Dim‐lee Kwong

Q: What Schools Are Affiliated With Dim‐lee Kwong

Dim‐lee Kwong is affiliated with the following schools: University of Texas at Austin, California Institute of Technology, University of Notre Dame, Massachusetts Institute of Technology

Dim‐lee Kwong's AcademicInfluence.com Rankings

Dim‐lee Kwong

Engineering

#3233

World Rank

#4275

Historical Rank

Applied Physics

#552

World Rank

#572

Historical Rank

Electrical Engineering

#693

World Rank

#757

Historical Rank

engineering Degrees

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Engineering

Dim‐lee Kwong's Degrees

PhD Electrical Engineering Stanford University
Masters Electrical Engineering Stanford University
Bachelors Electrical Engineering Stanford University

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Dim‐lee Kwong's Published Works

Number of citations in a given year to any of this author's works

Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author

Published Works

High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices (2006) (537)
An inverted organic solar cell employing a sol-gel derived ZnO electron selective layer and thermal evaporated MoO3 hole selective layer (2008) (529)
Regenerative oscillation and four-wave mixing in graphene optoelectronics (2012) (520)
Improved dye-sensitized solar cells with a ZnO-nanoflower photoanode (2007) (495)
All-optical analog to electromagnetically induced transparency in multiple coupled photonic crystal cavities. (2009) (310)
Energy gap and band alignment for (HfO2)x(Al2O3)1−x on (100) Si (2002) (290)
Si nanopillar array optimization on Si thin films for solar energy harvesting (2009) (267)
Silicon Modulators and Germanium Photodetectors on SOI: Monolithic Integration, Compatibility, and Performance Optimization (2010) (259)
Thermal stability of ultrathin ZrO2 films prepared by chemical vapor deposition on Si(100) (2001) (252)
Switchable Magnetic Metamaterials Using Micromachining Processes (2011) (228)
Microelectromechanical Maltese-cross metamaterial with tunable terahertz anisotropy (2012) (216)
Vertical Silicon-Nanowire Formation and Gate-All-Around MOSFET (2008) (208)
Design guidelines of periodic Si nanowire arrays for solar cell application (2009) (197)
Electrical characteristics of ultrathin oxynitride gate dielectric prepared by rapid thermal oxidation of Si in N2O (1990) (191)
N-type Schottky barrier source/drain MOSFET using ytterbium silicide (2004) (191)
A dynamic random access memory based on a conjugated copolymer containing electron-donor and -acceptor moieties. (2006) (180)
Gate-tunable frequency combs in graphene–nitride microresonators (2018) (170)
A Micromachined Reconfigurable Metamaterial via Reconfiguration of Asymmetric Split‐Ring Resonators (2011) (166)
Bistable resistance switching of poly(N-vinylcarbazole) films for nonvolatile memory applications (2005) (159)
An optical neural chip for implementing complex-valued neural network (2021) (158)
Dynamic NBTI of p-MOS transistors and its impact on MOSFET scaling (2002) (156)
Ultra-Narrow Silicon Nanowire Gate-All-Around CMOS Devices: Impact of Diameter, Channel-Orientation and Low Temperature on Device Performance (2006) (156)
High-bendability flexible dye-sensitized solar cell with a nanoparticle-modified ZnO-nanowire electrode (2008) (152)
Mode-locked ultrashort pulse generation from on-chip normal dispersion microresonators. (2014) (151)
Effect of surface NH3 anneal on the physical and electrical properties of HfO2 films on Ge substrate (2004) (148)
p-type conduction in unintentional carbon-doped ZnO thin films (2007) (146)
Demonstration of Tunneling FETs Based on Highly Scalable Vertical Silicon Nanowires (2009) (145)
Si, SiGe Nanowire Devices by Top–Down Technology and Their Applications (2008) (143)
$\hbox{HfO}_{x}/\hbox{TiO}_{x}/\hbox{HfO}_{x}/ \hbox{TiO}_{x}$ Multilayer-Based Forming-Free RRAM Devices With Excellent Uniformity (2011) (140)
Ultralow Power Silicon Photonics Thermo-Optic Switch With Suspended Phase Arms (2011) (139)
Fermi pinning-induced thermal instability of metal-gate work functions (2004) (132)
Metal nanocrystal memory with high-/spl kappa/ tunneling barrier for improved data retention (2005) (130)
Photoluminescence and formation mechanism of chemically etched silicon (1992) (127)
Physical mechanisms of endurance degradation in TMO-RRAM (2011) (127)
DNA detection using nanostructured SERS substrates with Rhodamine B as Raman label. (2008) (124)
Design and in Vitro Test of a Differentially Fed Dual-Band Implantable Antenna Operating at MICS and ISM Bands (2014) (124)
Ge diffusion in Ge metal oxide semiconductor with chemical vapor deposition HfO2 dielectric (2005) (120)
Alternative surface passivation on germanium for metal-oxide-semiconductor applications with high-k gate dielectric (2004) (115)
Broadband gate-tunable terahertz plasmons in graphene heterostructures (2017) (114)
Optimization of an inverted organic solar cell (2010) (109)
A Flat Lens with Tunable Phase Gradient by Using Random Access Reconfigurable Metamaterial (2015) (109)
WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability. (2010) (109)
Silicon-based horizontal nanoplasmonic slot waveguides for on-chip integration. (2011) (108)
A 0.18μm CMOS 802.15.4a UWB Transceiver for Communication and Localization (2008) (106)
Zero phase delay in negative-refractive-index photonic crystal superlattices (2011) (105)
Digital microfluidics: Droplet based logic gates (2007) (104)
Theoretical and experimental investigation of Si nanocrystal memory device with HfO/sub 2/ high-k tunneling dielectric (2003) (104)
Observation of femtojoule optical bistability involving fano resonances in high-Q/Vm silicon photonic crystal nanocavities (2007) (104)
Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module. (2008) (104)
Silicon-Waveguide-Based Mode Evolution Polarization Rotator (2010) (101)
Schottky-barrier S/D MOSFETs with high-k gate dielectrics and metal-gate electrode (2004) (100)
Effects of chemical composition on the electrical properties of NO‐nitrided SiO2 (1995) (94)
Near-infrared waveguide-based nickel silicide Schottky-barrier photodetector for optical communications (2008) (94)
Germanium pMOSFETs with Schottky-barrier germanide S/D, high-/spl kappa/ gate dielectric and metal gate (2005) (92)
Demonstration of photoluminescence in nonanodized silicon (1992) (92)
Developments in Luminescent Porous Si (1993) (91)
Wearable Triboelectric-Human-Machine-Interface (THMI) Using Robust Nanophotonic Readout. (2020) (89)
Thermal stability of (HfO2)(x)(Al2O3)(1-x) on Si (2002) (88)
Furnace nitridation of thermal SiO/sub 2/ in pure N/sub 2/O ambient for ULSI MOS applications (1992) (88)
Ultraviolet and visible electroluminescence from n-ZnO∕SiOx∕(n,p)-Si heterostructured light-emitting diodes (2008) (88)
A novel MONOS-type nonvolatile memory using high-/spl kappa/ dielectrics for improved data retention and programming speed (2004) (88)
Degradation of oxynitride gate dielectric reliability due to boron diffusion (1996) (87)
Fast and low power Michelson interferometer thermo-optical switch on SOI. (2008) (87)
Ultrathin low temperature SiGe buffer for the growth of high quality Ge epilayer on Si(100) by ultrahigh vacuum chemical vapor deposition (2007) (87)
Suspended optical fiber-to-waveguide mode size converter for silicon photonics. (2010) (86)
Cascade wide-angle Y-junction 1 x 16 optical power splitter based on silicon wire waveguides on silicon-on-insulator. (2008) (85)
Split Bull's eye shaped aluminum antenna for plasmon-enhanced nanometer scale germanium photodetector. (2011) (84)
Observation of four-wave mixing in slow-light silicon photonic crystal waveguides. (2010) (83)
A nano-opto-mechanical pressure sensor via ring resonator. (2012) (82)
Theoretical investigation of silicon MOS-type plasmonic slot waveguide based MZI modulators. (2010) (82)
MOS characteristics of ultrathin NO-grown oxynitrides (1994) (81)
Low-loss amorphous silicon wire waveguide for integrated photonics: effect of fabrication process and the thermal stability. (2010) (81)
Epitaxial strained germanium p-MOSFETs with HfO/sub 2/ gate dielectric and TaN gate electrode (2003) (81)
Heterogeneous 2.5D integration on through silicon interposer (2015) (80)
A novel high-/spl kappa/ SONOS memory using TaN/Al/sub 2/O/sub 3//Ta/sub 2/O/sub 5//HfO/sub 2//Si structure for fast speed and long retention operation (2006) (80)
Vertically Stacked SiGe Nanowire Array Channel CMOS Transistors (2007) (79)
Electro-absorption modulation in horizontal metal-insulator-silicon-insulator-metal nanoplasmonic slot waveguides (2011) (79)
Electrical properties and thermal stability of CVD HfOxNy gate dielectric with poly-Si gate electrode (2003) (79)
Microstructural investigations of light‐emitting porous Si layers (1992) (77)
CMOS Inverter Based on Gate-All-Around Silicon-Nanowire MOSFETs Fabricated Using Top-Down Approach (2007) (76)
MOS characteristics of ultrathin CVD HfAlO gate dielectrics (2003) (75)
Control of porous Si photoluminescence through dry oxidation (1992) (74)
Inverted tandem organic solar cells with a MoO3/Ag/Al/Ca intermediate layer (2010) (74)
Silicon nanowire sensor array using top–down CMOS technology (2008) (74)
Differentially Fed Dual-Band Implantable Antenna for Biomedical Applications (2012) (73)
Study of 15µm pitch solder microbumps for 3D IC integration (2009) (73)
Physical and electrical characteristics of HfN gate electrode for advanced MOS devices (2003) (72)
Nickel nanocrystal formation on HfO2 dielectric for nonvolatile memory device applications (2005) (72)
Silicon High-Order Coupled-Microring-Based Electro-Optical Switches for On-Chip Optical Interconnects (2012) (71)
Si interlayer passivation on germanium MOS capacitors with high-/spl kappa/ dielectric and metal gate (2005) (71)
GaAs metal-oxide-semiconductor device with HfO2∕TaN gate stack and thermal nitridation surface passivation (2007) (70)
Gate-All-Around Junctionless Nanowire MOSFET With Improved Low-Frequency Noise Behavior (2011) (69)
Effects of NH3 nitridation on oxides grown in pure N2O ambient (1994) (69)
Si-Nanowire Based Gate-All-Around Nonvolatile SONOS Memory Cell (2008) (69)
Micro-electro-mechanically switchable near infrared complementary metamaterial absorber (2014) (69)
Ge MOS characteristics with CVD HfO/sub 2/ gate dielectrics and TaN gate electrode (2003) (68)
RF, DC, and reliability characteristics of ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminate MIM capacitors for Si RF IC applications (2004) (68)
Dual work function metal gates using full nickel silicidation of doped poly-Si (2003) (66)
Negative U traps in HfO/sub 2/ gate dielectrics and frequency dependence of dynamic BTI in MOSFETs (2004) (66)
Integrated antennas on Si with over 100 GHz performance, fabricated using an optimized proton implantation process (2003) (66)
Enhanced four-wave mixing in graphene-silicon slow-light photonic crystal waveguides (2014) (65)
A broadband chip-scale optical frequency synthesizer at 2.7 × 10−16 relative uncertainty (2016) (65)
Fully complementary metal-oxide-semiconductor compatible nanoplasmonic slot waveguides for silicon electronic photonic integrated circuits (2011) (63)
Surface passivation using ultrathin AlNx film for Ge–metal–oxide–semiconductor devices with hafnium oxide gate dielectric (2005) (63)
Composition and growth kinetics of ultrathin SiO2 films formed by oxidizing Si substrates in N2O (1990) (63)
Silicided shallow junction formation by ion implantation of impurity ions into silicide layers and subsequent drive‐in (1987) (62)
Metal‐oxide‐semiconductor characteristics of chemical vapor deposited Ta2O5 films (1992) (61)
Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements (2012) (60)
Modeling of Retention Failure Behavior in Bipolar Oxide-Based Resistive Switching Memory (2011) (60)
Germanium p- & n-MOSFETs fabricated with novel surface passivation (plasma-PH/sub 3/ and thin AlN) and TaN/HfO/sub 2/ gate stack (2004) (60)
Hot-carrier-stress effects on gate-induced drain leakage current in n-channel MOSFETs (1991) (60)
Design of an ultra-compact electro-absorption modulator comprised of a deposited TiN/HfO₂/ITO/Cu stack for CMOS backend integration. (2014) (60)
Formation of hafnium-aluminum-oxide gate dielectric using single cocktail liquid source in MOCVD process (2003) (60)
Characterization of RuO2 electrodes on Zr silicate and ZrO2 dielectrics (2001) (59)
Thermal stability of nitrogen incorporated in HfNxOy gate dielectrics prepared by reactive sputtering (2004) (59)
Polarization dependent state to polarization independent state change in THz metamaterials (2011) (59)
Correlation between carrier recombination and p-type doping in P monodoped and In–P codoped ZnO epilayers (2007) (59)
Dual-work-function metal gates by full silicidation of poly-Si with Co-Ni bi-Layers (2005) (58)
Effects of ALD HfO2 thickness on charge trapping and mobility (2005) (58)
Novel evanescent-coupled germanium electro-absorption modulator featuring monolithic integration with germanium p-i-n photodetector. (2011) (58)
Dual band complementary metamaterial absorber in near infrared region (2014) (58)
Observation of zeroth-order band gaps in negative-refraction photonic crystal superlattices at near-infrared frequencies. (2009) (58)
Modeling of tunneling currents through HfO2 and (HfO2)x(Al2O3)/sub 1-x/ gate stacks (2003) (58)
Highly compact 1T-1R architecture (4F2 footprint) involving fully CMOS compatible vertical GAA nano-pillar transistors and oxide-based RRAM cells exhibiting excellent NVM properties and ultra-low power operation (2012) (57)
Passive ring-assisted Mach-Zehnder interleaver on silicon-on-insulator. (2008) (57)
A TaN-HfO/sub 2/-Ge pMOSFET with NovelSiH/sub 4/ surface passivation (2004) (57)
Microring resonator-assisted Fourier transform spectrometer with enhanced resolution and large bandwidth in single chip solution (2019) (56)
A fast measurement technique of MOSFETI/sub d/-V/sub g/ characteristics (2006) (56)
MOS characteristics of ultrathin SiO/sub 2/ prepared by oxidizing Si in N/sub 2/O (1991) (56)
Wide $V_{\rm fb}$ and $V_{\rm th}$ Tunability for Metal-Gated MOS Devices With HfLaO Gate Dielectrics (2007) (55)
3D arrays of SERS substrate for ultrasensitive molecular detection (2007) (55)
Selective epitaxial germanium on silicon-on-insulator high speed photodetectors using low-temperature ultrathin Si0.8Ge0.2 buffer (2007) (55)
A low-phase-noise 18 GHz Kerr frequency microcomb phase-locked over 65 THz (2015) (55)
A nanoelectromechanical systems optical switch driven by optical gradient force (2013) (55)
New degradation mechanisms and reliability performance in tunneling field effect transistors (2009) (55)
An Ultracompact Surface Plasmon Polariton-Effect-Based Polarization Rotator (2011) (54)
Memory effect in the current-voltage characteristic of 8-hydroquinoline aluminum salt films (2006) (54)
Optimization of inverted tandem organic solar cells (2011) (54)
0.2 λ0 Thick Adaptive Retroreflector Made of Spin‐Locked Metasurface (2018) (54)
Fermi-level pinning induced thermal instability in the effective work function of TaN in TaN/SiO/sub 2/ gate stack (2004) (54)
Multibit Programmable Flash Memory Realized on Vertical Si Nanowire Channel (2010) (53)
Physical and electrical characteristics of high-κ gate dielectric Hf(1−x)LaxOy (2006) (52)
Pulsed laser heating of silicon: The coupling of optical absorption and thermal conduction during irradiation (1983) (52)
Ge n-MOSFETs on lightly doped substrates with high-/spl kappa/ dielectric and TaN gate (2006) (52)
Novel Silicon-Carbon (Si:C) Schottky Barrier Enhancement Layer for Dark-Current Suppression in Ge-on-SOI MSM Photodetectors (2008) (51)
Study of the composition of thin dielectrics grown on Si in a pure N2O ambient (1991) (51)
Performance and reliability of ultra thin CVD HfO/sub 2/ gate dielectrics with dual poly-Si gate electrodes (2001) (51)
Novel silicon nanohemisphere-array solar cells with enhanced performance. (2011) (51)
A dual-metal gate integration process for CMOS with sub-1-nm EOT HfO/sub 2/ by using HfN replacement gate (2004) (51)
Analytic model of endurance degradation and its practical applications for operation scheme optimization in metal oxide based RRAM (2013) (51)
Effect of Interface Traps and Oxide Charge on Drain Current Degradation in Tunneling Field-Effect Transistors (2010) (50)
Low Thermal Budget Monolithic Integration of Evanescent-Coupled Ge-on-SOI Photodetector on Si CMOS Platform (2010) (50)
Random Telegraph Signal Noise in Gate-All-Around Si-FinFET With Ultranarrow Body (2006) (50)
Growth kinetics of ultrathin SiO2 films fabricated by rapid thermal oxidation of Si substrates in N2O (1991) (50)
Intense photoluminescence from laterally anodized porous Si (1991) (50)
Evanescent-Coupled Ge p-i-n Photodetectors on Si-Waveguide With SEG-Ge and Comparative Study of Lateral and Vertical p-i-n Configurations (2008) (50)
Electrical characteristics and suppressed boron penetration behavior of thermally stable HfTaO gate dielectrics with polycrystalline-silicon gate (2004) (49)
Wearable Triboelectric/Aluminum Nitride Nano‐Energy‐Nano‐System with Self‐Sustainable Photonic Modulation and Continuous Force Sensing (2020) (49)
An integrated low phase noise radiation-pressure-driven optomechanical oscillator chipset (2014) (49)
Thermally robust HfN metal as a promising gate electrode for advanced MOS device applications (2004) (49)
Mesoscopic chaos mediated by Drude electron-hole plasma in silicon optomechanical oscillators (2016) (49)
Performance breakthrough in 8 nm gate length Gate-All-Around nanowire transistors using metallic nanowire contacts (2008) (48)
Low-Voltage and High-Responsivity Germanium Bipolar Phototransistor for Optical Detections in the Near-Infrared Regime (2008) (48)
Thermally stable CVD HfO/sub x/N/sub y/ advanced gate dielectrics with poly-Si gate electrode (2002) (48)
Components for silicon plasmonic nanocircuits based on horizontal Cu-SiO₂-Si-SiO₂-Cu nanoplasmonic waveguides. (2012) (47)
Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device (2004) (47)
Si nanocone array optimization on crystalline Si thin films for solar energy harvesting (2010) (47)
Decoupling the Fermi-level pinning effect and intrinsic limitations on p-type effective work function metal electrodes (2008) (47)
Globally stable microresonator Turing pattern formation for coherent high-power THz radiation on-chip (2016) (47)
Micromachined switchable metamaterial with dual resonance (2012) (47)
Selective tungsten silicide formation by ion‐beam mixing and rapid thermal annealing (1985) (46)
Wafer level embedding technology for 3D wafer level embedded package (2009) (46)
Very low defects and high performance Ge-on-insulator p-MOSFETs with Al/sub 2/O/sub 3/ gate dielectrics (2003) (46)
Two-dimensional analytical modeling of threshold voltages of short-channel MOSFET's (1984) (46)
Dual-metal gate technology for deep-submicron CMOS transistors (2000) (46)
Nano-opto-mechanical actuator driven by gradient optical force (2012) (46)
Investigation of Low-Frequency Noise in Silicon Nanowire MOSFETs in the Subthreshold Region (2009) (45)
An Efficient Triple-Tandem Polymer Solar Cell (2009) (45)
Silicon Mach-Zehnder modulator of extinction ratio beyond 10dB at 10.0–12.5Gbps (2011) (45)
Performance of ultracompact copper-capped silicon hybrid plasmonic waveguide-ring resonators at telecom wavelengths. (2012) (45)
Theoretical investigation of silicide Schottky barrier detector integrated in horizontal metal-insulator-silicon-insulator-metal nanoplasmonic slot waveguide. (2011) (45)
High-field breakdown in thin oxides grown in N/sub 2/O ambient (1993) (44)
Surface plasmon enhanced responsivity in a waveguided germanium metal-semiconductor-metal photodetector (2010) (44)
The use of ultrathin reoxidized nitrided gate oxide for suppression of boron penetration in BF/sub 2//sup +/-implanted polysilicon gated p-MOSFETs (1991) (44)
Interface trap passivation effect in NBTI measurement for p-MOSFET with SiON gate dielectric (2005) (44)
Phase modulation in horizontal metal-insulator-silicon-insulator-metal plasmonic waveguides. (2013) (43)
Improved reliability characteristics of submicrometer nMOSFETs with oxynitride gate dielectric prepared by rapid thermal oxidation in N/sub 2/O (1991) (43)
MOS characteristics of NH/sub 3/-nitrided N/sub 2/O-grown oxides (1993) (43)
Metal-germanide Schottky Source/Drain transistor on Germanium substrate for future CMOS technology (2006) (42)
Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation. (2011) (42)
Three Dimensional Stress Mapping of Silicon Surrounded by Copper Filled through Silicon Vias Using Polychromator-Based Multi-Wavelength Micro Raman Spectroscopy (2010) (42)
Arbitrary and Independent Polarization Control In Situ via a Single Metasurface (2018) (41)
Fast DNBTI components in p-MOSFET with SiON dielectric (2005) (41)
Highly suppressed boron penetration in NO-nitrided SiO/sub 2/ for p/sup +/-polysilicon gated MOS device applications (1995) (41)
Si-nanowire CMOS inverter logic fabricated using gate-all-around (GAA) devices and top-down approach (2008) (41)
Observation of Metal-Layer Stress on Si Nanowires in Gate-All-Around High- $\kappa$/Metal-Gate Device Structures (2007) (41)
Observation of spontaneous Raman scattering in silicon slow-light photonic crystal waveguides (2008) (41)
Oxidation of Si(100) in nitric oxide at low pressures: An x-ray photoelectron spectroscopy study (1997) (40)
25 GHz operation of silicon optical modulator with projection MOS structure (2010) (40)
Oxynitride gate dielectrics for p/sup +/-polysilicon gate MOS devices (1993) (40)
Epitaxially grown n-ZnO/MgO/TiN/n(+)-Si(111) heterostructured light-emitting diode (2008) (39)
A novel method to predict die shift during compression molding in embedded wafer level package (2009) (39)
Application of piezoresistive stress sensors in ultra thin device handling and characterization (2009) (39)
RF passive devices on Si with excellent performance close to ideal devices designed by electro-magnetic simulation (2003) (39)
Inversion-Mode Self-Aligned $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ N-Channel Metal-Oxide-Semiconductor Field-Effect Transistor With HfAlO Gate Dielectric and TaN Metal Gate (2008) (39)
Waveguide-integrated near-infrared detector with self-assembled metal silicide nanoparticles embedded in a silicon p-n junction (2012) (39)
Propagation losses in undoped and n-doped polycrystalline silicon wire waveguides. (2009) (39)
Design High-Efficiency Si Nanopillar-Array-Textured Thin-Film Solar Cell (2010) (39)
Silicon Homoepitaxy by Rapid Thermal Processing Chemical Vapor Deposition (RTPCVD)—A Review (1991) (38)
The Role of Ti Capping Layer in HfOx-Based RRAM Devices (2014) (38)
Vertically scaled MOSFET gate stacks and junctions: How far are we likely to go? (2002) (38)
Oxide-based RRAM: Physical based retention projection (2010) (38)
Improving coupling efficiency of fiber-waveguide coupling with a double-tip coupler. (2008) (38)
Influence of fluorine preamorphization on the diffusion and activation of low‐energy implanted boron during rapid thermal annealing (1994) (38)
Low-Cost and High-Speed SOI Waveguide-Based Silicide Schottky-Barrier MSM Photodetectors for Broadband Optical Communications (2008) (38)
ALD(HfO2)x(Al2O3)1-x high-k gate dielectrics for advanced MOS devices application (2003) (38)
Electrical tracing-assisted dual-microring label‑free optical bio/chemical sensors. (2012) (37)
Effects of alloying and localized electronic states on the resonant Raman spectra of Zn1−xMgxO nanocrystals (2007) (37)
High-Performance Waveguided Ge-on-SOI Metal–Semiconductor–Metal Photodetectors With Novel Silicon–Carbon (Si : C) Schottky Barrier Enhancement Layer (2008) (37)
Investigation of performance limits of germanium double-gated MOSFETs (2003) (37)
Memory performance of a thin-film device based on a conjugated copolymer containing fluorene and chelated europium complex (2006) (37)
Wavelength-Flattened Directional Coupler Based Mid-Infrared Chemical Sensor Using Bragg Wavelength in Subwavelength Grating Structure (2018) (37)
Impact of field-enhanced band-traps-band tunneling on the dark current generation in germanium p-i-n photodetector (2009) (37)
Effects of H and O passivation on photoluminescence from anodically oxidized porous Si (1993) (37)
Low-Temperature Transport Characteristics and Quantum-Confinement Effects in Gate-All-Around Si-Nanowire N-MOSFET (2007) (36)
Fully Silicided NiSi and Germanided NiGe Dual Gates on SiO 2/Si and Al 2O 3/Ge-On-Insulator MOSFETs (2003) (36)
Silicon waveguide based TE mode converter (2010) (36)
Three-Layer laminated metal gate electrodes with tunable work functions for CMOS applications (2005) (36)
Robust high-quality HfN-HfO/sub 2/ gate stack for advanced MOS device applications (2004) (35)
WORM-Type Memory Device Based on a Conjugated Copolymer Containing Europium Complex in the Main Chain (2006) (35)
Monolithic Integration of a Multiplexer/Demultiplexer With a Thermo-Optic VOA Array on an SOI Platform (2009) (35)
Thickness and Compositional Nonuniformities of Ultrathin Oxides Grown by Rapid Thermal Oxidation of Silicon in N 2 O (1991) (35)
On Oxygen Deficiency and Fast Transient Charge-Trapping Effects in High-$k$ Dielectrics (2006) (35)
Electrical properties of amorphous high-/spl kappa/ HfTaTiO gate dielectric with dielectric constants of 40-60 (2005) (35)
Three Dimensionally Stacked SiGe Nanowire Array and Gate-All-Around p-MOSFETs (2006) (35)
Vertical-Si-Nanowire-Based Nonvolatile Memory Devices With Improved Performance and Reduced Process Complexity (2011) (35)
Electrical properties and reliability of MOSFET's with rapid thermal NO-nitrided SiO/sub 2/ gate dielectrics (1995) (34)
Fabrication Aspects of Germanium on Insulator from Sputtered Ge on Si-Substrates (2006) (34)
Vertical silicon nanowire platform for low power electronics and clean energy applications (2012) (34)
Thermally stable CVD HfOxNy advanced gate dielectrics with poly-Si gate electrode (2002) (34)
Enhanced photoresponsivity in graphene-silicon slow-light photonic crystal waveguides (2016) (34)
Enhanced thermal stability of nickel germanide on thin epitaxial germanium by adding an ultrathin titanium layer (2007) (34)
Coupled Resonances in Multiple Silicon Photonic Crystal Cavities in All-Optical Solid-State Analogy to Electromagnetically Induced Transparency (2010) (34)
DQPSK/QPSK modulation at 40–60 Gb/s using low-loss nested silicon Mach-Zehnder modulator (2013) (34)
Low-loss partial rib polarization rotator consisting only of silicon core and silica cladding. (2015) (33)
Hafnium oxide gate stack prepared by in situ rapid thermal chemical vapor deposition process for advanced gate dielectrics (2002) (33)
Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application (2014) (33)
Numerical investigation on the junctionless nanowire FET (2011) (33)
Observations of temporal group delays in slow-light multiple coupled photonic crystal cavities (2010) (32)
Low-Voltage High-Speed (18 GHz/1 V) Evanescent-Coupled Thin-Film-Ge Lateral PIN Photodetectors Integrated on Si Waveguide (2008) (32)
Mechanism of positive-bias temperature instability in sub-1-nm TaN/HfN/HfO/sub 2/ gate stack with low preexisting traps (2005) (32)
Comparison of the chemical structure and composition between N2O oxides and reoxidized NH3‐nitrided oxides (1994) (32)
Negative differential resistance and electrical bistability in nanocrystal organic memory devices (2006) (32)
Impact of surface roughness on silicon and germanium ultra-thin-body MOSFETs (2004) (32)
Quantum tunneling and scalability of HfO2 and HfAlO gate stacks (2002) (31)
Silicon epitaxial growth by rapid thermal processing chemical vapor deposition (1989) (31)
High quality ultrathin gate dielectrics formation by thermal oxidation of Si in N2O (1991) (31)
Simultaneous formation of silicide ohmic contacts and shallow p+-n junctions by ion-beam mixing and rapid thermal annealing (1985) (31)
Transmission electron microscopy study of chemically etched porous Si (1993) (31)
Low temperature MOSFET technology with Schottky barrier source/drain, high-K gate dielectric and metal gate electrode (2004) (31)
Current–voltage characteristics of Schottky barriers with barrier heights larger than the semiconductor band gap: The case of NiGe∕n-(001)Ge contact (2005) (31)
Chemical vapor deposition of ultrathin Ta2O5 films using Ta[N(CH3)2]5 (1998) (31)
11-Gb/s 80-km transmission performance of zero-chirp silicon Mach-Zehnder modulator. (2012) (31)
Ultrathin Ta2O5 film growth by chemical vapor deposition of Ta(N(CH3)2)5 and O2 on bare and SiOxNy-passivated Si(100) for gate dielectric applications (1998) (31)
Nanowire FETs for low power CMOS applications featuring novel gate-all-around single metal FUSI gates with dual Φm and VT tune-ability (2008) (30)
Electrical switching and transport in the Si/organic monolayer/Au and Si/organic bilayer/Al devices (2006) (30)
Characterization and reliability of dual high-k gate dielectric stack (poly-Si-HfO2-SiO2) prepared by in situ RTCVD process for system-on-chip applications (2003) (30)
Voltage and temperature dependence of capacitance of high-k HfO/sub 2/ MIM capacitors: a unified understanding and prediction (2003) (30)
Highly reliable, high-C DRAM storage capacitors with CVD TA/sub 2/O/sub 5/ films on rugged polysilicon (1993) (30)
Fully silicided NiSi and germanided NiGe dual gates on SiO/sub 2//Si and Al/sub 2/O/sub 3//Ge-on-insulator MOSFETs (2003) (30)
Refractory metal silicide formation by ion beam mixing and rapid thermal annealing (1985) (29)
Thermo-Optical Enhanced Silicon Wire Interleavers (2008) (29)
Gate-all-around Si-nanowire CMOS inverter logic fabricated using top-down approach (2007) (29)
Realization of n-Zn1−xMgxO∕i-ZnO∕SiOx∕n+-Si heterostructured n-i-n light-emitting diodes by low-cost ultrasonic spray pyrolysis (2007) (29)
Novel NiGe MSM Photodetector Featuring Asymmetrical Schottky Barriers Using Sulfur Co-Implantation and Segregation (2008) (29)
Electron mobility in Ge and strained-Si channel ultrathin-body metal-oxide semi conductor field-effect transistors (2004) (29)
Effective thermo-optical enhanced cross-ring resonator MZI interleavers on SOI. (2008) (28)
Study of the SiO2/Si interface endurance property during rapid thermal nitridation and reoxidation processing (1989) (28)
B-doping of vapour–liquid–solid grown Au-catalysed and Al-catalysed Si nanowires: effects of B2H6 gas during Si nanowire growth and B-doping by a post-synthesis in situ plasma process (2007) (28)
Pt-Germanide Schottky source/drain Germanium p-MOSFET with HfO/sub 2/ gate dielectric and TaN gate electrode (2006) (28)
Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice (2011) (28)
Performance and reliability assessment of dual-gate CMOS devices with gate oxide grown on nitrogen implanted Si substrates (1997) (28)
Study of thermal oxidation and nitrogen annealing of luminescent porous silicon (1994) (28)
Effect of rapid thermal reoxidation on the electrical properties of rapid thermally nitrided thin-gate oxides (1992) (28)
Impact of Gate Electrodes on $\hbox{1}/f$ Noise of Gate-All-Around Silicon Nanowire Transistors (2009) (28)
Realizing and and or Functions With Single Vertical-Slit Field-Effect Transistor (2012) (28)
Dual Metal Gates with Band-Edge Work Functions on Novel HfLaO High-K Gate Dielectric (2006) (28)
Endurance Degradation in Metal Oxide-Based Resistive Memory Induced by Oxygen Ion Loss Effect (2013) (28)
Si Nanopillar Array Surface-Textured Thin-Film Solar Cell With Radial p-n Junction (2011) (27)
Silicon Waveguide Integrated Germanium JFET Photodetector With Improved Speed Performance (2011) (27)
Aluminum nitride on insulator (AlNOI) platform for mid-infrared photonics. (2019) (27)
Anomalous transient diffusion of boron implanted into preamorphized Si during rapid thermal annealing (1989) (27)
Silicon nitride based plasmonic components for CMOS back-end-of-line integration. (2013) (26)
Vertical-Si-Nanowire SONOS Memory for Ultrahigh-Density Application (2009) (26)
Multi-channel silicon photonic receiver based on ring-resonators. (2010) (26)
Radio frequency regenerative oscillations in monolithic high-Q/V heterostructured photonic crystal cavities (2014) (26)
Time-dependent dielectric breakdown characteristics of N/sub 2/O oxide under dynamic stressing (1992) (26)
Thermal response of Ru electrodes in contact with SiO2 and Hf-based high-k gate dielectrics (2005) (26)
Low-loss high-speed silicon IQ modulator for QPSK/DQPSK in C and L bands. (2014) (26)
Visible photoluminescence from porous Si formed by annealing and chemically etching amorphous Si (1992) (26)
128-Gb/s DP-QPSK using low-loss monolithic silicon IQ modulator integrated with partial-rib polarization rotator (2014) (26)
Reduction of charge-transport characteristics of SiGe dot floating gate memory device with ZrO/sub 2/ tunneling oxide (2003) (26)
Improved carrier injection in gate-all-around Schottky barrier silicon nanowire field-effect transistors (2008) (26)
Proposed silicon wire interleaver structure. (2008) (26)
Recent developments in ultra thin oxynitride gate dielectrics (1995) (25)
Monte Carlo simulation of p- and n-channel GOI MOSFETs by solving the quantum Boltzmann equation (2005) (25)
Dynamic Bias-Temperature Instability in Ultrathin SiO2 and HfO2 Metal-Oxide-Semiconductor Field Effect Transistors and Its Impact on Device Lifetime (2004) (25)
HfO2 and Lanthanide-doped HfO2 MIM Capacitors for RF/Mixed IC Applications (2003) (25)
Fabrication of self-sealed circular nano/microfluidic channels in glass substrates (2007) (25)
Experimental Demonstration of Vertical ${\rm Cu}\hbox{-}{\rm SiO}_{2}\hbox{-}{\rm Si}$ Hybrid Plasmonic Waveguide Components on an SOI Platform (2012) (25)
Ultrasensitive electrical detection of nucleic acids by hematin catalysed silver nanoparticle formation in sub-microgapped biosensors. (2008) (25)
Photoluminescence, Structure, and Composition of Laterally Anodized Porous Si (1992) (25)
Fully CMOS-Compatible 1T1R Integration of Vertical Nanopillar GAA Transistor and Oxide-Based RRAM Cell for High-Density Nonvolatile Memory Application (2013) (25)
Vertically Stacked and Independently Controlled Twin-Gate MOSFETs on a Single Si Nanowire (2011) (25)
Formation of SiGe nanocrystals in HfO2 using in situ chemical vapor deposition for memory applications (2004) (24)
High quality thin gate oxide prepared by annealing low‐pressure chemical vapor deposited SiO2 in N2O (1991) (24)
Thin-film thermo-optic Ge(x)Si(1-x) Mach-Zehnder interferometer. (1992) (24)
Laser heating of semiconductors—effect of carrier diffusion in nonlinear dynamic heat transport process (1981) (24)
Modeling of Stress-Retarded Thermal Oxidation of Nonplanar Silicon Structures for Realization of Nanoscale Devices (2010) (24)
Bendability of single-crystal Si MOSFETs investigated on flexible substrate (2006) (24)
Ge-Rich (70%) SiGe Nanowire MOSFET Fabricated Using Pattern-Dependent Ge-Condensation Technique (2008) (24)
Red light emission from controlled multilayer stack comprising of thin amorphous silicon and silicon nitride layers (2007) (24)
Nanoplasmonic power splitters based on the horizontal nanoplasmonic slot waveguide (2011) (24)
Residual Stress Analysis in Thin Device Wafer Using Piezoresistive Stress Sensor (2011) (24)
Thermo-optical tunable planar ridge microdisk resonator in silicon-on-insulator. (2011) (24)
A Chip‐Scale Oscillation‐Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits (2020) (24)
Reliability characteristics of metal‐oxide‐semiconductor capacitors with chemical vapor deposited Ta2O5 gate dielectrics (1993) (24)
Thin fluorinated gate dielectrics grown by rapid thermal processing in O/sub 2/ with diluted NF/sub 3/ (1992) (23)
Boosting Short-Circuit Current With Rationally Designed Periodic Si Nanopillar Surface Texturing for Solar Cells (2011) (23)
High-performance inductors on plastic substrate (2005) (23)
A tunable polarization diversity silicon photonics filter. (2011) (23)
Roles of electron trapping and interface state generation on gate-induced drain leakage current in p-MOSFETs (1991) (23)
Study on the synthesis of high quality single crystalline Si1−xGex nanowire and its transport properties (2007) (23)
Ultra Thin (<20@ CVD Si3N4 Gate Dielectric for Deep-Sub-Micron CMOS Devices (1998) (23)
Analysis of charge trapping and breakdown mechanism in high-k dielectrics with metal gate electrode using carrier separation (2003) (23)
Photoinduced luminescence enhancement from anodically oxidized porous Si (1993) (23)
SiGeO layer formation mechanism at the SiGe/oxide interfaces during Ge condensation (2007) (23)
The electrical properties of HfO/sub 2/ dielectric on germanium and the substrate doping effect (2006) (23)
Narrow-band band-pass filters on silicon substrates at 30 GHz (2004) (23)
Polycrystalline Si Nanowire SONOS Nonvolatile Memory Cell Fabricated on a Gate-All-Around (GAA) Channel Architecture (2009) (23)
Waveguided Ge/Si Avalanche Photodiode With Separate Vertical SEG-Ge Absorption, Lateral Si Charge, and Multiplication Configuration (2009) (23)
A small OCA on a 1/spl times/0.5-mm/sup 2/ 2.45-GHz RFID Tag-design and integration based on a CMOS-compatible manufacturing technology (2006) (23)
A MEMS tunable metamaterial filter (2010) (23)
Metal‐oxide‐semiconductor characteristics of rapid thermal nitrided thin oxides (1988) (23)
Evidence and understanding of ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminate MIM capacitors outperforming sandwich counterparts (2004) (22)
Study on interfacial properties of InGaAs and GaAs integrated with chemical-vapor-deposited high-k gate dielectrics using x-ray photoelectron spectroscopy (2008) (22)
HfTiAlO dielectric as an alternative high-k gate dielectric for the next generation of complementary metal-oxide-semiconductor devices (2007) (22)
Complementary Metal-Oxide-Semiconductor Compatible Al-Catalyzed Silicon Nanowires Growth and the Effects of Surface Oxidation of Al Seeding Layer (2007) (22)
Electrical characterization of Ti‐silicided shallow junctions formed by ion‐beam mixing and rapid thermal annealing (1986) (22)
Laminated metal gate electrode with tunable work function for advanced CMOS (2004) (22)
CMOS-compatible all-Si metasurface polarizing bandpass filters on 12-inch wafers. (2019) (22)
Reliability projection and polarity dependence of TDDB for ultra thin CVD HfO/sub 2/ gate dielectrics (2002) (22)
Surface nanostructure optimization for solar energy harvesting in Si thin film based solar cells (2009) (22)
Experimental Demonstration of Horizontal Nanoplasmonic Slot Waveguide-Ring Resonators With Submicrometer Radius (2011) (21)
Characterization of Piezoresistive-Si-Nanowire-Based Pressure Sensors by Dynamic Cycling Test With Extralarge Compressive Strain (2012) (21)
Dark-Current Suppression in Metal–Germanium–Metal Photodetectors Through Dopant-Segregation in NiGe—Schottky Barrier (2008) (21)
3D GOI CMOSFETs with novel IrO/sub 2/(Hf) dual gates and high-k dielectric on 1P6M-0.18 /spl mu/m-CMOS (2004) (21)
High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric (2004) (21)
Radiation hardness of MOSFETs with N/sub 2/O-nitrided gate oxides (1993) (21)
Rectangular coils optimization for wireless power transmission (2012) (21)
High-field-induced leakage in ultrathin N/sub 2/O oxides (1993) (21)
P-channel MOSFET's with ultrathin N/sub 2/O gate oxides (1992) (21)
Suppression of stress‐induced leakage current in ultrathin N2O oxides (1992) (21)
Ultra thin high quality stack nitride/oxide gate dielectrics prepared by in-situ rapid thermal N 2 O oxidation of NH 3 -nitrided Si (1999) (20)
Thermally stable fully silicided Hf-silicide metal-gate electrode (2004) (20)
Thermally robust phosphorous nitride interface passivation for InGaAs self-aligned gate-first n-MOSFET integrated with high-k dielectric (2009) (20)
Relaxed GexSi1−x films grown by rapid thermal processing chemical vapor deposition (1990) (20)
Resonance Switchable Metamaterials Using MEMS Fabrications (2013) (20)
Real-time transition dynamics and stability of chip-scale dispersion-managed frequency microcombs (2020) (20)
Fundamental characteristics and high-speed applications of carrier-depletion silicon Mach-Zehnder modulators (2014) (20)
Engineering of voltage nonlinearity in high-k MIM capacitor for analog/mixed-signal ICs (2004) (20)
Omega-Gate p-MOSFET With Nanowirelike SiGe/Si Core/Shell Channel (2009) (20)
Ultra thin (<3 nm) high quality nitride/oxide stack gate dielectrics fabricated by in-situ rapid thermal processing (1997) (20)
The photoluminescence spectra of porous silicon boiled in water (1992) (19)
Low-cost and high-gain silicide Schottky-barrier collector phototransistor integrated on Si waveguide for infrared detection (2008) (19)
Low-Frequency Noise in Oxide-Based $(\hbox{TiN}/ \hbox{HfO}_{x}/\hbox{Pt})$ Resistive Random Access Memory Cells (2012) (19)
Extended defect evolution in boron‐implanted Si during rapid thermal annealing and its effects on the anomalous boron diffusion (1990) (19)
Annealing ultra thin Ta2O5 films deposited on bare and nitrogen passivated Si(100) (1999) (19)
Excellent immunity of GIDL to hot-electron stress in reoxidized nitrided gate oxide MOSFET's (1992) (19)
Effects of growth temperature on TDDB characteristics of N/sub 2/O-grown oxides (1992) (19)
Effect of the inversion layer on the electrical characterization of Pt germanide/n-Ge(001) Schottky contacts (2006) (19)
Silicon photonics technologies for monolithic electronic-photonic integrated circuit (EPIC) applications: Current progress and future outlook (2009) (19)
Ultrathin HfO 2 "EOT 0.75 nm… Gate Stack with TaN/HfN Electrodes Fabricated Using a High-Temperature Process (2005) (19)
Effective Modulation of Quadratic Voltage Coefficient of Capacitance in MIM Capacitors Using $\hbox{Sm}_{2}\hbox{O}_{3}/\hbox{SiO}_{2}$ Dielectric Stack (2009) (19)
Effects of post-deposition annealing on the electrical properties and reliability of ultrathin chemical vapor deposited Ta/sub 2/O/sub 5/ films (1994) (19)
Thickness optimization of the TiN metal gate with polysilicon-capping layer on Hf-based high-k dielectric (2006) (19)
Scaling computation with silicon photonics (2014) (19)
Compact Low Loss Mid-Infrared Wavelength-Flattened Directional Coupler (WFDC) for Arbitrary Power Splitting Ratio Enabled by Rib Waveguide Dispersion Engineering (2018) (19)
Highly Compact (4F2) and Well Behaved Nano-Pillar Transistor Controlled Resistive Switching Cell for Neuromorphic System Application (2014) (19)
A physical model for boron penetration through an oxynitride gate dielectric prepared by rapid thermal processing in N2O (1991) (19)
Physical model for frequency-dependent dynamic charge trapping in metal-oxide-semiconductor field effect transistors with HfO2 gate dielectric (2005) (18)
Radiation hardened metal-oxide-semiconductor devices with gate dielectrics grown by rapid thermal processing in O2 with diluted NF3 (1991) (18)
MOS devices with high quality ultra thin CVD ZrO/sub 2/ gate dielectrics and self-aligned TaN and TaN/poly-Si gate electrodes (2001) (18)
Charge trapping properties in thin oxynitride gate dielectrics prepared by rapid thermal processing (1990) (18)
Thermally robust high quality HfN/HfO/sub 2/ gate stack for advanced CMOS devices (2003) (18)
Competitive adsorption and two-site occupation effects in metal-organic chemical vapor deposition of ZnO (2007) (18)
Ge diffusion and solid phase epitaxy growth to form Si1 − xGex/Si and Ge on insulator structure (2006) (18)
Experimental Studies of Reliability Issues in Tunneling Field-Effect Transistors (2010) (18)
Rapid thermal annealing characteristics of As+‐ and BF+2 ‐implanted Si (1984) (17)
Highly reliable SiO/sub 2//Si/sub 3/N/sub 4/ stacked dielectric on rapid-thermal-nitrided rugged polysilicon for high-density DRAM's (1992) (17)
Effects of vacuum and inert gas annealing of ultrathin tantalum pentoxide films on Si(100) (1999) (17)
High-performance microwave coplanar bandpass and bandstop filters on Si substrates (2003) (17)
SiGe amorphization during Ge condensation in silicon germanium on insulator (2006) (17)
Time-dependent dielectric breakdown in poly-Si CVD HfO/sub 2/ gate stack (2002) (17)
Work function tuning of metal nitride electrodes for advanced CMOS devices (2006) (17)
Roles of oxide trapped charge and generated interface states on GIDL under hot-carrier stressing (1990) (17)
Current Conduction Model for Oxide-Based Resistive Random Access Memory Verified by Low-Frequency Noise Analysis (2013) (17)
Effects of post‐nitridation anneals on radiation hardness in rapid thermal nitrided gate oxides (1989) (17)
Trapping/De-Trapping Gate Bias Dependence of Hf-Silicate Dielectrics with Poly and TiN Gate Electrode (2004) (17)
Deterministic integrated tuning of multicavity resonances and phase for slow-light in coupled photonic crystal cavities (2010) (17)
Self-aligned ultra thin HfO/sub 2/ CMOS transistors with high quality CVD TaN gate electrode (2002) (17)
Effect of cladding layer and subsequent heat treatment on hydrogenated amorphous silicon waveguides. (2012) (17)
Modeling of gate-all-around charge trapping SONOS memory cells (2010) (17)
High permittivity quaternary metal (HfTaTiOx) oxide layer as an alternative high-κ gate dielectric (2006) (16)
RF MEMS switch integrated on printed circuit board with metallic membrane first sequence and transferring (2006) (16)
Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice (2012) (16)
Nickel Salicided Source/Drain Extensions for Performance Improvement in Ultrascaled (Sub 10 nm) Si-Nanowire Transistors (2009) (16)
Impact of Local Strain From Selective Epitaxial Germanium With Thin Si/SiGe Buffer on High-Performance p-i-n Photodetectors With a Low Thermal Budget (2007) (16)
A monolithic 9 degree of freedom (DOF) capacitive inertial MEMS platform (2014) (16)
Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform. (2019) (16)
An integratable dual metal gate CMOS process using an ultrathin aluminum nitride buffer layer (2003) (16)
Pulsed laser annealing of single-crystal and ion-implanted semiconductors (1982) (16)
Near-infrared Hong-Ou-Mandel interference on a silicon quantum photonic chip. (2012) (16)
High-quality MOSFETs with ultrathin LPCVD gate SiO/sub 2/ (1992) (16)
Trap Layer Engineered Gate-All-Around Vertically Stacked Twin Si -Nanowire Nonvolatile Memory (2007) (16)
Temperature Dependence of Carrier Transport of a Silicon Nanowire Schottky-Barrier Field-Effect Transistor (2008) (16)
Full Silicidation of Silicon Gate Electrodes Using Nickel-Terbium Alloy for MOSFET Applications (2006) (16)
Effects of Annealing and Ar Ion Bombardment on the Removal of HfO2 Gate Dielectric (2004) (16)
A Single-Chip Integrated Spectrometer via Tunable Microring Resonator Array (2019) (15)
Molybdenum metal gate MOS technology for post-SiO/sub 2/ gate dielectrics (2000) (15)
Operating TSV in Stable Accumulation Capacitance Region by Utilizing $\hbox{Al}_{2}\hbox{O}_{3}$-Induced Negative Fixed Charge (2012) (15)
Development of silicon electrode enhanced by carbon nanotube and gold nanoparticle composites on silicon neural probe fabricated with complementary metal-oxide-semiconductor process (2014) (15)
Work function tuning of fully silicided NiSi metal gates using a TiN capping layer (2004) (15)
Numerical and experimental study on silicon microresonators based on phononic crystal slabs with reduced central-hole radii (2013) (15)
MOS characteristics of fluorinated gate dielectrics grown by rapid thermal processing in O/sub 2/ with diluted NF/sub 3/ (1990) (15)
200 mm wafer-scale epitaxial transfer of single crystal Si on glass by anodic bonding of silicon-on-insulator wafers (2005) (15)
Characterization of Silicon Nanowire Embedded in a MEMS Diaphragm Structure Within Large Compressive Strain Range (2011) (15)
Effect of Furnace Preanneal and Rapid Thermal Annealing on Arsenic‐Implanted Silicon (1985) (15)
Theoretical investigation of ultracompact and athermal Si electro-optic modulator based on Cu-TiO2-Si hybrid plasmonic donut resonator. (2013) (15)
A Silicon Platform With MEMS Active Alignment Function and Its Potential Application in Si-Photonics Packaging (2010) (15)
Composite TaSi2/n+poly-Si formation by rapid thermal annealing (1984) (15)
Chip-Based Measurement-Device-Independent Quantum Key Distribution Using Integrated Silicon Photonic Systems (2020) (15)
MIM Capacitors Using Atomic-Layer-Deposited High- HfO Al O Dielectrics (2003) (15)
Two-dimensional pn-junction delineation and individual dopant identification using scanning tunneling microscopy/spectroscopy (1998) (15)
Rapid thermal annealing of co-sputtered tantalum silicide films (1984) (14)
HfO/sub 2/ and lanthanide-doped HfO/sub 2/ MIM capacitors for RF/mixed IC applications (2003) (14)
Microcantilever sensors with embedded piezoresistive transistor read-out: Design and characterization (2011) (14)
Nanometric Precision Distance Metrology via Hybrid Spectrally Resolved and Homodyne Interferometry in a Single Soliton Frequency Microcomb. (2021) (14)
Successful transferring of active transistors, rf-passive components and high density interconnect from bulk si to organic substrates (2005) (14)
Suppression of lateral Ti silicide growth by ion beam mixing and rapid thermal annealing (1988) (14)
Ultra-high order ring resonator system with sharp transmission peaks. (2010) (14)
Optical Coupling Methods for Cost-Effective Polymer Optical Fiber Communication (2009) (14)
Systems-oriented survey of noncontact temperature measurement techniques for rapid thermal processing (1991) (14)
Physical and electrical properties of lanthanide-incorporated tantalum nitride for n-channel metal-oxide-semiconductor field-effect transistors (2005) (14)
Work Function Tunability of Refractory Metal Nitrides by Lanthanum or Aluminum Doping for Advanced CMOS Devices (2007) (14)
High quality ultrathin oxynitride gate dielectric prepared by rapid thermal processing in N2O (1990) (14)
Toward Athermal Plasmonic Ring Resonators Based on Cu- ${\rm TiO}_{2}$-Si Hybrid Plasmonic Waveguide (2013) (14)
Influence of RTA and LTA on the Optical Propagation Loss in Polycrystalline Silicon Wire Waveguides (2010) (14)
Hole tunneling current through oxynitride/oxide stack and the stack optimization for p-MOSFETs (2002) (14)
Improved electrical and reliability Characteristics of HfN--HfO/sub 2/-gated nMOSFET with 0.95-nm EOT fabricated using a gate-first Process (2005) (14)
Tunable piezoresistance and noise in gate-all-around nanowire field-effect-transistor (2012) (14)
Waveguide-integrated Ge/Si avalanche photodetector with 105GHz gain-bandwidth product (2010) (13)
Study of the growth temperature dependence of performance and reliability of thin MOS gate oxides (1992) (13)
Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric (2004) (13)
High quality CVD TaN gate electrode for sub-100 nm MOS devices (2001) (13)
Stabilized chip-scale Kerr frequency comb via a high-Q reference photonic microresonator. (2016) (13)
Analytical modeling of the subthreshold current in short-channel MOSFET's (1986) (13)
Novel Monolithic Integration of RF-MEMS Switch with CMOS-IC on Organic Substrate for Compact RF System (2006) (13)
TDDB and polarity-dependent reliability of high-quality, ultrathin CVD HfO/sub 2/ gate stack with TaN gate electrode (2004) (13)
CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack (2009) (13)
Nucleic Acid Extraction, Amplification, and Detection on Si-Based Microfluidic Platforms (2006) (13)
GaAs p- and n-MOS devices integrated with novel passivation (plasma nitridation and AlN-surface passivation) techniques and ALD-HfO2/TaN gate stack (2006) (13)
Photoluminescence study of anodized porous Si after HF vapor phase etching (1993) (13)
HIGH-QUALITY OXYNITRIDE GATE DIELECTRICS PREPARED BY REOXIDATION OF NH3-NITRIDED SIO2 IN N2O AMBIENT (1995) (13)
Thin stacked oxide/nitride/oxide dielectrics formation by in situ multiple reactive rapid thermal processing (1989) (13)
A silicon-nanowire memory driven by optical gradient force induced bistability (2015) (13)
CWDM planar concave grating multiplexer/demultiplexer and application in ROADM (2011) (13)
Integrated in-band optical signal-to-noise ratio monitor implemented on SOI platform. (2012) (13)
Time-dependent dielectric breakdown of chemical-vapour-deposited SiO/sub 2/ gate dielectrics (1989) (13)
Influence of process parameters on the time‐dependent dielectric breakdown of rapid thermally nitrided and reoxidized nitrided thin SiO2 (1992) (13)
Formation of high quality ultrathin oxide/nitride (ON) stacked capacitors by in situ multiple rapid thermal processing [DRAM cells] (1995) (13)
Piezoresistive Sensing Performance of Junctionless Nanowire FET (2012) (13)
Growth kinetics of oxides during furnace oxidation of Si in N2O ambient (1995) (13)
Characterization and Modeling of Subfemtofarad Nanowire Capacitance Using the CBCM Technique (2009) (13)
Evolution of silicon surface morphology during H2 annealing in a rapid thermal chemical vapor deposition system (1996) (12)
High-Performance Poly-Si Vertical Nanowire Thin-Film Transistor and the Inverter Demonstration (2011) (12)
Coherent Four-Wave Mixing on Hybrid Graphene-Silicon Photonic Crystals (2014) (12)
Effects of rapid thermal processing on thermal oxides of silicon (1986) (12)
Gate-bias-controlled sensitivity and SNR enhancement in a nanowire FET pressure sensor (2011) (12)
The Viability of GeH4‐Based In Situ Clean for Low Temperature Silicon Epitaxial Growth (1996) (12)
A Miniaturization Strategy for Harvesting Vibration Energy Utilizing Helmholtz Resonance and Vortex Shedding Effect (2014) (12)
High density bump-less Cu-Cu bonding with enhanced quality achieved by pre-bonding temporary passivation for 3D wafer stacking (2011) (12)
Valence band structure of ultrathin silicon and germanium channels in metal-oxide-semiconductor field-effect transistors (2005) (12)
Scalability and Reliability Characteristics of CVD HfO2 Gate Dielectrics with HfN Electrodes for Advanced CMOS Applications (2007) (12)
Cross-correlation frequency-resolved optical gating and dynamics of temporal solitons in silicon nanowire waveguides. (2013) (12)
Specific structural factors influencing on reliability of CVD-HfO/sub 2/ (2002) (12)
Anomalous capacitance‐voltage characteristics of BF2‐implanted and rapid thermal annealed p+‐polycrystalline silicon gate metal‐oxide‐semiconductor structures (1990) (12)
Enhancement mode GaAs metal-oxide-semiconductor field-effect-transistor integrated with thin AlN surface passivation layer and silicon/phosphorus coimplanted source/drain (2009) (12)
CMOS integration issues with high-k gate stack (2004) (12)
Stable, self‐aligned TiNxOy/TiSi2 contact formation for submicron device applications (1987) (12)
Sensorized guidewires with MEMS tri-axial force sensor for minimally invasive surgical applications (2010) (12)
Low-voltage silicon Mach-Zehnder modulator operating at high temperatures without thermo-electric cooling (2016) (12)
Dependence of Chemical Composition Ratio on Electrical Properties of HfO2–Al2O3 Gate Dielectric (2003) (11)
Substituted aluminum metal gate on high-k dielectric for low work-function and Fermi-level pinning free (2004) (11)
Fabrication of thick SiGe on insulator (Si0.2Ge0.8OI) by condensation of SiGe∕Si superlattice grown on silicon on insulator (2007) (11)
A Two-Step Oxidation Mediated Condensation Process for Ultrathin High Ge Content SiGe Epitaxial Films on Insulator (2005) (11)
Growth of germanium quantum dots on different dielectric substrates by chemical-vapor deposition (2001) (11)
Comparison of neutral electron trap generation by hot-carrier stress in n-MOSFET's with oxide and oxynitride gate dielectrics (1992) (11)
Thermally robust TaTb/sub x/N metal gate electrode for n-MOSFETs applications (2005) (11)
Thickness uniformity and electrical properties of ultrathin gate oxides grown in N2O ambient by rapid thermal processing (1992) (11)
Molybdenum gate HfO/sub 2/ CMOS FinFET technology (2004) (11)
Shallow, silicided p+/n junction formation and dopant diffusion in SiO2/TiSi2/Si structure (1989) (11)
An on-chip opto-mechanical accelerometer (2013) (11)
Junctionless Vertical-Si-Nanowire-Channel-Based SONOS Memory With 2-Bit Storage per Cell (2011) (11)
200-mm wafer-scale transfer of 0.18-/spl mu/m dual-damascene Cu/SiO/sub 2/ interconnection system to plastic substrates (2005) (11)
Microfluidic design for bio-sample delivery to silicon nanowire biosensor - a simulation study (2006) (11)
Coherent satellites in multispectral regenerative frequency microcombs (2019) (11)
Application of dopant segregation to metal-germanium-metal photodetectors and its dark current suppression mechanism (2008) (11)
Germanium MOS: an evaluation from carrier quantization and tunneling current (2003) (11)
Long retention and low voltage operation using IrO/sub 2/HfAlO/HfSiO/HfalO gate stack for memory application (2005) (11)
High density RF MIM capacitors using high-/spl kappa/ AlTaO/sub x/ dielectrics (2003) (11)
Effects of ion-beam mixing on the performance and reliability of devices with self-aligned silicide structure (1988) (11)
Low-loss high-speed silicon Mach-Zehnder modulator for optical-fiber telecommunications (2013) (10)
High-Q on-chip inductors using extremely thick silicon dioxide and copper-damascene technology (2008) (10)
Selective epitaxial growth by rapid thermal processing (1990) (10)
Improved hot-carrier immunity in CMOS analog device with N/sub 2/O-nitrided gate oxides (1992) (10)
The Application of Ion Beam Mixing, Doped Silicide, and Rapid Thermal Processing to Self‐Aligned Silicide Technology (1990) (10)
A stabilized 18 GHz chip-scale optical frequency comb at 2.8x10-16 relative inaccuracy (2015) (10)
10Gbps monolithic silicon FTTH transceiver without laser diode for a new PON configuration (2010) (10)
Coupled-ring reflector in an external-cavity tunable laser (2015) (10)
A high-C capacitor (20.4 fF/ mu m/sup 2/) with ultrathin CVD-Ta/sub 2/O/sub 5/ films deposited on rugged poly-Si for high density DRAMs (1992) (10)
Submicron-Radius Plasmonic Racetrack Resonators in Metal-Dielectric-Si Hybrid Plasmonic Waveguides (2014) (10)
Yb-doped Ni FUSI for the n-MOSFETs gate electrode application (2006) (10)
Reduced carrier backscattering in heterojunction SiGe nanowire channels (2008) (10)
A novel program-erasable high-k AlN capacitor with memory function (2004) (10)
Demonstration of a-Si metalenses on a 12-inch glass wafer by CMOS-compatible technology (2019) (10)
Rapid thermal oxidation of thin nitride/oxide stacked layer (1989) (10)
Lanthanide-incorporated metal nitrides with tunable work function and good thermal stability for NMOS devices (2005) (10)
Application of piezoresistive stress sensor in wafer bumping and drop impact test of embedded ultra thin device (2011) (10)
Application of Piezoresistive Stress Sensor in Wafer Bumping and Drop Impact Test of Embedded Ultrathin Device (2012) (10)
Boosting short circuit current with rationally designed periodic Si nanopillar surface texturing for thin film solar cell (2010) (10)
Electrical properties of MOSFET's with N/sub 2/O-nitrided LPCVD SiO/sub 2/ gate dielectrics (1992) (10)
Comparison of dielectric wear-out between oxides grown in O2 and N2O (1991) (10)
Development of Silicon Probe With Acute Study on In Vivo Neural Recording and Implantation Behavior Monitored by Integrated Si-Nanowire Strain Sensors (2015) (10)
A method of fabricating metal-insulator-metal (MIM) capacitor in Cu/low-k backend interconnection process for RF application (2006) (10)
Molecular-absorption-induced thermal bistability in PECVD silicon nitride microring resonators. (2014) (10)
Time Dependence of Phosphorus Diffusion and Dose Loss during Postimplantation Annealing at Low Temperatures (2002) (10)
Gate-all-around MOSFETs: lateral ultra-narrow (/spl les/10 nm) fin as channel body (2005) (10)
High performance ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminate MIM capacitors for RF and mixed signal IC applications (2003) (10)
An absorptive filter using microfluidic switchable metamaterials (2011) (10)
Modification of Molybdenum Gate Electrode Work Function via (La-, Al-Induced) Dipole Effect at High-$k/\hbox{SiO}_{2}$ Interface (2008) (10)
Physical model for the diffusion of ion implanted boron and BF/sub 2/ during rapid thermal annealing (1992) (9)
Evaluation of Stresses in Thin Device Wafer using Piezoresistive Stress Sensor (2008) (9)
A Short-Channel SOI RF Power LDMOS Technology With$hboxTiSi_2$Salicide on Dual Sidewalls With Cutoff Frequency$f_T sim hbox19.3 hboxGHz$ (2006) (9)
Boron segregation in As-implanted Si caused by electric field and transient enhanced diffusion (1998) (9)
Nano-silicon-photonic Fourier Transform Infrared (FTIR) spectrometer-on-a-chip (2015) (9)
Electrical characteristics and photocurrent spectral response of Si nanowires p-i-n junctions (2010) (9)
Direct generation of 74-fs mode-locking from on-chip normal dispersion frequency combs (2014) (9)
Self-Consistent SchrÖdinger–Poisson Simulations on Capacitance–Voltage Characteristics of Silicon Nanowire Gate-All-Around MOS Devices With Experimental Comparisons (2009) (9)
Transconductance degradation and interface state generation in metal‐oxide‐semiconductor field‐effect transistors with oxynitride gate dielectrics under hot‐carrier stress (1990) (9)
AC hot-carrier effects in MOSFETs with furnace N/sub 2/O-nitrided gate oxides (1992) (9)
Advanced MOSFETs using HfTaON/SiO/sub 2/ gate dielectric and TaN metal gate with excellent performances for low standby power application (2005) (9)
Improving gate-oxide reliability by TiN capping layer on NiSi FUSI metal gate (2005) (9)
Silicon photonics technologies for monolithic electronic-photonic integrated circuit applications (2010) (9)
Study of Rapid Thermal Precleaning for Si Epitaxial Growth (1992) (9)
On the mechanism of ion-implanted As diffusion in relaxed SiGe (2004) (9)
High-K gate dielectrics for sub-100 nm CMOS technology (2001) (9)
Charge Trapping and TDDB Characteristics of Ultrathin MOCVD $\hbox{HfO}_{2}$ Gate Dielectric on Nitrided Germanium (2007) (9)
Modeling of stress-retarded orientation-dependent oxidation: shape engineering of silicon nanowire channels (2009) (9)
Work Function Tuning and Material Characteristics of Lanthanide-Incorporated Metal Nitride Gate Electrodes for NMOS Device Applications (2006) (9)
Dual-Color Electroluminescence ($\lambda \approx \hbox{450}\ \hbox{nm}$ and 650–700 nm) From a Silicon-Based Light Source (2008) (9)
(Invited) Silicon Photonics Technologies for Monolithic Electronic-Photonic Integrated Circuit (2010) (9)
Investigation of work function adjustments by electric dipole formation at the gate/oxide interface in preimplanted NiSi fully silicided metal gates (2006) (8)
Silicon Nanowire Array Bio-Sensor using Top-Down CMOS Technology (2007) (8)
Bandgap engineering in Alq3- and NPB-based organic light-emitting diodes for efficient green, blue and white emission (2007) (8)
Demonstration of memory string with stacked junction-less SONOS realized on vertical silicon nanowire (2011) (8)
Study of Ta-barrier and pore sealing dielectric layer interaction for enhanced barrier performance of Cu/ultralow /spl kappa/(/spl kappa/<2.2) interconnects (2005) (8)
Integrated high-/spl kappa/ (/spl kappa/ /spl sim/19) MIM capacitor with Cu/low-/spl kappa/ interconnects for RF application (2005) (8)
Selective deposition of in situ doped polycrystalline silicon by rapid thermal processing chemical vapor deposition (1989) (8)
Fluorinated thin SiO2 grown by rapid thermal processing (1990) (8)
Shallow junction formation by dopant diffusion from in situ doped polycrystalline silicon chemically vapor deposited in a rapid thermal processor (1990) (8)
Gate Tunneling in Nanowire MOSFETs (2011) (8)
Multiple gate oxide technology using nitrogen implantation and high-pressure O2 oxidation (2003) (8)
Investigation on the optimized design of alternate-hole-defect for 2D phononic crystal based silicon microresonators (2012) (8)
Physical model for defect mediated boron diffusion during rapid thermal annealing of ion implanted BF2 (1992) (8)
Formation of high quality storage capacitor dielectrics by in-situ rapid thermal reoxidation of Si/sub 3/N/sub 4/ films in N/sub 2/O ambient (1994) (8)
Development of RF MEMS switch on flexible organic substrate with wafer transfer technology (WTT) (2006) (8)
GexSi1-x optical directional coupler (1991) (8)
MOS Characteristics of NH ,-Nitrided N-0-Grown Oxides (1993) (8)
Hot carrier reliability of HfSiON NMOSFETs with poly and TiN metal gate (2004) (8)
Reliability of Ultra Thin CVD HfOt Gate Dielectrics with Dual Poly-Si Gate Electrodes (2001) (8)
Reduction of RIE-damage by N/sub 2/O-anneal of thermal gate oxide (1998) (8)
Fully CMOS compatible subwavelength plasmonic slot waveguides for Si electronic-photonic integrated circuits (2011) (8)
Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers (2007) (8)
Optical bistability and free carrier dynamics in graphene–silicon photonic crystal cavities (2014) (8)
Fast Vth instability in HfO2 gate dielectric MOSFETs and Its impact on digital circuits (2006) (8)
Improved device performance and reliability in high /spl kappa/ HfTaTiO gate dielectric with TaN gate electrode (2005) (8)
Widely Tunable Work Function TaN/Ru Stacking Layer on HfLaO Gate Dielectric (2008) (8)
New Insights in Hf Based High-k Gate Deielectrics in MOSFETs (2006) (8)
A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics (2017) (7)
Nano-opto-mechanical linear actuator utilizing gradient optical force (2011) (7)
Integration of High-$\kappa$ Dielectrics and Metal Gate on Gate-All-Around Si-Nanowire-Based Architecture for High-Speed Nonvolatile Charge-Trapping Memory (2009) (7)
Low-loss silicon partial-rib waveguide polarization rotator (2013) (7)
An ultra-compact polarization rotator based on surface plasmon polariton effect (2011) (7)
Fabrication and characterization of bump-less Cu-Cu bonding by wafer-on-wafer stacking for 3D IC (2010) (7)
Preface: Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment (2008) (7)
Demonstration of enhanced spontaneous Raman scattering in slow-light silicon photonic crystal waveguides (2008) (7)
Silicon Nitride-Based Compact Double-Ring Resonator Comb Filter With Flat-Top Response (2008) (7)
Radiation effects in ultrathin nitrided oxides prepared by rapid thermal processing (1989) (7)
NEMS variable optical attenuator (VOA) driven by optical force (2015) (7)
Design and Manufacturing of Small Area On-Chip-Antenna (OCA) for RFID Tags (2006) (7)
The impact of uniform strain applied via bonding onto plastic substrate on MOSFET performance (2006) (7)
Normal-incidence grating couplers in Ge-Si. (1994) (7)
In situ doping of GedxSi1−x with arsenic by rapid thermal processing chemical vapor deposition (1992) (7)
Demonstration of a hitless bypass switch using nanomechanical perturbation for high-bitrate transparent networks. (2010) (7)
Yttrium- and Terbium-Based Interlayer on $ \hbox{SiO}_{2}$ and $\hbox{HfO}_{2}$ Gate Dielectrics for Work Function Modulation of Nickel Fully Silicided Gate in nMOSFET (2007) (7)
Modeling of suppressed dopant activation in boron‐ and BF2‐implanted silicon (1994) (7)
Flicker Noise and Its Degradation Characteristics Under Electrical Stress in MOSFETs With Thin Strained-Si/SiGe Dual-Quantum Well (2007) (7)
Adhesion Studies of Ta ∕ Low-k (Black Diamond) Interface using Thermocompressive Wafer Bonding and Four-Point Bend (2006) (7)
Reflow of Phosphosilicate Glass by Rapid Thermal Annealing (1986) (7)
Synchronization in air-slot photonic crystal optomechanical oscillators (2017) (7)
Dependence of radiation induced damage on gate oxide thickness in mos capacitors with ultrathin gate oxides (1992) (7)
Metal-Gate Work Function Modulation Using Hafnium Alloys Obtained by the Interdiffusion of Thin Metallic Layers (2007) (7)
Solid phase epitaxy during Ge condensation from amorphous SiGe layer on silicon-on-insulator substrate (2006) (7)
Bright square pulse generation by pump modulation in a normal GVD microresonator (2017) (7)
Phase formation and work function tuning in fully silicided Co-Ni metal gates with variable Co:Ni ratios (2006) (7)
Fast $V_{\rm th}$ Instability in $\hbox{HfO}_{2}$ Gate Dielectric MOSFETs and Its Impact on Digital Circuits (2006) (7)
Silicon-based phase shifters for high figure of merit in optical modulation (2016) (7)
High quality Ta/sub 2/O/sub 5/ gate dielectrics with T/sub ox.eq/<10 /spl Aring/ (1999) (7)
Substrate Effects on Resonant Frequency of Silicon-Based RF On-Chip MIM Capacitor (2006) (7)
Design and fabrication of a line-defect bend sandwiched with air trenches in a photonic crystal platform (2008) (7)
Interfacial silicon oxide formation during oxygen annealing of Ta2O5 thin films on Si: Oxygen isotope labeling (2000) (7)
High Germanium Content Strained SGOI by Oxidation of Amorphous SiGe Film on SOI Substrates (2005) (7)
Low loss (approximately 6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler. (2008) (7)
Improvement in performance and degradation characteristics of MOSFETs with thin gate oxides grown at high temperature (1991) (7)
Thickness Dependence of Charge‐Trapping Properties in Ultrathin Thermal Oxides Prepared by Rapid Thermal Oxidation (1993) (7)
MICROFLUIDIC DROPLET-BASED LIQUID-LIQUID EXTRACTION FOR FLUORESCENCE-INDICATED MASS TRANSFER (2010) (7)
Improvement of Electrical Properties of MOCVD HfO2 by Multistep Deposition (2003) (7)
Dual Poly-Si Gate Metal Oxide Semiconductor Field Effect Transistors Fabricated with High-Quality Chemical Vapor Deposition HfO2 Gate Dielectrics (2003) (7)
Modeling Study of InSb Thin Film For Advanced III-V MOSFET Applications (2006) (7)
11-Gbps 80-km transmission performance of zero-chirp silicon Mach-Zehnder modulator (2014) (6)
A comparison of radiation and hot-electron-induced damages in MOS capacitors with rapid thermally nitrided thin-gate oxides (1991) (6)
An Efficient On-Chip Single-Photon SWAP Gate for Entanglement Manipulation (2020) (6)
Pseudo-potential band structure calculation of InSb ultra-thin films and its application to assess the n-metal-oxide-semiconductor transistor performance (2011) (6)
Mechanism of rapid thermal nitridation of thin oxides (1990) (6)
Work-Function Tuning of TaN by High-Temperature Metal Intermixing Technique for Gate-First CMOS Process (2006) (6)
CMOS compatible Gate-All-Around Vertical silicon-nanowire MOSFETs (2008) (6)
A manufacturable multiple gate oxynitride thickness technology for system on a chip (1999) (6)
Charge-Based Capacitance Measurement Technique for Nanoscale Devices: Accuracy Assessment Based on TCAD Simulations (2009) (6)
A tunable and program-erasable capacitor on Si with excellent tuning memory (2004) (6)
Kinetic diffusion model of ion‐implanted boron during rapid thermal annealing (1992) (6)
Development and evaluation of a two-level functional structure for the thin film encapsulation (2013) (6)
Design and analysis of 3D stacked optoelectronics on optical printed circuit boards (2008) (6)
Characteristics of NEMS Piezoresistive Silicon Nanowires Pressure Sensors With various Diaphragm Layers (2011) (6)
Perspective of flash memory realized on vertical Si nanowires (2012) (6)
Spatial variation of TSV capacitance and method of stabilization with Al2O3-induced negative fixed charge at the silicon-liner interface (2011) (6)
Study of inversion layer mobility in metal‐oxide‐semiconductor field‐effect transistors with reoxidized nitrided oxides (1990) (6)
Fine-pitch bump-less Cu-Cu bonding for wafer-on-wafer stacking and its quality enhancement (2010) (6)
Electrical transport of bottom-up grown single-crystal Si1−xGex nanowire (2008) (6)
Real-time transition dynamics and stability of chip-scale dispersion-managed frequency microcombs (2020) (6)
Selective epitaxial growth with oxide‐polycrystalline silicon‐oxide masks by rapid thermal processing chemical vapor deposition (1990) (6)
Microwave coplanar filters on Si substrates (2003) (6)
Dynamical chaos in chip-scale optomechanical oscillators (2016) (6)
Effect of Ni thickness dependence on NiSi FUSI metal gate characteristics (2004) (6)
Broadband variable chromatic dispersion in photonic-band electro-optic waveguide (2006) (6)
Suppressed Process-Induced Damage in N2O-annealed SiO2 Gate Dielectrics (1995) (6)
Low-Stress Bond Pad Design for Low-Temperature Solder Interconnections on Through-Silicon Vias (TSVs) (2010) (5)
Novel Rare-Earth Dielectric Interlayers for Wide NMOS Work-Function Tunability in Ni-FUSI Gates (2008) (5)
Modulation of the Ni FUSI workfunction by Yb doping: from midgap to n-type band-edge (2005) (5)
Real-time dynamics and cross-correlation gating spectroscopy of free-carrier Drude slow-light solitons (2017) (5)
Effects of rapid thermal oxidation on electrical characteristics of chemical-vapor-deposited SiO2 gate dielectrics (1989) (5)
The observation of super-long range surface plasmon polaritons modes and its application as sensory devices. (2010) (5)
NEMS actuator driven by electrostatic and optical force with nano-scale resolution (2015) (5)
HfOx-Based RRAM Cells with Fully CMOS Compatible Technology (2012) (5)
Frequency microcomb stabilization via dual-microwave control (2021) (5)
Impact of metal gate work function on nano CMOS device performance (2004) (5)
Sub-modeling technique for thermo-mechanical simulation of solder microbumps assembly in 3D chip stacking (2009) (5)
CMOS-Compatible Silicon Nanoplasmonics for On-Chip Integration (2012) (5)
Dynamic metasurface for broadband electromagnetic modulator in reflection (2016) (5)
Structure and Composition of Luminescent Laterally Anodized Porous Si (1991) (5)
Experiments and modeling of boron segregation in As implanted Si during annealing (1997) (5)
Deposition and Annealing of Ultrathin Ta2 O 5 Films on Nitrogen Passivated Si ( 100 ) (1999) (5)
Dependence of hot-carrier immunity on channel length and channel width in MOSFETs with N/sub 2/O-grown gate oxides (1992) (5)
Integration of RF MEMS and CMOS IC on a Printed Circuit Board for a Compact RF System Application Based on Wafer Transfer (2008) (5)
Enhanced Vertical Light Extraction From Ultrathin Amorphous Si–Si$_{3}$ N$_{4}$ Multilayers With Photonic Crystal Patterns (2009) (5)
Frequency dependent dynamic charge trapping in HfO/sub 2/ and threshold voltage instability in MOSFETs (2004) (5)
Ni-Containing Electrodes for Compact Integration of Resistive Random Access Memory With CMOS (2013) (5)
Modeling of nonvolatile gate-all-around charge-trapping SONOS memory cells (2009) (5)
In situ cleaning effect on the electrical properties of Ge MOS devices by Ar gas anneal (2006) (5)
Towards athermal nanoplasmonic resonators based on Cu-Tio2-Si hybrid plasmonic waveguide (2013) (5)
Error-free data transmission through fast broadband all-optical modulation in graphene–silicon optoelectronics (2020) (5)
High-Performance TO Switches on Compact Cu-Dielectric-Si Hybrid Plasmonic WRRs (2014) (5)
Enhanced hot-hole degradation in P/sup +/-poly PMOSFETs with oxynitride gate dielectrics (1999) (5)
High efficiency optical switches with Heater-on-Slab (HoS) structures (2011) (5)
Comparison of the Density and Distribution of Traps Generated by High Voltage Stress in Silicon Oxide and Silicon Oxynitrides (1992) (5)
Fabrication and Characterization of Poly-Si Vertical Nanowire Thin Film Transistor (2011) (5)
Nano-optomechanical static random access memory (SRAM) (2015) (5)
Enhancement of the Flatband Modulation of Ni-Silicided Gates on Hf-Based Dielectrics (2008) (5)
High capacitance density (> 17 fF//spl mu/m/sup 2/) Nb/sub 2/O/sub 5/-based MIM capacitors for future RF IC applications (2005) (5)
Integrated silicon microring resonator devices for point-of-care diagnostic applications (2014) (5)
A dual-strained CMOS structure through simultaneous formation of relaxed and compressive strained-SiGe-on-insulator (2006) (5)
Charge trapping and detrapping phenomena in thin oxide-nitride-oxide stacked films (1988) (5)
Impact of process-induced damage on MOSFET reliability and suppression of damage by the use of NO-based oxynitride gate dielectrics (1995) (5)
Dopant redistribution during Pd2Si formation using rapid thermal annealing (1986) (5)
A nano-optical switch driven by optical force using a laterally coupled double-ring resonator (2012) (5)
Ultra thin high quality stack nitride/oxide gate dielectrics prepared by in-situ rapid thermal N/sub 2/O oxidation of NH/sub 3/-nitrided Si (1999) (5)
Degradation of low frequency noise in SiGe-and SiGeC-surface channel p-type metal-oxide-semiconductor field effect transistor due to consuming the Si cap (2007) (5)
Multifunctional optoelectronic device based on graphene-coupled silicon photonic crystal cavities. (2021) (5)
Silicon Quadrature Phase-Shift-Keying Modulator for 40- and 100-Gb/s Transmission (2014) (5)
Ultra thin (<20 /spl Aring/) CVD Si/sub 3/N/sub 4/ gate dielectric for deep-sub-micron CMOS devices (1998) (5)
DOPANT-ENHANCED LOW-TEMPERATURE EPITAXIAL GROWTH OF IN SITU DOPED SILICON BY RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION (1991) (5)
Tunable flat lens based on microfluidic reconfigurable metasurface (2015) (5)
Observation of four-wave mixing conversion efficiency and bandwidth in silicon photonic crystal waveguides (2010) (5)
Junction-Less Stackable SONOS Memory Realized on Vertical-Si-Nanowire for 3-D Application (2011) (5)
Reliability Characteristics of poly Si-gated High Quality Chemical Vapor Deposition Hafnium Oxide Gate Dielectric (2004) (5)
Thz polarizer using tunable metamaterials (2013) (4)
Silicide Schottky-Barrier Phototransistor Integrated in Silicon Channel Waveguide for In-Line Power Monitoring (2009) (4)
Low-loss all-adiabatic silicon-waveguide polarization-division multiplexer in C and L bands (2014) (4)
Surface chemistry of the N-containing precursor dimethylhydrazine on Cu (1997) (4)
N 2 O Oxidation Kinetics of Ultra Thin Thermally Grown Silicon Nitride: An Angle Resolved X-Ray Photoelectron Spectroscopy Study (1999) (4)
Pt–Germanide Formed by Laser Annealing and Its Application for Schottky Source/Drain Metal–Oxide–Semiconductor Field-Effect Transistor Integrated with TaN/Chemical Vapor Deposition HfO2/Ge Gate Stack (2008) (4)
Fully CMOS compatible 1T1R integration of vertical nanopillar GAA transistor and Oxide based RRAM cell for high density nonvolatile memory application (2013) (4)
Investigation of Dopant Effects in CoSi2 and NiSi Fully Silicided Metal Gates (2005) (4)
A novel high-k gate dielectric HfLaO for next generation CMOS technology (2006) (4)
Design and characterisation of high-speed monolithic silicon modulators for digital coherent communication (2015) (4)
200 mm wafer-scale substrate transfer of 0.13μmCu∕low-k (Black Diamond™) dual-damascene interconnection to glass substrates (2005) (4)
High-ON/OFF-contrast 10-Gb/s silicon Mach-zehnder modulator in high-speed low-loss package (2014) (4)
Sub-femto-farad capacitance-voltage characteristics of single channel gate-all-around nano wire transistors for electrical characterization of carrier transport (2008) (4)
Interface Engineering for High-κ Ge MOSFETs (2007) (4)
Improving work function tuning by preimplanting multiple dopants in Ni fully silicided gate (2006) (4)
NEMS optical cross connect (OXC) driven by opticl force (2015) (4)
A Novel Dual-Metal Gate Integration Process for Sub-1nm EOT HfO2 CMOS Devices (2004) (4)
Study of Thermal Stability of Cvd Ta205/Si Interface (1999) (4)
Silicon Mach-Zehnder modulator using low-loss phase shifter with bottom PN junction formed by restricted-depth doping (2013) (4)
RF, DC, and Reliability Performance of MIM Capacitors Embedded in Organic Substrates by Wafer-Transfer Technology (WTT) for System-on-Package Applications (2007) (4)
Study of stress-induced leakage current in scaled SiO2 (1995) (4)
Localized oxide degradation in ultrathin gate dielectric and its statistical analysis (2003) (4)
Dopant-Segregated Ni-Silicide Schottky-Source/Drain CMOS on Strained-Si/SiGe Multiple Quantum-Well Channel on Bulk-Si (2006) (4)
A low stress bond pad design for low temperature solder interconnections on through silicon vias (TSVs) (2011) (4)
Design and Characterization of Microelectromechanical System Flow Sensors Using Silicon Nanowires (2011) (4)
Electrical characteristics of reoxidized-nitrided chemical vapor deposited oxides (1989) (4)
Alloying of Al-Cu-Si metallization by rapid thermal annealing (1986) (4)
High-density CMOS interconnect realized on flexible organic substrate (2006) (4)
The Role of Silicon Monohydride and Dihydride in the Photoluminescence of Porous Silicon and Photoluminescence of Porous Silicon Buried Underneath Epitaxial GaP (1991) (4)
Enhanced Sensitivity of Small-Size (With 1-$\mu \hbox{m}$ Gate Length) Junction-Field-Effect-Transistor-Based Germanium Photodetector Using Two-Step Germanium Epitaxy by Ultrahigh Vacuum Chemical Vapor Deposition (2009) (4)
Complementary Metal Oxide Semiconductor Compatible Hf-Based Resistive Random Access Memory with Ultralow Switching Current/Power (2012) (4)
Controllable optomechanical coupling and Drude self-pulsation plasma locking in chip-scale optomechanical cavities (2016) (4)
Accuracy Assessment of Charge-Based Capacitance Measurement for Nanoscale MOSFET Devices (2008) (4)
Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack (2008) (4)
Growth Chemistry of Ultrathin Silicon Nitride and Oxynitride Passivation Layers on Si(100) (1997) (4)
A novel approach for integration of dual metal gate process using ultra thin aluminum nitride buffer layer (2003) (4)
Rapid thermal hydrogen passivation of polysilicon MOSFETs (1990) (4)
Very High Density RF MIM Capacitors (17 ) Using High- Doped Dielectrics (2003) (4)
Ultrathin stacked Si/sub 3/N/sub 4//SiO/sub 2/ gate dielectrics prepared by rapid thermal processing (1991) (4)
Robust HfN metal gate electrode for advanced MOS devices application (2003) (4)
Highly reliable chemical vapor deposited stacked oxynitride gate dielectrics fabricated by in situ rapid thermal multiprocessing (1996) (4)
Monolithic photonic integrated circuit for optical performance monitoring of silicon Mach-Zehnder modulator in C and L bands (2013) (4)
Chemically modified ultrathin oxides fabricated by rapid thermal processing (1992) (4)
High-density MIM capacitors (/spl sim/85 nF/cm/sup 2/) on organic substrates (2005) (4)
Silicon Nanowire Field Effect Devices By Top-Down CMOS Technology (2007) (4)
Photoluminescence and Structure of Chemically Etched Si (1991) (4)
Dual metal gate process by metal substitution of dopant-free polysilicon on high-K dielectric (2005) (4)
Dielectric engineering in nanocrystal memory devices for improved programming dynamics (2005) (3)
Transport and Back-Gated Field Effect Characteristics of Si Nanowires Formed by Stress-Limited Oxidation (2005) (3)
Electrical characteristics of oxynitride gate dielectrics prepared by rapid thermal processing of LPCVD SiO/sub 2/ films (1989) (3)
The impact of TiN capping Layer on NiSi, CoSi/sub 2/, and Co/sub x/Ni/sub 1-x/Si/sub 2/ FUSI metal gate work function adjustment (2005) (3)
MULTI-SIZE DROPLETS GENERATION VIA SIDE-BRANCH MICROFLUIDIC CHANNELS (2010) (3)
Realization of Ni Fully Silicided Gate on Vertical Silicon Nanowire MOSFETs for Adjusting Threshold Voltage $({V}_{T})$ (2011) (3)
Ultrathin TiO2 Gate Dielectric Formation by Annealing of Sputtered Ti on Nitrogen Passivated Si Substrates in Nitric Oxide Ambient (1999) (3)
Stimulated generation of deterministic platicon frequency microcombs (2022) (3)
128Gb/s DP-QPSK silicon modulator module integrated with driver amplifiers (2014) (3)
A nano-actuator via cavity-enhanced optical dipole force (2012) (3)
Ge x Si l-x Layers Grown by Rapid Thermal Processing Chemical Vapor Deposition (1989) (3)
Novel Integration of Metal–Insulator–Metal (MIM) Capacitors Comprising Perovskite-type Dielectric and Cu Bottom Electrode on Low-Temperature Packaging Substrates (2008) (3)
Formation of High Quality Oxynitride Gate Dielectrics by High Pressure Thermal Oxidation of Si in NO (1999) (3)
Junction-less stackable SONOS memory realized on vertical-Si-nanowire for 3-D application (2011) (3)
Performance and reliability of ultrathin reoxidized nitrided oxides fabricated by rapid thermal processing (1991) (3)
Fabrication of high Ge content SiGe layer on Si by Ge condensation technique (2006) (3)
An Improved Pregate Cleaning Process for High-k Gate Dielectric Fabrication (2005) (3)
Self-aligned TiNxOy/TiSi2 contact formation (1989) (3)
Future mobile society beyond Moore's Law (2013) (3)
Effects of AC hot carrier stress on n- and p-MOSFET's with oxynitride gate dielectrics (1994) (3)
LASER PROCESSING OF SEMICONDUCTORS (1982) (3)
Study of interface state generation in thin oxynitride gate dielectrics under hot-electron stressing (1989) (3)
Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement (2014) (3)
Effects of residual surface nitrogen on the dielectric breakdown characteristics of regrown oxides (1993) (3)
Effects of surface pretreatment of polysilicon electrode prior to Si/sub 3/N/sub 4/ deposition on the electrical characteristics of Si/sub 3/N/sub 4/ dielectric films (1994) (3)
A Lens Holder in Conjunction With a MEMS Platform for On-Chip Aligning and Fixing of a Ball Lens in Silicon Photonics Packaging (2011) (3)
Characteristics of sub-1 nm CVD HfO/sub 2/ gate dielectrics with HfN electrodes for advanced CMOS applications (2004) (3)
Metamaterial tunable filter with liquid metal (2013) (3)
Reaction Kinetics of Sputter-Deposited Ti On SiO 2 Substrates during Rapid Thermal Annealing (1989) (3)
Interface configuration and Fermi-level pinning of fully silicided gate and high-K dielectric stack (2006) (3)
A CMOS-compatible oscillation-mode optomechanical DC accelerometer at 730-ng/Hz1/2 resolution (2016) (3)
Charge retention characteristics of SiGe quantum dot flash memories (2002) (3)
Rapid Thermal Processing for Self-Aligned Silicide Technology (1987) (3)
Power-dependence of high-Q optomechanical oscillators: from pre-oscillation, to oscillation slope, to Drude-plasma (2017) (3)
Universally stable microresonator Turing pattern formation for coherent high-power THz radiation on-chip (2016) (3)
A chip-scale sub-μg/Hz1/2 optomechanical DC accelerometer at the thermodynamical limit (2016) (3)
Effectiveness of Aluminum Incorporation in Nickel Silicide and Nickel Germanide Metal Gates for Work Function Reduction (2007) (3)
Charge trapping and interface state generation in ultrathin stacked Si3N4/SiO2 gate dielectrics (1991) (3)
A polarization diversity circuit for silicon photonics (2011) (3)
MOS Characteristics and Reliability of Thin Gate Dielectrics Grown by Rapid Thermal Processing in O2 Diluted with NF3 (1990) (3)
Thin Amorphous $\hbox{Si/Si}_{3}\hbox{N}_{4}$-Based Light-Emitting Device Prepared With Low Thermal Budget (2008) (3)
MOS Characteristics of synthesized HfAlON-HfO/sub 2/ stack using AlN-HfO/sub 2/ (2004) (3)
Dissipative Kerr Soliton mode-locking and breather states in 19 GHz Si3N4 microresonator (2018) (3)
Oxidation Resistance of Ultrathin Silicon Nitride Passivation Layers on Si(100) (1997) (3)
Ultrasensitive pressure sensor based on gate- all-around nanowire fet (2011) (3)
Higher k HfTaTiO gate dielectric with improved material and electrical characteristics (2005) (3)
Impacts of Dopant Segregation on the Performance and Interface-State Density of the MOSFET With FUSI NiSi Gate (2007) (3)
Electro-optically tunable switches with 100GHz flat-top passband and 45dB extinction ratio using silicon high-order coupled-microring resonators for optical interconnects (2012) (3)
Gb/s Physical Random Bits Through Mesoscopic Chaos in Integrated Silicon Optomechanical Cavities (2019) (3)
Rapid thermal annealing for H passivation of polysilicon MOSFETs from Si3N4 overcoat (1989) (3)
Short-channel MOSFETs with superior gate dielectrics fabricated using multiple rapid thermal processing (1988) (2)
Extended Access to Self-Disciplined Platicon Generation in Normal Dispersion Regime via Single FSR Intensity-Modulated Pump (2020) (2)
Ultracompact Si electro-optic modulator based on horizontal Cu-insulator-Si-insulator-Cu nanoplasmonic waveguide (2013) (2)
HfO2 Gate Dielectrics for Future Generation of CMOS Device Application (2004) (2)
All-optical analogue to electromagnetically induced transparency with silicon photonic crystal nanocavities (2008) (2)
CMOS Compatible Hf-based RRAM with Ultra-low Switching Currents/Power (2011) (2)
Rapid Thermal Annealing of Composite TaSi 2 /n + Poly-Si Silicide Films (1983) (2)
Selective tuning of silicon photonic crystal cavities via laser-assisted local oxidation (2011) (2)
Non-zone-folded transition-energy calculations for quantum-confined Stark effect in Si1-xGex/Si quantum wells (1991) (2)
High Performance NMOS Devices Using Ultra-Thin VHP Oxynitride (2000) (2)
Double-layer hepatocyte tumor co-culture using hydrogel for drug effectivity and specificity analysis (2012) (2)
Chaos synchronization over 50 kilometers using monolithic silicon optomechanical cavities (2018) (2)
Reduction of Leakage and Low-Frequency Noise in MOS Transistors Through Two-Step RTA of NiSi-Silicide Technology (2006) (2)
MOS characteristics of substituted Al gate on high-/spl kappa/ dielectric (2004) (2)
Low workfunction fully silicided gate on SiO/sub 2//Si and LaAlO/sub 3//GOI n-MOSFETs (2004) (2)
Role of dopant incorporation in low-temperature Si epitaxial growth by rapid thermal processing chemical vapor deposition (1992) (2)
Germanium Photodetector Technologies for Optical Communication Applications (2010) (2)
ALD HfO2 Based RRAM with Ti Capping (2013) (2)
Selected topics on HfO/sub 2/ gate dielectrics for future ULSI CMOS devices (2004) (2)
Two Silicon Nitride Technologies for Post (2001) (2)
A Two-Wafer Approach for Integration of Optical MEMS and Photonics on Silicon Substrate (2010) (2)
Novel gate voltage ramping technique for the characterisation of metal-oxide-semiconductor capacitor charge trapping properties (1990) (2)
Development of flexible neural probes using SU-8/parylene (2013) (2)
NEMS integrated photonic system using nano-silicon-photonic circuits (2015) (2)
Formation of high-quality oxide/nitride stacked layers on rugged polysilicon electrodes by rapid thermal oxidation (1993) (2)
20-Gb/s DPSK transmission with 550-ps/nm dispersion tolerance using silicon Mach-Zehnder modulator (2013) (2)
High performance depletion-mode silicon modulators (2011) (2)
Reliability comparison of short-channel MOSFETs with cobalt salicide and titanium salicide structures (1989) (2)
Four-wave mixing in slow-light graphene-silicon photonic crystal waveguides (2014) (2)
Response to “Comment on ‘Ultrathin low-temperature SiGe buffer for the growth of high quality Ge epilayer on Si(100) by ultrahigh vacuum chemical vapor deposition’” [Appl. Phys. Lett. 90, 092108 (2007)] (2007) (2)
Effects of Annealing and Temperature on SGOI Fabrication Using Ge Condensation (2006) (2)
Integration issues with high k gate stacks (2003) (2)
Hot carrier effects on analog performance of N- and P-MOSFET's with oxynitride gate dielectrics (1994) (2)
Hot-carrier degradation for deep-submicron N-MOSFETs introduced by back-end processing (1997) (2)
An integrated tunable laser using nano-silicon-photonic circuits (2014) (2)
Characterization of Si nanowires-based piezoresistive pressure sensor by dynamic cycling test (2012) (2)
Highly Ordered Nanostructures for Ultra-Sensitive SERS (2007) (2)
Experimental demonstration of Fano resonance in microfabricated phononic crystal resonators based on two-dimensional silicon slab (2013) (2)
Germanium electro-absorption modulator for power efficient optical links (2011) (2)
Optical Clocks via Breather Stabilization in Chip-Scale Frequency Combs (2019) (2)
Steady-State Versus Rapid Thermal Annealing of Phosphorusimplanted Pseudomorphic Si(100)/Ge 0.12 Si 0.88 (1994) (2)
Dual-poly CVD HfO2 gate stack for sub-100 nm CMOS technology (2001) (2)
Effects of dynamic stressing on nitrided and reoxidized-nitrided chemical-vapor-deposited gate oxides (1989) (2)
Rapid Thermal Anneaung of Arsenic-Phosphorus(N+-N-) Double-Diffused Shallow Junctions (1985) (2)
Nanometer germanium photodetector with aluminum surface plasmon antenna for enhanced photo-response (2010) (2)
The foundry model for silicon photonics-technology, challenges, and opportunities (2012) (2)
Stress Analysis of Embedded Active Devices in Substrate Cavity for System-On-Package (SOP) (2008) (2)
CMOS-Compatible Plasmonic Bragg Reflectors Based on Cu-Dielectric-Si Structures (2013) (2)
A study of cancer cell metastasis using microfluidic transmigration device (2012) (2)
Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California (1992) (2)
Defect reduction in GexSi1−x epitaxy by rapid thermal processing chemical vapor deposition using a low‐temperature in situ preclean and a Si buffer layer (1991) (2)
Internally phase stabilized Kerr frequency comb (2017) (2)
Study of electrical characteristics of polyoxides grown by rapid thermal oxdidation (1990) (2)
A THz dual mode switch using MEMS switchable metamaterial (2011) (2)
High Transmission Photonic Crystal Line-defect Bend with Double Low-index Trenches (2007) (2)
Silicon Device Processing (2013) (2)
CMOS Compatible Dual Metal Gate Integration with Successful Vth Adjustment on High-k HfTaON by High-Temperature Metal Intermixing (2006) (2)
A low stress bond pad design optimization of low temperature solder interconnections on TSVs for MEMS applications (2012) (2)
CMOS Integration Issues with High-K/Metal Gate Stack (2006) (2)
Comparative Study of $\hbox{1}/f$ Noise Degradation Caused by Fowler–Nordheim Tunneling Stress in Silicon Nanowire Transistors and FinFETs (2010) (2)
Cold and hot carrier effects on HfO/sub 2/ and HfSiO NMOSFETS with tin gate electrode (2005) (2)
Application of RTP-CVD Technology to Ulsi Device Fabrication (1991) (2)
Novel low aspect-ratio Si nano-hemisphere array surface texture application to ultrathin film solar cells (2011) (2)
Multispectral optical frequency comb based on microresonator Faraday instability (2017) (2)
Silicon waveguide infrared photodiodes based on embedded nickel silicide particles (2012) (2)
A NEMS optical switch driven by optical force (2011) (2)
Study of Mobility in Strained Silicon and Germanium Ultra Thin Body MOSFETs (2004) (2)
Si Nanowire CMOS Transistors and Circuits by Top-Down Technology Approach (2008) (2)
Investigation of PVD HfO/sub 2/MIM capacitors for Si RF and mixed signal ICs application (2003) (2)
Design and experiments of a Nano-opto-mechanical switch using EIT-like effects of coupled-ring resonator (2011) (2)
Behavior of Effective Work Function in Metal/High-K Gate Stack under High Temperature Process (2004) (2)
High Quality Ultra-Thin Tunneling N 2 O Oxides Fabricated by Rtp (1993) (2)
Gate-All-Around Silicon Nanowire Devices: Are These the Future of CMOS? (2008) (2)
Subharmonics generation based on synchronization of self-pulsation and optomechanical oscillation in a monolithic silicon cavity (2014) (2)
Feasibility study of using thin aluminum nitride film as a buffer layer for dual metal gate process (2004) (2)
Cost effective optical coupling for polymer optical fiber communication (2008) (2)
Visible Luminescence from Controlled Multi-Layer Stack Comprising of Thin Amorphous Silicon and Silicon Nitride Layers (2007) (2)
Analysis of ultracompact silicon electro-optic modulator based on Cu-insulator-Si hybrid plasmonic donut resonator (2012) (2)
Metal-oxide-semiconductor characteristics of rapid thermal processed chemical vapor deposited SiO2 gate dielectrics (1991) (2)
Mapping ultrafast timing jitter in dispersion-managed 89 GHz frequency microcombs via self-heterodyne linear interferometry (2021) (2)
50th order series-coupled micro-ring resonator (2008) (2)
Nanometric precision distance metrology via chip-scale soliton microcombs. (2020) (2)
Experimental demonstration of optical switch using gradient optical force (2012) (2)
Thermal and Chemical Instability Between Iridium Gate Electrode and Ta 2 0 5 Gate Dielectrics (1999) (2)
Smooth coherent Kerr frequency combs generation with broadly tunable pump by higher order mode suppression (2016) (2)
Fully-depleted ultra narrow (-10 nm) body Gate-All-Around CMOS transistors (2005) (1)
Defect Study of GeSi Alloy Multilayer Structures Grown by RTPCVD (1991) (1)
Effects of NH 3 nitridation on oxides grown in pure N 2 O ambient (2013) (1)
Reliability study on rapid thermal processed metal-oxide-semiconductor field effect transistors (1988) (1)
Modeling of Boron Diffusion and Activation for Nonequilibrium Rapid Thermal Annealing Application (1993) (1)
Silicon Nanowire: Technology Platform, Devices, Applications and Challenges (2007) (1)
Rapid thermal annealing of arsenic-phosphorus (n+ − n−) double-diffused shallow junctions (1988) (1)
Optofluidics: A Flat Lens with Tunable Phase Gradient by Using Random Access Reconfigurable Metamaterial (Adv. Mater. 32/2015) (2015) (1)
A tunable MEMS THz waveplate based on isotropicity dependent metamaterial (2013) (1)
Auger electron spectroscopy study of the interaction of NO2 with Si(100) (1994) (1)
Monolithic integration and optimization of waveguide silicon modulators and germanium photodetectors (2010) (1)
Dopant Redistribution During Pd2Si Formation Using Rapid Therm1al Annealing (1985) (1)
Conduction investigation in oxide-based resistive random access memory with low frequency noise analysis (2013) (1)
Localized germanium-on-insulator patterns on Si by novel etching scheme in CF4/O2 plasma (2006) (1)
The Analysis of Dielectric Breakdown in Cu/Low-k Interconnect System (2006) (1)
Plasma-induced charging damage in P+-polysilicon PMOSFETs (1997) (1)
Particle separation under the co-action of Brownian motion and optical force in near-field speckle patterns (2015) (1)
Calculation of the threshold voltage of metal‐oxide‐semiconductor field‐effect transistors with Pearson‐IV channel doping profile (1984) (1)
A thermo-optic photonic switch (2010) (1)
Nitridation of SiO2 in NO Ambient for Ultrathin Oxynitride Dielectric Formation (1994) (1)
Properties of Thin Inter-Polysilicon Reoxidized Nitrided Oxides Prepared by Rapid Thermal Processing (RTO/RTN/RTO) (1989) (1)
Corrections to "200-mm Wafer Scale Transfer of 0.18 $mu$ m Dual-Damascene Cu/SiO $_2$ Interconnection System to Plastic Substrates" (2006) (1)
Optical OFDM transmission using low-noise Kerr frequency comb generated in on-chip microresonator (2017) (1)
Work function adjustment and polydepletion reduction in deep partial and full silicidation of poly-Si with Ni layer (2006) (1)
Small-footprint 128-Gb/s DP-QPSK silicon optical modulator in ceramic-based metal package with low optical coupling loss (2015) (1)
Vertical GAA Silicon Nanowire Transistor with Impact of Temperature on Device Parameters (2010) (1)
Polarization selective tunable filter via tuning of Fano resonances in MEMS switchable metamaterials (2012) (1)
Defects and Strain in Ge x Si 1−x Layers Grown by Rapid Thermal Processing Chemical Vapor Deposition (1989) (1)
High Quality Single Crystal Al-catalyzed Si Nanowire (2007) (1)
A Wafer Transfer Technology for Integration of RF MEMS and CMOS on Organic Substrate (2007) (1)
High performance metal-gate/high-/spl kappa/ MOSFETs and GaAs compatible RF passive devices on Ge-on-insulator technology (2004) (1)
Integration of RF-MEMS, passives and CMOS-IC on silicon substrate by low temperature wafer to wafer bonding technique (2008) (1)
On-chip optical power measurement by optical force (2011) (1)
Negative Index Photonic Crystals Superlattices and Zero Phase Delay Lines (2012) (1)
Theoretical investigation of silicon MOS-type plasmonic slot waveguide based electrooptic modulators (2010) (1)
Mid-Infrared Aluminum Nitride on Insulator (AlNOI) Platform (2019) (1)
128-Gb/s Monolithic Silicon Optical Modulator for Digital Coherent Communication (2015) (1)
Purcell-enhanced spontaneous emission of colloidal PbS quantum dots in slow-light silicon photonic crystal waveguides at the near-infrared (2009) (1)
Ta/TaNx Metal Gate Electrodes for Advanced CMOS Devices (2002) (1)
Spontaneous tunable Turing pattern formation for coherent high-power THz radiation (2016) (1)
Deterministic control of all-optical analogue to electromagnetically induced transparency in coherently-coupled silicon photonic crystal cavities (2008) (1)
An Empirical Oxidation Rate Law for Thin Oxides (1985) (1)
Electrical and reliability characteristics of submicrometer nMOSFETs with oxynitride gate dielectric prepared by rapid thermal oxidation in N/sub 2/O (1991) (1)
Oxide/nitride stacked layers prepared by in situ rapid-thermal multiprocessing (1995) (1)
Zero phase accumulation in negative-index photonic crystal superlattices (2011) (1)
Characterization of DC, analog/RF, and low frequency noise in silicon-on-insulator nMOSFETs with different body-contact structures (2013) (1)
Globally stable turing pattern formation in Si3N4 microresonator (2017) (1)
Tunable microcantilever sensors with embedded piezotransistors (2010) (1)
First Principle Study of Si and Ge Band Structure for UTB MOSFETs Applications (2005) (1)
Novel Metal-Germinade Schottky Barrier Contacts for Si-Photonics Application (2008) (1)
Hot carrier stress study in Hf-silicate NMOS transistors (2004) (1)
Optimization of a Tin/TiSi 2 p+ Diffusion Barrier Process (1989) (1)
Multi-phase-matched satellite frequency combs (2019) (1)
A tunable metamaterial for wide-angle and broadband absorption through meta-water-capsule coatings (2016) (1)
SiGe on insulator MOSFET integrated with Schottky source/drain and HfO2/TaN gate stack (2006) (1)
Rapid Thermal Nitridation of Thin Oxides (1987) (1)
Overcoming Challenges in Metal Gate Etching for Sub-45 nm Technology Node (2005) (1)
Experimental demonstration of integrated horizontal Cu-Si3N4-Cu plasmonic waveguide and passive components (2012) (1)
Low-frequency noise statistics for the breakdown characterization of ultrathin gate oxides (2005) (1)
Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate (2011) (1)
High speed energy-efficient germanium electro-absorption modulator featuring monolithic integration with germanium p-i-n photodetector (2011) (1)
Design of a low-loss thermo-optic switch (2010) (1)
Gbps physical random bit generation based on the mesoscopic chaos of a silicon photonics crystal microcavity. (2020) (1)
A Kinetics Study of the Bond Strength of Direct Bonded Wafers (2005) (1)
A nanomachined tunable oscillator controlled by electrostatic and optical force (2015) (1)
Radiation-induced interface state generation in MOS devices with reoxidised nitrided SiO/sub 2/ gate dielectrics (1989) (1)
Rapid Thermal and Laser Processing: 24-25 September 1992 San Jose, California (1993) (1)
Effects of residual surface nitrogen on the dielectric breakdown characteristics of regrown oxides (1993) (1)
Silicon photonics for monolithic electronic-photonic integrated circuit applications: Opportunities and challenges (2011) (1)
Polarity asymmetry of electrical characteristics of thin nitrided polyoxides prepared by in-situ multiple rapid thermal processing (1991) (1)
Taper couplers for coupling between laser and silicon waveguide with large allowable tolerance (2008) (1)
Semi-Empirical Model for Boron Diffusion During Rapid Thermal Annealing of BF2 Implanted Silicon (1993) (1)
Issues associated with p-type band-edge effective work function metal electrodes: Fermi-level pinning and flatband roll-off (2007) (1)
CMOS Compatible Si-Nanowire Inverter Logic Gate for Low Power Applications (2007) (1)
Physically Secure Image Transfer using Synchronized Chaos between Silicon Optomechanical Cavities (2020) (1)
Nano-opto-mechanical (NOM) acoustic wavefront sensor via ring resonators (2013) (1)
A tunable laser using loop-back external cavity based on double ring resonators (2013) (1)
Current conduction and charge trapping in thin interpoly dielectrics prepared by in situ multiple rapid thermal processing (1992) (1)
Monolithic silicon photonic DWDM receiver for terabit data communications (2010) (1)
Vertical Silicon Nanowire MOSFET With A Fully-Silicided (FUSI) NiSi2 Gate (2011) (1)
5 Interface Engineering for High-k Ge MOSFETs (1)
High-resolution and Large Tunable Range Nanophotonic Spectrometer Using a Microring Resonator (2018) (1)
Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range (2012) (1)
Enhanced Raman scattering in slow-light photonic crystals for chip-scale frequency conversion and optical amplification. (2010) (1)
All optomechanical signal modulation in photonic circuits (2015) (1)
Short-channel MOSFETs with oxynitride gate dielectrics fabricated using multiple rapid thermal processing (1989) (1)
High Quality ONO Gate Dielectrics Fabricated by In-Situ RTCVD (1994) (1)
A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging (2010) (1)
Schottky s/d MOSFETs with high-K gate dielectrics and metal gate electrodes (2004) (1)
Quasi-breakdown in ultra-thin dielectrics (1997) (1)
Evanescent-Coupled SEG-Ge Lateral and Vertical PIN Photodetectors Integrated on Si-Waveguide (2008) (1)
Boron Diffusion in Fluorine Preamorphized Silicon During Rapid Thermal Annealing (1993) (1)
Microelectronic Processes, Sensors, and Controls (1994) (1)
Metal-insulator-Si hybrid plasmonic waveguide components for on-chip photonics (2012) (1)
Degradation of metal-oxide-semiconductor characteristics due to borophosphosilicate-glass reflow in O/sub 2/-containing ambient (1993) (1)
Impact of Process Variations on the Vertical Silicon Nanowire Tunneling FET (TFET) (2013) (1)
Investigation of tunneling field effect transistor reliability (2010) (1)
Ge x Si 1−x Waveguides Grown by Rapid Thermal Processing Chemical Vator Deposition (1991) (1)
Rapid thermal oxidation of thin nitride dielectrics deposited on rapid thermal nitrided polycrystalline silicon (1992) (1)
Gate-induced drain leakage current degradation and its time dependence during channel hot-electron stress in n-MOSFETs (1992) (1)
Broadband low-phase-noise 18 GHz Kerr frequency microcomb (2015) (1)
Optical design of a miniature semi-integrated tunable laser on a silicon optical bench (2008) (1)
320 Gbps monolithic silicon photonic DWDM receiver (2010) (1)
NEMS actuator driven by optical gradient force (2013) (1)
Integrated closed-loop cavity of a tunable laser (2016) (1)
A low-phase-noise 18 GHz Kerr frequency comb spanning 65 THz (2015) (1)
Low Hydrogen Component SiN Films by PECVD for Low Propagation Loss Waveguide (2008) (1)
Boron‐enhanced low‐temperature Si epitaxy by rapid thermal processing chemical vapor deposition (1992) (1)
Phase stabilization of Kerr frequency comb internally without nonlinear optical interferometry (2016) (1)
Low-driving-voltage silicon DP-IQ modulator for 100G and beyond (2017) (1)
Current‐voltage characteristics of ion‐implanted metal‐semiconductor field effect transistor (1985) (1)
High Performance fully silicided NiSi:Hf gate on LaAlO3/GOI n-MOSFET with Little Fermi-level Pinning (2004) (1)
Charge Trapping/Detrapping and Dielectric Breakdown in SiO2/Si3N4/SiO2 Stacked Layers on Rugged Poly-Si under Dynamic Stress (1992) (1)
Formation of Ultrathin Stacked Dielectrics Prepared by In-Situ Multi-Step RTP-CVD (1989) (1)
Dynamic-stress-induced dielectric breakdown in ultrathin nitride/oxide stacked films deposited on rugged polysilicon (1992) (1)
Copper Plug Barrier Process Optimization for Reliable Transistor Performance (2008) (1)
Si-nanowire TAHOS (TaN/Al2O3/HfO2/SiO2/Si ) nonvolatile memory cell (2008) (1)
Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications (2013) (1)
Gate oxide thickness dependence of high-field-induced interface state generation in thin thermal oxides (1990) (1)
Simultaneous Formation of Silicide Ohmic Ion-Beam Mixing and Rapid Thermal Annealing and Shallow Contacts p +-n Junctions by (1985) (1)
A novel program-erasable capacitor using high-/spl kappa/ AlN dielectric (2004) (1)
Tunable metamaterials for terahertz ultra-broadband absorption driven by microfluidics (2016) (1)
Charge trapping/detrapping and dielectric breakdown in SiO/sub 2//Si/sub 3/N/sub 4//SiO/sub 2/ stacked layers on rugged poly-Si under dynamic stress (1992) (1)
Effects Of Rapid Thermal Processing On Device Reliability (1987) (1)
Light emission near 1.3 /spl mu/m using ITO-Al/sub 2/O/sub 3/-Si/sub 0.3/Ge/sub 0.7/-Si tunnel diodes (2004) (1)
Wide optical force-induced RF dynamic range and 100+ high-order stable mechanics in chip-scale optomechanical cavities (2016) (1)
Demonstration of a single-chip integrated MEMS tunable laser with a large wavelength tuning range (2013) (1)
Growth of in situ doped silicon epitaxial layer by rapid thermal processing (1990) (1)
High spectral purity chip-scale tunable THz radiation source (2021) (0)
Process optimization of dual-gate CMOS (1997) (0)
Integration of 0.45-mm2 On-Chip-Antenna (OCA) with High Output Power for 2.45GHz RFID Tag (2005) (0)
Frequency microcomb stabilization via dual-microwave control (2021) (0)
Practical Solutions to Enhance EWF Tunability of Ni FUSI Gates on HfO2 (2007) (0)
Silicon Polarization Rotator using Partial-Rib Waveguide (2013) (0)
Quantum State Tomography of an On-chip Polarization-Spatial Qubit SWAP Gate (2021) (0)
Experimental verification of zero-n¯ bandgap in photonic crystal superlattices at the near-infrared (2008) (0)
Monolithic silicon DP-IQ modulator for digital coherent transmission (2016) (0)
The Characterization of Initial Growth of Polycrystalline Silicon Germanium Films on Zirconium Oxide (2001) (0)
OF RESIDUAL SURFACE NITROGEN ON THE DIELECTRIC BREDOWN CHARACTERISTICS OF REGROWN OXIDES (1993) (0)
Recent developments in RT-CVD technology for ULSI material processing and device fabrication: an overview (1994) (0)
Impacts of Body Contact Structures on SOI NMOSFET DC, RF, and 1/f Noise Characteristics (2007) (0)
Ultrafast phase-resolved self-acceleration and frequency-chirp in silicon chip-scale slow-light solitons (2013) (0)
An electrostatic controlled near-field nano-opto-probe for nano manipulation (2013) (0)
Visible Photoluminescence and Microstructure of Annealed and Chemically Etched Amorphous Si (1992) (0)
Prospective technology for system-on-a-chip: N 2 implant followed by VHP O 2 reoxidation (2000) (0)
Characterization of Preclean Induced Surface Damage by Rapid Thermal Processing (1991) (0)
Device and Technology Platform with Silicon Nanowire (Invited) (2008) (0)
olyoxide :Films Grown by Rapid Thermal Processing (1987) (0)
Efficient Nonlinear Activation Function in Optical Neural Network (2020) (0)
Synthesis and transistor performances of high quality single crystalline vapor-liquid-solid grown Si1-xGex nanowire (2007) (0)
Physical random bit generation using mesoscopic chaos in silicon optomechanical oscillators (2018) (0)
A nanomachined torque sensor with ultrahigh sensitivity (2016) (0)
Surface nanostructured high efficiency vertical wire-based solar cell (2010) (0)
Design of a bidirectional WDM module for multi-channel transceivers (2007) (0)
Degradation of thin Si02 sidewall spacers during selective epitaxial growth for the fabrication of raised source/drain MOSFETs (1995) (0)
Characterization of Silicon Mach-Zehnder Modulator in 20-Gbps NRZ-BPSK Transmission (2013) (0)
Sampling timing jitter in dispersion-managed frequency microcombs via a fiber interferometer (2022) (0)
Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process (2006) (0)
Electrical properties of thin reoxidised nitrided interpolyoxides prepared by rapid thermal processing (1989) (0)
Correction to “A Miniaturization Strategy for Harvesting Vibration Energy Utilizing Helmholtz Resonance and Vortex Shedding Effect” (2014) (0)
An Independent Double-Gate Thin Film FinFET Featuring Lithography-Free Channel Length Definition (2012) (0)
Performance analysis of nonvolatile gate-all-around charge-trapping TAHOS memory cells (2009) (0)
Bit-error-rate performance OF 10-Gb/s silicon Mach-Zehnder modulator module in 100-km optical-fiber transmisson (2013) (0)
Nano actuator and “pull-back” nonlinearity (2013) (0)
A 7 . Superior Performance and Reliability of MOSFETs with Ultrathin Gate Oxides Prepared by Conventional Furnace Oxidation of Si in Pure N 20 Ambient (2004) (0)
A Novel Approach to Fabricate ～120 nm Thick Fully Relaxed Ge-on-Insulator (2007) (0)
Deterministic double DKS generation in an 88 GHz single-mode Si3N4 microring with controlled spacing (2022) (0)
Spontaneous microwave platicon frequency microcomb in dispersion-managed microresonators (2022) (0)
Highly Reliable Oxynitride Gate Dielectrics for Dual Gate CMOS Applications (1993) (0)
Silicon-Waveguide Based Silicide Schottky- Barrier Infrared Detector for on-Chip Applications (2012) (0)
Time‐dependent breakdown of oxynitride gate dielectrics under unipolar ac stress (1992) (0)
Monolithically integrated silicon-based Mach-Zehnder modulator for digital coherent communication (2014) (0)
RF passive devices on Si substrates with close to ideal EM performance (2003) (0)
Wu Switching Behaviors of HfO 2 / NiSi x Based RRAM R (2013) (0)
Horizontal Cu/SiO2/Si/SiO2/Cu plasmonic waveguide components integrated in silicon photonic circuits (2012) (0)
Temperature Characterization of Pulsed Laser Annealing of Semiconductors (1982) (0)
Avalanche electron injection in ultrathin oxides grown in N2O ambient (1992) (0)
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DUAL MODE SWITCH USING WITCHABLE METAMATERIAL (2011) (0)
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A comparison study of high-density MIM capacitors with ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminated, sandwiched and stacked dielectrics (2004) (0)
Self-excited relaxation oscillation in optomechanical ring resonator for sensing applications (2015) (0)
Waveform dynamics in air-slot photonic crystal optomechanical oscillators (2017) (0)
Hybrid dual comb spectroscopy with largely dissimilar FSR (2018) (0)
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Cu-insulator-Si hybrid plasmonic waveguide based CMOS-compatible Nanophotonic Devices (2013) (0)
MOSFET characteristics of ultra thin CVD Si3N4 gate dielectrics (1998) (0)
Dependence of MOSFET hot-carrier aging on PECVD oxide process (1995) (0)
Multi-Spectral Regenerative Frequency Microcombs with Coherent Satellite Clusters (2020) (0)
Suppressed boron penetration in P/sup +/-poly PMOSFETs with NO-nitrided SiO/sub 2/ gate dielectrics (1995) (0)
Strained Ge-rich SiGe Nanowire pFETs with High- κ/Metal Gate Fabricated using Germanium Condensation Technique (2007) (0)
Active MEMS metamaterial with uniaxially isotropic dual band switching characteristics in terahertz region (2015) (0)
Bendable High-Performance Electronic Devices (Active Transistor, High-Density Interconnect and Passive-MIM Capacitors) on Flexible Organic-Substrate (2006) (0)
High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer (2016) (0)
Growth of Thin Epitaxial Silicon Layers on Heavily Doped Substrates by RTP-CVD (1989) (0)
Refractometric Optical Sensing by Using Photonics Mach–Zehnder Interferometer (2016) (0)
1 A Novel Approach to Fabricate ~ 120 nm Thick Fully Relaxed Geon-Insulator (2007) (0)
Interface dipole mechanism and NMOS Ni-FUSI gate work function engineering using rare-earth metal (RE)-based dielectric interlayers (2007) (0)
Characteristics of BaxSr1-xTiO3 thin films by metallorganic chemical vapor deposition for ultrahigh-density DRAM application (1997) (0)
Time-domain demonstrations of slow-light in multi-coupled photonic crystal cavities (2010) (0)
Mid-Infrared Aluminum Nitride on Insulator (AlNOI) Platform (2019) (0)
EFFECT OF FURNACE PREANNEAL AND RAPID THERMAL ANNEALING ON ARSENIC-IMPLANTED SILICON (1985) (0)
Low temperature MOSFET technology with Schottky barrier source/drain, high-K gate dielectrics and metal gate electrode (2003) (0)
Effects of ambipolar excess carrier diffusion in pulsed laser annealing of semiconductors (1981) (0)
Coherent phase-locked single-mode frequency microcombs in the C and L bands without mode-crossing disruptions (2016) (0)
Quasi-breakdowns in ultrathin dielectrics (1997) (0)
Solar Cells: Novel Silicon Nanohemisphere‐Array Solar Cells with Enhanced Performance (Small 22/2011) (2011) (0)
Low Temperature GAA Poly-Si Nanowire TFT SONOS Memory for MLC Application (2008) (0)
Electrical Sensing of Calcium Ions using Silicon Nanowire Array (2007) (0)
Two-dimensional Photonic Crystal Patterns for Vertical Light Extraction Enhancement from Ultra-thin Amorphous Si/Si3N4 Multilayer stack (2008) (0)
16 Negative Index Photonic Crystals Superlattices and Zero Phase Delay Lines C (2018) (0)
Effects of various RIE process-induced damages on MOSFET characteristics (1995) (0)
Switching Behaviors of TiN/HfOx/Pt Based RRAM (2013) (0)
Minimum detectable strain improvement in junctionless nanowire FET sensors (2012) (0)
Highly reliable CVD-stacked oxynitride gate dielectric fabricated by in-situ rapid thermal multiprocessing (1995) (0)
Stabilized on-chip optical frequency comb (2015) (0)
Embedded metallic nanoparticles for on-chip infrared detection (2012) (0)
CMOS-Compatible Plasmonic Nanocircuits for On-Chip Integration (2013) (0)
Electrical Properties of MOSFETs with N2O-Nitrided LPCVD SiO2 Gate Dielectrics (1992) (0)
Strained germanium MOSFETs: Devices and process technology (2004) (0)
Creation of Strained and Relaxed SiGe films simultaneously through Ge condensation on SOI (2005) (0)
Controlled zero-n̅ bandgaps in negative refraction photonic superlattices for wavefront control and open resonances (2009) (0)
Anomalous Transient Diffusion of Ion Implanted Boron during Rapid Thermal Annealing (1989) (0)
Ferroelectronic Thin Films Based Devices and Structures in oDtoelectronic Computing System (0)
Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers (2007) (0)
P‐127: A ZnO Based Heterostructured n‐i‐n Light‐Emitting Diode by Low‐Cost Ultrasonic Spray Pyrolysis (2008) (0)
Nanometric precision metrology based on hybrid spectrally-resolved and homodyne interferometry via a single soliton microcomb (2021) (0)
Dopant Segregated Pt-Germanide Schottky S/D p-MOSFET with HfO2/TaN gate on Strained Si-SiGe channel (2006) (0)
Improving electrical properties of CVD HfO2 by multi-step deposition and annealing in a gate cluster tool (2003) (0)
Chip-scale turing frequency comb for coherent high-power THz radiation (2017) (0)
Polarity dependence of charge to breakdown and interface state generation of oxynitride gate dielectrics prepared by rapid thermal processing (1990) (0)
Structural efficiency boost heralds third-generation solar cells (2011) (0)
Observations of dynamical chaos in silicon-based optomechanical cavities (2016) (0)
Interfacial Layer in High-k Dielectrics: Characterization and Suppression (2006) (0)
Effects at ambipolar assess carrier diffusion in pulsed laser annealing of semiconductors (1981) (0)
Oxide Based Resistive Random Access Memory Device for High Density Non Volatile Memory Applications (2013) (0)
Observation of deterministic double dissipative-Kerr-soliton generation with avoided mode crossing (2023) (0)
ON-CHIP REFRACTIVE INDEX MEASUREMENT VIA INTERFACIAL REFRACTION OF TWO PHASE FLOW STREAMS (2010) (0)
Real-time observation of breathing soliton and soliton molecules dynamics in strong coupled microcavity (2021) (0)
Silicon epitaxial growth on silicon‐on‐insulator structures by rapid thermal processing chemical vapor deposition (1990) (0)
A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab (2011) (0)
Silicon photonic integrated circuits: from devices to integration (2011) (0)
Multi-bit memory cell using long-range non-anchored actuation for high temperature applications (2013) (0)
RTP-CVD of Si Materials and Devices for ULSI Applications (1991) (0)
Study of NBTI Stress in P+-Poly PMOSFETs with Gate Oxides Grown on Nitrogen Implanted Si Substrates (1998) (0)
Stochastic bistable switching in CMOS-processed PECVD silicon nitride ring resonators (2012) (0)
MOCVD HfAlxOy Gate Dielectrics Deposited Using Single Cocktail Liquid Source (2003) (0)
Structural Investigation of Photoluminescent Porous Si by Transmission Electron Microscopy (1992) (0)
Top-Surface Aluminized and Nitrided Hafnium Oxide Using Synthesis of Thin AlN and HfO2 Stacked Layer (2004) (0)
Low power silicon photonics switch (2010) (0)
Generation of single-mode and phase-locked frequency microcombs without mode crossings (2016) (0)
High-efficiency thermal-tunable microring resonators made of Cu-dielectric-Si hybrid plasmonic waveguides (2014) (0)
Nano-optofluidics for single molecule detection and sorting (2012) (0)
Effects on TiN Film Properties of the Interaction Between Titanium and Borophosphosilicate Glass During High-Temperature Nitridation (1990) (0)
Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 3 : Preface (2011) (0)
Transparent high-data-rate optical transmission through broadband hitless bypass switches for chip-scale optical networks (2010) (0)
A process for producing high-pressure silicon oxynitride (oxynitride) gate dielectrics for metal oxide semiconductor (MOS) devices with P + polycrystalline type silicon (polysilicon) gate electrode (1996) (0)
Angle Resolved X-Ray Photoelectron Spectroscopy Study of Ultrathin N2O Oxides (1992) (0)
Comparison of -MOSFET lifetime estimates based on GIDL enhancement and transconductance degradation as criteria (1992) (0)
Silicon-Nanowire MOSFETs (2008) (0)
Visible Light Emission from Controlled α-Si/SiN Multi-layer Structures (2007) (0)
A Nanoelectromechanical Tunable Oscillator Base on a High-Q Optical Cavity (2016) (0)
A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics (2017) (0)
Parametrically driven inertial sensing in chip-scale optomechanical cavities at the thermodynamical limits with extended dynamic range (2022) (0)
Breather solitons dynamics and period-doubling transitions in 19 GHz microresonator frequency combs (2018) (0)
Structure de laser à semi-conducteurs accordable encapsulée et sa fabrication (2007) (0)
A high efficiency frequency pre-defined flow-driven energy harvester dominated by on-chip modified Helmholtz Resonating cavity (2014) (0)
Reliability issues in submicron MOSFETs with oxynitride gate dielectrics (1993) (0)
Effects of reoxidation on the hot-carrier immunity of 0.6 mu m MOSFETs with nitrided oxides (1990) (0)
Method of forming oxide film, method of forming reformed oxide film, method of forming high-quality oxide film, and method of forming tunnel and gate oxide film. (1995) (0)
Bichromatically-pumped coherent Kerr frequency combs with controllable repetition rates (2016) (0)
A Phase-Coherent On-Chip Single-Photon SWAP Gate (2022) (0)
Deterministic phase-control and resonance-detuning in optical EIT-like coupled resonances towards dynamical storage of light (2009) (0)
A cost-effective electrical tracing-assisted silicon microring biosensor (2012) (0)
Light Emission Near 1.3 m Using ITO-Al O -Si Ge -Si Tunnel Diodes (2004) (0)
Breakdown voltages of ion‐implanted junctions (1985) (0)
Energy-efficient Germanium electro-absorption modulator for ‘Green’ photonics applications (2010) (0)
New reliability issues of CMOS transistors with 1.3 nm thick gate oxide (2003) (0)
Work Function Modulation Using Thin Interdiffused Metal Layers for Dual Metal-Gate Technology (2006) (0)
Impact of Oxygen during Post-Gate Processing on MOS Device Characteristics (1991) (0)
NANO-OPTOFLUIDICS FOR SINGLE MOLECULE DETECTION (2012) (0)
Effect of nickel silicide induced dopant segregation on vertical silicon nanowire diode performance (2012) (0)
Charge Trapping and Bias Temperature Instability in High-k Dielectric CMOS Transistors (2006) (0)
Wideband switch enhanced by photonic crystal waveguide with graphene nanosheet heater (2021) (0)
' " SPIE-The International Society for Optical Engineering Microelectronic Processes , Sensors , and Controls (2008) (0)
Frequency instability and phase noise characterization of an integrated chip-scale optomechanical oscillator (2015) (0)
Ultrashort pulse mode-locking from a normal-dispersion on-chip Kerr frequency comb (2014) (0)
Material processing and advanced well structures using high-energy implantation for EPI replacement (1995) (0)
Scalability and reliability of TaN/HfN/HfO/sub 2/ gate stacks fabricated by a high temperature process (2005) (0)
A novel surface passivation process for HfO/sub 2/ Ge MOSFETs (2004) (0)
Multi-Layer High-K Gate Stack Materials for Low Dit 4H-SiC Based MOSFETs (2022) (0)
Monte Carlo Simulation of p- and n-channel GOI MOSFETs by Solving the Quantum (2005) (0)
Sampling sub-THz phase noise in frequency microcombs via fiber interferometry (2021) (0)
New developments in schottky source/drain high-k/metal gate CMOS transistors (2005) (0)
ZnO/Si Heterostructured Light-emitting Diodes by MOCVD (2008) (0)
Device Physics and Modeling of Organic Transistor Sensors (2003) (0)
Strong Light Output from Thin SRO/SiO 2 Multilayers with Photonic Crystal Patterns (2008) (0)
Real-time spectral dynamics of femtosecond solitons under free-carrier nonlinearity in silicon photonic crystals (2015) (0)
Monolithically fabricated germanium-on-SOI photodetector and Si CMOS circuit for integrated photonic applications (2010) (0)
Improving performance with itride gate dielectrics (1998) (0)
Gate-tunable frequency combs in graphene–nitride microresonators (2018) (0)
Enhanced Degradation in P + -Poly PMOSFETs With Oxynitride Gate Dielectrics Under Hot-Hole Injection (1999) (0)
Correlation between Chemical Structure and Electrical Properties of NH3-Nitrided N2O Oxides (1993) (0)
Device Performance and Reliability Considerations of Biaxially Strained Si by Wafer-Bonding-Technology (2007) (0)
Improved hot-carrier reliability of MOSFET analog performance with NO-Nitrided SiO2 gate dielectrics (1995) (0)
Lotus-Like Dual Soliton Generation and Phase Shifting in an 88 GHz High-Order-Mode-Suppressed Si3N4 Microring (2019) (0)
Subharmonics radio-frequency division in chip-scale optomechanical oscillators (2015) (0)
An integrated high-extinction-ratio low-loss polarization rotator for silicon photonics across C+L bands (2017) (0)
Overview of Recent Developments in RT-CVD Technology for ULSI Material Processing and Device Fabrication (2014) (0)
Experimental verification of phononic crystal slab based silicon microresonators (2013) (0)
New Developments in Schottky Source/Drain High-k/Metal Gate CMOS Transistos (2006) (0)
A novel low aspect-ratio Si nano-hemisphere surface texturing scheme for ultrathin film solar cells (2011) (0)
Generation and stabilization of on-chip optical frequency comb (2015) (0)
Transport Characteristics of Si Nanowires in Bulk Silicon and SOI Wafers (2006) (0)
Deterministic resonance and phase control for photonic sub-and super-radiance in coupled nanocavities (2011) (0)
Chip-scale integrated tuning of slow-light in all-optical multi-EIT analogue in photonic crystal cavities (2010) (0)
Ultrathin Ta2O5 Films on Rapid Thermal Nitrided Rugged Polysilicon for High Density DRAMs (1992) (0)
Photonic crystal waveguide coupling analysis using swept wavelength interferometry (2012) (0)
Ultrafast Real-Time Dynamics of Frequency Microcomb Transitions (2020) (0)
All-Si Metasurface Polarizing Bandpass Filter Mass Produced on 12 Inch Wafer (2019) (0)
On-chip Turing pattern formation for coherent high-power THz radiation (2016) (0)
Broadly tunable THz radiation through nonlinear microresonator (2021) (0)
HIGH QUALITY SELECTIVE EPITAXY GROWTH OF SILICON FOR DEVICE ISOLATION (1989) (0)
Si-based epitaxial growth by rapid thermal processing chemical vapor deposition (1991) (0)
Method for forming epitaxial silicon in insulated structure (1989) (0)
Dynamical Chaos in Silicon Cavity Optomechanics for Physically-Encrypted Secure Communications (2019) (0)
Si Quantum Dot TFT Nonvolatile Memory for System-On-Panel Applications (2007) (0)
Growth and Characterization of Germanium on Insulator (GOI) from Sputtered Ge by Novel Single and Dual Necking techniques (2005) (0)
A chip-scale single-photon SWAP gate as integrated interface between polarization and spatial-momentum qubits (2017) (0)
Comprehensive Characterization and Analysis of RTS, 1/f, RF Noise and Power Performances of Schottky-Diode in Standard CMOS (2006) (0)
Broadband χ(2) and χ(3) nonlinear frequency up-conversion from planar silicon nitride microcavities (2019) (0)
Electrical properties of Si-implanted gate oxides (1993) (0)
Stress Mapping of Silicon Surrounded by Various Through Silicon Via (TSV) Patterns using Polychromator-Based Multi-Wavelength Raman Spectroscopy (2010) (0)
radiation-pressure-driven (2014) (0)
Horizontal nanoplasmonic slot waveguide-based subwavelength photonic components for on-chip integration (2011) (0)
Silicon integrated electronic-photonic ICs (2010) (0)
Pt-germanide Formed by Laser Annealing and Its Application for Schottky Source/Drain MOSFET Integrated with TaN/CVD-HfO2/Ge Gate Stack (2007) (0)
Proceedings - Electrochemical Society: Preface (2005) (0)
Switching Behaviors of HfO2/NiSix Based RRAM (2013) (0)
Electrical and Reliability Characteristics of Submicron Nmosfet's with Oxynitride Gate Dielectric Prepared by Rapid Thermal Oxidation in N/sub 2/O (1991) (0)
A tunable laser using double-ring resonator external cavity via free-carrier dispersion effect (2011) (0)
In-situ Multiprocessing ULSI Manufacturing Technology by RTP-CVD (1990) (0)
A novel approach in modeling the diffusion of ion-implanted species during annealing (1995) (0)
Observation of synchronization in air-slot photonic crystal optomechanical oscillator (2017) (0)
Schottky Source/Drain Transistor on Thin SiGe on Insulator Integrated with HfO2/TaN Gate Stack (2006) (0)
Electrical characteristics of n- and p-MOSFETs with N2O-reoxidized NH3-nitrided N2O oxides as gate dielectrics (1995) (0)
Enhanced Thermal Stability of Nickel Germanide with Ultrathin Ti Layer (2007) (0)
Performance and Reliability of Ultrathin Oxynitride Gate Dielectrics Prepared using In-Situ Multiple Rapid Thermal Processing (1989) (0)
Improved radiation hardness of MOS devices with ultrathin nitrided oxide gate dielectrics prepared by rapid thermal processing (1989) (0)
Real-time high-sensitivity sensing of liquid films in microfluidic channels with optofluidic microresonators (2010) (0)
Undoped White Organic Light-Emitting Diodes Utilizing Two Sources of Excitons (2007) (0)
A Novel Approach to fabricate High Ge content SiGe on Insulator from Amorphous SiGe deposited on SOI wafers (2005) (0)
Integrated Fabless Manufacturing : Opportunities and Challenges in the Era of IoT (特集 IoTの現状と動向) (2015) (0)
A Self-Aligned Silicide Technology using Ion-Beam Mixing, Doped Silicide, and Rapid Thermal Processing (1989) (0)
Semiconductor Nanowires: from Growth to Device Applications (Invited) (2008) (0)
Simple quasi-two-dimensional analytical model to characterise the electric field in an LDD MOSFET (1990) (0)
Enhancement-Mode In 0.53 Ga 0.47 As n-MOSFET with Self-aligned Gate-first Process and CVD HfAlO Gate Dielectric (2008) (0)
Development of Si Light Emitting Technology Based on Si Quantum Wires. (1994) (0)
MOCVD 법에 의한 BaxSr1-xTiO3 박막의 물리적 , 전기적 특성에 관한 연구 ( Physical and Electrical Properties of BaxSr1-xTiO3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition ) (1996) (0)
Study on Densification and Oxidation Mechanism during PDA for Minimum EOT of Ultrathin CVD HfO2 (2002) (0)
Thermal Stability of Metal Gate Work Functions (2004) (0)
Dopant Enhanced Low-Temperature Epitaxial Growth by Rapid Thermal Processing Chemical Vapor Deposition (1991) (0)
Investigation of the mutual effect between power link and data link for biomedicai applications (2012) (0)
Interface confiauration and Fermi-level dinnina of fullv silicided aate and hiah-K dielectric stack (2006) (0)
Broadband gate-tunable terahertz plasmons in graphene heterostructures (2017) (0)
Improved crystallization temperature and interfacial properties of HfO/sub 2/ gate dielectrics by adding Ta/sub 2/O/sub 5/ with TaN metal gate (2004) (0)
Mim Capacitors with HfO 2 and HfAlO x for Si RF and Analog Applications (2003) (0)
Ultra-Thin High Quality Oxynitride Formed by NH3 Nitridation and High Pressure O2 Re-oxidation (2000) (0)
A micromachined injection-locked laser via tunable grating mirror (2010) (0)
AN OPTOFLUIDIC TUNABLE PRISM VIA CONTROL OF FLOW RATE RATIO (2010) (0)
Uniaxially Strained SiGe/Si Core/Shell Nanowire pFETs Integrated on Bulk Si with Ni x Si y Ge 1- x - y Source and Drain Contacts (2008) (0)
Vertical Nanowall Array Covered Silicon Solar Cells (2012) (0)
Memory Effect of Device Based on a Conjugated Donor-Acceptor Copolymer (2005) (0)
Near-field observation of zero index bandgaps in negative refraction photonic superlattices (2011) (0)
Dispersion-corrected metasurface for beam deflector and flat lens (2016) (0)
Electrical and Chemical Properties of ultra thin RTMOCVD Deposited Ti-doped Ta₂O 5 (2001) (0)
Sub 100 fs pulse generation via a Si3N4 micro-resonator based frequency comb (2013) (0)
Lotus-Like Dual Soliton Generation and Phase Shifting in an 88 GHz High-Order-Mode-Suppressed Si 3 N 4 Microring (2019) (0)
Boron segregation in As-implanted Si due to electric field and transient enhanced diffusion (1997) (0)
New reliability issues of CMOS transistors with 1.3 nm gate oxide (2003) (0)
High Quality Ultrathin Gate Dielectrics Prepared by In-Situ RTP (1995) (0)
NEMS spectrometer-on-a-chip (2015) (0)
Vertical Silicon Nanowire CMOS Inverter (2012) (0)
Silicon Thin Film with Si Nanopillar Surface Decoration for Solar Cell Application (2009) (0)
A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics (2011) (0)
Superior Immunity to the Effects of Plasma-Induced Charging Damage on the Hot-Carrier Reliability of MOSFET's with NO-nitrided SiO2 Gate Dielectrics (1995) (0)
High quality Si1-xGex nanowire and its application to MOSFET integrated with HfO2/TaN/Ta gate stack (2007) (0)
Hot-Carrier Related Phenomenon in MOSFETs with Furnace N2O-Nitrided Gate Oxides (1993) (0)
Scaling properties of GOI MOSFETs in nano scale by full band Monte Carlo simulation (2004) (0)
A Novel Silicided Shallow Junction Technology for Cmos VLSI (1986) (0)
Si and GexSi1−x Epitaxial Growth on SOI Structures by Rapid Thermal Processing Chemical Vapor Deposition (1991) (0)
100 nm Gate Length Pt-Germanosilicide Schottky S/D PMOSFET on SGOI substrate fabricated by novel condensation approach (2006) (0)
Observations of temporal regenerative oscillations in high-Q heterostructured photonic crystal cavities (2012) (0)
Coherent terahertz radiation with 2.8-octave tunability through chip-scale photomixed microresonator optical parametric oscillation (2022) (0)
Low-voltage carrier-depletion silicon Mach-Zehnder modulator at high temperatures without thermo-electric cooling (2016) (0)
TDDB characteristics of ultra-thin HfN/HfO/sub 2/ gate stack (2004) (0)
Materials and processing issues in the development of N2O/NO-based ultrathin oxynitride gate dielectrics for CMOS ULSI applications (1996) (0)
Polarization-diverse soliton transitions and deterministic switching dynamics in strongly-coupled and self-stabilized microresonator frequency combs (2023) (0)
A High Performance of Single Cell Imaging Detection with Deep Learning (2019) (0)
MOVPE Prepared ZnO/Si Heterojunction Diodes with Dual Functions: Light-Emission and UV Photo-Detection (2007) (0)
High Quality Ultrathin Gate Dielectrics Formation by Thermal Oxidation of Si in N2O. (2010) (0)
CMOS-Compatible Deposited Materials for Photonic Layers Integrated above Electronic Integrated Circuit (2013) (0)
Gate-All-Around 4-nm Silicon Nanowire Schottky Barrier MOSFET with 1-D NiSi Source/Drain (2008) (0)
Design of taper coupler for effective laser and single mode fiber coupling with large tolerance (2007) (0)
Technology and Reliability Aspects of Ultra Thin Dielectrics for ULSI Applications (1993) (0)
Highly Reliable Ultra Thin Gate Dielectrics for Dual-Gate CMOS Devices (1995) (0)
A fully integrated chip-scale optomechanical oscillator (2014) (0)
ALD HfO 2 Based RRAM with Ti Capping R World (2013) (0)
Dual Mode Mid-Infrared Chemical Sensor Using Bragg Wavelength in Subwavelength Grating Incorporated Broadband Directional Coupler (2019) (0)
Highly Manufacturable CMOSFETs with Single High-k (HfLaO) and Dual Metal Gate Integration Process (2007) (0)
Investigation of (HfO2)x(Al2O3)1-x on (100) Si by XPS--energy gap and band alignment (2002) (0)
Design and fabrication of a novel evanescent germanium electro-absorption (EA) modulator (2010) (0)
Microwave frequency mixer in integrated photonic circuits for signal processing (2016) (0)
Cost effective optical coupling for enhanced rate polymer optical fiber communication (2008) (0)
NICAL ( NOM ) ACOUSTIC WAVEFRO VIA RING RESONATORS (2013) (0)
N2O-Based Gate And Tunneling Dielectrics for VLSI Applications (1993) (0)

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