Farrokh Ayazi
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Farrokh Ayaziengineering Degrees
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Electrical Engineering
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Engineering
Farrokh Ayazi's Degrees
- PhD Electrical Engineering University of California, Berkeley
- Masters Electrical Engineering University of California, Berkeley
- Bachelors Electrical Engineering Sharif University of Technology
Why Is Farrokh Ayazi Influential?
(Suggest an Edit or Addition)According to Wikipedia, Farrokh Ayazi is a professor, the director of the Georgia Tech Analog Consortium and the Ken Byers Professor at the Georgia Institute of Technology in Atlanta. He was named Fellow of the Institute of Electrical and Electronics Engineers in 2013 for contributions to micro-electro-mechanical resonators and resonant gyroscopes.
Farrokh Ayazi's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Micromachined inertial sensors (1998) (1351)
- An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations (2003) (381)
- A HARPSS polysilicon vibrating ring gyroscope (2001) (372)
- Process and temperature compensation in a 7-MHz CMOS clock oscillator (2006) (231)
- Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications (2008) (190)
- High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps (2003) (172)
- High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology (2000) (171)
- A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability (2008) (169)
- Effect of phonon interactions on limiting the f.Q product of micromechanical resonators (2009) (165)
- An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon (2008) (145)
- A Sub-0.2$^{\circ}/$ hr Bias Drift Micromechanical Silicon Gyroscope With Automatic CMOS Mode-Matching (2009) (131)
- VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization (2004) (126)
- VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators-part I: design and modeling (2004) (124)
- High Performance Matched-Mode Tuning Fork Gyroscope (2006) (121)
- Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators (2007) (118)
- Sub-Micro-Gravity In-Plane Accelerometers With Reduced Capacitive Gaps and Extra Seismic Mass (2007) (116)
- A 104-dB Dynamic Range Transimpedance-Based CMOS ASIC for Tuning Fork Microgyroscopes (2007) (111)
- Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators (2004) (110)
- A 0.1°/HR bias drift electronically matched tuning fork microgyroscope (2008) (98)
- Micro-gravity capacitive silicon-on-insulator accelerometers (2005) (94)
- Low-cost low actuation voltage copper RF MEMS switches (2002) (93)
- Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators (2007) (93)
- A 4.5-mW Closed-Loop $\Delta\Sigma$ Micro-Gravity CMOS SOI Accelerometer (2006) (91)
- A 2.5-V 14-bit /spl Sigma//spl Delta/ CMOS SOI capacitive accelerometer (2004) (89)
- Multi-DOF inertial MEMS: From gaming to dead reckoning (2011) (78)
- Electrically coupled MEMS bandpass filters: Part II. Without coupling element (2005) (76)
- Temperature Compensation of Silicon Resonators via Degenerate Doping (2012) (75)
- Temperature compensation of silicon micromechanical resonators via degenerate doping (2009) (75)
- A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer (2006) (74)
- A 76 dB$\Omega $ 1.7 GHz 0.18 $\mu$ m CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators (2011) (72)
- 3-D micromachined hemispherical shell resonators with integrated capacitive transducers (2012) (71)
- Thin-film piezoelectric-on-substrate resonators with Q enhancement and TCF reduction (2010) (67)
- Wafer-level MEMS packaging via thermally released metal-organic membranes (2006) (65)
- Support loss in micromechanical disk resonators (2005) (65)
- Electrically coupled MEMS bandpass filters (2005) (63)
- Micromechanical IBARs: Tunable High-$Q$ Resonators for Temperature-Compensated Reference Oscillators (2010) (61)
- Passive TCF compensation in high Q silicon micromechanical resonators (2010) (59)
- Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes (2006) (58)
- Temperature-Stable Silicon Oxide (SilOx) Micromechanical Resonators (2013) (57)
- Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices (2016) (57)
- A high-Q in-plane SOI tuning fork gyroscope (2004) (57)
- High-frequency capacitive disk gyroscopes in (100) and (111) silicon (2007) (56)
- High aspect-ratio polysilicon micromachining technology (2000) (53)
- Design optimization and implementation of a microgravity capacitive HARPSS accelerometer (2006) (51)
- 7E-4 Enhanced Power Handling and Quality Factor in Thin-Film Piezoelectric-on-Substrate Resonators (2007) (50)
- A Low Phase Noise 100MHz Silicon BAW Reference Oscillator (2006) (49)
- MEMS Switched Tunable Inductors (2008) (48)
- A Polysilicon Microhemispherical Resonating Gyroscope (2014) (47)
- A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25 /spl mu/m CMOS interface (2004) (47)
- MEMS for integrated timing and spectral processing (2009) (46)
- High-order composite bulk acoustic resonators (2007) (45)
- One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators (2011) (44)
- A mode-matched 0.9 MHZ single proof-mass dual-axis gyroscope (2011) (43)
- A 500MHz Low Phase-Noise A1N-on-Silicon Reference Oscillator (2007) (43)
- Dual-Mode AlN-on-Silicon Micromechanical Resonators for Temperature Sensing (2014) (43)
- A 27 MHz temperature compensated MEMS oscillator with sub-ppm instability (2012) (43)
- A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films (2020) (42)
- Wafer-Level Packaging of Micromechanical Resonators (2007) (41)
- High-Frequency AlN-on-Silicon Resonant Square Gyroscopes (2013) (40)
- High-Density Embedded Deep Trench Capacitors in Silicon With Enhanced Breakdown Voltage (2009) (39)
- Performance Analysis of Gyroscope and Accelerometer Sensors for Seismocardiography-Based Wearable Pre-Ejection Period Estimation (2019) (37)
- Design of inductors in organic substrates for 1-3 GHz wireless applications (2002) (36)
- A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter (2008) (35)
- Wafer-level vacuum-packaged triaxial accelerometer with nano airgaps (2013) (34)
- A Low-Power Oven-Controlled Vacuum Package Technology for High-Performance MEMS (2009) (33)
- Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals (2020) (33)
- THERMOELASTIC DAMPING IN FLEXURAL-MODE RING GYROSCOPES (2005) (33)
- A low cost wafer-level MEMS packaging technology (2005) (32)
- A 0.2°/hr Micro-Gyroscope with Automatic CMOS Mode Matching (2007) (31)
- Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique (2012) (31)
- The Resonating Star Gyroscope: A Novel Multiple-Shell Silicon Gyroscope With Sub-5 deg/hr Allan Deviation Bias Instability (2009) (31)
- Electrostatically tunable piezoelectric-on- silicon micromechanical resonator for real-time clock (2012) (30)
- Characterization of high-Q spiral inductors on thick insulator-on-silicon (2005) (30)
- A 145MHz low phase-noise capacitive silicon micromechanical oscillator (2008) (29)
- Electrostatic self-calibration of vibratory gyroscopes (2012) (29)
- Multi-axis AlN-on-Silicon vibration energy harvester with integrated frequency-upconverting transducers (2012) (29)
- The resonating star gyroscope (2005) (29)
- Bulk and Surface Thermoelastic Dissipation in Micro-Hemispherical Shell Resonators (2015) (29)
- Sub-micro-gravity capacitive SOI microaccelerometers (2005) (29)
- An Empirical Phase-Noise Model for MEMS Oscillators Operating in Nonlinear Regime (2012) (29)
- A 3D-HARPSS Polysilicon Microhemispherical Shell Resonating Gyroscope: Design, Fabrication, and Characterization (2015) (28)
- High-Q integrated inductors on trenched silicon islands (2005) (28)
- Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units (2017) (28)
- Tunable piezoelectric MEMS resonators for real-time clock (2011) (27)
- Energy Loss Mechanisms in a Bulk-Micromachined Tuning Fork Gyroscope (2006) (27)
- A Dual-Mode Actuation and Sensing Scheme for In-Run Calibration of Bias and Scale Factor Errors in Axisymmetric Resonant Gyroscopes (2018) (26)
- Energy dissipation in micromechanical resonators (2011) (26)
- High Performance Inductors on CMOS-Grade Trenched Silicon Substrate (2008) (25)
- A 76dBΩ 1.7GHz 0.18µm CMOS tunable transimpedance amplifier using broadband current pre-amplifier for high frequency lateral micromechanical oscillators (2010) (24)
- Temperature-Stable High-Q AlN-on-Silicon Resonators with Embedded Array of Oxide Pillars (2010) (24)
- A Digital Phase Demodulation Technique for Resonant MEMS Gyroscopes (2014) (24)
- High performance spiral inductors embedded on organic substrates for SOP applications (2002) (23)
- Process compensated CMOS temperature sensor for microprocessor application (2012) (23)
- A Low-Voltage Temperature-Stable Micromechanical Piezoelectric Oscillator (2007) (23)
- A two-chip, 4-MHz, microelectromechanical reference oscillator (2005) (23)
- Effect of thickness anisotropy on degenerate modes in oxide micro-hemispherical shell resonators (2013) (23)
- Small-bandwidth integrated tunable bandpass filters for GSM applications (2008) (22)
- A high sensitivity z-axis torsional silicon accelerometer (1996) (22)
- Substrate-decoupled silicon disk resonators having degenerate gyroscopic modes with Q in excess of 1-million (2015) (22)
- A dynamically mode-matched piezoelectrically transduced high-frequency flexural disk gyroscope (2015) (21)
- A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope (2000) (21)
- High-Q Micromachined Silver Passives and Filters (2006) (21)
- A high aspect-ratio high-performance polysilicon vibrating ring gyroscope. (2000) (21)
- Monolithic Thin-Film Piezoelectric-on-Substrate Filters (2007) (21)
- A High-Q Length-Extensional Bulk-Modemass Sensor with Annexed Sensing Platforms (2006) (21)
- An FPGA-Based Interface System for High-Frequency Bulk-Acoustic-Wave Microgyroscopes With In-Run Automatic Mode-Matching (2020) (21)
- Acoustically coupled thickness-mode AIN-on-Si band-pass filters-Part II: simulation and analysis (2012) (20)
- Postfabrication Electrical Trimming of Silicon Micromechanical Resonators via Joule Heating (2011) (20)
- Post-Fabrication Electrical Trimming of Silicon Bulk Acoustic Resonators using Joule Heating (2009) (20)
- Combined capacitive and piezoelectric transduction for high performance silicon microresonators (2011) (20)
- Monocrystalline Silicon Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk Acoustic Wave Modes (2019) (20)
- A 7-MHz process, temperature and supply compensated clock oscillator in 0.25 /spl mu/m CMOS (2003) (20)
- Invar-36 Micro Hemispherical Shell Resonators (2014) (20)
- WINEGLASS-ON-A-CHIP (2012) (20)
- Dual-mode piezo-on-silicon resonant temperature and humidity sensor for portable air quality monitoring systems (2010) (19)
- Single-resonator dual-frequency AIN-on-Si MEMS oscillators (2015) (19)
- A 3MHz spoke gyroscope with wide bandwidth and large dynamic range (2010) (18)
- A Temperature-Compensated ZnO-on-Diamond Resonant Mass Sensor (2006) (18)
- Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design (2017) (18)
- TOWARDS INERTIAL GRADE VIBRATORY MICROGYROS: A HIGH-Q IN-PLANE SILICON-ON-INSULATOR TUNING FORK DEVICE (2004) (18)
- Micromechanical IBARs: Modeling and Process Compensation (2010) (18)
- Cascaded collimator for atomic beams traveling in planar silicon devices (2019) (18)
- Compensation, tuning, and trimming of MEMS resonators (2012) (18)
- Single-Crystal Silicon HARPSS Capacitive Resonators with Submicron Gap-Spacing (2002) (18)
- High frequency XYZ-axis single-disk silicon gyroscope (2008) (18)
- Figure 16 (2018) (17)
- High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters (2006) (17)
- Wafer-level-packaged HARPSS+ MEMS platform: Integration of robust timing and inertial measurement units (TIMU) on a single chip (2018) (17)
- A high-performance single-chip timing and inertial measurement unit with robust mode-matched gyroscopes (2018) (17)
- The HARPSS process for fabrication of nano-precision silicon electromechanical resonators (2001) (16)
- A ±0.3 ppm Oven-Controlled MEMS Oscillator Using Structural Resistance-Based Temperature Sensing (2018) (16)
- Electrical characterization of ALD-coated silicon dioxide micro-hemispherical shell resonators (2014) (16)
- Localized Eutectic Trimming of Polysilicon Microhemispherical Resonating Gyroscopes (2014) (16)
- Thermo-acoustic engineering of silicon microresonators via evanescent waves (2015) (15)
- Acoustically-engineered multi-port AlN-on-silicon resonators for accurate temperature sensing (2013) (15)
- Single-Resonator Dual-Frequency Thin-Film Piezoelectric-on-Substrate Oscillator (2007) (15)
- Phase noise shaping via forced nonlinearity in piezoelectrically actuated silicon micromechanical oscillators (2011) (15)
- Acoustically coupled thickness-mode AIN-on-Si band-pass filters-part I: principle and devices (2012) (14)
- Environmentally-robust high-performance tri-axial bulk acoustic wave gyroscopes (2016) (14)
- A packaged micromachined switched tunable inductor (2007) (14)
- A Chopper-Stabilized Lateral-BJT-Input Interface in 0.6μm CMOS for Capacitive Accelerometers (2008) (14)
- 2.06 – Vibrating Gyroscopes (2008) (14)
- Low phase-noise UHF thin-film piezoelectric-on-substrate LBAR oscillators (2008) (14)
- The HARPSS process for fabrication of precision MEMS inertial sensors (2002) (14)
- High-frequency monolithic thin-film piezoelectric-on-substrate filters (2009) (13)
- Hermetic packaging of resonators with vertical feedthroughs using a glass-in-silicon reflow process (2011) (13)
- An out-of-plane "hinge-shaped" nano-gap accelerometer with high sensitivity and wide bandwidth (2017) (13)
- A High-Frequency Resonant Framed-Annulus Pitch or Roll Gyroscope for Robust High-Performance Single-Chip Inertial Measurement Units (2018) (13)
- A dual-mode gyroscope architecture with in-run mode-matching capability and inherent bias cancellation (2015) (12)
- Lamb Waves and Resonant Modes in Rectangular-Bar Silicon Resonators (2010) (12)
- Single-mask reduced-gap capacitive micromachined devices (2005) (12)
- CMOS ASIC for MHz silicon BAW gyroscope (2008) (11)
- Dynamic tuning of MEMS resonators via electromechanical feedback (2015) (11)
- Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals. (2020) (11)
- Gyroscope sensing and self-calibration architecture based on signal phase shift (2016) (11)
- QUALITY FACTOR SENSITIVITY TO CRYSTALLOGRAPHIC AXIS MISALIGNMENT IN SILICON MICROMECHANICAL RESONATORS (2010) (11)
- Combined phase-readout and self-calibration of MEMS gyroscopes (2013) (11)
- Eigenmode operation as a quadrature error cancellation technique for piezoelectric resonant gyroscopes (2017) (11)
- 18µM THICK HIGH FREQUENCY CAPACITIVE HARPSS RESONATORS WITH REDUCED MOTIONAL RESISTANCE (2004) (11)
- Simultaneous dual-mode excitation of piezo-on-silicon micromechanical oscillator for self-temperature sensing (2011) (11)
- Dual-mode vertical membrane resonant pressure sensor (2014) (10)
- HARPSS-fabricated nano-gap comb-drive for efficient linear actuation of high frequency BAW resonators (2016) (10)
- Intrinsic temperature compensation of highly resistive high-Q silicon microresonators via charge carrier depletion (2010) (10)
- A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope (2016) (10)
- A 104dB SNDR Transimpedance-based CMOS ASIC for Tuning Fork Microgyroscopes (2006) (10)
- An Integrated 800-MHz Coupled-Resonator Tunable Bandpass Filter in Silver With a Constant Bandwidth (2009) (10)
- Characterization of A Polymer-Based MEMS Packaging Technique (2006) (9)
- High-Q energy trapping of temperature-stable shear waves with Lamé cross-sectional polarization in a single crystal silicon waveguide (2016) (9)
- Tunable silicon bulk acoustic resonators with multi-face AlN transduction (2011) (9)
- A wide-bandwidth tri-axial pendulum accelerometer with fully-differential nano-gap electrodes (2018) (9)
- High-Q monocrystalline silicon carbide disk resonators fabricated using drie of thick SiC-on-insulator substrates (2018) (9)
- A Gap Reduction and Manufacturing Technique for Thick Oxide Mask Layers With Multiple-Size Sub-$mu$m Openings (2006) (9)
- Laterally-excited silicon bulk acoustic resonators with sidewall AlN (2011) (9)
- A high-g low-voltage HARPSS tunable capacitor (2005) (9)
- Low motional impedance distributed Lamé mode resonators for high frequency timing applications (2020) (9)
- Epitaxially-grown thick polysilicon for baw disk resonator gyroscopes with very low dissipation (2018) (9)
- A Smart Angular Rate Sensor System (2007) (9)
- Fully integrated low-loss band-pass filters for wireless applications (2009) (9)
- Detection of pathological mechano-acoustic signatures using precision accelerometer contact microphones in patients with pulmonary disorders (2021) (9)
- PRECISION HIGH-BANDWIDTH OUT-OF-PLANE ACCELEROMETER AS CONTACT MICROPHONE FOR BODY-WORN AUSCULTATION DEVICES (2018) (9)
- Self-polarized capacitive silicon micromechanical resonators via charge trapping (2010) (9)
- Single proof-mass tri-axial pendulum accelerometers operating in vacuum (2014) (8)
- Eigenmode operation of piezoelectric resonant gyroscopes (2020) (8)
- Poly-Wire-Coupled Single Crystal Silicon HARPSS Micromechanical Filters Using Oxide Islands (2004) (8)
- Effect of structural anisotropy on anchor loss mismatch and predicted case drift in future micro-Hemispherical Resonator Gyros (2014) (8)
- A Novel Offset Calibration Method to suppress Capacitive Mismatch in MEMS Accelerometer (8)
- Analytical Modeling and Numerical Simulation of Capacitive Silicon Bulk Acoustic Resonators (2009) (8)
- A Hermetically-Sealed 2.9MHz $\mathrm{N}=3$ Disk BAW Gyroscope with Sub-Degree-Per-Hour Bias Instability (2020) (8)
- Microscale pierced shallow shell resonators: A test vehicle to study surface loss (2017) (8)
- A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation (2017) (7)
- A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process (2019) (7)
- High-Q Tunable Silver Capacitors for RFIC's (2007) (7)
- Finite Ground Coplanar Lines on CMOS Grade Silicon with a Thick Embedded Silicon Oxide Layer Using Micromachining Techniques (2003) (7)
- High‐frequency Integrated Microelectromechanical Resonators and Filters (2004) (7)
- High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing (2015) (7)
- An electronically temperature-compensated 427MHz low phase-noise AlN-on-Si micromechanical reference oscillator (2010) (7)
- A 4.5mW Closed-Loop /spl Delta//spl Sigma/ Micro-Gravity CMOS-SOI Accelerometer (2006) (7)
- MEMS Inertial Sensors (2015) (7)
- Eutectic trimming of polysilicon micro hemispherical resonating Gyroscope (2013) (7)
- A piezo-capacitive BAW accelerometer with extended dynamic range using a gap-changing moving electrode (2018) (6)
- Shock-protection of nano-gap capacitive MEMS accelerometers using sloped electrode design (2017) (6)
- Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness (2015) (6)
- A High-$k_{t}{}^{2}$ Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator (2020) (6)
- Linear acoustic bandgap arrays for spurious mode suppression in piezoelectric MEMS resonators (2011) (6)
- Temperature compensated MEMS oscillator using structural resistance based temperature sensing (2015) (6)
- High-aspect-ratio sub-micron trench etching on SOI using wet metal-assisted chemical etching (MaCE) process (2016) (6)
- Low-loss MEMS band-pass filters with improved out-of-band rejection by exploiting inductive parasitics (2009) (6)
- A 0.5 mm2 7-mhz capacitive bulk acoustic wave gyroscope in (100) silicon with large dynamic range (2017) (6)
- Distributed Lamé mode resonators for temperature-stable high frequency mems oscillators (2017) (6)
- Novel Readout Scheme for MEMS Vibratory Gyroscopes Based on Signal Phase Shift (2012) (6)
- Multiple-frequency thickness-mode thin-film piezoelectric-on-substrate filter array (2008) (6)
- A Study of Mode-Matching and Alignment In Piezoelectric Disk Resonator Gyros Via Femtosecond Laser Ablation (2021) (5)
- Precise release and insulation technology for vertical Hall sensors and trench-defined MEMS (2004) (5)
- CMOS-Compatible Encapsulated Silver Bandpass Filters (2007) (5)
- A Piezoelectric Resonant Accelerometer for Above 140db Linear Dynamic Range High-G Applications (2019) (5)
- Stiffness trimming of high Q MEMS resonators by excimer laser annealing of germanium thin film on silicon (2016) (5)
- Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gaps (2005) (5)
- A digital force-to-rebalance scheme for high-frequency bulk-acoustic-wave micro-gyroscopes (2020) (5)
- Bulk modes in silicon crystal silicon (2011) (4)
- Three-dimensional, ultra-wideband micromachined millimetre-wave hemispherical shell antenna: theoretical concept and calibration (2016) (4)
- Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications (2019) (4)
- A phase-noise model for nonlinear piezoelectrically-actuated MEMS oscillators (2011) (4)
- MEMS composite structures for tunable capacitors and IC-package nano interconnects (2004) (4)
- Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators (2020) (4)
- ULTRA-HIGH Q MONOCRYSTALLINE SILICON CARBIDEDISK RESONATORS ANCHORED UPON A PHONONIC CRYSTAL (2018) (4)
- High-Q rf passives on organic substrates using a low-cost low-temperature laminate process (2002) (3)
- A dual-axis single-proof-mass angular accelerometer for a vestibular prosthesis. (2016) (3)
- Robust characterization of microfabricated atomic beams on a six-month time scale (2020) (3)
- High-Q Timing and Inertial Measurement Unit Chip (TIMU) with 3D Wafer-Level Packaging (2019) (3)
- Three-dimensional super-wideband micro-antenna for high-resolution millimeter-wave medical imaging (2014) (3)
- Substrate-decoupled 3D micro-shell resonators (2016) (3)
- High-G and High-Bandwidth Bulk Acoustic Wave (BAW) Accelerometers Using a Metal-Less AlN-HARPSS Process With 95 nm Gaps (2020) (3)
- Low-voltage large-value tunable capacitors using selfaligned HARPSS (2008) (3)
- RECONFIGURABLE SIBAR FILTERS WITH SIDEWALL ALUMINUM NITRIDE SIGNAL TRANSDUCTION (2012) (2)
- A temperature compensated biaxial eFM accelerometer in Epi-seal process (2021) (2)
- Ultra-wideband, dual-mode millimeter-wave micro hemispherical shell antenna (2015) (2)
- Environmentally-Robust High-Performance Silicon TIMU Chip (2020) (2)
- SiGe digital frequency dividers with reduced residual phase noise (2009) (2)
- A Band-Reject Nested-PLL Clock Cleaner Using a Tunable MEMS Oscillator (2014) (2)
- Monocrystalline 4H Silicon Carbide-on-Insulator Substrates for Nav-Grade Planar BAW Gyroscopes (2021) (2)
- Silicon-On-Insulator Bulk Acoustic Wave Disk Resonators (2006) (2)
- Finite Ground Coplanar lines on CMOS grade silicon with a thick embedded silicon oxide layer using micromachining techniques (2003) (1)
- A dual-axis single-proof-mass angular accelerometer for a vestibular prosthesis (2016) (1)
- P2G-1 Effect of Nonuniform Loading Layer on Monolithic Thickness-Mode Piezoelectric Filters (2007) (1)
- CMOS Systems and Interfaces for Microgyroscopes (2008) (1)
- AN ANISOTROPIC-WET-ETCHED PITCH OR ROLL MODE-MATCHED GYROSCOPE WITH SLANTED QUADRATURE-CANCELLATION ELECTRODES (2016) (1)
- Capacitive Lamé Mode Resonators in $65\ \mu \mathrm{m}$-Thick Monocrystalline Silicon Carbide with Q-Factors Exceeding 20 Million (2020) (1)
- A 2.5V 14-bit /spl Sigma//spl Delta/ CMOS-SOI capacitive accelerometer (2004) (1)
- APPLICATION OF FLOATING-GATE TRANSISTORS IN FIELD PROGRAMMABLE ANALOG ARRAYS (2005) (1)
- Sensors and MEMS (2007) (1)
- METAL-ORGANIC THIN-FILM ENCAPSULA- TION FOR GRAVIMETRIC GAS MICROSENSORS (2008) (1)
- Monolithic implementation of AlN-on-silicon bandpass filters with a high-Q notch within the passband (2012) (1)
- A band-reject nested-PLL phase-noise reduction scheme for clock-cleaners (2011) (1)
- TEMPERATURE-COMPENSATED TETHERLESS BULK ACOUSTIC PHONON TRAP FOR SELF-OVENIZED OSCILLATORS (2014) (1)
- Multi-dof Inertia (2011) (0)
- IMU-on-a-Chip: MEMS and CMOS Microsystems (2015) (0)
- A Sub-Micro-G Resolution Frequency-Modulated Piezoelectric In-Plane Accelerometer (2021) (0)
- SOIVibrating Micromechanical Resonators and Filters (2006) (0)
- Compact parametric model of capacitive BAW resonators (2011) (0)
- CAREER: advanced temperature compensation techniques for integrated bulk-mode micro and nano mechanical resonators (2010) (0)
- Finite GroundCoplanar Lines on CMOS GradeSilicon with a ThickEmbeddedSilicon OxideLayerUsing Micromachining Techniques (2003) (0)
- A 100 MHz MEMS SiBAR phase modulator for quadrature phase shift keying (2012) (0)
- AL MEMS: FROM GAMING TO DEAD R (2011) (0)
- Is fabless MEMS fabulous? (2009) (0)
- HIGH FREQUENCY ZNO-ON-DIAMOND MONOLITHIC FILTERS (2008) (0)
- Lamb Waves and Resonant Modes in (2010) (0)
- QUALITY FACTOR SE SITIVITY TO CRYSTALLOGRAPHIC AXIS MISALIG ME T I SILICO MICROMECHA ICAL RESO ATORS (2010) (0)
- ACOUSTIC BANDGAP STRUCTURES F N-ON-SILICON MICROMECHANICAL (2011) (0)
- ONE-DIMENSIONAL LINEAR A ENHANCEMENT OF ALN Georgia Ins (0)
- Session 17 Overview: MEMS and Sensors (2004) (0)
- Near source fluorescence spectroscopy for miniaturized thermal atomic beams (2019) (0)
- Stimulated Laser Cooling Using Microfabrication (2022) (0)
- MEMS and microsystems for navigation, sensing, and spectral processing (2012) (0)
- Integrating Solution-Derived 3D PZT Structures on Si Mems Platform for RF and Biomedical Applications (2006) (0)
- A Multi-Directional Single-Proof-Mass Accelerometer Contact Microphone (Accelophone) with 10Khz Open-Loop Bandwidth (2021) (0)
- A Phase-Noise Model for Nonlinear (2011) (0)
- Analysis Of MEMS Accelerometer Sensor Using The Taguchi Optimization Method (2015) (0)
- MEMS & Sensors (2008) (0)
- Eigenmode operation of piezoelectric resonant gyroscopes (2020) (0)
- Through-silicon-via process development (2010) (0)
- A High-Order Membrane Resonator Array For Gravimetric Ammonia Sensing with Sub-Ppm Limit of Detection (2022) (0)
- CMOS Systems and Interfaces for Sub-Deg/Hr Microgyroscopes (2017) (0)
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