Costas J. Spanos
#154,475
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Costas J. Spanos's AcademicInfluence.com Rankings
Costas J. Spanosengineering Degrees
Engineering
#6388
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#7712
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Systems Engineering
#70
World Rank
#73
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Electrical Engineering
#1896
World Rank
#1998
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Applied Physics
#2031
World Rank
#2068
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Engineering
Costas J. Spanos's Degrees
- PhD Electrical Engineering Stanford University
- Masters Electrical Engineering Stanford University
- Bachelors Electrical Engineering National Technical University of Athens
Why Is Costas J. Spanos Influential?
(Suggest an Edit or Addition)Costas J. Spanos's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Advanced process control (1989) (579)
- Fundamentals of Semiconductor Manufacturing and Process Control (2006) (323)
- Modeling within-die spatial correlation effects for process-design co-optimization (2005) (242)
- Towards Efficient Data Valuation Based on the Shapley Value (2019) (208)
- Distributed Energy Consumption Control via Real-Time Pricing Feedback in Smart Grid (2014) (160)
- Specular spectroscopic scatterometry (2001) (156)
- Personal thermal comfort models with wearable sensors (2019) (144)
- Microgrid to enable optimal distributed energy retail and end-user demand response (2018) (141)
- Model-Based Fault Detection and Identification for Switching Power Converters (2017) (136)
- MOD-DR: Microgrid optimal dispatch with demand response (2017) (131)
- Fundamentals of Semiconductor Manufacturing and Process Control: May/Fundamentals of Semiconductor Manufacturing and Process Control (2006) (127)
- A Digital Twin Approach for Fault Diagnosis in Distributed Photovoltaic Systems (2020) (126)
- WinLight: A WiFi-based occupancy-driven lighting control system for smart building (2018) (122)
- WinIPS: WiFi-Based Non-Intrusive Indoor Positioning System With Online Radio Map Construction and Adaptation (2017) (119)
- A data-driven strategy for detection and diagnosis of building chiller faults using linear discriminant analysis (2016) (114)
- Accurate indoor localization and tracking using mobile phone inertial sensors, WiFi and iBeacon (2017) (110)
- Statistical experimental design in plasma etch modeling (1991) (109)
- Device-free occupancy detection and crowd counting in smart buildings with WiFi-enabled IoT (2018) (109)
- Measurement and Analysis of Variability in 45 nm Strained-Si CMOS Technology (2009) (100)
- Efficient Task-Specific Data Valuation for Nearest Neighbor Algorithms (2019) (98)
- Occupancy Detection via Environmental Sensing (2018) (94)
- Semiconductor yield improvement: results and best practices (1995) (92)
- Gate Line Edge Roughness Model for Estimation of FinFET Performance Variability (2009) (91)
- A Cooperative Demand Response Scheme Using Punishment Mechanism and Application to Industrial Refrigerated Warehouses (2014) (90)
- Virtual Occupancy Sensing: Using Smart Meters to Indicate Your Presence (2017) (87)
- Non-intrusive occupancy sensing in commercial buildings (2017) (83)
- Automated mobile sensing: Towards high-granularity agile indoor environmental quality monitoring (2018) (82)
- Statistical process control in semiconductor manufacturing (1991) (80)
- PresenceSense: zero-training algorithm for individual presence detection based on power monitoring (2014) (80)
- Fault detection and diagnosis for building cooling system with a tree-structured learning method (2016) (77)
- Towards occupant activity driven smart buildings via WiFi-enabled IoT devices and deep learning (2018) (77)
- Consensus Adversarial Domain Adaptation (2019) (76)
- A deep learning and gamification approach to improving human-building interaction and energy efficiency in smart infrastructure (2019) (75)
- Diagnosing wind turbine faults using machine learning techniques applied to operational data (2016) (75)
- Smart lighting system using ANN-IMC for personalized lighting control and daylight harvesting (2018) (74)
- Real-time statistical process control using tool data (semiconductor manufacturing) (1992) (73)
- WiFi-Based Human Identification via Convex Tensor Shapelet Learning (2018) (69)
- FreeCount: Device-Free Crowd Counting with Commodity WiFi (2017) (69)
- DeepSense: Device-Free Human Activity Recognition via Autoencoder Long-Term Recurrent Convolutional Network (2018) (67)
- Specular spectroscopic scatterometry in DUV lithography (1999) (66)
- Virtual metrology modeling for plasma etch operations (2008) (65)
- Abnormal event detection with high resolution micro-PMU data (2016) (65)
- Adaptive Localization in Dynamic Indoor Environments by Transfer Kernel Learning (2017) (64)
- Partial Knowledge Data-Driven Event Detection for Power Distribution Networks (2018) (63)
- Statistical equipment modeling for VLSI manufacturing: an application for LPCVD (1990) (63)
- PMV-based event-triggered mechanism for building energy management under uncertainties (2017) (59)
- Use of short-loop electrical measurements for yield improvement (1995) (59)
- Physically justifiable die-level modeling of spatial variation in view of systematic across wafer variability (2009) (57)
- Privacy-Enhanced Architecture for Occupancy-Based HVAC Control (2016) (54)
- Design Automation for Smart Building Systems (2018) (54)
- Sensing by Proxy : Occupancy Detection Based on Indoor CO 2 Concentration (2015) (53)
- FreeDetector: Device-Free Occupancy Detection with Commodity WiFi (2017) (52)
- Causal meets Submodular: Subset Selection with Directed Information (2016) (50)
- Fault Prognosis for Power Electronics Systems Using Adaptive Parameter Identification (2017) (50)
- WiFi and Vision Multimodal Learning for Accurate and Robust Device-Free Human Activity Recognition (2019) (50)
- A control system for photolithographic sequences (1996) (49)
- Parameter Extraction for Statistical IC Process Characterization (1986) (48)
- Plasma etch modeling using optical emission spectroscopy (1996) (47)
- Advanced Building Control via Deep Reinforcement Learning (2019) (47)
- Control of photoresist properties: a Kalman filter based approach (1996) (46)
- Environmental sensing by wearable device for indoor activity and location estimation (2014) (45)
- A fully unsupervised non-intrusive load monitoring framework (2015) (44)
- Social game for building energy efficiency: Incentive design (2014) (41)
- Prediction of wafer state after plasma processing using real-time tool data (1995) (40)
- Automatic hotspot classification using pattern-based clustering (2008) (40)
- Low-cost coarse airborne particulate matter sensing for indoor occupancy detection (2013) (39)
- Characterizing post-exposure bake processing for transient- and steady-state conditions in the context of critical dimension control (2002) (39)
- SugarMate: Non-intrusive Blood Glucose Monitoring with Smartphones (2017) (38)
- Optimal Sensor Configuration and Feature Selection for AHU Fault Detection and Diagnosis (2017) (37)
- Automated malfunction diagnosis of semiconductor fabrication equipment: a plasma etch application (1993) (37)
- Electrical linewidth metrology for systematic CD variation characterization and causal analysis (2003) (33)
- Circuit sensitivity to interconnect variation (1998) (33)
- Clustering and pattern matching for an automatic hotspot classification and detection system (2009) (33)
- A Robust Utility Learning Framework via Inverse Optimization (2017) (32)
- Optimal Sharing and Fair Cost Allocation of Community Energy Storage (2020) (32)
- Autonomous on-wafer sensors for process modeling, diagnosis, and control (2001) (32)
- Energy Management Considering Load Operations and Forecast Errors With Application to HVAC Systems (2018) (31)
- Modeling the electrical effects of metal dishing due to CMP for on-chip interconnect optimization (2004) (29)
- Robust WiFi-Enabled Device-Free Gesture Recognition via Unsupervised Adversarial Domain Adaptation (2018) (29)
- Introduction to Semiconductor Manufacturing (2006) (29)
- PAD: protecting anonymity in publishing building related datasets (2017) (29)
- Modeling within-field gate length spatial variation for process-design co-optimization (2005) (29)
- Veto-Consensus Multiple Kernel Learning (2016) (28)
- Adversarial Learning-Enabled Automatic WiFi Indoor Radio Map Construction and Adaptation With Mobile Robot (2020) (28)
- HVAC Energy Cost Optimization for a Multizone Building via a Decentralized Approach (2019) (28)
- Optimal coordination of air conditioning system and personal fans for building energy efficiency improvement (2017) (27)
- Dishing-radius model of copper CMP dishing effects (2005) (26)
- A comprehensive model of process variability for statistical timing optimization (2008) (26)
- SoundLoc: Accurate room-level indoor localization using acoustic signatures (2015) (25)
- Unsupervised WiFi-Enabled IoT Device-User Association for Personalized Location-Based Service (2019) (25)
- WiFi-enabled Device-free Gesture Recognition for Smart Home Automation (2018) (24)
- A novel in-line automated metrology for photolithography (1996) (24)
- Building-in-Briefcase: A Rapidly-Deployable Environmental Sensor Suite for the Smart Building (2018) (24)
- Diagnosing and PredictingWind Turbine Faults from SCADA Data Using Support Vector Machines (2020) (23)
- Using qualitative observations for process tuning and control [IC manufacture] (1997) (23)
- Nonparametric Event Detection in Multiple Time Series for Power Distribution Networks (2019) (22)
- Comprehensive CD uniformity control across lithography and etch (2005) (22)
- Coordinated optimization of multiple buildings with a fair price mechanism for energy exchange (2017) (22)
- Non-Parametric Outliers Detection in Multiple Time Series A Case Study: Power Grid Data Analysis (2018) (22)
- Distributed model predictive control of bilinear HVAC systems using a convexification method (2017) (22)
- Technology Variability From a Design Perspective (2010) (22)
- Time-based PEB adjustment for optimizing CD distributions (2004) (21)
- RTSPC: a software utility for real-time SPC and tool data analysis (1995) (20)
- Handling Incomplete Sensor Measurements in Fault Detection and Diagnosis for Building HVAC Systems (2020) (20)
- Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment (2007) (20)
- A Novel Graphical Lasso Based Approach Towards Segmentation Analysis in Energy Game-Theoretic Frameworks (2019) (19)
- Near-real-time plug load identification using low-frequency power data in office spaces: Experiments and applications (2020) (19)
- MapSentinel: Can the Knowledge of Space Use Improve Indoor Tracking Further? (2016) (18)
- Inverse Reinforcement Learning via Deep Gaussian Process (2015) (18)
- A Framework for Privacy-Preserving Data Publishing with Enhanced Utility for Cyber-Physical Systems (2018) (18)
- Data-driven event detection with partial knowledge: A Hidden Structure Semi-Supervised learning method (2016) (18)
- Conditional Synthetic Data Generation for Robust Machine Learning Applications with Limited Pandemic Data (2021) (18)
- Causal analysis for non-stationary time series in sensor-rich smart buildings (2013) (18)
- Design, Benchmarking and Explainability Analysis of a Game-Theoretic Framework towards Energy Efficiency in Smart Infrastructure (2019) (18)
- CausalBG: Causal Recurrent Neural Network for the Blood Glucose Inference With IoT Platform (2020) (17)
- Fault diagnosis via PV panel-integrated power electronics (2016) (17)
- Inverse modeling of non-cooperative agents via mixture of utilities (2016) (17)
- Modeling of end-use energy profile: An appliance-data-driven stochastic approach (2014) (17)
- Measuring fine-grained metro interchange time via smartphones (2017) (16)
- Online learning of Contextual Hidden Markov Models for temporal-spatial data analysis (2016) (16)
- Energy consumption scheduling in smart grid: A non-cooperative game approach (2013) (16)
- Multiple Kernel Representation Learning for WiFi-Based Human Activity Recognition (2017) (16)
- BikeMate: Bike Riding Behavior Monitoring with Smartphones (2017) (16)
- Distributed Control of Multizone HVAC Systems Considering Indoor Air Quality (2021) (16)
- BISCUIT: Building Intelligent System Customer Investment Tools (2019) (16)
- Identifying Unseen Faults for Smart Buildings by Incorporating Expert Knowledge With Data (2019) (16)
- Across-wafer CD uniformity control through lithography and etch process: experimental verification (2007) (16)
- Spatial modeling of micron-scale gate length variation (2006) (16)
- Comparative study of line width roughness (LWR) in next-generation lithography (NGL) processes (2010) (16)
- Across-wafer CD uniformity enhancement through control of multizone PEB profiles (2004) (16)
- SugarMate (2017) (16)
- Using Domain Knowledge Features for Wind Turbine Diagnostics (2016) (16)
- Occupancy modelling in shared spaces of buildings: a queueing approach (2017) (15)
- Real-time model-based fault diagnosis for switching power converters (2015) (15)
- Smart building energy efficiency via social game: a robust utility learning framework for closing–the–loop (2016) (15)
- WinIPS: WiFi-based non-intrusive IPS for online radio map construction (2016) (15)
- Efficient Sensor Deployments for Spatio-Temporal Environmental Monitoring (2020) (15)
- Robust Fault Detection and Fault Classification of Semiconductor Manufacturing Equipment (1998) (15)
- Hierarchical modeling of spatial variability with a 45nm example (2009) (15)
- Machine Learning empowered Occupancy Sensing for Smart Buildings (2019) (14)
- Dimensionality Reduction Flows (2019) (14)
- Leveraging correlations in utility learning (2017) (13)
- Characterization of a chemically amplified photoresist for simulation using a modified "poor man's DRM" methodology (1998) (13)
- Real-time furnace modeling and diagnostics (2002) (13)
- Lithographic measurement of EUV flare in the 0.3-NA micro exposure tool optic at the Advanced Laser Source (2005) (13)
- Learning Convex Piecewise Linear Machine for Data-Driven Optimal Control (2015) (13)
- A luenberger observer-based fault detection and identification scheme for photovoltaic DC-DC converters (2017) (13)
- BikeSafe: bicycle behavior monitoring via smartphones (2017) (13)
- A general equipment diagnostic system and its application on photolithographic sequences (1997) (13)
- Parameter extraction framework for DUV lithography simulation (1999) (12)
- Photovoltaic condition monitoring using real-time adaptive parameter identification (2017) (12)
- Continuous equipment diagnosis using evidence integration: an LPCVD application (1991) (12)
- RING OSCILLATOR SENSITIVITY TO SPATIAL PROCESS VARIATION (1996) (12)
- Building-in-Briefcase (BiB) (2014) (12)
- Poster: WiFi-based Device-Free Human Activity Recognition via Automatic Representation Learning (2017) (12)
- Joint Adversarial Domain Adaptation for Resilient WiFi-Enabled Device-Free Gesture Recognition (2018) (11)
- An iBeacon Assisted Indoor Localization and Tracking System (2015) (11)
- Critical dimension sensitivity to post-exposure bake temperature variations in EUV photoresists (2005) (11)
- Impact of gate line edge roughness on double-gate FinFET performance variability (2008) (11)
- Prospective Experiment for Reinforcement Learning on Demand Response in a Social Game Framework (2020) (11)
- Learning Optimization Friendly Comfort Model for HVAC Model Predictive Control (2015) (11)
- Social Game for Building Energy Efficiency: Utility Learning, Simulation, and Analysis (2014) (11)
- Poisoning Attacks on Data-Driven Utility Learning in Games (2018) (11)
- MetroEye: Smart Tracking Your Metro Trips Underground (2016) (10)
- Stochastic Optimal Control of HVAC System for Energy-Efficient Buildings (2019) (10)
- In-line supervisory control in a photolithographic workcell (1991) (10)
- Impedance modeling of a Cl2/He plasma discharge for very large scale integrated circuit production monitoring (1996) (10)
- Modeling spatial gate length variation in the 0.2μm to 1.15mm separation range (2007) (10)
- Spatio-temporal environmental monitoring for smart buildings (2017) (10)
- Lithographic characterization of the flare in the Berkeley 0.3 numerical aperture extreme ultraviolet microfield optic (2006) (10)
- Low power wireless readout of autonomous sensor wafer using MEMS grating light modulator (2000) (10)
- Statistical equipment modeling for VLSI manufacturing (1989) (10)
- CDCGen: Cross-Domain Conditional Generation via Normalizing Flows and Adversarial Training (2021) (10)
- Multiple Kernel Semi-Representation Learning With Its Application to Device-Free Human Activity Recognition (2019) (10)
- Resist-based measurement of the contrast transfer function in a 0.3 numerical aperture extreme ultraviolet microfield optic (2006) (9)
- Modeling of mask thermal distortion and its dependency on pattern density (2005) (9)
- One step forward from run-to-run critical dimension control: Across-wafer level critical dimension control through lithography and etch process (2008) (9)
- Optimization of blended virtual and actual metrology schemes (2012) (9)
- SoundLoc: Acoustic Method for Indoor Localization without Infrastructure (2014) (9)
- Engineering vs. Ambient type visualizations: Quantifying effects of different data visualizations on energy consumption (2019) (9)
- Neural network approach to rapid thin film characterization (1998) (9)
- Dynamics of electricity markets with unknown utility functions: An extremum seeking control approach (2014) (9)
- Augmenting Reinforcement Learning with a Planning Model for Optimizing Energy Demand Response (2020) (8)
- Virtual power sensing based on a multiple-hypothesis sequential test (2013) (8)
- A statistically based model of electron‐beam exposed, chemically amplified negative resist (1991) (8)
- Characterization of a positive chemically amplified photoresist for process control (1998) (8)
- A transfer kernel learning based strategy for adaptive localization in dynamic indoor environments: poster (2016) (8)
- Modeling of EUV photoresists with a resist point spread function (2005) (8)
- Sequential Logistic Principal Component Analysis (SLPCA): Dimensional Reduction in Streaming Multivariate Binary-State System (2014) (8)
- Enhanced Spatial PEB Uniformity through a Novel Bake Plate Design (2005) (8)
- Comparing the economic impact of alternative metrology methods in semiconductor manufacturing (2002) (8)
- Environmental Exposures in Singapore Schools: An Ecological Study (2021) (8)
- Optimum sampling for characterization of systematic variation in photolithography (2002) (8)
- Dimensionality reduction methods in virtual metrology (2008) (7)
- Unsupervised personal thermal comfort prediction via adversarial domain adaptation (2021) (7)
- Wafer-grown heat flux sensor arrays for plasma etch processes (2005) (7)
- Offline-online reinforcement learning for energy pricing in office demand response: lowering energy and data costs (2021) (7)
- A Control & Diagnosis Scheme for Semiconductor Manufacturing (1993) (7)
- Energy-cyber-physical systems (2019) (7)
- Statistical Experimental Design in Plasma Etch (1991) (7)
- BRIEF: Bayesian Regression of Infinite Expert Forecasters for single and multiple time series prediction (2015) (7)
- FailSafe: A generalized methodology for converter fault detection, identification, and remediation in nanogrids (2015) (7)
- Stochastic Model Predictive Control with adaptive constraint tightening for non-conservative chance constraints satisfaction (2018) (7)
- Circuit size optimization with multiple sources of variation and position dependant correlation (2007) (7)
- REST: a reliable estimation of stopping time algorithm for social game experiments (2015) (6)
- Optimal Training and Efficient Model Selection for Parameterized Large Margin Learning (2016) (6)
- Fusing system configuration information for building cooling plant Fault Detection and severity level identification (2016) (6)
- Phase profilometry for the 193-nm lithography gate stack (2000) (6)
- Robust estimation of line width roughness parameters (2010) (6)
- Cooperative demand response using repeated game for price-anticipating buildings in smart grid (2014) (6)
- Adapting Surprise Minimizing Reinforcement Learning Techniques for Transactive Control (2021) (6)
- Distributed Model Predictive Control of a HVAC System via a Projected Subgradient Method* (2018) (6)
- Efficient spatio-temporal sensor deployments: A smart building application (2017) (6)
- Patterning tool characterization by causal variability decomposition (1996) (6)
- Proximal ADMM for Nonconvex and Nonsmooth Optimization (2022) (6)
- An improved robust adaptive parameter identifier for DC-DC converters using H-infinity design (2018) (6)
- Parametric Dual Maximization for Non-Convex Learning Problems (2017) (6)
- Statistical Experimental Design (2006) (6)
- Pricing in Prosumer Aggregations using Reinforcement Learning (2021) (6)
- APEC : Auto Planner for Efficient Configuration of Indoor Positioning System (2015) (5)
- Using Meta Reinforcement Learning to Bridge the Gap between Simulation and Experiment in Energy Demand Response (2021) (5)
- A lithography workcell monitoring and modeling scheme (1991) (5)
- In-situ metrology for deep-ultraviolet lithography process control (1998) (5)
- Design of an integrated aerial image sensor (2005) (5)
- A Deep Learning and Gamification Approach to Energy Conservation at Nanyang Technological University (2018) (5)
- Application of adaptive equipment models to a photolithographic process (1992) (5)
- Distribution Network Event Detection with Ensembles of Bundle Classifiers (2015) (5)
- A Proximal Linearization-based Decentralized Method for Nonconvex Problems with Nonlinear Constraints (2020) (5)
- Chronological equipment diagnosis using evidence integration (1990) (5)
- Compact formulation of mask error factor for critical dimension control in optical lithography (2002) (5)
- Time series-based deep learning model for personal thermal comfort prediction (2022) (5)
- Physical modeling of deprotection-induced thickness loss (1999) (5)
- Distributed Control of Multi-zone HVAC Systems Considering Indoor Air Quality (2020) (4)
- Real time in-situ data acquisition using autonomous on-wafer sensor arrays (2000) (4)
- Modeling metal dishing for interconnect optimization (2003) (4)
- Deep Learning and Unsupervised Domain Adaptation for WiFi-based Sensing (2021) (4)
- Resist-based measurement of the contrast transfer function in a 0.3-NA EUV microfield optic (2005) (4)
- Social Game for Building Energy Efficiency: Utility Learning, Simulation, Analysis and Incentive Design (2015) (4)
- Optimal Network Charge for Peer-to-Peer Energy Trading: A Grid Perspective (2022) (4)
- Selling Renewable Utilization Service to Consumers via Cloud Energy Storage (2020) (4)
- Integrated aerial image sensor: modeling and assembly (2006) (4)
- Yield-constrained digital circuit sizing via sequential geometric programming (2010) (4)
- Likelihood Contribution based Multi-scale Architecture for Generative Flows (2019) (4)
- Variability aware compact model characterization for statistical circuit design optimization (2012) (4)
- Hybrid Approach for Digital Twins in the Built Environment (2021) (4)
- Power prediction through energy consumption pattern recognition for smart buildings (2015) (4)
- Understanding Distributions of Environmental Parameters for Thermal Comfort Study in Singapore (2020) (4)
- Development and verification of a multizone building HVAC model with TRNSYS (2017) (4)
- One Bit Matters: Understanding Adversarial Examples as the Abuse of Redundancy (2018) (4)
- Indoor environmental quality monitoring by autonomous mobile sensing (2017) (3)
- Context-Aware Plug-Load Identification Toward Enhanced Energy Efficiency in the Built Environment (2020) (3)
- MetroEye: towards fine-grained passenger tracking underground (2016) (3)
- WiFiGenius : An Accurate and Reliable WiFi-based Indoor Localization and Navigation System (2015) (3)
- Real-time inspection system utilizing scatterometry pupil data (2014) (3)
- Interval-value based circuit simulation for statistical circuit design (2009) (3)
- Integrated aerial image sensor: Design, modeling, and assembly (2006) (3)
- Layout optimization based on a generalized process variability model (2008) (3)
- On a class of multi-parametric quadratic programming and its applications to machine learning (2016) (3)
- Decarbonizing Buildings Via Energy Demand Response and Deep Reinforcement Learning: The Deployment Value of Supervisory Planning and Guardrails (2022) (3)
- DEPEND: Density adaptive power efficient neighbor discovery for wearable body sensors (2013) (3)
- Towards a theory of free-lunch privacy in cyber-physical systems (2017) (3)
- Statistical significance of error-corrupted IC measurements (1989) (3)
- A class of impedance tomography based sensors for semiconductor manufacturing (2004) (3)
- Context-Aware Plug-Load Identification Towards Enhanced Energy Efficiency in the Built Environment (2018) (3)
- PROCESS V ARIABILITY AND DEVICE MISMATCH (1996) (3)
- Condition monitoring system of Ubin Island micro-grid (2016) (3)
- Statistical Process Control (2006) (2)
- OfficeLearn: An OpenAI Gym Environment for Reinforcement Learning on Occupant-Level Building’s Energy Demand Response (2020) (2)
- Demonstration of Transactive Control of Commercial Buildings as Energy Nodes (2020) (2)
- A Survey of ADMM Variants for Distributed Optimization: Problems, Algorithms and Features (2022) (2)
- Electrical impedance tomography based sensors for semiconductor manufacturing (2002) (2)
- Optimal sensor-controller codesign for privacy in dynamical systems (2017) (2)
- Optical thin-film decomposition for DUV positive-tone resist process monitoring (1998) (2)
- Variability-aware compact modeling and statistical circuit validation on SRAM test array (2016) (2)
- Asset Participation and Aggregation in Incentive-Based Demand Response Programs (2021) (2)
- Probe-pattern grating focus monitor through scatterometry calibration (2008) (2)
- Non-Gaussian uncertainty propagation in statistical circuit simulation (2011) (2)
- Hierarchical Decision making by Leveraging Utility Theory and Game Theoretic Analysis towards Sustainability in Building Design Operation (2018) (2)
- Decentralized Optimal Load Scheduling using Extremum Seeking-Based Optimization (2014) (2)
- Conditional Synthetic Data Generation for Personal Thermal Comfort Models (2022) (2)
- Transmission power allocation for cooperative relay-based neighborhood area networks for smart grid (2013) (1)
- Physically based model for predicting volume shrinkage in chemically amplified resists (1999) (1)
- Optimal Composition of Prosumer Aggregations (2021) (1)
- Enhancing metrology by combining spatial variability and global inference (2013) (1)
- Real-time inspection system utilizing scatterometry pupil data (2014) (1)
- Privacy-preserving building-related data publication using PAD (2017) (1)
- Building Automation via Deep Reinforcement Learning (2018) (1)
- Segmentation Analysis in Human Centric Cyber-Physical Systems using Graphical Lasso (2018) (1)
- Unsupervised Cross-Domain Conditional Generation via Normalizing Flows and Adversarial Training (2022) (1)
- Continuous diagnosis of low-pressure chemical vapor deposition reactors using evidence integration (1990) (1)
- Poster Abstract: MapSentinel: Map-Aided Non-intrusive Indoor Tracking in Sensor-Rich Environments (2015) (1)
- Reliability of high renewable penetration microgrid facilitated by coordination of air conditioning system and cooling fans (2017) (1)
- 45nm transistor variability study for memory characterization (2010) (1)
- Implementation and multiple dimensional extension to rectangle elimination methods for biobjective decision making (1982) (1)
- Estimating the probability density function of critical path delay via partial least squares dimension reduction (2011) (1)
- Improved dequantization and normalization methods for tabular data pre-processing in smart buildings (2022) (1)
- Adversarial poisoning attacks on reinforcement learning-driven energy pricing (2022) (1)
- In-Situ Metrology for Deep Ultraviolet Lithography (1997) (1)
- Fuzzy inference system for semiconductor manufacturing processes (1995) (1)
- Deep-ultraviolet lithography simulator tuning by resist profile matching (1999) (1)
- Special Issues in Semiconductor Manufacturing Eecs 290h Fall 2005 Problem Set No. 4 Official Solutions (2005) (1)
- Partial least squares-preconditioned importance sampling for fast circuit yield estimation (2011) (1)
- Specular spectral profilometry on metal layers (2000) (1)
- Conference Committee (2015) (1)
- SEM characterization of etch and develop contributions to poly-CD error (1996) (1)
- Optimizing participation of buildings and aggregations in incentive-based demand response programs: poster abstract (2022) (0)
- A Prospective Human-in-the-Loop Experiment using Reinforcement Learning with Planning for Optimizing Energy Demand Response (2020) (0)
- Parameter sensitive patterns for scatterometry monitoring (2007) (0)
- Two-wave pattern shift aberration monitor for centrally obscured optical systems (2005) (0)
- Novel metrology for the DUV photolithography sequence (1998) (0)
- CD uniformity improvement and IC process monitoring by wireless sensor technology (2004) (0)
- Data-Driven Hybrid Approach for Early Fault Detection of AHU using Electrical Signals (2022) (0)
- Collaborative platform, tool-kit, and physical models for DfM (2007) (0)
- Performance Evaluation of Blended Metrology Schemes Incorporating Virtual Metrology (2013) (0)
- Are There Differences between the Stress Responses of Philippine Men and Women to the COVID-19 Pandemic? (2023) (0)
- smartSDH: A Mechanism Design Approach to Building Control (2020) (0)
- Personalized Federated Hypernetworks for Privacy Preservation in Multi-Task Reinforcement Learning (2022) (0)
- A Survey of Failure Mechanisms and Statistics for Critical Electrical Equipment in Buildings (2020) (0)
- A Diagnostic System For Photolithography Equipment (1998) (0)
- Novel DUV photoresist modeling by optical thin film decomposition from spectral ellipsometry/reflectometry data (1998) (0)
- Building Efficiency and Sustainability in the Tropics ( SinBerBEST ) Title A Bayesian method of evaluating discomfort due to glare : The effect of order bias from a large glare source Permalink (2011) (0)
- Machine Learning for Smart and Energy-Efficient Buildings (2022) (0)
- Transactive Energy Market Framework for Decentralized Coordination of Peak Load Shaving within a Cluster-of-Commercial-Buildings (2022) (0)
- Concurrent Circuit Design/Process Engineering in a (1993) (0)
- Collaborative research on emerging technologies and design (2011) (0)
- Appendix C: Percentage Points of the 2 Distributiona (2006) (0)
- Appendix A: Some Properties of the Error Function (2006) (0)
- smartSDH: An Experimental Study of Mechanism-Based Building Control (2020) (0)
- Resource Allocation with Unknown Constraints: An Extremum Seeking Control Approach and Applications to Demand Response (2014) (0)
- APEC: Auto Planner for Efficient Configuration of Indoor Positioning Systems (2015) (0)
- Using composite gratings for optical system characterization through scatterometry (2008) (0)
- Appendix E: Percentage Points of the F Distribution (2006) (0)
- An Integrated Aerial Image Sensor for Lithography Diagnostics (2007) (0)
- Design, Benchmarking and Graphical Lasso based Explainability Analysis of an Energy Game-Theoretic Framework (2019) (0)
- Testing RL with Planning for Demand Response in an Energy Social Game (2020) (0)
- A sensor fusion based methodology for real time furnace diagnostics (2000) (0)
- Synthetic personal thermal comfort data generation: poster abstract (2022) (0)
- Low-cost coarse airborne particulate matter sensing for indoor detection (2014) (0)
- Appendix D: Percentage Points of the t Distributiona (2006) (0)
- Developing a Digital Twin for Indoor Environments: A Case Study (2021) (0)
- Development and application of equipment-specific process models for semiconductor manufacturing (1992) (0)
- Creating and using equipment models in semiconductor manufacturing (1991) (0)
- Semiconductor Manufacturing-EE 290 H Second Midterm Exam (1999) (0)
- Offline-online reinforcement learning for generalizing demand response price-setting to energy systems (2021) (0)
- A Syntactic Method for Analyzing Plasma Etching Signals (2017) (0)
- Appendix F: Factors for Constructing Variables Control Charts (2006) (0)
- Resist-based measurement of contrast transfer function in a 0.3-NAmicrofield optic (2005) (0)
- Appendix B: Cumulative Standard Normal Distribution (2006) (0)
- Process and Equipment Diagnosis (2006) (0)
- Deep reinforcement learning with planning guardrails for building energy demand response (2022) (0)
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