H. P. Baltes
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H. P. Baltesengineering Degrees
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Electrical Engineering
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Engineering
H. P. Baltes's Degrees
- PhD Electrical Engineering University of California, Berkeley
- Masters Electrical Engineering University of California, Berkeley
- Bachelors Electrical Engineering Stanford University
Why Is H. P. Baltes Influential?
(Suggest an Edit or Addition)H. P. Baltes's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Smart single-chip gas sensor microsystem (2001) (549)
- Integrated semiconductor magnetic field sensors (1986) (298)
- Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds. (2002) (275)
- Micromachined thermally based CMOS microsensors (1998) (243)
- Process-dependent thin-film thermal conductivities for thermal CMOS MEMS (2000) (188)
- Microfabrication techniques for chemical/biosensors (2003) (183)
- CMOS microelectrode array for the monitoring of electrogenic cells. (2004) (178)
- REVIEW ARTICLE: Silicon dioxide sacrificial layer etching in surface micromachining (1997) (165)
- CMOS Schmitt trigger design (1994) (141)
- CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors (2002) (133)
- A new approach for the fabrication of micromechanical structures (1989) (128)
- CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects (1999) (125)
- Application-specific sensor systems based on CMOS chemical microsensors (2000) (121)
- CMOS-based chemical microsensors. (2003) (112)
- Mechanical properties of thin films from the load deflection of long clamped plates (1998) (106)
- Silicon gas flow sensors using industrial CMOS and bipolar IC technology (1991) (104)
- Light-emitting devices in industrial CMOS technology (1993) (101)
- CMOS as sensor technology (1993) (97)
- Thermoelectric infrared sensors by CMOS technology (1992) (95)
- CMOS MEMS - present and future (2002) (94)
- Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array (2001) (93)
- Resonant Magnetic Field Sensor With Frequency Output (2006) (89)
- Strongly buckled square micromachined membranes (1999) (89)
- Tuning sensitivity and selectivity of complementary metal oxide semiconductor-based capacitive chemical microsensors. (2004) (77)
- CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry (2004) (77)
- Thermoelectric AC power sensor by CMOS technology (1992) (75)
- Two-dimensional integrated gas flow sensors by CMOS IC technology (1995) (72)
- Offset reduction in Hall devices by continuous spinning current method (1997) (70)
- Metal oxide-based monolithic complementary metal oxide semiconductor gas sensor microsystem. (2004) (68)
- Novel fully CMOS-compatible vacuum sensor (1995) (68)
- Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers (1994) (67)
- A high sensitivity CMOS gas flow sensor on a thin dielectric membrane (1993) (64)
- Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500/spl deg/C (2004) (64)
- Surface micromachining by sacrificial aluminium etching (1996) (64)
- Thermally actuated CMOS micromirrors (1995) (64)
- SOLIDIS: a tool for microactuator simulation in 3-D (1997) (64)
- GLOBAL MODEL FOR HIGH PRESSURE ELECTRONEGATIVE RADIO-FREQUENCY DISCHARGES (1997) (63)
- Thermoelectric infrared sensors in CMOS technology (1993) (63)
- Micromachined Resonant Sensors — an Overview (1998) (61)
- Two-dimensional numerical modeling of magnetic-field sensors in CMOS technology (1985) (61)
- Photolithography in anisotropically etched grooves (1996) (60)
- CMOS-based microsensors and packaging (2001) (59)
- Electrostatic aluminum micromirrors using double-pass metallization (1997) (59)
- Simple CMOS analog square-rooting and squaring circuits (1992) (57)
- Smart sensor interface with A/D conversion and programmable calibration (1994) (56)
- Fabrication and modelling of CMOS microbridge gas-flow sensors (1992) (56)
- Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics (2000) (55)
- Two-dimensional magnetic microsensor with on-chip signal processing for contactless angle measurement (1996) (55)
- Future of IC microtransducers (1996) (54)
- Single-chip CMOS anemometer (1997) (54)
- High sensitivity CMOS humidity sensors with on-chip absolute capacitance measurement system (1993) (52)
- Industrial CMOS technology for the integration of optical metrology systems (photo-ASICs) (1992) (52)
- A lateral magnetotransistor structure with a linear response to the magnetic field (1989) (50)
- Integrated temperature microsensors for characterization and optimization of thermosonic ball bonding process (1999) (50)
- CMOS Cantilever Sensor Systems (2002) (50)
- Determination of the thermal conductivity of CMOS IC polysilicon (1994) (49)
- Influence Of Design Geometry And Packaging On The Response Of Thermal Cmos Flow Sensors (1995) (48)
- CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (2002) (47)
- An industrial CMOS process family adapted for the fabrication of smart silicon sensors (2000) (47)
- Test structures to measure the Seebeck coefficient of CMOS IC polysilicon (1996) (46)
- Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators (2003) (45)
- A Smart Single-Chip Micro-Hotplate-Based Gas Sensor System in CMOS-Technology (2004) (43)
- The electronic nose in Lilliput (1998) (43)
- Numerical analysis of magnetic-field-sensitive bipolar devices (1991) (43)
- Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimide (1991) (43)
- Influence of mechanical stress on the offset voltage of Hall devices operated with spinning current method (1999) (42)
- Thermosonic ball bonding: friction model based on integrated microsensor measurements (1999) (42)
- Operating principle of dual collector magnetotransistors studied by two-dimensional simulation (1994) (42)
- Scaling of thermal CMOS gas flow microsensors: experiment and simulation (1996) (42)
- Dual-collector magnetotransistor optimized with respect to injection modulation☆ (1983) (42)
- Capacitive sensors in CMOS technology with polymer coating (1995) (42)
- Thermal conductivity of CMOS materials for the optimization of microsensors (1993) (41)
- Process-dependent Thermophysical Properties Of CMOS IC Thin Films (1995) (41)
- Enhanced multipole acceleration technique for the solution of large Poisson computations (1996) (41)
- Enabling technology for MEMS and nanodevices (2004) (41)
- Model of thermoelectric radiation sensors made by CMOS and micromachining (1992) (40)
- CMOS-MEMS: Advanced Micro and Nanosystems (Advanced Micro and Nanosystems) (2005) (39)
- Suppressed sidewall injection magnetotransistor with focused emitter injection and carrier double deflection (1987) (39)
- IN-SITU ULTRASONIC STRESS MEASUREMENTS DURING BALL BONDING USING INTEGRATED PIEZORESISTIVE MICROSENSORS (1999) (38)
- Dynamics of CMOS-based thermally actuated cantilever arrays for force microscopy (2004) (38)
- CMOS resonant beam gas sensing system with on-chip self excitation (2001) (38)
- Optimization tool for the performance parameters of thermoelectric microsensors (1993) (38)
- A 2D CMOS microfluxgate sensor system for digital detection of weak magnetic fields (1999) (37)
- Mechanical behavior and sound generation efficiency of prestressed, elastically clamped and thermomechanically driven thin film sandwiches (1999) (36)
- Microtransducer CAD: Physical and Computational Aspects (1999) (36)
- A NiFeMo Electroplating Bath for Micromachined Structures (1999) (35)
- Industrial fabrication technology for CMOS infrared sensor arrays (1997) (35)
- CMOS integration of a thermal pressure sensor system (1996) (35)
- A single-chip CMOS micro-hotplate array for hazardous-gas detection and material characterization (2004) (34)
- Numerical Simulation of a CF 4 / O 2 Plasma and Correlation with Spectroscopic and Etch Rate Data (1989) (34)
- A thermal van der Pauw test structure (1999) (34)
- CMOS Hotplate Chemical Microsensors (2007) (33)
- Thermally excited silicon oxide beam and bridge resonators in CMOS technology (1993) (33)
- CMOS Single Chip Gas Detection Systems — Part I (2002) (33)
- Very high Q-factor in water achieved by monolithic, resonant cantilever sensor with fully integrated feedback (2003) (32)
- Vacuum gauging with complementary metal–oxide–semiconductor microsensors (1995) (31)
- CMOS monolithic microelectrode array for stimulation and recording of natural neural networks (2003) (31)
- An error indicator and automatic adaptive meshing for electrostatic boundary element simulations (1997) (30)
- Parallel scanning AFM with on-chip circuitry in CMOS technology (1999) (29)
- The Hall effect in integrated magnetotransistors (1989) (29)
- A smart single-chip micro-hotplate-based chemical sensor system in CMOS-technology (2002) (29)
- Two-dimensional numerical analysis of a silicon magnetic field sensor (1984) (28)
- Contactless angle measurement using four Hall devices on single chip (1997) (27)
- 2D magnetic microsensor with on-chip signal processing for contactless angle measurement (1996) (26)
- Numerical modeling of magnetic-field-sensitive semiconductor devices (1985) (26)
- Polymer Coated Capacitive Microintegrated Gas Sensor (1995) (26)
- Resonant humidity sensors using industrial CMOS-technology combined with postprocessing (1992) (26)
- Ultrasound barrier microsystem for object detection based on micromachined transducer elements (1997) (26)
- IC MEMS microtransducers (1996) (25)
- Design of a CMOS oscillator with magnetic-field frequency modulation (1987) (25)
- Novel integrated thermal pressure gauge and read-out circuit by CMOS IC technology (1994) (25)
- Flip-chip packaging for thermal CMOS anemometers (1997) (24)
- CMOS chemical microsensors based on resonant cantilever beams (1998) (24)
- Fully programmable MEMS ciliary actuator arrays for micromanipulation tasks (2000) (24)
- Humidity sensing properties and electrical permittivity of new photosensitive polyimides (1991) (23)
- Electroplated soft magnetic materials for microsensors and microactuators (1997) (23)
- Analytical 2D-model of CMOS micromachined gas flow sensors (1991) (22)
- Ultrasound-transducer using membrane resonators realized with bipolar IC technology (1994) (21)
- Industrial fabrication method for arbitrarily shaped silicon N-well micromechanical structures (1998) (21)
- Determination of the heat capacity of CMOS layers for optimal CMOS sensor design (1995) (21)
- Combined air humidity and flow CMOS microsensor with on-chip 15 bit sigma-delta A/D interface (1995) (20)
- A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching (1999) (20)
- Micromachined CMOS calorimetric chemical sensor with on-chip low noise amplifier (1999) (20)
- Sacrificial aluminum etching for CMOS microstructures (1997) (20)
- Highly sensitive split-contact magnetoresistor with AlAs/GaAs superlattice structures (1989) (20)
- KOH etching of high-index crystal planes in silicon (1992) (20)
- A CMOS compatible thermally excited silicon oxide beam resonator with aluminum mirror (1991) (20)
- Nanochemical surface analyzer in CMOS technology. (2002) (20)
- A new carrier-domain mangnetometer (1983) (20)
- A resonant poliyimide-based humidity sensor (1996) (20)
- A magnetic sensor with current-controlled sensitivity and resolution (1995) (20)
- Simulation aspects of a thermal accelerometer (1996) (20)
- Characterization of plasma etch processes using measurements of discharge impedance (1994) (20)
- IMEMS - Integrated Micro Electro Mechanical Systems by VLSI and Micromachining (1994) (20)
- Integrated flux concentrator improves CMOS magnetotransistors (1995) (19)
- CMOS membrane infrared sensors and improved TMAHW etchant (1994) (19)
- Packaging of CMOS MEMS (2000) (19)
- Packaging test chip for flip-chip and wire bonding process characterization (2003) (19)
- A Novel Method to Measure Poisson's Ratio of Thin Films (1997) (18)
- A gas detection system on a single CMOS chip comprising capacitive, calorimetric, and mass-sensitive microsensors (2002) (18)
- Complete set of piezoresistive coefficients of CMOS -diffusion (1998) (18)
- N-well based CMOS calorimetric chemical sensors (2000) (18)
- A Resonant Polyimide-based Humidity Sensor (1995) (18)
- Solder-bonded micromachined capacitive pressure sensors (1998) (18)
- CMOS-sealed membrane capacitors for medical tactile sensors (2006) (17)
- Flexible architecture for CMOS sensor interfaces (1992) (17)
- Field oxide microbridges, cantilever beams, coils and suspended membranes in SACMOS technology (1990) (17)
- Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds (2003) (17)
- Flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds (1998) (17)
- New convergence scheme for self-consistent electromechanical analysis of iMEMS (1995) (17)
- CMOS Integrated Organic Ciliary Actuator Arrays For General-Purpose Micromanipulation Tasks (2000) (17)
- Simulation of a thermomechanically actuated gas sensor (1998) (16)
- A capacitive humidity sensor based on CMOS technology with adsorbing film (1988) (16)
- Noise correlation and operating conditions of dual-collector magnetotransistors (1991) (16)
- Test structures to measure the heat capacity of CMOS layer sandwiches (1997) (16)
- Spectral infrared absorption of CMOS thin film stacks (1999) (16)
- A CMOS-compatible device for fluid density measurements (1997) (16)
- CMOS flow sensors (1993) (16)
- A Behavioural Model of Resonant Cantilevers for Chemical Sensing (2005) (16)
- Multi-purpose interface for sensor systems fabricated by CMOS technology with post-processing (1993) (16)
- Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating (1999) (16)
- In-situ Measurement of Stress and Temperature under Bonding Pads During Wire Bonding Using Integrated Microsensors (1999) (16)
- Dual collector magnetotransistors with on-chip bias and signal conditioning circuitry (1993) (15)
- Assessment of Silicon Wafer Material for the Fabrication of Integrated Circuit Sensors (2000) (15)
- Continuous blood pressure monitoring utilizing a CMOS tactile sensor (2004) (15)
- Noise correlation in dual-collector magnetotransistors (1989) (15)
- Coupled 3D thermo-electro-mechanical simulations of microactuators (1996) (15)
- A CMOS-compatible fluid density sensor (1997) (15)
- Integrated silicon magnetotransistors: High sensitivity or high resolution? (1990) (15)
- Optimized Structured Absorbers For CMOS Infrared Detectors (1995) (15)
- Discretization and grid adaptation in semiconductor device modeling (1990) (14)
- Trench-Hall devices (2000) (14)
- Equivalent circuit model of resistive IC sensors derived with the box integration method (1999) (14)
- SESES: a comprehensive MEMS modelling system (1994) (14)
- Fabrication Technology (14)
- Oversampled interface for IC sensors (1994) (14)
- Modeling of a Dual-Drain NMOS Magnetic-Field Sensor (1985) (14)
- CMOS-based sealed membranes for medical tactile sensor arrays (2003) (14)
- Double Pass Metallization For Cmos Aluminum Actuators (1995) (14)
- Humidity-sensitive oscillator fabricated in double poly CMOS technology (1990) (14)
- Progress in Microsensor Interfaces (1996) (13)
- Polysilicon microbridge fabrication using standard CMOS technology (1988) (13)
- Carrier transport in semiconductor detectors of magnetic domains (1987) (13)
- CMOS monolithic atomic force microscope (2004) (13)
- Review of physical models for numerical simulation of semiconductor microsensors (1990) (13)
- Extraction of the Coefficient of Thermal Expansion of Thin Films from Buckled Membranes (1998) (13)
- Low noise multirate SC read-out circuitry for thermoelectric integrated infrared sensors (1994) (13)
- Thermal effects in magnetic microsensor modeling (1991) (13)
- Magnetic actuation and MOS-transistor sensing for CMOS-integrated resonators (2002) (13)
- Smart single-chip CMOS microhotplate array for metal-oxide-based gas sensors (2003) (13)
- Package quality testing using integrated pressure sensor (1998) (12)
- Sensors, Update 10 (2001) (12)
- A digital CMOS micro-hotplate array for analysis of environmentally relevant gases (2004) (12)
- Ultrasound transducer for distance measurements (1997) (12)
- Compensation and Calibration of IC Microsensors (1997) (12)
- Smart sensor interfaces (1996) (12)
- 256-pixel CMOS-integrated thermoelectric infrared sensor array (2001) (12)
- Full three-dimensional numerical analysis of multi-collector magnetotransistors with directional sensitivity (1995) (12)
- Thermoelectric Infrared Sensors by (1992) (11)
- Integrated micromachined decoupled CMOS chip on chip (1997) (11)
- High sensitivity CMOS microfluxgate sensor (1997) (11)
- CMOS-Based Tactile Microsensor for Medical Instrumentation (2007) (11)
- Mechanical properties of CMOS thin films (1999) (11)
- 2D magnetic micro fluxgate system with digital signal output (1999) (11)
- An incremental A/D converter for accurate vector probe measurements (1995) (11)
- Thermal CMOS Sensors―an Overview (1996) (11)
- Effects of aging on polyimide: a model for dielectric behavior (of relative humidity sensors) (1991) (11)
- The CMOS MEMS nose-fact or fiction? (1997) (11)
- Analysis of Ultrasonic Wire Bonding by In-situ Piezoresistive Microsensors (2001) (11)
- Simulation toolbox and material parameter data base for CMOS MEMS (1996) (10)
- Contactless Angle Measurement By Cmos Magnetic Sensor With On Chip Read-out Circuit (1995) (10)
- Deformable micromirror arrays by CMOS technology (1997) (10)
- CMOS single-chip multisensor gas detection system (2002) (10)
- Anodically bonded silicon membranes for sealed and flush mounted microsensors (1996) (10)
- Digital MOS-transistor-based microhotplate array for simultaneous detection of environmentally relevant gases (2004) (10)
- How to achieve nanotesla resolution with integrated silicon magnetotransistors (1989) (10)
- CMOS 10-Cantilever Array for Constant-Force Parallel Scanning AFM (2001) (10)
- Sensors Update, Vol. 8 (2002) (10)
- A complementary-metal-oxide-semiconductor-field-effect-transistor-compatible atomic force microscopy tip fabrication process and integrated atomic force microscopy cantilevers fabricated with this process. (2002) (10)
- Influence of surface effects on the sensitivity of magnetic-field sensors (1989) (10)
- On-chip circuitry for a CMOS parallel scanning AFM (1999) (10)
- Inexpensive range camera operating at video speed. (1993) (10)
- Integrated ultraviolet sensor system with on-chip 1 G/spl Omega/ transimpedance amplifier (1996) (10)
- Double-Hall sensor with self-compensated offset (1997) (10)
- Ultrasound barrier based on packaged micromachined membrane resonators (1995) (10)
- In-situ calibration of wire bonder ultrasonic system using integrated microsensor (1998) (9)
- Micromachined hot plate test structures to measure the heat capacity of CMOS IC thin films (1998) (9)
- Fully packaged CMOS current monitor using lead-on-chip technology (1998) (9)
- KOH etch rates of high-index planes from mechanically prepared silicon crystals (1991) (9)
- Silicon microsensors and microstructures (1992) (9)
- Two-dimensional Numerical Analysis Of Silicon Bipolar Magnetotransistors (1987) (9)
- Hotplate-based conductometric monolithic CMOS gas sensor system (2003) (9)
- Influence of air pressure on resonating and thermoelectric microstructures realized with standard IC technologies (1993) (9)
- A micro-hotplate-based monolithic CMOS gas sensor array (2003) (9)
- Measurement of Hall mobility in n-channel silicon inversion layer (1987) (9)
- Measurement of discharge impedance for dry etch process control (1994) (9)
- Temperature And Supply Voltage Stabilized Power Driver For Flow Sensors (1995) (9)
- Delta-Sigma Modulation Sensor Interface Circuits with Improved Conversion Gain for Capacitive Readout Chemical Sensors (1999) (9)
- Hand‐Held and Palm‐Top Chemical Microsensor Systems for Gas Analysis (2004) (9)
- Linear CMOS power controller for precision sensor applications (1992) (8)
- Thermomechanical modeling of an actuated micromirror (1995) (8)
- A self-calibrating barrier-detector microsystem in standard silicon circuit technology (1995) (8)
- Optimization of CMOS infrared detector microsystems (1996) (8)
- CMOS absolute value precision capacitance measurement system (1992) (8)
- Thermal microtransducers by CMOS technology combined with micromachining (1991) (8)
- Noise correlations in magnetic field sensitive transistors (1988) (8)
- Quasi-analytical study of offset voltage due to piezoresistive effect in vertical Hall devices by mapping techniques (2003) (8)
- Three-dimensional modelling of capacitive humidity sensors (1990) (8)
- In-plane sensitive vertical trench-Hall device (1998) (8)
- Towards a versatile DRIE: silicon pit structures combined with electrochemical etch stop (2006) (8)
- CMOS stabilised DC power source (1992) (8)
- Overall System Analysis Of A Cmos Thermal Converter (1995) (8)
- Fluxless Microjoining by Au-In-Ni Isothermal Solidification (1999) (7)
- Mechanical characterization of electroplated nickel-iron (2000) (7)
- Thermoelectric AC Power Sensor by (1992) (7)
- CMOS-based chemical microsensors: components of a micronose system (1999) (7)
- Optimized CMOS infrared detector microsystems (1995) (7)
- Integrated magnetotransistors in bipolar and CMOS technology (1994) (7)
- An industrial CMOS process family for integrated silicon sensors (1999) (7)
- Oversampled A/D Interface Circuit For Integrated AC-power Sensor (1995) (7)
- CMOS two-quadrant multiplier using transistor triode regime (1992) (7)
- Monolithic metal-oxide microsensor system in industrial CMOS technology (2003) (7)
- Efficient 3D computation of electrostatic fields and forces in microsystems (1997) (7)
- Microengineering of Metals and Ceramics: Part II: Special Replication Techniques, Automation and Properties; Volume 4: Advanced Micro & Nanosystems (2005) (6)
- Two-dimensional numerical modeling of dual-collector magnetotransistors: Evidence for emitter efficiency modulation (1992) (6)
- Ageing behavior of polysilicon heaters for CMOS microstructures operated at temperatures up to 1200 K (2001) (6)
- Progress in CMOS integrated measurement systems (1999) (6)
- An inexpensive real-time 3-D camera with a smart optical sensor (1992) (6)
- Low-frequency noise in modulation-doped AlAs/GaAs superlattice dual-drain magnetic sensors (1990) (6)
- First three-dimensional numerical analysis of magnetic vector probe (1994) (6)
- Metal film protection of CMOS wafers against KOH (2000) (6)
- Resonant magnetic field sensor with frequency output (2005) (6)
- Temperature calibration of CMOS magnetic vector probe for contactless angle measurement system (1996) (6)
- Numerical modeling of silicon magnetic field sensors: Magnetoconcentration effects in split-metal-contact devices (1984) (6)
- Thermally excited silicon oxide bridge resonators in CMOS technology (1992) (6)
- Thermoelectric CMOS anemometers (1996) (6)
- Optimization Of Micromachined Ultrasound Transducer By Finite Element Simulation (1995) (6)
- Integrated Magnetic Sensors (2008) (6)
- Numerical Modelling and Materials Characterisation for Integrated Micro Electro Mechanical Systems (1995) (6)
- A monolithic fully-differential CMOS gas sensor microsystem for microhotplate temperatures up to 450/spl deg/C (2004) (6)
- Thin film front protection of CMOS wafers against KOH (1998) (6)
- Programmable CMOS analog function synthesis (1993) (5)
- Two-dimensional numerical simulations of electrothermal behaviour in very large scale integrated contacts and vias (1989) (5)
- Single-chip CMOS capacitive gas sensor for detection of volatile organic compounds (2002) (5)
- Magnetotransistors in SOI technology (1994) (5)
- Linear array of complementary metal oxide semiconductor double-pass metal micromirrors (1997) (5)
- PNP bipolar magnetotransistor for sensor application (1991) (5)
- A single-chip CMOS resonant beam gas sensor (2001) (5)
- High dynamic range interface system for a micromachined integrated AC-power sensor (1995) (5)
- Precise release and insulation technology for vertical Hall sensors and trench-defined MEMS (2004) (5)
- Application of harmonic finite element analysis to a CMOS heat-capacity measurement structure (1998) (5)
- Search for extraterrestrial enantioenrichment by using chemical microsensors. (2001) (5)
- Multi-transducer recordings from a single-chip gas sensor system coated with different polymers (2003) (5)
- Interfaces for Microsensor Systems (1994) (5)
- Determination of characteristic magnetotransistor parameters by measurement and inverse modelling (1993) (4)
- Packaging of CMOS IR microsystems (2000) (4)
- Thermal imagers in CMOS technology (2002) (4)
- Photo-ASICs: integrated optical metrology systems with industrial CMOS technology (1993) (4)
- Automatic adaptive meshing for efficient electrostatic boundary element simulations (1996) (4)
- Offset in CMOS magnetotransistors. II. Reduction (2001) (4)
- Microsensors between physics and technology (1993) (4)
- CMOS force sensors for wire bonding and flip chip process characterization (2003) (4)
- CMOS MEMS technology and CAD: the case of thermal microtransducers (1998) (4)
- Offset reduction in multicollector magnetotransistors (1996) (4)
- CMOS humidity sensors (1993) (4)
- Carrier transport in semiconductor magnetic field sensors (1983) (4)
- Photo-ASICs: integrated circuits for optical measurements using industrial CMOS technology (1991) (4)
- Optimization of a Novel Split Current Hall Device by Numeric Modeling (1995) (4)
- Microsensor packaging (2002) (4)
- Industrial CMOS technology for thermal imagers (2000) (4)
- IC microtransducers: new components with old materials? (1997) (4)
- Gate insulation yield loss due to lattice misfit stress in MCT and IGBT devices (1993) (4)
- Magnetostatic Modeling Of An Integrated Microconcentrator (1995) (4)
- An oversampled modulator for A/D conversion with minimized analog content (1994) (4)
- CMOS-integrated cantilevers for biosensing and probe microscopy (2005) (4)
- A micro-hotplate-based monolithic CMOS thermal analysis system (2003) (4)
- Modelling of sacrificial aluminium etching in complex geometries (2004) (4)
- A triple-drain MOSFET magnetic-field sensor (1985) (4)
- Using reactands in CMOS-based calorimetric sensors: new functional materials for electronic noses. (2002) (4)
- Planar distance and velocity sensor (1994) (4)
- Flip-chip packaging for smart MEMS (1998) (4)
- Automated extraction of capacitances and electrostatic forces in MEMS and ULSI interconnects from the mask layout (1997) (4)
- Design and Simulation of Sensors (1990) (4)
- Fabrication of microbridges in standard complementary metal oxide semiconductor technology (1989) (4)
- Thermoelectric Infrared Imaging Microsystems by Commercial CMOS Technology (1998) (3)
- Oversampled interface for IC sensors with minimized analog content (1995) (3)
- Determination of mechanical material properties of piezoelectric ZnO films (1998) (3)
- Simulation procedure to improve piezoresistive microsensors used for monitoring ball bonding (2001) (3)
- Computer-aided trade-off study of an integrated infrared sensor (1994) (3)
- Packaging techniques for CMOS-based chemical and biochemical microsensors (2005) (3)
- CMOS microelectrode array for extracellular stimulation and recording of electrogenic cells (2004) (3)
- CMOS Integrated Organic Ciliary Actuator Array as a General-Purpose Micromanipulation Tool for Small Objects (1999) (3)
- Isolating analog circuits from digital interferences (1995) (3)
- Sensor Design and Fabrication for Cointegration with Circuitry (1991) (3)
- Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics (2000) (3)
- An Error Indicator And Automatic AdaptiveMeshing For 3D Electrostatic Boundary ElementSimulations (1970) (3)
- A multiple window demonstration of the operation of PN diodes using devsim (1995) (3)
- Rotation of base region hall field in magnetotransistors (1990) (3)
- Thermoelectric test structures to measure the heat capacity of CMOS layer sandwiches (1997) (3)
- MemCel: An Inexpensive and Efficient Tool for 3D MEMS Prototyping (1998) (3)
- A new computational method for piezoelectric plate modeling: application to membrane microsensors (2003) (3)
- Trench hall and resonant magnetic field mircosensors (2005) (3)
- Design of analog blocks for low-voltage switched systems (1994) (3)
- Integration of an ultraviolet sensitive flame detector (1995) (3)
- Biomimetic self-assembled surfaces for highly selective guided cell growth on cell-based biosensors (2004) (3)
- In situ ultrasonic stress microsensor for second bond characterization (2001) (3)
- CMOS Integrated Chemical Microsensors and the Electronic Nose (1999) (3)
- Modeling of hall devices under locally inverted magnetic field (1987) (3)
- Integrated Chemical Microsensor Systems in CMOS Technology (2005) (3)
- Active and self-detecting cantilever with on-chip CMOS electronics for scanning force microscopy (1999) (2)
- Analysis and Reduction of CMOS Magnetotransistor Offset (1998) (2)
- CMOS resonant sensors (1998) (2)
- An analytical model of a new magnetotransistor: The SSIMT (1987) (2)
- A monolithic fully-differential CMOS gas sensor microsystem for microhotplate temperatures up to 450°C (2004) (2)
- A CMOS bipolar transistor with a locally doped base in the proximity of the emitter as a magnetic field sensor (1988) (2)
- Designer's Casebook-Simple bipolar, constant-power source (1991) (2)
- Semiconductor-Based Chemical Microsensors (2006) (2)
- Thermoelectric Microsensors and Microsystems (2008) (2)
- Operation of Vertical and Lateral Dual Collector Magnetotransistors Studied by Exact 2D-Simulation (2007) (2)
- IC microsensors-between system and technology (1997) (2)
- CMOS-based tactile sensor for coronary artery identification (2005) (2)
- Growth and shrinkage of surface stacking faults in float-zone and Czochralski silicon (1994) (2)
- Data Conversion and Programmable Calibration for Smart Sensors (1993) (2)
- Improving the gate oxide integrity of very high voltage MCT and IGBT devices by external gettering of metal impurities (1994) (2)
- Stress analysis of a standard CMOS process (1999) (2)
- Finite-Element Simulation of Silicon Accelerometers (1990) (2)
- OPTIMIZATION OF SPLIT-DRAIN MAGFET GEOMETRIES WITH RESPECT TO 1/f NOISE (1986) (2)
- Smart enumeration in C++: virtual construction, message dispatching and tables (1999) (2)
- CMOS-based calorimetric chemical microsensors (2002) (2)
- In-situ measurement of chip temperature during soft solder die bonding using integrated microsensors (1999) (2)
- Chemical Microsensors Based on Resonant Cantilever Beams (1998) (2)
- Long-term stability of membrane transducers for proximity sensing (1998) (2)
- A novel CMOS multivibrator (1992) (2)
- CMOS resonant microsensors (1998) (1)
- Sensors Update, Volume 9 (2002) (1)
- Thermal Non-Uniformity Effects on Carrier Transport (1999) (1)
- Sensors and Sensitivities (2006) (1)
- CMOS integrated chemical microsensors (1995) (1)
- Optical MicrosystemModeling and Simulation (2000) (1)
- 1.2 CMOS Single-chip Gas Detection Systems: Part II (2003) (1)
- Lateral and Vertical Hall Microsystems (2000) (1)
- Linear array of CMOS double pass metal micromirrors (1996) (1)
- Applications and Performance of a Polymer-coated Monolithic CMOS Gas Sensor Microsystem (2004) (1)
- Fast-injection Langmuir probe for process diagnostic and control (1991) (1)
- SPICE model for mechanically stressed device/circuit simulation (1998) (1)
- Realization of silicon based ultrasound micro-systems (1999) (1)
- CMOS‐based Biochemical Sensing Systems (2005) (1)
- Design of an Integrated Humidity Sensor with Digital Output in Double Metal CMOS Technology (1990) (1)
- CMOS Integrated Chemical Sensors for Application-specific Micronoses (1999) (1)
- Bipolar circuits for stabilization of power in variable resistors (1992) (1)
- Technology and application of the reusable Olympus Ultrasonic Dissector (2002) (1)
- Computer-Aided Optimization of Electrothermal CMOS-Compatible Infrared Sensors (1994) (1)
- Carrier transport in GaAs Hall-cross devices (1987) (1)
- CMOS integrated microsystems and nanosystems (1999) (1)
- Plastic BGA Package and Direct Filter Attachment for CMOS Thermal Imagers (2001) (1)
- Two-dimensional numerical analysis of novel magnetotransistor with partially removed substrate (1992) (1)
- Microsystem CAD (1996) (1)
- Electro-Thermo-Mechanical Field Analysis using SESES (1994) (1)
- Switched capacitor dual-collector magnetotransistors (1994) (1)
- Treatment of thermomagnetic effects in semiconductor device modelling (1990) (1)
- Is technology transfer possible (1998) (0)
- Interface circuitry for CMOS-based monolithic gas sensor arrays (2003) (0)
- Mechanical and Fluidic Signals (1999) (0)
- Thermal Sensors Fabricated by CMOS and Micromachining (2018) (0)
- PNP BIPOWR MAGNILTOTRANSISTOR FOR SENSOR APPLICATION (1991) (0)
- CMOS Platform Technology for Chemical Sensors (2005) (0)
- Chapter 2. Thermoelectric Microsensors and Microsystems (2008) (0)
- INFLUENCE OF DE AND PACKAGING ON THE RESPONSE OS FLOW SENSORS (1995) (0)
- Cantilever Beam Resonators (2002) (0)
- Lateral transistor structure optimization with respect to current gain (1987) (0)
- SESES: A Comprehensive MEMS Modelli (1994) (0)
- Radiation Effects on Carrier Transport (1999) (0)
- Force Sensors for Parallel Scanning Atomic Force Microscopy (2002) (0)
- TCAD for MEMS (1996) (0)
- Micro and nano sensors snoop around (2003) (0)
- From research to product: the CMOS MEMS case (2000) (0)
- Package Quality Testing Using Integrated Pressure Sensor Package Quality Testing Using Integrated Pressure Sensor (1999) (0)
- Microtechnology for Chemical Sensors (2005) (0)
- Carrier transport in semiconductor magnetic sensors under nonuniform fields (1986) (0)
- Mechanical Effects on Carrier Transport (1999) (0)
- Sensors in Microsystems (2008) (0)
- SIMULATION TOOL TO IMPROVE PIEZORESISTIVE MICROSENSORS USED FOR MONITORING BALL BONDING (2000) (0)
- Mechanical characterization of Electroplated NiFe (2000) (0)
- A CMOS current-controlled multivibrator (1992) (0)
- Magnetic Field Effects on Carrier Transport (1999) (0)
- Scanning probe-based local spectroscopy of semiconductor heterostructures below 300mK (2002) (0)
- A NiFeMo Electroplating Bath for Micromachined Structures. (2000) (0)
- Oxide Etch without etching Aluminum Etchant Oxide Etch (2003) (0)
- Moment-based Analysis of Mechanical Effects on Trench-Hall Devices (2001) (0)
- Bipolar Magnetotransistor: Relative Sensitivity Revisited (1994) (0)
- Thermal CMOS anemometers (1998) (0)
- A new Platform for Studying Information Processing by Natural Neural Networks (2004) (0)
- BOOK REVIEW: Sensors Update, Volume 9 (2002) (0)
- Outlook and Future Developments (2005) (0)
- CMOS-Based Biochemical Sensing Systems (2006) (0)
- Microfabricated Chemical Sensors (2005) (0)
- ip Signal P ocessing ontactless e Measurement (1996) (0)
- Nanofluidics – Structures and Devices (2004) (0)
- Is the femtoamp bipolar transistor DC operation feasible (1996) (0)
- Basic Electronic Transport (1999) (0)
- Modeling of Hall Devices Under Magnetic Field (1987) (0)
- Resonant Gas Sensor (2002) (0)
- to Measure the OS Layer Sand (1997) (0)
- Minority carrier lifetime measurements after high temperature pre-treatment (1992) (0)
- Integrated-optical nanomechanical components (1994) (0)
- INDUSTRIAL FABRICATION METHOD FOR MICROMECHANICAL STRUCTURES ARBITRARILY SHAPED SILICON N-WELL (1998) (0)
- CMOS Integrated Chemical Microsensors And Their Circuitry (特集 集積化・知能化センサとその要素技術) (2000) (0)
- Fundamentals of Chemical Sensing (2005) (0)
- 11 – Semiconductor-Based Chemical Microsensors (2006) (0)
- CONTACTLESS ANGLE MEASUREMENT BY C MAGNETIC SENSOR WITH (1995) (0)
- Microfluidic PDMS Channel System to Achieve Defined Neuronal Network Topologies for Reliable Electrical Activity Measurements (2004) (0)
- Single-chip AFM array with integrated digital controllers (2004) (0)
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