Albert P. Pisano
#31,108
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Mechanical engineering researcher and university administrator
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Albert P. Pisanoengineering Degrees
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Mechanical Engineering
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Applied Physics
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Engineering
Albert P. Pisano's Degrees
- PhD Mechanical Engineering Stanford University
- Masters Mechanical Engineering Stanford University
- Bachelors Mechanical Engineering University of California, Berkeley
Why Is Albert P. Pisano Influential?
(Suggest an Edit or Addition)According to Wikipedia, Albert P. Pisano is an American academic. He serves as dean of the Jacobs School of Engineering at the University of California San Diego , a position he has held since September 2013. Pisano publishes a monthly Dean's column that introduces the monthly news email from the UC San Diego Jacobs School of Engineering. The January 2022 dean's column, "Math matters to all of us" triggered significant conversation on Pisano's LinkedIn feed.
Albert P. Pisano's Published Works
Published Works
- Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators (2006) (558)
- Monitoring of the central blood pressure waveform via a conformal ultrasonic device (2018) (379)
- Modeling and optimal design of piezoelectric cantilever microactuators (1997) (376)
- Microelectromechanical filters for signal processing (1992) (307)
- Direct nanoimprinting of metal nanoparticles for nanoscale electronics fabrication. (2007) (291)
- Photoactuators and motors based on carbon nanotubes with selective chirality distributions (2014) (262)
- Silicon-processed microneedles (1999) (254)
- Three-dimensional integrated stretchable electronics (2018) (235)
- Silicon-processed overhanging microgripper (1992) (223)
- Viscous damping model for laterally oscillating microstructures (1994) (204)
- Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators (2007) (199)
- Injection molded microfluidic chips featuring integrated interconnects. (2006) (190)
- Top-down fabricated silicon nanowire sensors for real-time chemical detection (2010) (189)
- Parallel microassembly with electrostatic force fields (1998) (185)
- Microfabricated Polysilicon Microneedles for Minimally Invasive Biomedical Devices (2000) (173)
- Nanoscale Patterning and Electronics on Flexible Substrate by Direct Nanoimprinting of Metallic Nanoparticles (2007) (172)
- Harsh Environment Silicon Carbide Sensors for Health and Performance Monitoring of Aerospace Systems: A Review (2009) (172)
- Surface-micromachined resonant accelerometer (1997) (161)
- A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications (2007) (156)
- Temperature-compensated aluminum nitride lamb wave resonators (2010) (156)
- One and Two Port Piezoelectric Higher Order Contour-Mode MEMS Resonators for Mechanical Signal Processing (2007) (150)
- AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐Q Micromechanical Resonators (2012) (144)
- Polysilicon microgripper (1990) (135)
- Coffee-ring effect-based three dimensional patterning of micro/nanoparticle assembly with a single droplet. (2010) (130)
- PLANAR LAMINAR MIXER (2000) (130)
- Batch transfer of microstructures using flip-chip solder bonding (1999) (127)
- Surface micromachined piezoelectric accelerometers (PiXLs) (2001) (124)
- A micro strain gauge with mechanical amplifier (1997) (123)
- Dual axis operation of a micromachined rate gyroscope (1997) (122)
- Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications (2010) (113)
- Selective surface functionalization of silicon nanowires via nanoscale joule heating. (2007) (112)
- Linear microvibromotor for positioning optical components (1995) (108)
- Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode (2014) (108)
- Water-powered, osmotic microactuator (2001) (107)
- Solar-Blind Photodetectors for Harsh Electronics (2013) (105)
- Precision positioning using a microfabricated electrostatic actuator (1999) (103)
- Towards the silicon nanowire-based sensor for intracellular biochemical detection. (2007) (102)
- Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments (1997) (101)
- ZnO nanowire network transistor fabrication on a polymer substrate by low-temperature, all-inorganic nanoparticle solution process (2008) (97)
- A MEMS resonant strain sensor operated in air (2004) (92)
- Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references (2008) (89)
- High-Q aluminum nitride Lamb wave resonators with biconvex edges (2011) (87)
- Thermal bubble formation on polysilicon micro resistors (1998) (85)
- Slide film damping in laterally driven microstructures (1994) (85)
- Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications (2005) (84)
- Vacuum encapsulation of resonant devices using permeable polysilicon (1999) (79)
- AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices (2010) (77)
- Temperature sensor based on 4H-silicon carbide pn diode operational from 20 °C to 600 °C (2014) (76)
- Continuous On-Chip Micropumping for Microneedle Enhanced Drug Delivery (2004) (72)
- Design and fabrication of an angular microactuator for magnetic disk drives (1998) (66)
- A review of recent progress in sensing of gas concentration by impedance change (2011) (64)
- Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures (2013) (61)
- Corrugated aluminum nitride energy harvesters for high energy conversion effectiveness (2011) (61)
- Mechanical design issues in laterally-driven microstructures (1989) (60)
- Self-adjusting microstructures (SAMS) (1991) (57)
- PS-4 GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators (2006) (57)
- Batch transfer of microstructures using flip-chip solder bump bonding (1997) (55)
- Anchor loss reduction in ALN Lamb wave resonators using phononic crystal strip tethers (2014) (54)
- Characterization of a Micro-Mixing, Pumping, and Valving System (2001) (53)
- 4H–SiC Metal–Semiconductor–Metal Ultraviolet Photodetectors in Operation of 450 $^{\circ}\hbox{C}$ (2012) (52)
- Thermal bubble powered microactuators (1994) (52)
- Focused Energy Field Method for the Localized Synthesis and Direct Integration of 1D Nanomaterials on Microelectronic Devices (2015) (51)
- Transducer design for AlN Lamb wave resonators (2017) (51)
- Low temperature, low pressure nanoimprinting of chitosan as a biomaterial for bionanotechnology applications (2007) (50)
- Microfabricated electrostatic actuators for hard disk drives (1998) (50)
- An Experimental and Analytical Investigation of the Dynamic Response of a High-Speed Cam-Follower System. Part 1: Experimental Investigation (1983) (50)
- An Experimental and Analytical Investigation of the Dynamic Response of a High-Speed Cam-Follower System. Part 2: A Combined, Lumped/Distributed Parameter Dynamic Model (1983) (50)
- Improved Dielectric Properties of Polyvinylidene Fluoride Nanocomposite Embedded with Poly(vinylpyrrolidone)-Coated Gold Nanoparticles. (2017) (49)
- A planar micropump utilizing thermopneumatic actuation and in-plane flap valves (2004) (48)
- Single-Source Chemical Vapor Deposition of 3 C SiC Films in a LPCVD Reactor I. Growth, Structure, and Chemical Characterization (2004) (48)
- Integrated micro-electro-mechanical sensor development for inertial applications (1998) (48)
- Polysilicon angular microvibromotors (1992) (47)
- Theoretical investigation of Lamb wave characteristics in AlN/3C–SiC composite membranes (2010) (46)
- A fully surface-micromachined piezoelectric accelerometer (1997) (46)
- The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter (2003) (45)
- Fast, high-throughput creation of size-tunable micro/nanoparticle clusters via evaporative self-assembly in picoliter-scale droplets of particle suspension. (2012) (45)
- Polymer investment molding: Method for fabricating hollow, microscale parts (2007) (42)
- Self-assembling electrical networks: an application of micromachining technology (1991) (41)
- High-resolution direct patterning of gold nanoparticles by the microfluidic molding process. (2010) (41)
- High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators (2017) (41)
- Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS (2007) (40)
- Angular micropositioner for disk drives (1997) (40)
- Viscous energy dissipation in laterally oscillating planar microstructures: a theoretical and experimental study (1993) (40)
- Permeable Polysilicon Etch-access Windows For Microshell Fabrication (1995) (40)
- Large-scale arrays of picolitre chambers for single-cell analysis of large cell populations. (2010) (39)
- General dynamic equations of helical springs with static solution and experimental verification (1987) (39)
- Deformation measurement of individual cells in large populations using a single-cell microchamber array chip. (2012) (38)
- Demonstration of piezoelectric actuated GaAs-based MEMS tunable VCSEL (2006) (38)
- Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications (2010) (37)
- The Multi-Mode Resonance in AlN Lamb Wave Resonators (2018) (37)
- Piezoelectric aluminum nitride MEMS annular dual contour mode filter (2007) (37)
- Microbubble powered actuator (1991) (36)
- Theoretical study of thermally stable SiO2/AlN/SiO2 Lamb wave resonators at high temperatures (2014) (36)
- Multiple mode micromechanical resonators (1990) (36)
- Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators (2005) (35)
- Ultrafast self-assembly of microscale particles by open-channel flow. (2010) (35)
- Dual-mode temperature compensation for a comb-driven MEMS resonant strain gauge (2008) (35)
- POLY-SIGE: A HIGH-Q STRUCTURAL MATERIAL FOR INTEGRATED RF MEMS (2002) (34)
- Development and characterisation of small-scale rotary engines (2007) (34)
- MEMS Rotary Engine Power System (2003) (34)
- Low-Temperature, Ion Beam-Assisted SiC Thin Films With Antireflective ZnO Nanorod Arrays for High-Temperature Photodetection (2011) (34)
- A passive, in situ micro strain gauge (1993) (34)
- Mechanically Coupled Contour Mode Piezoelectric Aluminum Nitride MEMS Filters (2006) (34)
- Continuous on-chip micropumping through a microneedle (2001) (33)
- Silicon carbide coated MEMS strain sensor for harsh environment applications (2007) (33)
- Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments (2009) (33)
- Multi-temperature zone, droplet-based microreactor for increased temperature control in nanoparticle synthesis. (2014) (33)
- Quality factor enhancement in Lamb wave resonators utilizing butterfly-shaped AlN plates (2014) (32)
- Effect of temperature on the devitrification kinetics of NiTi films (2003) (31)
- Silicon, Parylene, and Silicon/Parylene Micro-Needles for Strength and Toughness (2001) (30)
- High resolution patterning of nanoparticles by evaporative self-assembly enabled by in situ creation and mechanical lift-off of a polymer template (2011) (30)
- Resonant-structure micromotors (1989) (30)
- POST-CMOS COMPATIBLE CONTOUR-MODE ALUMINUM NITRIDE MICROMECHANICAL RESONATORS FOR VHF APPLICATIONS (2004) (30)
- Batch micropackaging by compression-bonded wafer-wafer transfer (1999) (30)
- Monolithic Integrated Piezoelectric MEMS-Tunable VCSEL (2007) (30)
- Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors (2012) (30)
- High-Q capacitive-piezoelectric AlN Lamb wave resonators (2013) (29)
- Photolithographic Process for Integration of the Biopolymer Chitosan Into Micro/Nanostructures (2008) (28)
- Green's function analysis of Lamb wave resonators (2008) (28)
- Surface-micromachined 1MHz oscillator with low-noise Pierce configuration (1998) (27)
- Micro-actuators for high density disk drives (1997) (27)
- The design of ARCTIC : A rotary compressor thermally insulated μcooler (2007) (26)
- Rigid, vapor-permeable poly(4-methyl-2-pentyne) templates for high resolution patterning of nanoparticles and polymers. (2012) (26)
- Dynamic Model of a Fluctuating Rocker-Arm Ratio Cam System (1987) (26)
- The Differential Geometry of the General Helix as Applied to Mechanical Springs (1988) (26)
- 4H-SiC N-Channel JFET for Operation in High-Temperature Environments (2014) (26)
- Microfabrication using one-step LPCVD porous polysilicon films (2003) (25)
- A novel continuous microfluidic reactor design for the controlled production of high-quality semiconductor nanocrystals (2008) (25)
- Characterization of aluminum nitride lamb wave resonators operating at 600°C for harsh environment RF applications (2010) (25)
- Characteristics of AlN Lamb wave resonators with various bottom electrode configurations (2011) (24)
- Variable Valve Timing By Means of a Hydraulic Actuation (2000) (23)
- Closed-loop control of a microfabricated actuator for dual-stage hard disk drive servo systems (1998) (23)
- Microleverage DETF Aluminum Nitride resonating accelerometer (2012) (23)
- An analysis of evaporative self-assembly of micro particles in printed picoliter suspension droplets (2013) (23)
- Pyroelectric aluminum nitride micro electromechanical systems infrared sensor with wavelength-selective infrared absorber (2014) (23)
- A Polymer-Based Microfluidic Platform Featuring On-Chip Actuated Hydrogel Valves for Disposable Applications (2010) (22)
- All-in-One Nanowire-Decorated Multifunctional Membrane for Rapid Cell Lysis and Direct DNA Isolation (2014) (22)
- Rapid Silicon-to-Steel Bonding by Induction Heating for MEMS Strain Sensors (2012) (22)
- A MEMS resonant strain sensor with 33 nano-strain resolution in a 10 kHz bandwidth (2005) (22)
- Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning Forks (2012) (22)
- Resonant-structure Micromotors: Historical Perspective and Analysis (1989) (21)
- Fabrication of a Free Floating Silicon Gate Valve (1999) (21)
- Physical Delivery of Macromolecules using High-Aspect Ratio Nanostructured Materials. (2015) (21)
- Enhanced Ohmic contact via graphitization of polycrystalline silicon carbide (2010) (21)
- Overhung electrostatic microgripper (1991) (21)
- Nonlinear behaviors of a comb drive actuator under electrically induced tensile and compressive stresses (2007) (21)
- Epitaxial Graphene Growth on 3C–SiC(111)/AlN(0001)/Si(100) (2011) (20)
- Low-frequency process for silicon-on-insulator deep reactive ion etching (2001) (20)
- Three-Dimensional Dynamic Simulation of Helical Compression Springs (1990) (19)
- Microelectromechanical systems technology to deliver insulin. (1999) (19)
- Aluminum nitride as a masking material for the plasma etching of silicon carbide structures (2010) (18)
- Single-chip multiple-frequency RF microresonators based on aluminum nitride contour-mode and FBAR technologies (2005) (18)
- Torque measurements of an automotive halfshaft utilizing a MEMS resonant strain gauge (2009) (18)
- Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes (2013) (18)
- Cross-coupling errors of micromachined gyroscopes (2004) (18)
- Anchor loss suppression using butterfly-shaped plates for AlN Lamb wave resonators (2015) (17)
- Quality factor enhancement in lamb wave resonators utilizing AlN plates with convex edges (2011) (17)
- Large displacement linear actuator (1990) (17)
- Aluminum Nitride Contour-Mode Vibrating RF MEMS (2006) (17)
- Simultaneous patterning of nanoparticles and polymers using an evaporation driven flow in a vapor permeable template. (2012) (16)
- On the Nonlinear Dynamics of Tether Suspensions for MEMS (2004) (16)
- Low temperature ion beam sputter deposition of amorphous silicon carbide for wafer-level vacuum sealing (2007) (16)
- Coulomb Friction in High-Speed Cam Systems (1984) (16)
- High-Speed and Bi-Stable Electrolysis-Bubble Actuated Gate Valves (2001) (15)
- SiC Metal – Semiconductor – Metal Ultraviolet Photodetectors in Operation of 450 ◦ C (2012) (15)
- Trapping and collection of uniform size droplets for nanoparticle synthesis (2012) (15)
- Modeling, fabrication, and characterization of SiC concentrically matched differential capacitance output pressure sensors (2018) (15)
- Ultrasonic particle manipulation in microchannels using phased co-planar transducers (2003) (15)
- Polysilicon micro vibromotors (1992) (15)
- AlN Contour-Mode Vibrating RF MEMS for Next Generation Wireless Communications (2006) (14)
- 800 MHZ LOW MOTIONAL RESISTANCE CONTOUR-EXTENSIONAL ALUMINUM NITRIDE MICROMECHANICAL RESONATORS (2006) (14)
- Optimum Structural Design of Micromechanical Crab-Leg Flexures with Microfabrication Constraints (1990) (14)
- MLHP: A High Heat Flux Localized Cooling Technology for Electronic Substrates (2008) (14)
- High temperature compatible aluminum nitride resonating strain sensor (2011) (14)
- Piezoelectric Thin Film AlN Annular Dual Contour Mode Bandpass Filter (2005) (14)
- Repetitive impact testing of micromechanical structures (1993) (14)
- Fine frequency selection techniques for aluminum nitride Lamb wave resonators (2010) (14)
- Low-Leakage micro gate valves (2003) (14)
- Hierarchical Silicon Nanospikes Membrane for Rapid and High-Throughput Mechanical Cell Lysis (2014) (14)
- Localized strain sensing using high spatial resolution, highly-sensitive MEMS resonant strain gauges for failure prevention (2011) (14)
- Electrical isolation process for molded, high-aspect-ratio polysilicon microstructures (2000) (13)
- Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes (2012) (13)
- MEMS ROTARY ENGINE POWER SYSTEM : PROJECT OVERVIEW AND RECENT RESEARCH RESULTS (2003) (13)
- Torque measurements of an automotive halfshaft using micro double-ended tuning fork strain gauges (2013) (13)
- Gold nanoparticle/PVDF polymer composite with improved particle dispersion (2015) (13)
- Temperature compensation of the AlN Lamb wave resonators utilizing the S1 mode (2015) (13)
- Electrostatic Self-Assembly Aided by Ultrasonic Vibration (1997) (13)
- Energy harvesting from cerebrospinal fluid pressure fluctuations for self-powered neural implants (2017) (13)
- GHZ higher order contour mode ALN annular resonators (2007) (13)
- Impact, Friction, and Wear Testing of Microsamples of Polycrystalline Silicon (1992) (13)
- Hydrogen peroxide etching and stability of p-type poly-SiGe films (2004) (13)
- Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm (2015) (12)
- Micro, Internal-Combustion Engine Fabrication With 900 µm Deep Features Via DRIE (2003) (12)
- Microsensors for heat transfer and fluid flow measurements (1990) (12)
- MEMS and Nano Technology for the Handheld, Portable Electronic and the Automotive Markets (2007) (12)
- Fluid-powered rotary gears and micro-flow channels (1991) (12)
- Experimental study of temperature-compensated aluminum nitride Lamb wave resonators (2009) (12)
- On The Synthesis of Cams With Irregular Followers (1990) (12)
- Modeling of a Finger-Follower Cam System With Verification in Contact Forces (1996) (12)
- Characterization of a single port aluminum nitride tuning fork (2010) (12)
- Dielectric properties of ligand-modified gold nanoparticle/SU-8 photopolymer based nanocomposites (2017) (12)
- Optimal Design of Resonance Suppression Helical Springs (1993) (12)
- Microgimbal torsion beam design using open, thin-walled cross sections (2001) (11)
- Normal and tangential impact in micro electromechanical structures (1991) (11)
- Interpolation Technique for Fast Analysis of Surface Acoustic Wave and Lamb Wave Devices (2009) (11)
- Comparison of Microscale Rapid Prototyping Techniques (2014) (11)
- Design of a monolithic piezoelectrically actuated microelectromechanical tunable vertical-cavity surface-emitting laser. (2005) (11)
- High-frequency and low-resonance-impedance lamb wave resonators utilizing the S1 mode (2015) (11)
- A BATCH FABRICATED RUBIDIUM-VAPOR RESONANCE CELL FOR CHIP-SCALE ATOMIC CLOCKS (2004) (10)
- High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms (2013) (10)
- Silicon and Silicon Carbide Survivability in an In-Cylinder Combustion Environment (2008) (10)
- Novel thin-film piezoelectric aluminum nitride rate gyroscope (2012) (10)
- Synthesis of narrowband AlN Lamb wave ladder-type filters based on overhang adjustment (2010) (10)
- Micromachined passive phase-change cooler for thermal management of chip-level electronics (2015) (10)
- DESIGN AND FABRICATION OF PIEZOELECTRIC ALUMINUM NITRIDE CORRUGATED BEAM ENERGY HARVESTER (2010) (10)
- Leakage Flow Analysis for a MEMS Rotary Engine (2003) (10)
- Characterization of 4H-SiC Bipolar Junction Transistor at High Temperatures (2014) (9)
- Electrode design and coupling optimization of Aluminum Nitride DETF (2011) (9)
- Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters (2006) (9)
- One and Two Port Piezoelectric Contour-Mode MEMS Resonators for Frequency Synthesis (2006) (9)
- Integrating Coherent Porous Silicon as a Wicking Structure in the MEMS Based Fabrication of a Vertically Wicking Micro-Columnated Loop Heat Pipe (2011) (9)
- Vapor Bubble Formation on a Micro Heater in Confined and Unconfined Micro Channels (1993) (9)
- Micro capillary-force driven fluidic accumulator/pressure source (2003) (9)
- Apex Seal Design for the MEMS Rotary Engine Power System (2003) (8)
- AlN Contour-Mode Vibrating RF MEMS for Next Generation Wireless Communications (2006) (8)
- Silicon-to-steel bonding using rapid thermal annealing (2005) (8)
- Corrosion Enhanced Capacitive Strain Gauge at 370°C (2007) (8)
- Electrolysis-Bubble Actuated Gate Valve (8)
- Modeling, Simulation, and Modal Analysis of a Hydraulic Valve Lifter With Oil Compressibility Effects (1991) (8)
- Enabling two-phase microfluidic thermal transport systems using a novel thermal-flux degassing and fluid charging approach (2014) (8)
- Silicon Carbide Transistors for IC Design Applications up to 600 °C (2014) (8)
- On the Vibrations of a MEMS Gyroscope (1998) (8)
- Caterpillar locomotion-inspired valveless pneumatic micropump using a single teardrop-shaped elastomeric membrane. (2014) (8)
- Temperature-insensitive silicon carbide resonant micro-extensometers (2009) (7)
- Development of Liquid Fuel Injection System for Small Scale Rotary Engines (2006) (7)
- Nanowire-integrated microporous silicon membrane for continuous fluid transport in micro cooling device (2013) (7)
- Thermal compensation for aluminum nitride Lamb wave resonators operating at high temperature (2010) (7)
- High-Q piezoelectric Lamb wave resonators based on AlN plates with chamfered corners (2015) (7)
- High-aspect-ratio, molded microstructures with electrical isolation and embedded interconnects (2001) (7)
- Synthesis and characterization of gold nanoparticle/SU-8 polymer based nanocomposite (2014) (7)
- MEMS-based non-contact voltage sensor with multi-mode resonance shutter (2019) (7)
- Investigation of an impedancemetric NOx sensor with gold wire working electrodes (2012) (7)
- Growth of 3C-SiC Thin Film on AlN/Si(100) with Atomically Abrupt Interface via Tailored Precursor Feeding Procedure (2010) (7)
- Design of nano-gap piezoelectric resonators for mechanical RF magnetic field modulation (2007) (7)
- Influence of Sensor Substrate Geometry on the Sensitivity of MEMS Micro-Extensometers (2005) (7)
- Dynamic Modeling of a Thermally-Driven Micro Diffuser Pump (2003) (6)
- Device Packaging Techniques for Implementing a Novel Thermal Flux Method for Fluid Degassing and Charging of a Planar Microscale Loop Heat Pipe (2011) (6)
- Fabrication of Ultra Thick Ferromagnetic Structures in Silicon (2004) (6)
- In-Plane, Hollow Microneedles Via Polymer Investment Molding (2006) (6)
- Geothermal environmental exposure testing of encapsulant and device materials for harsh environment MEMS sensors (2012) (6)
- Ultralow Acoustic Loss Micromachined Butterfly Lamb Wave Resonators on AlN Plates (2020) (6)
- Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines (2003) (6)
- Heat Transfer due to Microscale Thin Film Evaporation From the Steady State Meniscus in a Coherent Porous Silicon Based Micro-Columnated Wicking Structure (2011) (6)
- Bent-beam sensing with triple-beam tuning forks (2013) (6)
- A solar-powered, milligram prototype robot from a three-chip process (2003) (6)
- Piezo thermoelastic model for design optimization of resonant beams (2008) (5)
- Energy Storage in Paraffin: A PDE Backstepping Experiment (2021) (5)
- Optimized ultra-DRIE for the MEMS rotary engine power system (2004) (5)
- Intrinsic characteristics of thermally stable AlN Lamb wave resonators at high temperatures (2011) (5)
- Lithographic patterning of immobilized enzymes in chitosan thin films for multi-layer, chemical/biological sensors (2007) (5)
- Spectrum-clean S1 AlN Lamb wave resonator with damped edge reflectors (2020) (5)
- GROWTH OF HIGHLY C-AXIS ORIENTED ALN FILMS ON 3C-SIC/SI SUBSTRATE (2010) (5)
- Small-scale rotary engine power system development status (2004) (5)
- Thermally stable SiO2/AlN/SiO2 Lamb wave resonators utilizing the lowest-order symmetric mode at high temperatures (2013) (5)
- Tunable in situ growth of porous cubic silicon carbide thin films via methyltrichlorosilane-based chemical vapor deposition (2009) (5)
- On the Synthesis of Straight Line, Constant Velocity Scanning Mechanisms (1991) (5)
- Low-energy ion bombardment to tailor the interfacial and mechanical properties of polycrystalline 3C-silicon carbide (2010) (5)
- Coulomb Friction and Optimal Rocker Arm Ratio for High-Speed Cam Systems (1986) (5)
- Minimizing the Wick Thickness in a Planar Microscale Loop Heat Pipe Using Efficient Thermodynamic Design (2011) (4)
- Integrated 4H-silicon carbide diode bridge rectifier for high temperature (773 K) environment (2014) (4)
- Simple, high-precision, microliter per minute, fluid-flow sensor (2011) (4)
- 4H-Silicon Carbide p-n Diode for High Temperature (600 °C) Environment Applications (2015) (4)
- Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope (4)
- Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist (2009) (4)
- A PLANAR MICROPUMP UTILIZING THERMOPNEUMATIC ACTUATION (2004) (4)
- Micro-Electro-Mechanical Systems (MEMS) Micro-Heater (2012) (4)
- A silicon carbide differential output pressure sensor by concentrically matched capacitance (2017) (4)
- GEOMETRIC CONTROL OF THE FLUID-TRANSPORT MENISCUS IN A PASSIVE PHASE-CHANGE MICROFLUIDIC ELECTRONICS COOLING DEVICE (2010) (4)
- Nanocrystalline SiC metal-semiconductor-metal photodetector with ZnO nanorod arrays for high-temperature applications (2011) (4)
- Experimentally validated aluminum nitride based pressure, temperature and 3-axis acceleration sensors integrated on a single chip (2014) (4)
- TWO-PORT STACKED CONTOUR-MODE ALUMINUM NITRIDE PIEZOELECTRIC MICROMECHANICAL RESONATORS (2005) (4)
- Harsh environment temperature sensor based on 4H-Silicon carbide PN diode (2013) (4)
- Harsh Environment Wireless MEMS Sensors for Energy & Power (2009) (4)
- Refillable and magnetically actuated drug delivery system using pear-shaped viscoelastic membrane. (2014) (4)
- Nanomechanical Protein Concentration Detector Using a Nanogap Squeezing Actuator With Compensated Displacement Monitoring Electrodes (2007) (4)
- Selective Functionalization of Silicon Micro/Nanowire Sensors via Localized Joule Heating (2007) (3)
- Bubble time-of-flight: A simple method for measuring microliter per minute flows without calibration (2012) (3)
- FEASIBILITY STUDY OF A MEMS VISCOUS ROTARY ENGINE POWER SYSTEM (VREPS) (2004) (3)
- GENETIC ALGORITHM OPTIMIZATION FOR MEMS CANTILEVERED PIEZOELECTRIC ENERGY HARVESTERS (2010) (3)
- The Design, Experimentation, and Simulation of a Novel Coulomb Friction Device for Automotive Valve Spring Damping (1993) (3)
- Micro Printing Using Microfluidics for Printed Biodegradable Devices in Trillion Sensing (2017) (3)
- Dispersion characteristics of high-order lamb wave modes in an AlN/3C-SiC layered plate (2012) (3)
- A Frequency-Tunable Comb Resonator Using Spring Tension and Compression Effects (2004) (3)
- Bi-chevron aluminum nitride actuators for high pressure microvalves (2009) (3)
- Enhanced Cross-Axis Rejection Capacitive Strain Gauge (2007) (3)
- Surface acoustic wave propagation properties in AlN/3C-SiC/Si composite structure (2010) (3)
- Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors (2012) (3)
- Surface micromachining of unfired ceramic sheets (2011) (3)
- Gel-seq: whole-genome and transcriptome sequencing by simultaneous low-input DNA and RNA library preparation using semi-permeable hydrogel barriers. (2017) (3)
- Ultrafast Self-Assembly of Microscale Particles by Open-Channel Flow (2009) (3)
- Development of an Uncooled Photomechanic Infrared Sensor Based on the IR Organ of the Pyrophilous Jewel Beetle Melanophila Acuminata (2007) (3)
- The Technological Arguments for Micro-Engines (2004) (3)
- Self-Transport of Condensed Liquid in Micro Cooling Device Using Distributed Meniscus Pumping. (2015) (3)
- A MEMS RF-interrogated biosensor (2005) (3)
- SIC/ALN PIEZOELECTRIC ENERGY HARVESTERS FOR PULSED PRESSURE SOURCES IN HARSH ENVIRONMENT APPLICATIONS (2012) (3)
- A LOW-POWER, LOW-LEAKAGE, BI-STABLE PLANAR ELECTROLYSIS MICRO GATE VALVE (2004) (3)
- Development of an injection molding tool for complex microfluidic geometries (2011) (3)
- Controlling nanoparticle aggregation in colloidal microwave absorbers via interface chemistry (2007) (3)
- Micro- and Nano-Technologies for Automotive Sensor Research (2007) (2)
- Comparison of Microscale Rapid Prototyping Techniques for Microfluidic Applications (2014) (2)
- Characterization of Thin-Film Impact Microactuators (1997) (2)
- High-throughput microstructure printing technology using inflatable thin membrane with microchannel (2019) (2)
- OHMIC CONTACT WITH ENHANCED STABILITY TO POLYCRYSTALLINE SILICON CARBIDE VIA CARBON INTERFACIAL LAYER (2010) (2)
- The development and application of kinematic icon and inactive-joint concepts in automated mechanism sketching (1988) (2)
- Trapping and collection of uniform size droplets using a well array inside a microchannel (2012) (2)
- Fabrication and Packaging of Microfluidic Devices With SU-8 Epoxy (2000) (2)
- Evaporation of Methanol/Water Mixtures in Microchannels (2003) (2)
- "IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control - Front cover" (2011) (2)
- Microdroplet-based synthesis and centrifuge-free retrieval of nanoparticles via a continuous flow micropost array railing system (2013) (2)
- Extreme temperature 4H-SiC metal-semiconductor-metal ultraviolet photodetectors (2012) (2)
- Stability and Control of a Metal Oxide Gas Sensor in Simulated Wind (2016) (2)
- Rapid Low Temperature Bonding of Silicon to Steel for MEMS Sensors (2004) (2)
- Towards Integrated Sensors for Environments with Temperatures up to 600 °C (2016) (1)
- Vertical Channel Silicon Carbide JFETs Based Operational Amplifiers (2013) (1)
- Aluminum Nitride High Temperature Strain Sensors (2013) (1)
- The Materials Science of “Permeable Polysilicon” Thin Films (2001) (1)
- Nonlinear elastic coupling in tether-suspended MEMS (2005) (1)
- Multi-scale pore membrane for continuous, passive fluid transport in a micro cooling device (2013) (1)
- Fuel-Flexible Engines for Portable-Power Applications (2009) (1)
- MEMS Sensing in an In-Cylinder Combustion Environment (2010) (1)
- MICRO INVESTMENT MOLDING: METHOD FOR CREATING INJECTION MOLDED HOLLOW PARTS (2005) (1)
- THE DYNAMIC PRESSURE RESPONSE OF PHASE ERUPTION IN MICRO CHANNELS (2004) (1)
- Micromechanical Resonators: AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐Q Micromechanical Resonators (Adv. Mater. 20/2012) (2012) (1)
- ARCTIC: A Rotary Compressor Thermally Insulated µCooler (2005) (1)
- Monolithic Integration of Piezoelectric Cantilever in Tunable VCSEL (2006) (1)
- MEMS Sensors for Down-Hole Monitoring of Geothermal Energy Systems (2011) (1)
- ON-CHIP ACTUATION OF A THERMALLY SENSITIVE HYDROGEL VALVE (2008) (1)
- A Model to Guide Template-Based Nanoparticle Printing Development (2015) (1)
- NONINVASIVE HERMETIC SEALING OF DEGASSED LIQUID INSIDE A MICROFLUIDIC DEVICE BASED ON INDUCTION HEATING (2011) (1)
- Microelectronic Devices: Focused Energy Field Method for the Localized Synthesis and Direct Integration of 1D Nanomaterials on Microelectronic Devices (Adv. Mater. 7/2015) (2015) (1)
- Gel-seq: A Method for Simultaneous Sequencing Library Preparation of DNA and RNA Using Hydrogel Matrices. (2018) (1)
- PIEZOELECTRIC PRESSURE ENERGY HARVESTERS USING CIRCULAR DIAPHRAGMS WITH CONCENTRIC RING-BOSS STRUCTURES (2016) (1)
- EXPERIMENTAL INVESTIGATION OF THIN-FILM EVAPORATION IN AN OPEN-LOOP COLUMNATED MICRO-EVAPORATOR (2011) (1)
- Effect of Leakage on Optimal Compression Ratio for Small-Scale Rotary Engines (2007) (1)
- Rapid Silicon-to-Steel Bonding via Inductive Heating (2006) (1)
- Functionalized micromolded nanoparticles towards gas sensor arrays (2014) (1)
- Effect of Chamber Width on Flame Characteristics in Small Combustion Chambers (2005) (1)
- Micro/Nanoscale Structure Fabrication by Direct Nanoimprinting of Metallic and Semiconducting Nanoparticles (2007) (1)
- NANO-GAP PIEZOELECTRIC RESONATORS FOR MECHANICAL RF MAGNETIC FIELD MODULATION (2005) (1)
- Bioinspired, uncooled chitin photomechanical sensor for thermal infrared sensing (2011) (1)
- On the Development of a MicroScale Magneto-Static Actuator for a Planar Fuel Valve (2006) (1)
- Planar SiC MEMS flame ionization sensor for in-engine monitoring (2013) (0)
- PowerMEMS 2004 CONFERENCE APPLICATION OF THE VISCOUS ROTARY ENGINE POWER SYSTEM ( VREPS ) TO BASIC THERMODYNAMIC CYCLES (2004) (0)
- Low Temperature OFET (Organic Field Effect Transistor) Fabrication by Metal Nanoparticle Imprinting (2007) (0)
- Fractional Factorial Experimental Design Applied to the Development of an Impedancemetric NO x Sensor (2009) (0)
- Electro-Magnetic Actuated Valve for MEMS Fuel Metering System (2007) (0)
- ADVISORY EMIRETUS EDITORS EDITOR-IN-CHIEF (2008) (0)
- IMPROVED POWER GENERATION OF A SMALL-SCALE, NATURALLY ASPIRATED AND LIQUID FUEL INJECTED ROTARY ENGINE (2007) (0)
- Low Acoustic Loss Butterfly Lamb Wave Resonator (2019) (0)
- Comparison of Laterally-Driven Microflexure Suspension Systems (1989) (0)
- Controlled Growth of Metal Oxide Nanowires via Nanoimprinting-based Patterning of Nanoparticle Seeds (2008) (0)
- Planar off-chip microelectrode for the electrophysiological measurement of small biological cells (2005) (0)
- Modeling of a hydraulic lash adjuster with experimental identification in oil refill mechanism (1994) (0)
- Non-Invasive and Remote Pipeline Rehabilitation Technology Using Reactive and Magnetic Particles (2015) (0)
- NOMENCLATURE Parameter Description Value Units Free Space Permittivity Young ’ s Modulus Shear Modulus Poisson ’ s Ratio-Yield Stress Acceleration (2007) (0)
- A Novel Analytical Model for Thermoplastic Deformation of Resist in Thermal (2008) (0)
- Surface micromachining of unfired ceramic sheets (2011) (0)
- The CITRIS Project : Merging Information Technology and BSAC MEMS Microsensors for Societal Grand Challenge (2003) (0)
- Single-Step, Integrated Assembly and Encapsulation of Microfluidic Bubble Generator (2005) (0)
- Flow-lysometry for cytoplasmic analysis of single cells in large populations (2013) (0)
- High-throughput microstructure printing technology using inflatable thin membrane with microchannel (2019) (0)
- MEMS Piezoelectric Energy Harvesters for Harsh Environment Sensing (2013) (0)
- MICROSCALE BOILING HEAT TRANSFER NEAR THE MENISCUS (2005) (0)
- Assembly of Nanoparticles Synthesized Inside a Polyurethane Microreactor by Using a Micropatterned Polymer Template (2012) (0)
- High-endurance solar-blind photodetectors using AlN on Si substrates for extreme harsh environment applications (2013) (0)
- Toward Integrated Pressure Sensors for Temperatures up to 600°C (2016) (0)
- DEVOE AND PISANO : MODELING AND DESIGN OF PIEZOELECTRIC CANTILEVER MICROACTUATORS (1998) (0)
- Characterization of the Dynamic Pressure Response of Fuels in Microchannels (2004) (0)
- Acoustic characteristics of the third-order quasi-symmetric Lamb wave mode in an AlN/3C-SiC plate (2013) (0)
- Solid State Electrochemical Sensor for Monitoring Lean Direct Injection Engines (2008) (0)
- Three-dimensional integrated stretchable electronics (2018) (0)
- A surface acoustic resonator with template-patterned interdigitated fingers (2016) (0)
- Design considerations to enhance the performances of thin circular piezoelectric energy harvester diaphragms in harsh liquid environments (2013) (0)
- MEMS CAD beyond multi-million transistors (panel) (1999) (0)
- Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm (2013) (0)
- Plenary Speech: Micro- and Nano-Technologies for Automotive Research (2007) (0)
- EXTENDING AND CHARACTERIZING THE FUEL FLEXIBILITY OF A 4.97 CC ROTARY ENGINE (2012) (0)
- Monitoring of the central blood pressure waveform via a conformal ultrasonic device (2018) (0)
- Sensor selection for outdoor air quality monitoring (2014) (0)
- Enhanced Heat Rejection of Microscale Geometries in Convective Flow Boiling Evaporators (2013) (0)
- Design Optimization of a MEMS Magneto-Static Linear Actuator (2007) (0)
- Radar Absorbing Colloidal Solutions (RACS) (2007) (0)
- Single Molecular Detection via Micro-Scale Polymeric Opto-Electro-Mechanical Systems (2005) (0)
- SCALABLE , INTEGRATED SYSTEM FOR MECHANICAL , 3 D ASSEMBLY OF MONODISPERSE NANOPARTICLES SYNTHESIZED ON-DEMAND (2011) (0)
- Micromachine a ensor Systems on a Chip : The integration of MEMS with CMOS and its applications (2008) (0)
- Crystallization of Sputtered NiTi Films (2003) (0)
- IMECE 2005-82142 ARCTIC : A ROTARY COMPRESSOR THERMALLY INSULATED μ COOLER (2005) (0)
- High temperature energy harvesters utilizing ALN/3C-SiC composite diaphragms (2014) (0)
- OF ULTRA THICK FERROMAGNETIC STRUCTURES IN SILICON (0)
- Self-Assembled Ultra-thin Silica Layers for On-Chip Chromatography (2009) (0)
- Capitalizing on the G7 Research Compact. (2021) (0)
- HIGH RESOLUTION SILICON CARBIDE RESONANT STRAIN GAUGE AT 600 0 C (2008) (0)
- Localized synthesis of metal oxide nanowires (2009) (0)
- INTEGRATED HEATING AND COOLING MULTI-ZONE SILICON MICROREACTOR (MZSM) FOR INCREASED MONODISPERSITY IN TiO2 NANOPARTICLE SYNTHESIS (2012) (0)
- Sub-population analysis of deformability distribution in heterogeneous cell populations (2012) (0)
- A ZERO-POWER, HIGH-THROUGHPUT MICRO, NANOPARTICLE PRINTING VIA GRAVITY-DRIVEN FORMATION of PICOLITER-SCALE DROPLETS (2011) (0)
- Thermofluidic Packaging Approach for the MEMS Rotary Engine Power System (2003) (0)
- Multifunctional nanowire array for chemical sensing and manipulation (2009) (0)
- Two-dimensional printed flame ionization sensor (2009) (0)
- 4H-SiC PN diode for extreme environment temperature sensing applications (2014) (0)
- Energy harvesting from cerebrospinal fluid pressure fluctuations for self-powered neural implants (2017) (0)
- NANOSCALE JOULE HEATING ALONG SILICON NANOWIRE AND ITS NANOSCALE HEATER APPLICATION (2007) (0)
- Research for Fuel Cracking in Microchannels for Power MEMS Applications (2005) (0)
- Title Gel-seq : A Method for Simultaneous Sequencing Library Preparation of DNA and RNA Using Hydrogel Matrices Permalink (2018) (0)
- Solar-Blind Photodetectors for Harsh (2013) (0)
- Fourier Transform Analysis of Pressure Fluctuations Due to Microscale Phase Change (2005) (0)
- A Resealable, Gas-Tight Packaging Technique for Silicon Microfluidic Devices (2015) (0)
- Silver Precipitation in Energy-Scavenging Aluminum Nitride Resonators (2011) (0)
- A Resealable Hermetic Packaging Technique for Silicon Microfluidic Devices (2014) (0)
- Piezo Thermoelastic Model for Quality Factor Optimization of Resonant Rings (2010) (0)
- Flow-Lysometry and its Biomedical Application: Cytosolic Analysis of Single Cells in Large Populations (2009) (0)
- Localized Synthesis of Metal Oxide Nanowires via Templated Growth on Nanoimprinted Nanoparticle Seed Micro/nano-patterns (2009) (0)
- Novel Piezoelectrically Actuated MEMS Tunable VCSEL (2005) (0)
- Three-Dimensional Patterning of Micro/Nanoparticle Assembly with a Single Droplet of Suspension (2011) (0)
- Nanomechanical Protein Presence and Concentration Detectors Based on the Mechanical Stiffness of Proteins in Squeezed Nano-Gaps (2006) (0)
- Theoretical Study of Thermally Stable Large-Coupling Lithium Niobate SH0 Plate Wave Resonator (2021) (0)
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