Frank Scholze
German librarian
Frank Scholze's AcademicInfluence.com Rankings

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Philosophy
Frank Scholze's Degrees
- Masters Library Science University of Hamburg
Why Is Frank Scholze Influential?
(Suggest an Edit or Addition)According to Wikipedia, Frank Scholze is a German librarian. Since January 2020 he serves as the Director General of the German National Library. Education and career Scholze studied library and information science at the Stuttgart Media University, as well as art history and English literature at the University of Stuttgart. He started his professional career at the University of Stuttgart Library where he worked as project manager in various projects on digital libraries. Later he also worked there as a subject specialist and Head of the Public Services Department. After serving for two years at the Ministry of Science research and The Arts Baden-Württemberg he was appointed Librarian of the Karlsruhe Institute of Technology in January 2010. In 2016 he was elected to the Board of the German Library Association and re-elected for a second term of office in 2019.
Frank Scholze's Published Works
Published Works
- A quarter‐century of metrology using synchrotron radiation by PTB in Berlin (2009) (137)
- Making Research Data Repositories Visible: The re3data.org Registry (2013) (135)
- Mean energy required to produce an electron-hole pair in silicon for photons of energies between 50 and 1500 eV (1998) (133)
- Modelling the response function of energy dispersive X-ray spectrometers with silicon detectors (2009) (118)
- High-accuracy radiometry in the EUV range at the PTB soft x-ray beamline (2003) (112)
- X-ray CCD calibration for the AXAF CCD Imaging Spectrometer (1996) (90)
- Recent developments of wide-bandgap semiconductor based UV sensors (2009) (89)
- High-accuracy EUV metrology of PTB using synchrotron radiation (2001) (86)
- Determination of the electron–hole pair creation energy for semiconductors from the spectral responsivity of photodiodes (2000) (85)
- Late Paleozoic–early Mesozoic continental biostratigraphy — Links to the Standard Global Chronostratigraphic Scale (2020) (85)
- Measurement of detection efficiency and response functions for an Si(Li) x-ray spectrometer in the range 0.1-5 keV (2001) (80)
- High precision soft x‐ray reflectometer (1995) (73)
- Characterization of a windowless Si(Li) detector in the photon energy range 0.1-5 keV (1994) (69)
- Effect of line roughness on the diffraction intensities in angular resolved scatterometry (2010) (67)
- Design of ion energy distributions by a broad beam ion source (1996) (65)
- Low energy response of silicon pn-junction detector (1996) (63)
- Robust UV/VUV/EUV PureB Photodiode Detector Technology With High CMOS Compatibility (2014) (60)
- Characterization of photodiodes as transfer detector standards in the 120 nm to 600 nm spectral range (1998) (56)
- The PTB high-accuracy spectral responsivity scale in the VUV and x-ray range (2006) (52)
- re3data.org – REgistry of REsearch data REpositories (2015) (52)
- Characterization of the PTB EUV reflectometry facility for large EUVL optical components (2003) (51)
- Progress in Mo/Si multilayer coating technology for EUVL optics (2000) (51)
- Improved methodology of ‘conchostracan’ (Crustacea: Branchiopoda) classification for biostratigraphy (2015) (51)
- Plane grating monochromator beamline for VUV radiometry (1994) (51)
- Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology (2011) (50)
- Nitrogen diffusivity in expanded austenite (2003) (47)
- Optimisation and characterisation of a TCP type RF broad beam ion source (2001) (47)
- An Image Mapping Approach to U‐Pb LA‐ICP‐MS Carbonate Dating and Applications to Direct Dating of Carbonate Sedimentation (2018) (46)
- A maximum likelihood approach to the inverse problem of scatterometry. (2012) (45)
- The EUV metrology program of PTB (2006) (44)
- Characterization of detectors for extreme UV radiation (2006) (43)
- Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates (2009) (42)
- Calibration and characterization of semiconductor X-ray detectors with synchrotron radiation (2006) (42)
- Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM (2014) (42)
- The Landscape of Research Data Repositories in 2015: A re3data Analysis (2017) (41)
- The Determination of the Efficiency of Energy Dispersive X-Ray Spectrometers by a New Reference Material (2006) (41)
- A unique ECR broad beam source for thin film processing (2001) (41)
- Lack of proportionality of total electron yield and soft x-ray absorption coefficient (2000) (40)
- Pure boron-doped photodiodes: A solution for radiation detection in EUV lithography (2008) (39)
- Early Triassic Conchostracans (Crustacea: Branchiopoda) from the terrestrial Permian–Triassic boundary sections in the Moscow syncline (2015) (39)
- Measurement of the mean electron‐hole pair creation energy in crystalline silicon for photons in the 50–1500 eV spectral range (1996) (38)
- Detector calibration at the PTB radiometry laboratory at BESSY (1996) (37)
- Pre-Flight Calibration of LYRA, the Solar VUV Radiometer on board PROBA2 (2009) (36)
- New PTB beamlines for high-accuracy EUV reflectometry at BESSY II (2000) (35)
- Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering. (2012) (34)
- Reflection of ultraviolet light at 121.6 nm from rough surfaces (1995) (34)
- X-ray detector calibration in the PTB radiometry laboratory at the electron storage ring BESSY II (2000) (34)
- CALIBRATION OF CHARGE COUPLED DEVICES AND A PINHOLE TRANSMISSION GRATING TO BE USED AS ELEMENTS OF A SOFT X-RAY SPECTROGRAPH (1997) (34)
- Late Pennsylvanian–Early Triassic conchostracan biostratigraphy: a preliminary approach (2016) (34)
- Radiometric characteristics of new diamond PIN photodiodes (2006) (33)
- Molecular contamination mitigation in EUVL by environmental control (2002) (32)
- Novel EUV mask absorber evaluation in support of next-generation EUV imaging (2018) (32)
- Radiometry with synchrotron radiation at the PTB laboratory at Bessy ii (2002) (32)
- High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application (2009) (32)
- Current capabilities at the Metrology Light Source (2012) (32)
- Absolute calibration of a multilayer-based XUV diagnostic (2002) (31)
- NICER instrument detector subsystem: description and performance (2016) (30)
- Electron-beam-deposited Mo/Si and MoxSiy/Si multilayer x-ray mirrors and gratings (1994) (30)
- Irradiation stability of silicon photodiodes for extreme-ultraviolet radiation. (2003) (29)
- Performance of diamond detectors for VUV applications (2006) (29)
- Reducing EUV mask 3D effects by alternative metal absorbers (2017) (28)
- Characterization of a modular broad beam ion source (1998) (28)
- Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements (2016) (28)
- Thermal stability of Mo/Si multilayer soft-X-ray mirrors fabricated by electron-beam evaporation (1994) (27)
- High-accuracy detector calibration for EUV metrology at PTB (2002) (27)
- The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks (2007) (26)
- Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry. (2012) (26)
- Diamond detectors for LYRA, the solar VUV radiometer on board PROBA2 (2006) (26)
- Inductive coupled radio frequency plasma bridge neutralizer. (2008) (26)
- Surface-Charge-Collection-Enhanced High-Sensitivity High-Stability Silicon Photodiodes for DUV and VUV Spectral Ranges (2012) (26)
- Quantum efficiencies of gold and copper photocathodes in the VUV and X-ray range (2000) (25)
- Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry. (2012) (25)
- Nitriding of austenitic stainless steel by pulsed low energy ion implantation (2010) (25)
- Metrology of EUV masks by EUV-scatterometry and finite element analysis (2008) (25)
- High-accuracy EUV reflectometry at large optical components and oblique incidence (2009) (24)
- Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography (1999) (24)
- A multistratigraphic approach to pinpoint the Permian-Triassic boundary in continental deposits: The Zechstein-Lower Buntsandstein transition in Germany (2017) (24)
- Multilayer reflectance during exposure to EUV radiation (2000) (24)
- High-accuracy calibration of the HXDS HPGe detector at the PTB radiometry laboratory at BESSY (1997) (23)
- Precision soft x-ray reflectometry of curved multilayer optics (1992) (23)
- Characterization of extreme ultraviolet masks by extreme ultraviolet scatterometry (2004) (23)
- Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver (2017) (23)
- Alternative materials for high numerical aperture extreme ultraviolet lithography mask stacks (2015) (23)
- Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams (2017) (23)
- Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation (2008) (23)
- Rigorous FEM simulation of EUV masks: influence of shape and material parameters (2006) (23)
- Stability Characterization of High-Sensitivity Silicon-Based EUV Photodiodes in a Detrimental Environment (2013) (23)
- X-ray response of epitaxial GaAs (1999) (23)
- EUV and DUV scatterometry for CD and edge profile metrology on EUV masks (2009) (22)
- Calibration of space instrumentation with synchrotron radiation (2006) (22)
- Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence. (2018) (22)
- Imaging impact of multilayer tuning in EUV masks, experimental validation (2014) (22)
- Status of EUV reflectometry at PTB (2005) (22)
- Spectral responsivity of silicon photodiodes: high-accuracy measurement and improved self-calibration in the soft x-ray spectral range (1996) (21)
- New laboratory EUV reflectometer for large optics using a laser plasma source (2003) (21)
- Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errors (2014) (21)
- Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers (2017) (21)
- Conchostracans in continental deposits of the Zechstein–Buntsandstein transition in central Germany: Taxonomy and biostratigraphic implications for the position of the Permian–Triassic boundary within the Zechstein Group (2016) (21)
- Correlated Diffuse X-ray Scattering from Periodically Nano-Structured Surfaces (2015) (21)
- High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges (2011) (21)
- Conchostracans in continental deposits of the Zechstein–Buntsandstein transition in central Germany: Taxonomy and biostratigraphic implications for the position of the Permian–Triassic boundary within the Zechstein Group (2016) (21)
- Detection efficiency of energy-dispersive detectors with low-energy windows (2005) (20)
- Electrical and Optical Performance Investigation of Si-Based Ultrashallow-Junction $\hbox{p}^{+}\hbox{-}\hbox{n}$ VUV/EUV Photodiodes (2012) (20)
- Broad-band efficiency calibration of ITER bolometer prototypes using Pt absorbers on SiN membranes. (2013) (19)
- An EUV beamsplitter based on conical grazing incidence diffraction. (2012) (19)
- Characterization of the polarization properties of PTB's EUV reflectometry system (2010) (19)
- Detector Calibration and Measurement of Fundamental Parameters for X-Ray Spectrometry (2006) (19)
- Use of EUV scatterometry for the characterization of line profiles and line roughness on photomasks (2008) (19)
- Late Permian conchostracans (Crustacea, Branchiopoda) from continental deposits in the Moscow Syneclise, Russia (2018) (18)
- The response functions of the HEPC/LEPC detector system measured at the Xe L edge region (1995) (18)
- Fundamental mechanisms of titanium nitride formation by d.c. magnetron sputtering (1992) (18)
- Broad Beam Ion Sources for Electrostatic Space Propulsion and Surface Modification Processes: From Roots to Present Applications (2007) (18)
- Metrology tools for EUVL-source characterization and optimization (2003) (18)
- Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold (2018) (18)
- First steps towards a scatterometry reference standard (2012) (18)
- Lifetime testing of EUV optics using intense synchrotron radiation at the PTB Radiometry Laboratory (2001) (17)
- Quantum efficiency of the XMM pn-CCD camera (1999) (17)
- New PTB reflectometer for the characterization of large optics for the extreme-ultraviolet spectral region (2002) (17)
- Calibration of energy-dispersive X-ray detectors at BESSY I and BESSY II (2001) (17)
- Update on optical material properties for alternative EUV mask absorber materials (2017) (16)
- Modeling of broad beam ion sources (1998) (16)
- Absolute calibration of ACIS x-ray CCDs using calculable undispersed synchrotron radiation (2000) (16)
- CHARACTERISING A SI(LI) DETECTOR ELEMENT FOR THE SIXA X-RAY SPECTROMETER (1997) (16)
- Status of EUV reflectometry at PTB (2005) (15)
- The Metrology Light Source – The new dedicated electron storage ring of PTB ☆ (2007) (15)
- Ni-Al Alloys as Alternative EUV Mask Absorber (2018) (15)
- Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB (2006) (15)
- An advanced electric propulsion diagnostic (AEPD) platform for in-situ characterization of electric propulsion thrusters and ion beam sources (2016) (15)
- Generation of a pulsed ion beam with a tuned electronic beam switch (2003) (14)
- Quantum efficiency measurements of eROSITA pnCCDs (2010) (14)
- A new approach to ion beam modelling (1997) (14)
- An accurate determination of the K‐shell X‐ray fluorescence yield of silicon (2012) (14)
- Reflectivity of Mo/Si multilayer systems for EUVL (1999) (14)
- Characterization of eROSITA PNCCDs (2013) (14)
- Development of superconducting tunnel junction detectors for high-resolution X-ray spectroscopy (2000) (14)
- Note: An advanced in situ diagnostic system for characterization of electric propulsion thrusters and ion beam sources. (2010) (14)
- Optimal sets of measurement data for profile reconstruction in scatterometry (2007) (14)
- Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings. (2019) (14)
- High-accuracy calibration of the HXDS flow-proportional counter for AXAF at the PTB laboratory at BESSY (1998) (14)
- Mo0.5Si0.5/Si multilayer soft x-ray mirrors, high thermal stability, and normal incidence reflectivity (1993) (13)
- Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft X-ray region (1996) (13)
- Characterization of a broad ion beam source by determination of the energy flux (2003) (13)
- Effect of substrate roughness on Mo/Si multilayer optics for EUVL produced by UHV-e-beam evaporation and ion polishing (2003) (13)
- Polarization dependence of multilayer reflectance in the EUV spectral range (2006) (13)
- In-situ temperature, grid curvature, erosion, beam and plasma characterization of a gridded ion thruster RIT-22 (2009) (13)
- Computational methods estimating uncertainties for profile reconstruction in scatterometry (2008) (13)
- Metadata Schema for the Description of Research Data Repositories : version 3.0 (2015) (13)
- Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering. (2017) (13)
- Performance and Properties of Ultra-Thin Silicon Nitride X-ray Windows (2014) (13)
- Calibration measurements on the DEPFET Detectors for the MIXS instrument on BepiColombo (2014) (12)
- On the X-ray transmission properties of multilayer windows (1994) (12)
- Developing a Grid-Based Search and Categorization Tool (2003) (12)
- The Metrology Light Source — the New Dedicated Electron Storage Ring of PTB (2007) (12)
- Irradiation Damage Tests on Backside-Illuminated CMOS APS Prototypes for the Extreme Ultraviolet Imager On-Board Solar Orbiter (2013) (12)
- Linearity of silicon photodiodes for EUV radiation (2004) (12)
- Item-level usage statistics: A review of current practices and recommendations for normalization and exchange (2009) (12)
- Plasma and ion beam characterization by non-conventional methods (2004) (12)
- Establishing a Research Information System as Part of an Integrated Approach to Information Management: Best Practice at the Karlsruhe Institute of Technology (KIT) (2012) (11)
- Grazing Incidence Small Angle X-Ray Scattering ( GISAXS ) on Small Targets Using Large Beams (2018) (11)
- Validation of the uncertainty budget for soft X-ray radiant power measurement using a cryogenic radiometer (2002) (11)
- Characterization of Backside-Illuminated CMOS APS Prototypes for the Extreme Ultraviolet Imager On-Board Solar Orbiter (2013) (11)
- Project GRACE: A grid based search tool for the global digital library (2004) (11)
- An enigmatic ‘conchostracan’ fauna in the eastern Dead Sea region of Jordan: First records of Rossolimnadiopsis Novozhilov from the Early Triassic Ma'in Formation (2017) (11)
- Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability (2000) (11)
- Extension of PTB's EUV metrology facilities (2012) (11)
- Optical metrology of micro- and nanostructures at PTB: status and future developments (2008) (11)
- First comparison of spectral responsivity in the soft x-ray region (2012) (10)
- Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures (2020) (10)
- Single-layer mirrors for advanced research light sources (2010) (10)
- Modeling and empirical characterization of the polarization response of off-plane reflection gratings. (2016) (10)
- Reinvestigation of conchostracans (Crustacea: Branchiopoda) from the Permian–Triassic transition in Southwest China (2020) (10)
- Measurement and calculation of the spatial and spectral distribution of wavelength shifter radiation at BESSY (1996) (10)
- High-throughput EUV reflectometer for EUV mask blanks (2004) (10)
- Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing (2015) (10)
- Measuring Research Impact in an Open Access Environment (2007) (10)
- Extended asymmetric-cut multilayer X-ray gratings. (2015) (10)
- Absolute calibration of the AXAF telescope effective area (1997) (10)
- Optical and electrical properties of amorphous hydrogenated carbon layers deposited by dc plasma decomposition (1992) (10)
- On the factors governing the energy resolution of Ta-based superconducting tunnel junctions (1999) (10)
- Single-layer and multilayer mirrors for current and next-generation light sources (2008) (10)
- Characterization of the measurement uncertainty of a laboratory EUV reflectometer for large optics (2006) (9)
- Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold (2018) (9)
- CNTs in the context of EUV pellicle history (2018) (9)
- Absolute total electron yield of Au(111) and Cu(111) surfaces (1999) (9)
- Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology (2004) (9)
- Update on EUV radiometry at PTB (2016) (9)
- Sub-aperture EUV collector with dual-wavelength spectral purity filter (2015) (9)
- Plasma and particle flux characterization of the a-C:H deposition process by ion-assisted methods (1991) (9)
- Modelling line edge roughness in periodic line-space structures by Fourier optics to improve scatterometry (2014) (9)
- In Situ Thermal Characterization of the Accelerator Grid of an Ion Thruster (2011) (9)
- DINI institutional repository certification and beyond (2006) (9)
- LIBER Open Science Roadmap (2018) (8)
- Characterization of a laser-produced plasma source for a laboratory EUV reflectometer (2003) (8)
- Nanometrology on gratings with GISAXS: FEM reconstruction and fourier analysis (2014) (8)
- The radiation entrance window of pn junction detectors (1995) (8)
- AXAF HXDS germanium solid state detectors (1997) (8)
- Phyloblattidae and Compsoblattidae (Insecta, Blattodea) from the late Carboniferous Souss basin, Morocco (2019) (8)
- EUV optical characterization of alternative membrane materials for EUV pellicles (2017) (8)
- Metrology in the soft x-ray range: from EUV to the water window (2008) (8)
- Modeling the Chandra high-energy transmission gratings below 2 keV (2000) (8)
- Electrical performance optimization of a silicon-based EUV photodiode with near-theoretical quantum efficiency (2011) (8)
- The effect of line roughness on the reconstruction of line profiles for EUV masks from EUV scatterometry (2010) (8)
- Investigation of 3D patterns on EUV masks by means of scatterometry and comparison to numerical simulations (2011) (8)
- High-accuracy x-ray detector calibration at PTB (2004) (8)
- Large-format distributed read-out imaging devices for X-ray imaging spectroscopy (2002) (7)
- Characterization of nano-structured surfaces by EUV scatterometry (2011) (7)
- Role of dynamic effects in the characterization of multilayers by means of power spectral density. (2014) (7)
- First steps towards traceability in scatterometry (2011) (7)
- A holistic metrology sensitivity study for pattern roughness quantification on EUV patterned device structures with mask design induced roughness (2018) (7)
- Empfehlungen zur Open-Access-Transformation: strategische und praktische Verankerung von Open Access in der Informationsversorgung wissenschaftlicher Einrichtungen (2016) (7)
- Comparison of extreme ultraviolet reflectance measurements (2003) (7)
- UV and VUV calibration capabilities at the Metrology Light Source for solar and atmospheric research (2013) (7)
- Performance and spectroscopic behaviour of DePFET macropixels (2009) (7)
- Determination of optical constants of thin films in the EUV. (2022) (7)
- Forschungsinformation in Deutschland: Anforderungen, Stand und Nutzen existierender Forschungsinformationssysteme. Workshop Forschungsinformationssysteme 2011 (2012) (7)
- Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography (2019) (7)
- The X-ray response of CdZnTe detectors to be used as future spectroscopic detectors for X-ray astronomy (1998) (7)
- Developments in calibration of EUV and VUV detectors for solar orbiter instrumentation using synchrotron radiation (2016) (7)
- Calibration of a Si(Li) detector system with different radiation entrance windows (1991) (7)
- Vocabulary for the Registration and Description of Research Data Repositories. Version 1.0 (2012) (7)
- Improved blattoid insect and conchostracan zonation for the Late Carboniferous, Pennsylvanian, of Euramerica (2021) (7)
- Polarization resolved measurements with the new EUV ellipsometer of PTB (2015) (6)
- Comparison of CD measurements of an EUV photomask by EUV scatterometry and CD-AFM (2013) (6)
- Determination of line profiles on photomasks using DUV, EUV, and x-ray scattering (2014) (6)
- Laboratory LPP EUV reflectometer working with non-polarized radiation (2005) (6)
- Refined extreme ultraviolet mask stack model. (2021) (6)
- Report on the activities of the Nonmarine-Marine Correlation Working Group for 2014 – program for 2015 and future tasks (2014) (6)
- Oldest known naiaditid bivalve from the high-latitude Late Devonian (Famennian) of South Africa offers clues to survival strategies following the Hangenberg mass extinction (2017) (6)
- High-accuracy detector calibration in the 3-1500 eV spectral range at the PTB radiometry laboratory. (1998) (6)
- Metrology tools for EUV-source characterization and optimization (2004) (6)
- Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range (2014) (6)
- Detector calibration at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt in the VUV and soft x-ray spectral ranges using synchrotron radiation (1995) (6)
- Absolute Responsivity of Silicon Photodiodes in the X-ray Range (2004) (6)
- Early–Middle Triassic fluvial ecosystems of Mallorca (Balearic Islands): Biotic communities and environmental evolution in the equatorial western peri-Tethys (2021) (6)
- Modeling the diffraction efficiencies of the AXAF high-energy transmission gratings: II (1995) (6)
- Report on the CCPR Pilot Comparison: Spectral Responsivity 10 nm to 20 nm (2010) (6)
- First Permian Occurrence of the Shark Egg Capsule Morphotype Palaeoxyris Brongniart, 1828 (2016) (6)
- Evaluation of measurement uncertainties in EUV scatterometry (2009) (6)
- EUV-angle resolved scatter (EUV-ARS): a new tool for the characterization of nanometre structures (2018) (6)
- Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask (2021) (5)
- Lifetime test on EUV photomask with EBL2 (2019) (5)
- Ion Beam Characterisation of the RIT 10 Ion Thruster (2003) (5)
- Compound Semiconductor Detectors for X-Ray Astronomy: Spectroscopic Measurements and Material Characteristics (1997) (5)
- Middle Triassic conodont assemblages from the Germanic Basin: implications for multi-element taxonomy and biogeography (2019) (5)
- The anisotropy in the optical constants of quartz crystals for soft X-rays (2020) (5)
- Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application (2012) (5)
- Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. (2021) (5)
- A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence (2020) (5)
- The spectral redistribution function of eROSITA PNCCDs (2011) (5)
- Performance of transmission filters for EUV and soft x-ray astronomy (1996) (4)
- Finite element analysis of EUV lithography (2007) (4)
- Irradiation of EUV multilayer optics with synchrotron radiation of a different time structure (2002) (4)
- Schema for the Description of Research Data Repositories - RFC Version 2.2 (2014) (4)
- Joint Research on Scatterometry and AFM Wafer Metrology (2011) (4)
- Polarization dependence of multilayer reflectance in the EUV spectral range (2007) (4)
- Modelling of a radio frequency plasma bridge neutralizer (RFPBN) (2017) (4)
- Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction (2019) (4)
- PDF (Portable Document Format) (1997) (4)
- Making Research Data Repositories Visible:The re3data.org Registry (2014) (4)
- Diffraction Efficiency Testing of Sinusoidal and Blazed Off-Plane Reflection Gratings (2016) (4)
- Characteristic diffuse scattering from distinct line roughnesses (2017) (4)
- The soft x‐ray transmission properties of thin polyimide windows and their application to future detectors (1995) (4)
- Soft x-ray reflectometer for large and complex samples using synchrotron radiation (1994) (4)
- Scalable large volume ECR plasma generation for low pressure applications (1997) (4)
- Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering (2015) (4)
- Study of EUV reticle storage effects through exposure on EBL2 and NXE (2020) (4)
- Linearity tests of silicon photodiodes for EUV radiation (2005) (4)
- Advanced Electric Propulsion Diagnostic Tools at IOM (2017) (4)
- International Workshop on Institutional Repositories and Enhanced and Alternative Metrics of Publication Impact, 20-21 February 2006, Humboldt University Berlin. Report (2006) (4)
- Validation of optical constants in the EUV spectral range (2019) (3)
- Synchrotron Radiation for the Characterization of Energy Dispersive X-ray Spectrometers (2004) (3)
- X-Ray Detectors and XRF Detection Channels (2006) (3)
- Schema for the description of research data repositories : version 2.1 (2013) (3)
- Large-format distributed readout imaging devices for x-ray imaging spectroscopy (2002) (3)
- Retrieval on the Grid : results from the European Project GRACE (Grid Search and Categorization Engine) (2006) (3)
- EUV and x-ray scattering methods for CD and roughness measurement (2011) (3)
- Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum (2018) (3)
- Positionspapier Forschungsdaten Arbeitsgruppe âElektronisches Publizierenâ (2009) (3)
- Investigating surface structures by EUV scattering (2017) (3)
- Nutzungsstatistiken elektronischer Publikationen (2007) (3)
- The EUI flight instrument of Solar Orbiter: from optical alignment to end-to-end calibration (2018) (3)
- Qualification of the AEPD System as a Standard On-Ground Tool for Electric Propulsion Thruster (2015) (3)
- Streulichtarme holografische Blaze-Gitter für den EUV-Bereich (2014) (3)
- Report on the activities of the Late Carboniferous – Permian – Early Triassic Nonmarine-Marine Correlation Working Group for 2016 and 2017 (2017) (3)
- Institutional Repositories and Enhanced and Alternative Metrics of Publication Impact (2006) (3)
- Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region. (1995) (3)
- Fabrication, thermal stability, and reflectivity measurements of Mo/Si multilayers as x-ray mirrors and other optical components (1993) (3)
- Determination of line profiles on nano-structured surfaces using EUV and x-ray scattering (2014) (3)
- Recent results on the factors governing the energy resolution in compound semiconductors to be used as future spectroscopic detectors for hard x-ray astronomy (1998) (3)
- Triassic clam shrimps ("Conchostraca"; Branchiopoda: Diplostraca) from Mallorca: Taxonomic description and interregional comparisons. (2021) (3)
- Online Publikationsverbund der Universität Stuttgart (OPUS) (1997) (3)
- Das DINI-Zertifikat – Qualitätskontrolle für Dokumenten- und Publikationsserver (2005) (3)
- Goldene und grüne Strategie des Open Access - Übersicht und Vergleich (2006) (3)
- Two-Photon Laser-Induced Fluorescence in a Radiofrequency Ion Thruster Plume in Krypton (2019) (2)
- Absolute calibration of the Chandra X-ray Observatory: transfer standard solid state detectors (1999) (2)
- Two-Photon Laser-Induced Fluorescence Diagnostics of a Radiofrequency Ion Thruster: Measurements in Xenon and Krypton (2019) (2)
- Optimized EUV mask absorber stack for improved imaging by reducing roughness and crystallinity of alternative absorber materials (2016) (2)
- Laser-Induced Fluorescence in the Plume of a Radiofrequency Ion Thruster: Measurements and Excitation Schemes (2019) (2)
- A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence (2019) (2)
- Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region (1994) (2)
- re3data - Open infrastructure for Open Science (2019) (2)
- Profile reconstruction in EUV scatterometry: Modeling and uncertainty estimates (2009) (2)
- Development of a scatterometry reference standard (2014) (2)
- Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle (2013) (2)
- Single- and two-photon absorption laser-induced fluorescence spectroscopy in rare gases for gridded ion thruster diagnostics (2022) (2)
- DINI Certificate for Open Access Repositories and Publication Services 2016 (2017) (2)
- re3data.org - Establishing a registry of research data repositories (2013) (2)
- Ion current density profile control of a scalable linear ion source and its application (2006) (2)
- Modeling EUV mask using alternative materials for mask 3D effect compensation (2015) (2)
- Fabrication and performance of linear multilayer gratings in the 44-130 angstrom wavelength range (1993) (2)
- Challenges in nanometrology: high precision measurement of position and size (2014) (2)
- Absolute dose calibration in PIII (2004) (2)
- The new Permian–Triassic paleomagnetic pole for the East European Platform corrected for inclination shallowing (2018) (2)
- Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with grazing-incidence small-angle X-ray scattering (2019) (2)
- E-Science-Tage 2019: Data to Knowledge (2020) (2)
- Qualitätssicherung durch das DINI-Zertifikat (2007) (2)
- Online Publikationsverbund: Erfassung und Organisation elektronischer Hochschulschriften (1999) (2)
- Integration und Verarbeitung Multimedialer Dokumente in Digitalen Bibliotheken - Der MAVA-Ansatz (2001) (2)
- Stand und Perspektive des globalen Verzeichnisses von Forschungsdaten-Repositorien re3data.org (2015) (2)
- Autorenidentifikation für wissenschaftliche Publikationen. Bericht über den Workshop der DINI-AG Elektronisches Publizieren auf dem 6. Bibliothekskongress (2016) (2)
- Open Access und Forschungsdaten (2016) (1)
- Advanced Electric Propulsion Diagnostics (2012) (1)
- Internationalisation of information services for publishers' open access policies: the DINI multilingual integration layer (2008) (1)
- High speed reflectometer for EUV mask-blanks (2005) (1)
- Photon detector calibration in the EUV spectral range at PTB (2019) (1)
- Building an E-Publications Infrastructure (2005) (1)
- Electric Propulsion Thruster Diagnostic Activities at IOM IEPC-2015-392 (2015) (1)
- High speed reflectometer for EUV mask-blanks (2005) (1)
- Bibliothekarische Analyse von Publikationen an der Universität Stuttgart und Verfeinerung des organisatorischen und technischen Konzepts (1997) (1)
- Calibration of Detectors and Tools for EUV-Source Metrology (2006) (1)
- Forschungsinformationssysteme in Deutschland und die Rolle der Bibliotheken (2014) (1)
- MAVA - Entwicklung und Integration eines erweiterbaren multimedialen Dokumentationssystems (1999) (1)
- Technik. Ein Jahr DINI-Zertifikat für Dokumenten- und Publikationsserver (2005) (1)
- Diffraction efficiency of radially-profiled off-plane reflection gratings (2015) (1)
- Characterization of thin film CCD filters on board the German astronomy satellite ABRIXAS by soft x-ray transmission measurements (1999) (1)
- Ion analytical characterisation of the RIT 22 ion thruster (2007) (1)
- Plasmadiagnostics in the Plume of a Radiofrequency Ion Thruster (2013) (1)
- DINI-Zertifikat fuer Open-Access-Repositorien und -Publikationsdienste 2013 (2013) (1)
- Characterization of optical material parameters for EUV Lithography applications at PTB (2015) (1)
- Characterization of an RF excited broad beam ion source operating with inert gases (2021) (1)
- Zeitschriftenevaluation an der Universität Stuttgart: oder Ist die inhaltliche Bewertung ein hinreichendes Kriterium für Zeitschriftenabbestellungen? (2004) (1)
- Selective measurement of small metrology targets using CD-GISAXS (2017) (1)
- DINI-Zertifikat Dokumenten- und Publikationsservice 2010 (2010) (1)
- Forschungsinformationen und Open Access Repository-Systeme (2009) (1)
- The effect of line roughness on the diffraction intensities in angular resolved scatterometry (2011) (1)
- Coprolite with Conchostracans from the Terminal Permian of Central Russia—Paleobiological and Stratigraphic Significance (2020) (1)
- Open-Access-Transformation (2017) (1)
- New reference and test materials for the characterization of energy dispersive X-ray spectrometers at scanning electron microscopes (2015) (1)
- DINI-Zertifikat für Open-Access-Repositorien und -Publikationsdienste 2016 [Oktober 2016] (2016) (1)
- COUNTRY UPDATE Germany (2005) (1)
- DINI-Zertifikat für Open-Access-Publikationsdienste 2019 (2019) (1)
- Improved geometry reconstruction and uncertainty evaluation for extreme ultraviolet (EUV) scatterometry based on maximum likelyhood estimation (2011) (1)
- Öffentliche Testphase und Weiterentwicklung der Pilotversion des Publikationsverbundes (1998) (1)
- Nanometrology at PTB in support of process control of nanoscale features in semiconductor manufacturing (2012) (1)
- Fingerprinting the type of line edge roughness (2017) (1)
- DINI certificate 2013 for open access repositories and publication services (2015) (1)
- A new mask blank deposition tool (2006) (1)
- Physics of X-Ray and Neutron Multilayer Structures (2018) (1)
- Correlation between crystal morphology and x-ray performance of a CdZnTe detector (1997) (1)
- Calibration of the detection efficiency of energy dispersive X-ray spectrometers for absolute intensity measurements and for establishing a basis for a more rigorous quantitation procedure (2008) (1)
- Einbindung elektronischer Hochschulschriften in den Verbundkontext am Beispiel OPUS (2000) (1)
- Early Triassic Conchostracans from the Tiryakh-Kobyume Section (Southern Verkhoyansk Region, Republic of Sakha (Yakutia)) (2020) (1)
- Analysis of Line-Edge Roughness Using EUV Scatterometry (2022) (1)
- Forschungsdaten-Repositorien mit Beteiligung deutscher Institutionen. Eine re3data.org-Analyse (2016) (1)
- In situ erosion measurement tools for electric propulsion thrusters: triangular laser head and telemicroscope (2022) (1)
- Erratum: “Characterization of an RF excited broad beam ion source operating with inert gases” [J. Appl. Phys. 129, 223305 (2021)] (2022) (0)
- 24 Stunden sind eine Bibliothek : Lernen, Forschen, Kooperieren ; die innovative Bibliothek. 2. Aufl (2012) (0)
- Observation of Higher-Order Yoneda Resonances in the Diffuse X-ray Scattering from Structured Surfaces (2015) (0)
- Late Carboniferous to Early Triassic non-marine-marine correlation - ideas, tasks, perspectives (2015) (0)
- On the Optical Constants of Cobalt in the M-Absorption Edge Region (2022) (0)
- NEWRAD 2005: Characterization of detectors for extreme UV radiation (2005) (0)
- Open Science Champions: Karlsruhe Institute of Technology (2018) (0)
- An advanced electric propulsion diagnostic (AEPD) platform for in-situ characterization of electric propulsion thrusters and ion beam sources (2016) (0)
- Innovation aus Tradition : 175 Jahre KIT-Bibliothek (2015) (0)
- An arrangement for controlling and regulating the ion beam profile of broad ion beam sources by clocked Beamletsteuerung (2004) (0)
- Calibration measurements on the DEPFET Detectors for the MIXS instrument on BepiColombo (2014) (0)
- Outcrop coordinates and stratigraphic dip data of the Tambach Formation in the Tambach-Dietharz sedimentary basin, Central Germany (2022) (0)
- PERMIAN NON-MARINE BIVALVES FROM THE COLLIO AND GUNCINA FORMATIONS (SOUTHERN ALPS, ITALY): REVISED BIOSTRATIGRAPHY AND PALAEOBIOGEOGRAPHY (2022) (0)
- Low energy response of the NICER detectors and "threshold efficiency" effect (2016) (0)
- Single-shot damage of Ru thin film induced by FEL fs pulses (2016) (0)
- Simulation of gridded broad-beam ion sources for ultra-precise surface processing (2006) (0)
- re3data COREF - Community Driven Open Reference for Research Data Repositories (2019) (0)
- Ion propulsion for a spacecraft (2008) (0)
- Sensitivity analysis for the detection of pitchwalk in self-aligned quadruple patterning by GISAXS (2020) (0)
- Design Considerations for a Si(Li) Detector Assembly for X-Ray Microscopy (1992) (0)
- Realisierung einer Pilotversion des Publikationsverbundes und Umfrage an der Universität Stuttgart (1997) (0)
- E-Learning an Hochschulen in Baden-Württemberg (2008) (0)
- Erwerbung. Zeitschriftenevaluation an der Universität Stuttgart (2004) (0)
- Spatially resolved reflectometry for EUV optical components (2018) (0)
- Innovationspotential von Zusammenlegungen und Fusionen von Wissenschaftseinrichtungen am Beispiel des Karlsruher Instituts für Technologie (KIT) (2014) (0)
- B-WIN4M Baden Württemberg, Teilprojekt Aufbau eines elektronischen wissenschaftlichen Publikationsverbunds. 7. Abschlußbericht des Projekts Elektronischer Publikationsverbund (1998) (0)
- DINI-Zertifikat 2013 - Request for Comments (2013) (0)
- Vernetzung von Open Access Repositorien in Deutschland - ein Überblick (2009) (0)
- Open Access-Strategie des KIT (2010) (0)
- Ende des goldenen Zeitalters? : Aspekte niederländischer Porträtmalerei des späten 17. Jahrhunderts. End of the golden age? : Aspects of late 17th century Dutch portrait painting (1996) (0)
- Open Access - wo stehen wir heute? (2011) (0)
- Karl Ludwig Wilhelm von Zanth und die Wilhelma : eine kurze Einführung zum 200. Geburtstag des Architekten (1996) (0)
- Fachliche und institutionelle Repositorien - Komplementäre Ansätze, gemeinsame Ziele (2007) (0)
- »Den Blick nach außen richten und nach innen wirken« Barbara Lison zu Zielen und Herausforderungen des bibliothekarischen Weltverbandes und ihren wichtigsten Handlungsfeldern als IFLA-Präsidentin (2021) (0)
- Entwicklung von OPUS als Baustein nationaler und internationaler Open Access Netzwerke (2007) (0)
- Elektronisches Publizieren in den Wissenschaften (2009) (0)
- Aus dem Schützengraben nach Schätzen graben und nach den Sternen greifen (2012) (0)
- Bibliotheken 2040 – mehr Utopien als Dystopien (2023) (0)
- Mask CD characterization with EUV reflectometry at the electron storage ring BESSY II (2003) (0)
- Elektronische Hochschulschriften und multimediale Dokumente (2002) (0)
- Klassifikation international. Bericht über die European Conference on Data Analysis (ECDA) mit integriertem Workshop on Classification and Subject Indexing in Library and Information Science (LIS’2015) in Colchester (2015) (0)
- Schluss mit den ewigen Fragen? Langzeitverfügbarkeit als exemplarische Aufgabe der Informationsinfrastruktur (2015) (0)
- Bibliotheken ohne Bücher - Neue Aufgaben für Universitätsbibliotheken - Campusreport am 18.04.2017 (2017) (0)
- Forschung - Information - Infrastruktur: Die exemplarische Perspektive der KIT-Bibliothek (2012) (0)
- Authentizität und Langzeitarchivierung (2002) (0)
- Innovationspotential von Zusammenlegungen und Fusionen von Wissenschaftseinrichtungen am Beispiel des Karlsruher Instituts für Technologie (KIT) - Impulse für das Bibliothekssystem (2014) (0)
- Digitale Informationsräume der Zukunft (2011) (0)
- Editorial (2022) (0)
- Nutzungsstatistiken elektronischer Publikationen. DFG-Projekt Open Access-Statistik (OA-S) und Arbeitsgruppe "Elektronisches Publizieren". [Version 1.0, August 2009] (2009) (0)
- Forschungsdaten sammeln und strukturieren: Ein Thema auf dem "Kongress Bibliothek und Information" in Leipzig 2013 (2013) (0)
- From books to Big Data : the new role of the KIT Library in the management of research data (2016) (0)
- Informationsvermittlung. Online Publikationsverbund (1999) (0)
- Forschung - Information - Infrastruktur: Bausteine für Open Science (13. DINI-Jahrestagung 2012): Die exemplarische Perspektive der KIT-Bibliothek (2012) (0)
- OPUS – Elektronisches Publizieren an Hochschulen (2004) (0)
- Liebe in der 24 Stunden Bibliothek - Die Gewinner des Videowettbewerbs der KIT-Bibliothek - Beitrag bei Radio KIT am 06.12.2012 (2012) (0)
- OPUS [Online Publikationsverbund der Universität Stuttgart] (1999) (0)
- Karlsruher Lernraumtag 17.10.2017 - Podiumsdiskussion: Lernraum für morgen - Wie können Bibliotheksräume die Entwicklung von Wissen fördern? (2017) (0)
- E-Learning-Förderung für Hochschulen in Baden-Württemberg. (2010) (0)
- GRACE - eine Grid-basierte und kategoriebildende Suchmaschine (2004) (0)
- Zitations- und Nutzungsanalysen als alternative Impact-Messungen wissenschaftlicher Publikationen (2008) (0)
- Neue Wege und Qualitäten – Die Inhaltserschließungspolitik der Deutschen Nationalbibliothek (2021) (0)
- Betrieb von Hochschulbibliotheken als Komplettanbieter : Das Beispiel Karlsruhe (2017) (0)
- Abschlußbericht des Projekts Elektronischer Publikationsverbund (1998) (0)
- Erste Verfügbarkeitsanalyse elektronischer Volltexte an der Universität Stuttgart und DB-Spezifikation (1997) (0)
- re3data - Offene Infrastruktur für Open Science (2019) (0)
- Das DINI-Zertifikat 2016 : Neuerungen, Praxisbeispiele und zukünftige Entwicklungen (2017) (0)
- Das DINI-Zertifikat (2005) (0)
- Workflow für Online Hochschulschriften mit OPUS (2003) (0)
- Recommendations for the Open Access Transition: Strategic and practical anchorage of Open Access in informational provisioning of research institutions (2016) (0)
- Ende des goldenen Zeitalters? : Aspekte niederländischer Porträtmalerei des späten 17. Jahrhunderts (1996) (0)
- Von Publikationsfonds und Open-Access-Konsortien: Zur Finanzierung von Open Access an Hochschulen und Forschungseinrichtungen (2013) (0)
- Editorial (2020) (0)
- Metrology with synchrotron radiation at PTB (2022) (0)
- In situ erosion measurement tools for electric propulsion thrusters: triangular laser head and telemicroscope (2022) (0)
- 2.2 Wissenschaftlicher Datenmarkt (2021) (0)
- Interview »Ein lebendiges Netzwerk etablieren und nachhaltige Strukturen im Wissenschaftssystem schaffen«. York Sure-Vetter zu Zielen und Herausforderungen der Nationalen Forschungsdateninfrastruktur und seinen wichtigsten Handlungsfeldern als NFDI-Direktor (2020) (0)
- Die Open Archives Initiative - Erfahrungen mit Daten- und Serviceproviderdiensten in Deutschland (2002) (0)
- DFG-Projekt NatHosting - Doppelter Boden für digitale Publikationen (2015) (0)
- Gemeinsam in die Zukunft? Publikationsrepositorien und Forschungsinformationssysteme an Universitäten (2014) (0)
- Precise optical constant determination in the soft x-ray, EUV, and VUV spectral range (2023) (0)
- DINI Certificate for Open Access Repositories and Publication Services 2019 (2020) (0)
- Workshop Meldesystem für Texte auf InternetSeiten (METIS) und Institutional Repositories (2007) (0)
- Late Devonian non-marine Naiadites devonicus nov. sp. (Bivalvia: Pteriomorphia) from the Waterloo Farm Lagerstätte in South Africa (2021) (0)
- The refined EUVL mask model (2019) (0)
- Supporting a nationwide Open Access Infrastructure using repository certification - The German Experience (2007) (0)
- VISUALIZATION OF ION AND NEUTRAL DRAG IN COMPLEX (DUSTY) PLASMAS (2007) (0)
- EUV Lithography’s Present and Future (2016) (0)
- A coaxial microwave plasma generation with automatic or manual adjustment (1998) (0)
- Early Permian Palaeotemperature Values Proposed for Continental Red-Bed Deposits of the Tambach Formation at the Bromacker Section (2021) (0)
- re3data – ein internationales Verzeichnis von Forschungsdateninfrastrukturen (2018) (0)
- Repository-Systeme, Forschungsinformationen und Open Access (2009) (0)
- The German National Library and the Covid-19 pandemic (2020) (0)
- Certification and beyond : DINI open access activities in Germany (2005) (0)
- Tunability of the optical constants of tantalum-cobalt alloys thin films in the extreme ultraviolet (2022) (0)
- Development and test of a cost-efficient gridded ion thruster propulsion system for small satellites – IonJet (2022) (0)
- Radiometric Characterization of Space Instrumentation (2017) (0)
- Innovation aus Tradition (2015) (0)
- Investigation of Nanostructured Surfaces by Scattering Procedures (2017) (0)
- Determination of the Beam Divergence of a Gridded Ion Thruster Using the AEPD Platform (2019) (0)
- Design and Performance Test of a RF Plasma Bridge Neutralizer (2019) (0)
- Combined usage statistics as a basis for Research intelligence (2010) (0)
- Recent status of VUV/EUV photodiodes for radiometric scale comparison (2021) (0)
- The RIT 2 X propulsion system : current development status IEPC-2017-505 (2017) (0)
- Metrics in an Open Access environment: an infrastructure for collecting and aggregating usage data (2007) (0)
- Die Junglämmermast beim Leineschaf unter besonderer Berücksichtigung von Milchleistung und Futterverwertung (2010) (0)
- Nested Sampling aided determination of tantalum optical constants in the EUV spectral range. (2022) (0)
- The refined EUV mask model (2019) (0)
- NEWRAD 2005: Improvements in EUV reflectometry at PTB (2005) (0)
- The AXAF HPGe Solid State Detectors (1997) (0)
- EUV optics with integrated IR suppression gratings (2015) (0)
- Detector-based Radiometry with Cryogenic Radiometers and Monochromatized Synchrotron Radiation (0)
- Calibration of NICER detectors at the synchrotron radiation facility BESSY-II (2017) (0)
- Diagnostics of ECR-MW Broad Beam Ion Sources (2008) (0)
- Single- and two-photon absorption laser-induced fluorescence spectroscopy in rare gases for gridded ion thruster diagnostics (2022) (0)
- Determining the transmission of thin foil filters for soft X-ray free-electron laser radiation: an ablation imprint approach (Conference Presentation) (2019) (0)
- Preliminary Comparison of DUV Scatterometry for CD and Edge Profile Metrology on EUV Masks (2014) (0)
- Networking institutional repositories in Germany: DINI/DFG projects (...and DRIVER) (2007) (0)
- "Data scientist is the sexiest job in the 21st century". Bericht über die 2. European Conference on Data Analysis mit integriertem Workshop on Classification and Subject Indexing in Library and Information Science (LIS 2014) an der Jacobs University Bremen (2014) (0)
- A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range. (2023) (0)
- Optical constants for EUV scatterometry (2021) (0)
- Laser-induced fluorescence spectroscopy for kinetic temperature measurement of xenon neutrals and ions in the discharge chamber of a radiofrequency ion source (2023) (0)
- Aktivitäten der Kommission Zukunft der Informationsinfrastruktur (KII) (2010) (0)
- DINI institutional repository certification and beyond - Open Access activities in Germany (2006) (0)
- Precise optical constants: determination and impact on metrology, simulation, and development of EUV masks (2022) (0)
- IMPACT OF MODEL UNCERTAINTIES TO THE RECONSTRUCTION OF SURFACE PROFILES IN SCATTEROMETRY (2009) (0)
- Measuring impact revisited - an update on infrastructure, methods and techniques (2007) (0)
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