Mark G. Allen

Q: What Schools Are Affiliated With Mark G. Allen

Mark G. Allen is affiliated with the following schools: University of California, Berkeley, Stanford University, Massachusetts Institute of Technology, Georgia Tech, University of Pennsylvania

Mark G. Allen's AcademicInfluence.com Rankings

Mark G. Allen

Engineering

#2137

World Rank

#2990

Historical Rank

Applied Physics

#685

World Rank

#707

Historical Rank

Electrical Engineering

#717

World Rank

#781

Historical Rank

engineering Degrees

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Engineering

Mark G. Allen's Degrees

PhD Electrical Engineering Stanford University
Masters Electrical Engineering Stanford University
Bachelors Electrical Engineering Stanford University

Why Is Mark G. Allen Influential?

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According to Wikipedia, Mark G. Allen is a professor specializing in microfabrication, nanotechnology, and microelectromechanical systems at the University of Pennsylvania, where he is currently Alfred Fitler Moore Professor of Electrical and Systems Engineering Director of the Singh Center for Nanotechnology, and leader of the Microsensor and Microactuator Research Group. Prior to his joining the University of Pennsylvania in 2013, he was with the Georgia Institute of Technology, where he was Regents' Professor of Electrical and Computer Engineering and the J.M. Pettit Professor in Microelectronics. While at Georgia Tech, he also held multiple administrative positions, including Senior Vice Provost for Research and Innovation; Acting Director of the Georgia Electronic Design Center; and Inaugural Executive Director of Georgia Tech's Institute for Electronics and Nanotechnology. He was editor in chief of the Journal of Micromechanics and Microengineering , and currently serves on the editorial board of JMM as well as the journal Microsystems and Nanoengineering .

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Mark G. Allen's Published Works

Number of citations in a given year to any of this author's works

Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author

Published Works

Microfabricated microneedles: a novel approach to transdermal drug delivery. (1998) (963)
Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: Fabrication methods and transport studies (2003) (751)
Insertion of microneedles into skin: measurement and prediction of insertion force and needle fracture force. (2004) (642)
Diode laser absorption sensors for gas-dynamic and combustion flows. (1998) (554)
Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery. (2005) (542)
Lack of Pain Associated with Microfabricated Microneedles (2001) (421)
Polymer Microneedles for Controlled-Release Drug Delivery (2006) (401)
Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery (2004) (397)
Microfabricated microneedles for gene and drug delivery. (2000) (348)
Hollow metal microneedles for insulin delivery to diabetic rats (2005) (329)
Wireless micromachined ceramic pressure sensor for high-temperature applications (2002) (310)
Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films (1987) (254)
Micromachined planar inductors on silicon wafers for MEMS applications (1998) (188)
Microjet cooling devices for thermal management of electronics (2003) (187)
Magnetic microactuators based on polymer magnets (1999) (181)
Fully integrated magnetically actuated micromachined relays (1998) (175)
Lack of pain associated with microfabricated microneedles. (2001) (156)
A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply (1995) (149)
Multidirectional UV Lithography for Complex 3-D MEMS Structures (2006) (148)
Metallic microstructures fabricated using photosensitive polyimide electroplating molds (1993) (143)
Tapered Conical Polymer Microneedles Fabricated Using an Integrated Lens Technique for Transdermal Drug Delivery (2007) (140)
A fully integrated micromachined magnetic particle separator (1996) (134)
Ultrasensitive dual-beam absorption and gain spectroscopy: applications for near-infrared and visible diode laser sensors. (1995) (130)
Alignable epitaxial liftoff of GaAs materials with selective deposition using polyimide diaphragms (1991) (130)
Micromachined needles for the transdermal delivery of drugs (1998) (124)
Surface micromachined solenoid inductors for high frequency applications (1997) (122)
A Microfabricated Wireless RF Pressure Sensor Made Completely of Biodegradable Materials (2012) (114)
Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices (1998) (113)
Polymer particle-based micromolding to fabricate novel microstructures (2007) (113)
FLEXIBLE WIRELESS PASSIVE PRESSURE SENSORS FOR BIOMEDICAL APPLICATONS (2006) (113)
Rapid measurements of temperature and H2O concentration in IC engines with a spark plug-mounted diode laser sensor (2007) (113)
Measurements of CO, CO2, OH, and H2O in room-temperature and combustion gases by use of a broadly current-tuned multisection InGaAsP diode laser. (1999) (107)
A planar variable reluctance magnetic micromotor with fully integrated stator and coils (1993) (102)
An electrically active microneedle array for electroporation (2010) (101)
Fluid micropumps based on rotary magnetic actuators (1995) (101)
Magnetic and mechanical properties of micromachined strontium ferrite/polyimide composites (1997) (99)
Analysis of Critical Debonding Pressures of Stressed Thin Films in the Blister Test (1988) (98)
A novel integrated decoupling capacitor for MCM-L technology (1996) (98)
Microsecond thermal ablation of skin for transdermal drug delivery. (2011) (97)
A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core (1993) (89)
Application of Balanced Detection to Absorption Measurements of Trace Gases with Room-Temperature, Quasi-cw Quantum-Cascade Lasers. (2001) (84)
Handheld, battery-powered near-IR TDL sensor for stand-off detection of gas and vapor plumes (2003) (83)
High aspect ratio electroplated microstructures using a photosensitive polyimide process (1992) (82)
A wide-band reflection-type phase shifter at S-band using BST coated substrate (2002) (82)
Absorption measurements of the second overtone band of NO in ambient and combustion gases with a 1.8-mum room-temperature diode laser. (1997) (79)
A diode laser sensor for rapid, sensitive measurements of gas temperature and water vapour concentration at high temperatures and pressures (2007) (78)
Uncrosslinked SU-8 as a sacrificial material (2005) (78)
Tunable terahertz quantum cascade lasers with an external cavity (2007) (77)
A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils (1993) (77)
Integrated cavity output spectroscopy measurements of NO levels in breath with a pulsed room-temperature QCL (2005) (77)
Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: application to low-megahertz DC-DC converters (2003) (76)
An electromagnetic energy scavenger from direct airflow (2009) (74)
A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost DC/DC (1996) (74)
Observation of CO and CO(2) absorption near 1.57 microm with an external-cavity diode laser. (1997) (74)
Three dimensional MEMS microfluidic perfusion system for thick brain slice cultures (2007) (74)
Digital imaging of reaction zones in hydrocarbon - air flames using planar laser-induced fluorescence of CH and C2. (1986) (74)
A Technology Overview of the PowerChip Development Program (2013) (73)
A new toroidal-meander type integrated inductor with a multilevel meander magnetic core (1994) (72)
Ferrite-based Integrated Planar Inductors And Transformers Fabricated At Low Temperature (1997) (70)
Polymer-core conductor approaches for RF MEMS (2005) (70)
An imaging neural network combustion control system for utility boiler applications (1993) (70)
Thermoelectrically cooled quantum-cascade-laser-based sensor for the continuous monitoring of ambient atmospheric carbon monoxide. (2002) (70)
Planar laser-induced-fluorescence imaging measurements of OH and hydrocarbon fuel fragments in high-pressure spray-flame combustion. (1995) (69)
A reduced intermodulation distortion tunable ferroelectric capacitor: architecture and demonstration (2003) (69)
Fabrication and characterization of laser micromachined hollow microneedles (2003) (68)
Micromachined endovascularly-implantable wireless aneurysm pressure sensors: from concept to clinic (2005) (67)
Biodegradable magnesium/iron batteries with polycaprolactone encapsulation: A microfabricated power source for transient implantable devices (2015) (67)
Diode laser-based air mass flux sensor for subsonic aeropropulsion inlets. (1996) (65)
A patch type non-enzymatic biosensor based on 3D SUS micro-needle electrode array for minimally invasive continuous glucose monitoring (2016) (64)
Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate (2004) (64)
Wireless micromachined ceramic pressure sensors (1999) (64)
Quantitative THz Spectroscopy of Explosive Materials (2005) (63)
Integrated vertical screen microfilter system using inclined SU-8 structures (2003) (62)
Standoff and Miniature Chemical Vapor Detectors Based on Tunable Diode Laser Absorption Spectroscopy (2010) (59)
Micromachined biodegradable microstructures (2003) (58)
Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array (2006) (58)
Off-axis integrated cavity output spectroscopy with a mid-infrared interband cascade laser for real-time breath ethane measurements. (2009) (58)
Ultraminiaturized High-Speed Permanent-Magnet Generators for Milliwatt-Level Power Generation (2008) (57)
Hollow microneedles for intradermal injection fabricated by sacrificial micromolding and selective electrodeposition (2013) (57)
Intracellular protein delivery and gene transfection by electroporation using a microneedle electrode array. (2012) (57)
A fully integrated planar toroidal inductor with a micromachined nickel-iron magnetic bar (1994) (57)
Application of the Island Blister Test for Thin Film Adhesion Measurement (1989) (57)
A Refreshable Braille Cell Based on Pneumatic Microbubble Actuators (2012) (56)
A planar micromachined spiral inductor for integrated magnetic microactuator applications (1993) (56)
SU-8 2000 rendered cytocompatible for neuronal bioMEMS applications. (2008) (54)
Active Control Technology for Enhanced Performance Operational Capabilities of Military Aircraft, Land Vehicles and Sea Vehicles (2001) (54)
Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices (1997) (54)
High O spiral-type microinductors on silicon substrates (1999) (54)
Simultaneous water vapor concentration and temperature measurements using 1.31-micron diode lasers (1996) (53)
Digital imaging of species concentration fields in spray flames (1988) (53)
Design optimization of an 8 W, microscale, axial-flux, permanent-magnet generator (2006) (52)
Extracellular matrix-based intracortical microelectrodes: Toward a microfabricated neural interface based on natural materials (2015) (52)
Fluorescence imaging of OH and NO in a model supersonic combustor (1993) (52)
Integrated electroplated micromachined magnetic devices using low temperature fabrication processes (2000) (51)
Packaging-compatible high Q microinductors and microfilters for wireless applications (1999) (51)
Development of micromachined devices using polyimide-based processes (1994) (51)
Diode laser-based sensors for chemical oxygen iodine lasers (1996) (51)
Finger sculpting with Digital Clay: 3D shape input and output through a computer-controlled real surface (2003) (51)
2.4 GHz continuously variable ferroelectric phase shifters using all-pass networks (2003) (50)
Ultrasensitive, visible tunable diode laser detection of NO(2). (1996) (50)
Low temperature fabrication and characterization of integrated packaging-compatible, ferrite-core magnetic devices (1997) (48)
Through container THz sensing: applications for explosives screening (2004) (47)
Capacitive pressure sensors with stainless steel diaphragm and substrate (2004) (46)
Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores (1999) (46)
An all-polymer airflow sensor using a piezoresistive composite elastomer (2009) (46)
Large eddy simulation (LES) for synthetic jet thermal management (2006) (45)
In-situ sensing of tropospheric water vapor using an airborne near-IR diode laser hygrometer (1998) (45)
Microfabricated High-Speed Axial-Flux Multiwatt Permanent-Magnet Generators—Part II: Design, Fabrication, and Testing (2006) (45)
Silicon-embedded 3D toroidal air-core inductor with through-wafer interconnect for on-chip integration (2012) (44)
Highly-compliant, microcable neuroelectrodes fabricated from thin-film gold and PDMS (2011) (44)
Size- and composition-dependent radio frequency magnetic permeability of iron oxide nanocrystals. (2014) (42)
Microcrimped Collagen Fiber‐Elastin Composites (2010) (41)
Flexible microelectrode arrays with integrated insertion devices (2001) (41)
Ion beam induced luminescence from diamond and other crystals from a nuclear microbeam (1994) (41)
Vertical electrical interconnection of compound semiconductor thin-film devices to underlying silicon circuitry (1992) (40)
Addressable Micromachined Jet Arrays (1995) (40)
Diode Laser Sensor for Gasdynamic Measurements in a Model Scramjet Combustor (2000) (39)
Hollow polymer microneedle array fabricated by photolithography process combined with micromolding technique (2009) (39)
Analysis and Characterization of a High-Performance Ka-Band Surface Micromachined Elevated Patch Antenna (2006) (38)
Surface plasmon isolator based on nonreciprocal coupling (2009) (38)
Two dimensional metallic microelectrode arrays for extracellular stimulation and recording of neurons (1993) (37)
Very high-Q inductors using RF-MEMS technology for System-On-Package wireless communication integrated module (2003) (36)
Generation of Spatially Aligned Collagen Fiber Networks Through Microtransfer Molding (2014) (36)
Microfabricated High-Speed Axial-Flux Multiwatt Permanent-Magnet Generators—Part I: Modeling (2006) (36)
RF evanescent-mode cavity resonator for passive wireless sensor applications (2010) (36)
A NiFeMo Electroplating Bath for Micromachined Structures (1999) (35)
A solid hydraulically amplified piezoelectric microvalve (2011) (35)
Improvements and recent advances in nanocomposite capacitors using a colloidal technique (1998) (34)
Microfabrication of air core power inductors with metal-encapsulated polymer vias (2013) (34)
Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication (2011) (34)
Rotational level-dependent collisional broadening and line shift of the A2σ+−X2∏ (1, 0) band of OH in hydrogen-air combustion gases (1993) (33)
Sensing nitrous oxide with QCL-coupled silicon-on-sapphire ring resonators. (2015) (33)
A high voltage solar cell array as an electrostatic MEMS power supply (1994) (33)
Deformable Strain Sensors Based on Patterned MWCNTs/ Polydimethylsiloxane Composites (2013) (33)
Standoff sensing of natural gas leaks: evolution of the remote methane leak detector (RMLD) (2005) (33)
Micromachined three-dimensional electrode arrays for transcutaneous nerve tracking (2011) (33)
Implantable Sensors for Regenerative Medicine. (2017) (33)
A fully integrated micromagnetic actuator with a multilevel meander magnetic core (1992) (32)
Standoff gas leak detectors based on tunable diode laser absorption spectroscopy (2005) (32)
WIRELESS CHEMICAL SENSORS FOR HIGH TEMPERATURE ENVIRONMENTS (2006) (32)
Calibrated measurements of elastic limit, modulus, and the residual stress of thin films using micromachined suspended structures (1988) (32)
A low-power resonant micromachined compass (2004) (31)
A W-band surface micromachined monopole for low-cost wireless communication systems (2004) (31)
Wireless Ceramic Sensors Operating in High Temperature Environments (2004) (31)
MEMS technology for the fabrication of RF magnetic components (2003) (31)
Micro-fabricated thin-film inductors for on-chip power conversion (2012) (31)
Fabrication and Characterization of Polymer Hollow Microneedle Array Using UV Lithography Into Micromolds (2013) (31)
A vertical W-band surface-micromachined Yagi-Uda antenna (2005) (30)
A wide bandwidth monolithic BST reflection-type phase shifter using a coplanar waveguide Lange coupler (2002) (30)
Magnetic induction machines integrated into bulk-micromachined silicon (2006) (29)
High-aspect-ratio tapered structures using an integrated lens technique (2004) (29)
Piezoresistive graphite/polyimide thin films for micromachining applications (1993) (29)
Robust capacitive pressure sensor array (2002) (29)
A comparison of micromachined inductors with different magnetic core materials (1996) (29)
ERRATUM: An energy-based design criterion for magnetic microactuators (1996) (29)
A 2.4 GHz integrated CMOS power amplifier with micromachined inductors (2001) (28)
Fabrication of high current and low profile micromachined inductor with laminated Ni/Fe core (2002) (28)
Active cooling substrates for thermal management of microelectronics (2005) (27)
Nanolaminated Permalloy Core for High-Flux, High-Frequency Ultracompact Power Conversion (2013) (27)
Metal-Transfer-Micromolded Three-Dimensional Microelectrode Arrays for in-vitro Brain-Slice Recordings (2011) (27)
Imaging of laser-induced fluorescence in a high-pressure combustor (1999) (27)
Multi-watt electric power from a microfabricated permanent-magnet generator (2005) (27)
Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators (2010) (27)
Velocity Field Imaging in Supersonic Reacting Flows near Atmospheric Pressure (1994) (27)
Quantum cascade laser sensor for SO2 and SO3 for application to combustor exhaust streams. (2005) (27)
Electrothermal microactuators based on dielectric loss heating (1993) (27)
Wireless Implantable Sensor for Noninvasive, Longitudinal Quantification of Axial Strain Across Rodent Long Bone Defects. (2017) (27)
High-Q mechanical tuning of MEMS resonators using a metal deposition -annealing technique (2005) (26)
A Portable Pneumatically-Actuated Refreshable Braille Cell (2007) (26)
Cooling performance of micromachined self-oscillating reed actuators in heat transfer channels with integrated diagnostics (2012) (26)
Hypodermic-Needle-Like Hollow Polymer Microneedle Array: Fabrication and Characterization (2014) (26)
Planarization techniques for vertically integrated metallic MEMS on silicon foundry circuits (1997) (26)
Microfabrication of toroidal inductors integrated with nanolaminated ferromagnetic metallic cores (2013) (26)
Planar laser-induced-fluorescence monitoring of OH in a spray flame (1986) (25)
The next generation of TDLAS analyzers (2007) (25)
Heat transfer enhancement in high-power heat sinks using active reed technology (2010) (25)
Solid-phase conductive fuels for chemical microactuators (2004) (24)
Electrodeposited Co–Pt micron-size magnets with strong perpendicular magnetic anisotropy for MEMS applications (2004) (24)
Demonstration of a rapidly strain tuned Er3+-doped fiber laser for sensitive gas detection. (1999) (24)
Planar spiral inductors with multilayer micrometer-scale laminated cores for compact-packaging power converter applications (2004) (24)
High Aspect Ratio SU-8 Structures for 3-D Culturing of Neurons (2003) (23)
Electroplated soft magnetic materials for microsensors and microactuators (1997) (23)
Integrated solenoid-type inductors for high frequency applications and their characteristics (1998) (23)
In situ measurement of mechanical properties of polyimide films using micromachined resonant string structures (1999) (23)
Silicon-Embedding Approaches to 3-D Toroidal Inductor Fabrication (2013) (23)
Exploitation of aeroelastic effects for drift reduction in an all-polymer air flow sensor (2009) (22)
Copper atom based measurements of velocity and turbulence in arc jet flows (1991) (22)
Extracellular matrix-based materials for neural interfacing (2012) (22)
Magnetic induction micromachine-part II: fabrication and testing (2006) (22)
Single- and multi-layer surface-micromachined platforms using electroplated sacrificial layers (1992) (22)
Biodegradable batteries with immobilized electrolyte for transient MEMS (2019) (22)
Spectral behavior of a terahertz quantum-cascade laser. (2009) (22)
Uses of electroplated aluminum for the development of microstructures and micromachining processes (1997) (22)
Development and characterization of a packaged mechanically actuated microtweezer system (2011) (22)
Three-Dimensional Metal Transfer Micromolded Microelectrode Arrays (MEAS) for In-Vitro Brain Slice Recordings (2007) (22)
Diode laser-based air mass flux sensor for subsonic aeropropulsion inlets (1996) (21)
Design and fabrication of movable silicon plates suspended by flexible supports (1989) (21)
Diode laser measurements of line strengths and self-broadening parameters of water vapor between 300 and 1000K near 1.31μm (1998) (21)
Packaging-Compatible microinductors and microtransformers with screen-printed soft ferrite using low temperature processes (1998) (21)
A sacrificial layer approach to highly laminated magnetic cores (2002) (21)
Movable micromachined silicon plates with integrated position sensing (1990) (21)
Micropatternable elastic electrets based on a PDMS/carbon nanotube composite (2010) (21)
Closed-loop system for stability control in gas turbine combustors (1997) (20)
PLIF imaging in spray flame combustors at elevated pressure (1995) (20)
Pulsed laser annealing of P-implanted diamond (1993) (20)
UV-LED LITHOGRAPHY FOR 3-D HIGH ASPECT RATIO MICROSTRUCTURE PATTERNING (2012) (20)
Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors (2007) (20)
Technology Development for Short-period Magnetic Undulators (2014) (20)
A thermal microjet system with tapered micronozzles fabricated by inclined UV lithography for transdermal drug delivery (2011) (19)
Integrated flux concentrator improves CMOS magnetotransistors (1995) (19)
Parylene-Insulated Ultradense Microfabricated Coils (2010) (19)
Micromachined polymer magnets (1996) (19)
Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials (2004) (18)
Surface-micromachined millimeter-wave antennas (2005) (18)
Inclined nanoimprinting lithography for 3D nanopatterning (2011) (18)
Mechanically driven microtweezers with integrated microelectrodes (2008) (18)
Highly inclined electrodeposited metal lines using an excimer laser patterning technique (2005) (18)
Micromachined viscosity sensor for real-time polymerization monitoring (1997) (18)
Handheld laser-based sensor for remote detection of toxic and hazardous gases (2001) (18)
High Temperature Characterization of Ceramic Pressue Sensors (2001) (18)
Microfluidics for generation and characterization of liquid and gaseous micro- and nanojets (2007) (18)
AVIA: Adaptive Virtual Aerosurface (2000) (17)
Characterization of laser-heated soot particles using optical pyrometry (1998) (17)
A MEMS-enabled biodegradable battery for powering transient implantable devices (2014) (17)
Measurements of OH and H2O for Reacting Flow in a Supersonic Combusting Ramjet Combustor (1995) (17)
A micromachined airflow sensor based on RF evanescent-mode cavity resonator (2008) (17)
APPLICATION OF BALANCED DETECTION TO ABSORPTION MEASUREMENTS OF TRACE GASES WITH ROOM-TEMPERATURE, QUASI-CW QC LASERS (2001) (17)
High temperature operation of multi-watt, axial-flux, permanent-magnet microgenerators (2008) (17)
A fully integrated micromachined magnetic particle manipulator and separator (1994) (17)
A High Torque Density MEMS Magnetic Induction Machine (2001) (17)
Multifunctional industrial combustion process monitoring with tunable diode lasers (2001) (16)
Surface micromachined platforms using electroplated sacrificial layers (1991) (16)
High Current Integrated Microinductors and Microtransformers using Low Temperature Fabrication Processes (1997) (16)
A Magnetically Excited And Sensed MEMS-Based Resonant Compass (2006) (16)
A metallic buried interconnect process for through-wafer interconnection (2008) (16)
AIAA 2000-0772 Measurements of Major Species in a High Pressure Gas Turbine Combustion Simulator Using Raman Scattering (2000) (16)
A micromachined resonant magnetic field sensor (2001) (16)
Vertically laminated magnetic cores by electroplating Ni-Fe into micromachined Si (2004) (16)
Kinematically-stabilized microbubble actuator arrays (2008) (16)
Spun-cast micromolding for etchless micropatterning of electrically functional PDMS structures (2009) (16)
A MEMS-enabled 3D zinc–air microbattery with improved discharge characteristics based on a multilayer metallic substructure (2011) (16)
Single- and multi-layer electroplated microaccelerometers (1996) (16)
Three dimensional metal pattern transfer for replica molded microstructures (2009) (15)
Biomimetic extracellular matrix coatings improve the chronic biocompatibility of microfabricated subdural microelectrode arrays (2018) (15)
microneedle devices and methods of manufacture. (1999) (15)
Interband cascade laser-based sensor for ambient CH4 (2010) (15)
RF MEMS based on Epoxy-Core Conductors (2002) (15)
Ultra-Compact Power Conversion Based on a CMOS-Compatible Microfabricated Power Inductor with Minimized Core Losses (2007) (15)
Embedded Solenoid Inductors for RF CMOS Power Amplifiers (2001) (15)
A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification (2008) (15)
Rapid, low-cost fabrication of parylene microchannels for microfluidic applications (2003) (15)
Microfabricated intracortical extracellular matrix-microelectrodes for improving neural interfaces (2018) (14)
Intracellular delivery of molecules using microfabricated nanoneedle arrays (2016) (14)
Nonlinear sensitivity enhancement of resonant microsensors and its application to low power magnetic sensing (2011) (14)
Integrated inductors in the chip-to-board interconnect layer fabricated using solderless electroplating bonding (2002) (14)
Exploitation of aeroelastic effects for drift reduction, in an all-polymer air flow sensor (2011) (14)
Instantaneous temperature and concentration imaging in supersonic air flow behind a rear-facing step with hydrogen injection (1992) (14)
Integration of thin film optoelectronic devices onto micromachined movable platforms (1994) (14)
Tunable ferroelectric capacitor with low-loss electrodes fabricated using reverse side exposure (2003) (14)
Ultraminiaturized Milliwatt-Scale Permanent Magnet Generators (2007) (14)
A MEMS lamination technology based on sequential multilayer electrodeposition (2013) (14)
Strain‐modulated epitaxy: A flexible approach to 3‐D band structure engineering without surface patterning (1996) (14)
Microfabricated implantable wireless microsystems: Permanent and biodegradable implementations (2014) (14)
High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generators (2005) (14)
Modeling and Measured Verification of Stored Energy and Loss in MEMS Toroidal Inductors (2012) (13)
PLIF imaging measurements in high-pressure spray flame combustion (1994) (13)
Computer numerical control (CNC) lithography: light-motion synchronized UV-LED lithography for 3D microfabrication (2016) (13)
Progress in reducing size and cost of trace gas analyzers based on tunable diode laser absorption spectroscopy (2004) (13)
Embedded conductor technology for micromachined RF elements (2005) (13)
A comparison of two micromachined inductors (bar-type and meander-type) for fully integrated boost DC/DC power converters (1994) (13)
Characterization of low-temperature SU-8 photoresist processing for MEMS applications (2004) (13)
Wafer-fused orientation-patterned GaAs (2008) (13)
Development of Electroplated Magnesium Microstructures for Biodegradable Devices and Energy Sources (2014) (13)
Fully integrated passives modules for filter applications using low temperature processes (1997) (13)
Infrared Characterization of Particulate and Pollutant Emissions from Gas Turbine Combustors (2001) (12)
ELECTROPLATING-BASED APPROACHES TO VOLUMETRIC NANOMANUFACTURING (2011) (12)
Thermomigration-Based Junction Isolation of Bulk Silicon MEMS Devices (2006) (12)
Tomographic reconstruction of air temperature and density profiles using tunable diode laser absorption measurements on O2 (1995) (12)
Planar measurements of instantaneous species and temperature distributions in reacting flows - A novel approach to ground testing instrumentation (1990) (12)
Electroless Ni-P/Ni-W-P thin-film resistors for MCM-L based technologies (1998) (12)
Two-color-absorption sensor for time-resolved measurements of gasoline concentration and temperature. (2009) (12)
Infrared emission from high-temperature H2O(nu2) - A diagnostic for concentration and temperature (1996) (12)
3-D PATTERNED MICROSTRUCTURES USING INCLINED UV EXPOSURE AND METAL TRANSFER MICROMOLDING (2006) (12)
Magnetic Patterning of Permanent-Magnet Rotors for Microscale Motor/Generators (2005) (12)
Through-container THz sensing: applications for biodetection (2004) (11)
SURFACE MICROMACHINED ELECTROMAGNETICALLY RADIATING RF MEMS (2004) (11)
High-temperature supersonic combustion testing with optical diagnostics (1993) (11)
Anisotropic nanolaminated CoNiFe cores integrated into microinductors for high-frequency dc–dc power conversion (2015) (11)
CHARACTERIZATION OF A FULLY-INTEGRATED PERMANENT-MAGNET TURBINE GENERATOR (2008) (11)
Low-cost lightweight airborne laser-based sensors for pipeline leak detection and reporting (2013) (11)
Electrodeposited Nanolaminated CoNiFe Cores for Ultracompact DC–DC Power Conversion (2015) (11)
Accuracy and linearity of time-domain THz paint thickness measurements (2008) (11)
An experimental study of microfabricated spark gaps :wear and erosion characteristics (2001) (11)
An All Polymer Air-Flow Sensor Array using a Piezoresistive Composite Elastomer (2009) (11)
Electroplated Metal Buried Interconnect and Through-Wafer Metal-Filled Via Technology for High-Power Integrated Electronics (2009) (11)
Diode laser instrumentation for aeropropulsion applications (1995) (11)
A broadband surface-micromachined 15-45 ghz microstrip coupler (2005) (11)
Nanoparticle sintering methods and applications for printed electronics (2011) (11)
Packaging compatible micromagnetic devices using screen printed polymer/ferrite composites (1998) (11)
Gas Generator Actuator Arrays for Flight Control of Spinning Body Projectiles (2006) (11)
Polymeric microcombustors for solid-phase conductive fuels (2004) (11)
The mechanics of microneedles (2002) (10)
Miniature Excess Enthalpy Combustor for Microscale Power Generation (2001) (10)
An experimental study of supersonic H2-AIR combustion in a shock tunnel flow facility (1992) (10)
Time-resolved infrared emission spectroscopy in high-enthalpy supersonic air flows (1993) (10)
Microneedles for transdermal delivery of macromolecules (1999) (10)
A Micromachined Freestanding Electrochemical Sensor for Measuring Dissolved Oxygen (2019) (10)
Low-loss microelectrodes fabricated using reverse-side exposure for a tunable ferroelectric capacitor application (2006) (10)
Dissolvable-tipped, drug-reservoir integrated microneedle array for transdermal drug delivery (2010) (10)
Electrodeposited Metal Structures in High Aspect Ratio Cavities using Vapor Deposited Polymer Molds and Laser Micromachining (2007) (10)
Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon (2005) (10)
Electrical Interconnects Fabricated From Biodegradable Conductive Polymer Composites (2019) (10)
Chip-to-Board Micromachining for Interconnect Layer Passive Components (2007) (10)
Magnetic Induction Machines Embedded in Fusion-Bonded Silicon (2004) (10)
Thick orientation-patterned GaAs grown by low-pressure HVPE on fusion-bonded templates (2012) (10)
Thick Multilayered Micromachined Permanent Magnets With Preserved Magnetic Properties (2016) (10)
Hyperspectral Infrared Imaging of Flames Using a Spectrally Scanning Fabry-Perot Filter (2001) (10)
Continuously-varying, three-dimensional SU-8 structures: fabrication of inclined magnetic actuators (2002) (10)
Automated dynamic mode multidirectional UV lithography for complex 3-D microstructures (2008) (9)
Detection of high explosives with THz radiation (2005) (9)
Fluorescence imaging of NO and O2 in a spray flame combustor at elevated pressures (1996) (9)
Silicon-embedded toroidal inductors with magnetic cores: Design methodology and experimental validation (2014) (9)
Alternate current magnetic property characterization of nonstoichiometric zinc ferrite nanocrystals for inductor fabrication via a solution based process (2016) (9)
Highly Laminated Soft Magnetic Electroplated CoNiFe Thick Films (2013) (9)
Nanopatterned surfaces based on template-assisted multilayer electrodeposition. (2015) (9)
Absorption performance of iodixanol-imprinted polymers in aqueous and blood plasma media. (2010) (9)
Microfabricated, ultra-dense, three-dimensional metal coils (2009) (9)
Low-voltage ferroelectric phase shifters from L- to C-band and their applications (2006) (9)
Vertically integrated high voltage Zn-Air batteries enabled by stacked multilayer electrodeposition (2020) (9)
A tunable capacitor using an immiscible bifluidic dielectric (2004) (9)
Anisotropy in Thermal, Electrical and Mechanical Properties of Spin-Coated Polymer Dielectrics (1994) (9)
PLIF imaging measurements compared to model calculations in high-temperature Mach 3 airflow over a sphere (1993) (9)
Reconfigurable shadow mask technology: a microsystem for metal nanoline deposition (2004) (9)
Micromachined intermediate and high frequency inductors (1997) (9)
A Self-Contained, Flow-Powered Microgenerator System (2005) (9)
Modeling of substrate‐induced anisotropy in through‐plane thermal behavior of polymeric thin films (1996) (9)
Species and temperature imaging in liquid-fueled spray flames (1990) (9)
Terahertz Time Domain Measurements of Marine Paint Thickness (2007) (9)
Monolithically-fabricated laminated inductors with electrodeposited silver windings (2013) (9)
A pendulous oscillating gyroscopic accelerometer fabricated using deep-reactive ion etching (2003) (9)
A Micromachined Chip-to-Board Interconnect System Using Electroplating Bonding Technology (2008) (8)
Micromachined Flexible Interconnect for Wafer Level Packaging (2001) (8)
Diode laser sensors for combustor and aeroengine emissions testing - Applications to CO, CO2, OH, and NO (1996) (8)
An electrically active microneedle array for electroporation of skin for gene delivery (2005) (8)
A non-enzymatic micro-needle patch sensor for freecholesterol continuous monitoring (2014) (8)
Micromachined capacitors based on automated multilayer electroplating (2010) (8)
In situ wafer-level polarization of electret films in MEMS acoustic sensor arrays (2011) (8)
High Altitude Aerial Natural Gas Leak Detection System (2006) (8)
Single-step label-free nanowell immunoassay accurately quantifies serum stress hormones within minutes (2021) (8)
Hypodermic-needle-like hollow polymer microneedle array using UV lithography into micromolds (2011) (8)
Mid-IR Gas Sensors Based on Quasi-CW, Room-Temperature Quantum Cascade Lasers (2000) (8)
Immobilized electrolyte biodegradable batteries for implantable MEMS (2015) (8)
Fabrication of patterned carbon nanotube (CNT) / elastomer bilayer material and its utilization as force sensors (2009) (8)
Continuous water vapor mass flux and temperature measurements in a model scram jet combustor using a diode laser sensor (1999) (8)
Fabrication of 3D nanostructures by multidirectional UV lithography and predictive structural modeling (2015) (8)
A microfluidic-electric package for power MEMS generators (2008) (7)
Watt-level wireless power transfer based on stacked flex circuit technology (2011) (7)
Microfabricated nickel-based electrodes for high-power battery applications (2013) (7)
Measurement of adhesion and mechanical properties of thin films using microfabricated structures (1989) (7)
In-situ, multi-species combustion sensor using a multi-section diode laser (1998) (7)
Fabry-Perot pressure sensor arrays for imaging surface pressure distributions (1997) (7)
Near-IR diode-laser-based sensor for parts-per-billion-level water vapor in industrial gases (1999) (7)
Room-temperature mid-IR lasers for on-line measurements of trace combustion generated pollutants (2003) (7)
Integration of thin film passive circuits using high/low dielectric constant materials (1997) (7)
Methods for the microfabrication of magnesium (2013) (7)
Standoff detection from diffusely scattering surfaces using dual quantum cascade laser comb spectroscopy (2018) (7)
A THREE-DIMENSIONAL MICROFLUIDIC NETWORK FOR CELLULAR PERFUSION (2003) (6)
Exploitation of Nonlinear Effects for Enhancement of the Sensing Performance of Resonant Sensors (2007) (6)
Surface tension-driven assembly of metallic nanosheets at the liquid-air interface: Application to highly laminated magnetic cores (2015) (6)
Progress toward mid-IR chip-scale integrated-optic TDLAS gas sensors (2013) (6)
Design and fabrication of substrate-independent integrated antennas utilizing surface micromachining technology (2005) (6)
A ten-minute, single step, label-free, sample-to-answer assay for qualitative detection of cytokines in serum at femtomolar levels (2020) (6)
Pneumatically actuated micromachined synthetic jet modulators (2006) (6)
Near-IR diode lasers for in-situ measurements of combustor and aeroengine emissions (1997) (6)
Maskless fabrication of high aspect ratio structures by combination of micromolding and direct drawing (2011) (6)
Micromechanically based integrated optic modulators and switches (1993) (6)
A SELF-RESONANT, MEMS-FABRICATED, AIR-BREATHING ENGINE (2008) (6)
High performance system-on-package integrated Yagi-Uda antennas for W-band applications and mm-wave ultra-wideband data links (2006) (6)
AIAA 2000-2452 Overview of Diode Laser Measurements in Large-Scale Test Facilities (2000) (6)
Supercapacitor Electrodes Based on Three-Dimensional Copper Structures with Precisely Controlled Dimensions (2015) (6)
Pollutant emission monitoring using QC laser-based mid-IR sensors (2001) (6)
Packaging and characterization of mechanically actuated microtweezers for biomedical applications (2009) (6)
MEMS-based fabrication and microfluidic analysis of three-dimensional perfusion systems (2008) (6)
Fabrication of a fully integrated passive module for filter application using MCM-D compatible processes (2000) (6)
Measurement of mechanical properties and adhesion of thin polyimide films (1986) (6)
Diode laser measurements of line strengths and self-broadening parameters of water vapor between 300 and 1100 K near 1.31 micron (1997) (6)
Design and flight qualification of a diode laser-based optical mass flux sensor (1998) (6)
A sub-/spl mu/W micromachined magnetic compass (2003) (6)
Hairlike carbon-fiber-based solar cell (2010) (6)
Quantitative detection and imaging of soot particles by laser induced incandescence (1997) (5)
Silica hermetic packages based on laser patterning and localized fusion bonding (2018) (5)
Multiwell Plate Impedance Analysis of a Nanowell Array Sensor for Label-Free Detection of Cytokines in Mouse Serum (2020) (5)
Integrated inductors for low cost electronic packages (1995) (5)
Observations of H2O formation in the supersonic combustion of H2 by high-enthalpy air (1996) (5)
Metal-Transfer-Micromolded RF Components for System-On-Package (SOP) (2007) (5)
3D lithium ion battery fabrication via scalable stacked multilayer electrodeposition (2019) (5)
8×8 robust capacitive pressure sensor array (1998) (5)
MEMS-assisted spatially homogeneous endothelialization of a high length-to-depth aspect ratio microvascular network (2011) (5)
All-Passive Hardware Implementation of Multilayer Perceptron Classifiers (2020) (5)
Optimization of a Microscale, Axial-Flux, Permanent-Magnet Generator (2005) (5)
Inclined nanoimprinting lithography-based 3D nanofabrication (2011) (5)
Micro-opto-mechanical devices and systems using epitaxial lift off (1993) (5)
A microwell-based impedance sensor on an insertable microneedle for real-time in vivo cytokine detection (2021) (5)
AIAA 2001-3317 Quantum-Cascade Laser-Based Sensor for CO and NO Measurements in Combustor Exhaust Flows (2001) (5)
Batch-Fabricated Microjet Coolers for Electronic Components (1997) (5)
Ultrasensitive detection technique for tunable diode laser spectrometers: application to detection of NO2 and H2O (1996) (5)
CMOS Compatible Hermetic Packages Based on Localized Fusion Bonding of Fused Silica (2019) (5)
In-situ and stand-off sensing using QC/IC laser technology from 3-100 microns (2005) (5)
Nanolaminated CoNiFe Cores with Dip-Coated Fluoroacrylic Polymer Interlamination Insulation: Fabrication, Electrical Characterization, and Performance Reliability (2017) (5)
Assessment of Laser-Induced Damage in Laser-Micromachined Rare-Earth Permanent Magnets (2012) (5)
A Magnetically Actuated, Electrostatically Clamped High Current MEMS Switch (2001) (5)
Microfabricated PLGA/PVA-based completely biodegradable passive RF pressure sensors (2015) (5)
Thermally switchable thin films of an ABC triblock copolymer of poly( n -butyl methacrylate)-poly(methyl methacrylate)-poly(2-fluoroethyl methacrylate) (2011) (5)
Ultra-low-profile micromachined power inductors with highly laminated NiFe cores: application to low MHz DC-DC converters (2003) (5)
Model-assisted development of microfabricated 3D Ni(OH)2 electrodes with rapid charging capabilities (2017) (5)
Metal-Transfer-Micromolding of Air-Lifted RF Components (2007) (5)
Simultaneous Measurement of In-Cylinder Temperature and Residual Gas Concentration in the Vicinity of the Spark Plug by Wavelength Modulation Infrared Absorption (2007) (4)
Designing Surface Chemistry of Silver Nanocrystals for Radio Frequency Circuit Applications. (2018) (4)
New micromachind inductors on silicon substrates (1999) (4)
Polyimide-Based Processes for the Fabrication of Thick Electroplated Microstructures (2003) (4)
A micromachined pendulous oscillating gyroscopic accelerometer (2000) (4)
MICROFABRICATION OF AIR CORE TOROIDAL INDUCTORWITH VERY HIGH ASPECT RATIO METAL ENCAPSULATED POLYMER VIAS (2012) (4)
A single mask process for the realization of fully-isolated, dual-height MEMS metallic structures separated by narrow gaps (2018) (4)
High density focal plane signal processing using 3-D vertical interconnects (1994) (4)
Micromachined high Q inductors for high-frequency applications (1998) (4)
Wafer-scale Micromolding of Unitary Polymeric Microstructures with Simultaneously Formed Functional Metal Surface (2005) (4)
Wireless implantable sensor for non-invasive, longitudinal quantification of axial strain across rodent long bone defects (2017) (4)
Fully integrated micromachined inductors with electroplated anisotropic magnetic cores (1998) (4)
Optimization of Synthetic Jet Fluidic Structures in Printed Wiring Boards (2006) (4)
BIODEGRADABLE ELECTRICAL INTERCONNECTS FOR TRANSIENT IMPLANTABLE SYSTEMS (2016) (4)
AIAA 2000-0192 An Aerodynamic Control System for Modifying Fuel Spray Distributions (2000) (4)
Tunable diode laser sensor for multiple species monitoring in harsh atmospheres (2004) (4)
Diode laser sensors for aeroengines - Lessons learned and future promises (1998) (4)
Spectroscopic trace gas detection with pulsed quantum cascade lasers (2002) (4)
Interfacial interactions affecting polyimide reliability (1989) (4)
A HIGH BANDWIDTH AIR BEARING BALANCE FOR DYNAMIC WIND TUNNEL TESTING (1997) (4)
Digital imaging techniques for single- and multi-phase reacting flowfields (1987) (4)
Measurements of trace pollutants in combustion flows using room-temperature, Mid-IR quantum cascade lasers (2002) (4)
Laser based multiple gas species sensor for harsh combustion process control applications (2004) (4)
Ultrasensitive diode laser direct absorption measurements: applications to mass flux flight instrumentation (1994) (4)
Rapid homogeneous endothelialization of high aspect ratio microvascular networks (2015) (3)
Tunable Diode Laser Wavelength Modulation Spectroscopy (TDL-WMS) Using a Fiber-Amplified Source (2007) (3)
MCM-L Compatible Integrated Resistors And Capacitors (1998) (3)
Microsystems for the fabrication of nano-scale structures (2003) (3)
An experimental comparison of swept-ramp injectors in a model scramjet flow (1996) (3)
CO Absorption Measurements with a Mid-IR Quantum Laser for Engine Exhaust Applications (2003) (3)
Demonstration of Robust Micromachined Jet Technology and its Application to Realistic Flow Control Problems (2000) (3)
Micro-Cantilever Based Metrology Tool for Flow Characterization of Liquid and Gaseous Micro/Nanojets (2005) (3)
RETAINING HIGH AREAL IN-PLANE MAGNETIC ENERGY DENSITY OVER LARGE MAGNETIC THICKNESS: A PERMANENT MAGNETIC MICROLAMINATION APPROACH BASED ON SEQUENTIAL MULTILAYER ELECTROPLATING (2014) (3)
Water-based resistive switches for neuromorphic long-range connections (2021) (3)
Fabrication of molecular-scale patterns with chemically tunable functionalities (2009) (3)
Ferrite Filled Polymers for Integrated Power Conversion Devices (1997) (3)
ROOM-TEMPERATURE DIODE LASER MONITORS FOR SPACECRAFT AIR QUALITY (1997) (3)
High sensitivity detection of broadband gas absorption using time-domain multiplexed QC lasers (2003) (3)
Instantaneous velocity field imaging instrument for supersonic reacting flows (1993) (3)
Fully Additive Fabrication of Electrically Anisotropic Multilayer Materials Based on Sequential Electrodeposition (2020) (3)
Antireflection Coating for External-Cavity Quantum Cascade Laser Near 5 THz (2007) (3)
Microwell-array on a flexible needle: A transcutaneous insertable impedance sensor for label-free cytokine detection (2018) (3)
Micro-Ablation of Skin by Arc-Discharge Jet Ejection for Transdermal Drug Delivery (2007) (3)
A template-based fabrication technique for spatially-designed polymer micro/nanofiber composites (2009) (3)
A HIGHLY DENSE NANONEEDLE ARRAY FOR INTRACELLULAR GENE DELIVERY (2012) (3)
Cavity-enhanced-spectroscopy using room-temperature quantum cascade lasers (2004) (3)
Fabrication and Characterization of Liquid and Gaseous Micro- and Nanojets (2005) (3)
Three Dimensional Integrated Circuits: Epitaxial Lift Off GaAs Photodetectors Integrated Directly On Top Of Silicon Circuits (1992) (3)
Fabrication of Microscale Rotating Magnetic Machines (2009) (3)
An S-Band Reflection-Type Phase Shifter - A Design Example Using Ferroelectrics (2002) (3)
Plasmonic Absorption Enhancement in Organic Photovoltaic Cells with Periodic Metallic Nanostructures (2011) (3)
In vitro degradation of biodegradable metal Zn and Zn/Fe-couples and their application as conductors in biodegradable sensors (2015) (3)
Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation (2010) (3)
Micro projection lithography inside deep trenches using microlens on a mask (2009) (3)
Sensitive detection of methane via absorption spectroscopy using a mid-infrared DFB interband cascade laser (2003) (3)
Sidewall lithography of micron-sized features in high-aspect-ratio meso-scale channels using a three-dimensional assembled mask (2014) (3)
Micro Magnetic Induction Machines for Portable Power Applications (2003) (3)
igh temperature operation of multi-watt , axial-flux , permanent-magnet icrogenerators (2008) (3)
Nickel-oxide-based supercapacitors with high aspect ratio concentric cylindrical electrodes (2013) (3)
Multidirectional UV Lithography for Complex 3-D (2006) (3)
Progress Toward a Microfabricated Gas Turbine Generator for Soldier Portable Power Applications (2004) (3)
The evolution of a room temperature, near-IR diode laser sensor for combustion-generated NO emissions (1997) (3)
A MEMS Active Cooling Substrate for Microelectronics Thermal Management (2003) (3)
Solenoid microinductors with anisotropic nanolaminated CoNiFe cores for high-frequency DC-DC power conversion (2015) (3)
A quantum cascade laser sensor for SO/sub 2/ and SO/sub 3/ (2005) (3)
Pt Heater/Sensor Microarray for Distributed Fluidic Cooling Assessment (2001) (3)
Fabrication of Micromechanical Structures of Titania and Titanium with Electrophoretic Deposition (2001) (2)
Multiwatt Microscale Permanent-Magnet Generators Operating at High Temperatures (2006) (2)
Path-averaged number density and temperature in high enthalpy, supersonic air flows by time-resolved infrared emission spectroscopy (1992) (2)
Three dimensional nanoscale fabrication and modeling of dynamic mode multidirectional UV lithography (2011) (2)
Lithographically patterned polypyrrole multilayer microstructures via sidewall-controlled electropolymerization (2020) (2)
Flame-flow structure in an acoustically driven jet flame (1986) (2)
Microfabricated Structures for the Measurement of Adhesion and MechanicaL Properties of Polymer Films (1988) (2)
Double-side exposure UV-LED CNC lithography for fine 3D microfabrication (2017) (2)
Kinematically Stabilized Microbubble Actuator Arrays (2005) (2)
A Packaging-Compatible, Fully Integrated Micromachined Relay (1996) (2)
HIGH-CURRENT ZINC-AIR MICROBATTERY BASED ON A MICROMACHINED MULTILAYER LATERAL METALLIC SCAFFOLD (2010) (2)
Recognition and Absorption of the Water-soluble X-ray Contrast Medium Iodixanol using Molecularly Imprinted Polymers for Biomedical Applications (2008) (2)
Theoretical investigation of gas separation inside a microchannel by thermal diffusion (2006) (2)
Interlamination Insulation Design Considerations for Laminated Magnetics Operating at High Frequencies (2019) (2)
Micro projection lithography using microlens on a mask (2009) (2)
MEMS enabled scalable fabrication of high performance lithium ion battery electrodes (2018) (2)
Electroplated and screen-printed magnetic materials applicable to micromachined magnetic devices (1998) (2)
A novel variable power diode laser sensor for harsh process monitoring (2005) (2)
Microsystems Research in Japan (2003) (2)
Modeling and measured verification of stored energy and loss in MEMS toroidal inductors (2014) (2)
Three Dimensional Smart Pixel Integration Of A GaAs-based Detector Array Directly On Top Of Silicon Circuits (1994) (2)
CNC-lithography: Computer-controlled multidirectional light-motion-synchronized lithography for 3-D microfabrication (2015) (2)
Wireless thermal micro-ablation of skin for transdermal drug delivery (2005) (2)
A micromachined sensor array for optical measurements of surface pressure (1997) (2)
An External Cavity 4.7 Terahertz Quantum Cascade Laser (2007) (2)
Diode laser sensors for aeropropulsion testing and control (1995) (2)
Fluorescence imaging of NO, O2, and fuel vapor in a high pressure spray flame combustor (1996) (2)
QCL-based standoff and proximal chemical detectors (2016) (2)
A Hybrid-Integrated Artificial Mechanoreceptor in 180nm CMOS (2020) (2)
Off-axis integrated cavity output spectroscopy for nitric oxide detection in human breath using a quantum cascade laser (2003) (2)
MICRONEEDLES FOR GENE AND DRUG DELIVERY (2000) (2)
HIGH-SPEED AXIAL-FLUX PERMANENT MAGNET MICROMOTORS WITH ELECTROPLATED WINDINGS (2010) (2)
Wind tunnel diagnostics based on laser-induced fluorescence (1989) (2)
Demonstration of an External Cavity Terahertz Quantum Cascade Laser (2005) (2)
Triboelectrification driven fin-fact (flip-flop actuated channel transistor) for security application (2017) (2)
Low cost absorption sensors for networked applications (2011) (2)
AIAA 2000-0253 Design and Testing of Micromachined Fabry-Perot Pressure Sensors for Aerodynamic Applications (2000) (2)
Dynamic Flight Maneuvering Using Virtual Control Surfaces Generated by Trapped Vorticity (2010) (2)
MICROPATTERNABLE ELASTIC CARBON NANOTUBE/PDMS ELECTRETS (2009) (2)
Microcombustors Based on Controllable Solid Fuel Elements (2003) (2)
A Wireless Artificial Mechanoreceptor in 180-nm CMOS (2021) (2)
Instantaneous two-dimensional multiple particle sizing diagnostic (1987) (2)
ITR/PE+SY digital clay for shape input and display (2007) (2)
AIAA 2002-0824 Measurements of Trace Pollutants in Combustion Flows Using Room-Temperature, Mid-IR Quantum Cascade Lasers (2002) (2)
A NOVEL SYSTEM FOR MEASU~MENT OF ELECTROPHYSIOLOGICAL SIGNALS ASSOCIATED WITH TRAUMATIC NEURONAL INJURY (2003) (2)
Photovoltaic on-demand high-voltage pulse generator as an on-board power source for electrostatic actuator array (1999) (1)
Alternative Micromachining Approaches For the Realization of Robust MEMS (2000) (1)
FOR REAL-TIMIE POLYMERIZATION MONITORING (1997) (1)
METAL TRANSFER MICROMOLDING (MTM) PROCESS FOR HIGH-ASPECT-RATIO 3-D STRUCTURES WITH FUNCTIONAL METAL SURFACES (2008) (1)
High-Energy-Density Zinc-Air Microbatteries with Lean PVA-KOH-K2CO3 Gel Electrolytes. (2023) (1)
Planar laser-induced fluorescence diagnostics for large scale test facilities (1990) (1)
High-temperature multiple species diode laser sensor (2004) (1)
Integrated Fabrication of Serially Connected High Voltage Microbatteries via Multilayer Electrodeposition (2019) (1)
Time domain thz spectroscopy and related standoff sensing applications (2003) (1)
Inter-substrate microstructure formation by electroplating bonding technology (2008) (1)
A bi-stable vertical magnetic actuator with non-contact latching based on magnetic microlamination technology (2018) (1)
Laser-based Measurements of Vapor-Phase Sodium Molecules in Combustion Systems (1993) (1)
Fabrication and Characterization of Evaporated ZINC Anodes for Small-Scale ZINC-Air Batteries (2021) (1)
Recent advances in temperature sensors (1995) (1)
Multicolor pyrometer for materials processing in space (1988) (1)
Challenges and opportunities for next generation diode laser active sensing (2009) (1)
Selected papers from the 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2012) (Atlanta, GA, USA, 2–5 December 2012) (2013) (1)
A quantum cascade laser-based sensor for measurement of the stable isotopomers of carbon dioxide (2004) (1)
Diode Laser-based Sensor for High Precision Measurements of Ambient CO2 (2008) (1)
Electrical isolation of bulk silicon MEMS devices via thermomigration (2000) (1)
Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach (2003) (1)
Hollow microneedles for intradermal injection fabricated by sacrificial micromolding and selective electrodeposition (2012) (1)
Microneedle Electrode Array for Electroporation of Skin for Gene Therapy (2005) (1)
FABRICATION OF MICROMACHINED MOLD MASTERS FOR 3-D, HIGH-ASPECT-RATIO CELL CULTURING SUBSTRATES (2005) (1)
Fabrication of 3-D hybrid polymer-magnetite nanostructures with geometric shape anisotropy (2011) (1)
An In-Situ Measurement Technique for Through-Plane Thermal Properties of Thin Dielectric Films (1994) (1)
Control of ignition delay in microfabricated hot-wire igniters: Simulation, fabrication, and experimental results (2011) (1)
Fast and Controlled Integration of Carbon Nanotubes into Microstructures (2008) (1)
IoT4Ag: MEMS-Enabled Distributed Sensing, Communications, And Information Systems for The Internet Of Things For Precision Agriculture (2021) (1)
A Magnetically Excited and Sensed MEMS-Based Resonant Compass (2006) (1)
Mgh density electroplating bonding interconnect technology: chip packaging and high aspect ratio passive elements (2003) (1)
Ethane Spectroscopy for Breath Analysis Using a Mid-Infrared Interband Cascade Laser (2008) (1)
Effects on fuel spray characteristics and vaporization on energy release rates and flow field structure in a dump combustor (1986) (1)
Velocity Measurements in High Temperature Gases Using Laser-Induced No Fluorescence (1991) (1)
Supersonic combustor testing using optical diagnostics and a high enthalpy shock tunnel (1992) (1)
An Integrated Multiwatt Permanent Magnet Turbine Generator (2005) (1)
Mid-infrared detection of trace biogenic species using compact QCL-based integrated cavity output spectroscopy (ICOS) (2005) (1)
A POLYMERIC ELECTROPORATION MICRONEEDLE ARRAY FOR ENHANCED INTRACELLULAR DELIVERY (2008) (1)
A SACRIFICIAL-POLYMER-BASED TRENCH REFILL PROCESS FOR POST-DRIE SURFACE MICROMACHINING (2004) (1)
Mechanical and Piezoresistive Properties of Graphite-Filled Polyimide Thin Films (1992) (1)
Application of balanced detection to absorption measurements with quasi-cw QC lasers (2001) (1)
Composite materials with controllable macromechanical properties based on MEMS-assisted structural manipulation of low-dimensional subcomponents (2017) (1)
Micromachined sensor for in-situ monitoring of wafer state in plasma etching (1996) (1)
MICROFABRICATION OF AIRCORE TOROIDAL INDUCTOR WITH VERY HIGH ASPECT RATIO METALENCAPSULATED POLYMER VIAS (2013) (1)
High-altitude airborne standoff sensing of natural gas leaks (2006) (1)
Measurements of microjet cooling and phase change characteristics using microcantilever heaters (2007) (1)
FABRICATION OF NEURAL MICROELECTRODE ARRAYS FROM EXTRACELLULAR MATRIX PROTEIN SUBSTRATES (2016) (1)
Model and Subcomponent Development for a Pulse-Combustor-Driven Microgenerator (2004) (1)
A Self-Powered, Biodegradable Dissolved Oxygen Microsensor (2020) (1)
Doppler-shifted fluorescence imaging of velocity fields in supersonic reacting flows (1992) (1)
PL-3 MEMS for Medical Applications (2009) (0)
Power MEMS devices of energy harvesting from the environment for wireless sensor networks applications (2008) (0)
LATERAL LAMINATION APPROACH FOR MULTILAYER PIEZOELECTRIC MICROACTUATOR (2006) (0)
Intelligent Turbine Engine (2002) (0)
Alignable Deposition of Thin Film Semiconductor Materials for Integrated Micro-Opto-Electronic Systems (1992) (0)
Nonintrusive, multipoint velocity measurements in high-pressure combustion flows (1993) (0)
Microfabrication-Enhanced Carbon Fiber Cathodes for High Discharge Rate Aluminum-Air Batteries (2022) (0)
Microfabricated intracortical extracellular matrix-microelectrodes for improving neural interfaces (2018) (0)
Integration of thin film photonic devices onto micromachined movable platforms (1993) (0)
Fabrication of a Fully-integrated Multiwatt µTurboGenerator (2007) (0)
Non-lithographic and scalable fabrication of one-turn-like inductor having laminated NiFe core for power converters operating at high frequency (2021) (0)
A NiFeMo Electroplating Bath for Micromachined Structures. (2000) (0)
Monolithic 180^o and 360^o Analog Phase Shifters Based on Barium Strontium Titanate Coated Sapphire Substrates (2003) (0)
Equipment for neural network determination of optical phase correction using parallel optical hardware and control using micromachined microjets (1996) (0)
Suppression of Eddy Current Loss in Multilayer NiFe-Polypyrrole Magnetic Cores Fabricated Using a Continuous Electrodeposition Process (2022) (0)
Nanojets – Formation, characterization and applications (2008) (0)
Materials and Fabrication Methods for High Temperature Micro-Magnetic Machines for Micro-Turbine Power Generation (2003) (0)
Side-Opening Hollow Microneedles for Transdermal Drug Delivery (2006) (0)
Fabrication of multi-layer windings in silicon-embedded toroidal inductors (2015) (0)
Rapid homogeneous endothelialization of high aspect ratio microvascular networks (2015) (0)
Early detection of acute rejection in lung transplant recipients using laser-based detection of exhaled nitric oxide (2004) (0)
Near-IR diode laser monitoring of volatile organic compounds (1997) (0)
Using Thomson-Scattering Brightness to Enhance Coronal Magnetic Field Measurements (2018) (0)
An airborne tunable diode laser multigas sensor (1997) (0)
Diode laser sensors for aeropropulsion monitoring and control (1995) (0)
In-Situ Measurements of Combustion Species Using Near-IR Diode Laser Sensors (1998) (0)
Thermomigration-Based Junction Isolation of Bulk (2006) (0)
ontrol of ignition delay in microfabricated hotwire igniters : Simulation , abrication , and experimental results rian (2011) (0)
A micromachined sensor for in-situ monitoring of plasma etching (1996) (0)
The Nucleus and Coma of Comet 67P/C-G as Seen at Millimeter and Submillimeter Wavelengths by the MIRO Instrument (2015) (0)
Zinc film anodes for air microbatteries: fabrication, approaches, and utilization optimization (2023) (0)
Investigation of Gas Separation Induced by Thermal Loading (2005) (0)
Pseudo-random code-based differential absorption LIDAR in the LWIR spectral region (2001) (0)
SR-960 NEAR-IR DIODE LASER-BASED SENSOR FOR PPB-LEVEL WATER VAPOR IN INDUSTRIAL GASES SPIE Paper No . 3537-A 30 (0)
Monolithic integrated-optic TDLAS sensors (2012) (0)
In situ Sensing of Atmospheric Trace Gases Using Airborne Near-IR Diode Laser Sensors (1998) (0)
Diode and Quantum Cascade Laser-Based Systems for Process Monitoring and Control (Invited) (2002) (0)
Mechanically Driven Microtweezers (2003) (0)
Thin Film Programmable Interconnect Arrays (1994) (0)
An optical comparison of wall and axial injection for high enthalpy reacting scramjet flows (1993) (0)
Oxy-fuel combustion emission monitoring using tunable diode laser sensors (1999) (0)
Infrared Imaging Array Integrated in Three Dimensions Directly on Top of Silicon Circuits (1993) (0)
Sidewall lithography of micron-sized features in high-aspect-ratio meso-scale channels using a three-dimensional assembled mask (2014) (0)
2005 Laser Diagnostics in Combustion Gordon Conference July 31-August 5, 2005 (2005) (0)
In-situ flame measurements of NO and CO using mid-IR QC lasers (2002) (0)
Microfabricated , Combustion-Driven Jet Actuators for Flow Control Applications (2003) (0)
Tunable external-cavity quantum cascade laser sources for gas sensing and spectroscopy (2009) (0)
High sensitivity detection of broadband gas using time domain multiplexed QC lasers (2003) (0)
MULTILAYER ELECTRODEPOSITION FROM MICROMACHINED TEMPLATES: A CONTROLLABLE, SCALABLE ROUTE TO HIERARCHICAL SUPERHYDROPHOBIC SURFACES (2016) (0)
Exit plane measurements in scramjet flows - High temperature infrared emission spectra of H2O(nu2) (1995) (0)
Active Control of Combustor Processes (2001) (0)
PLIF Imaging of Species and Temperature Distributions in Spray Flames (1990) (0)
Optical Diagnostics in Supersonic Combusting Systems (1992) (0)
The use of surface-initiated polymerization to reduce template feature size and facilitate fabrication of 3D freestanding nanostructures (2013) (0)
Author ' s personal copy Microsecond thermal ablation of skin for transdermal drug delivery (2011) (0)
研究所紹介 Physical Sciences Inc: An Introduction to 25 Years of Combustion Research and Technology Development (2000) (0)
Simultaneous imaging of species distributions in two-phase reacting flowfields (1986) (0)
E224 On-Board Measurements for better understanding of Combustion in A Spark Ignition Engine (2006) (0)
N 94-29793 Micro-Opto-Mechanical Devices and Systems Using Epitaxial Lift (0)
An airborne tunable diode laser multigas sensor (1997) (0)
High resolution laser-induced fluorescence measurements of Schumann-Runge transitions in room temperature O 2 (1989) (0)
A Near-IR TDL-based sensor for eddy covariance flux measurements of CO2 (2002) (0)
Fabrication of Three-Dimensional Nano-Patterns by Inclined Nanoimprinting Lithography (2007) (0)
Development of mini-undulators for a table-top free-electron laser (2018) (0)
Laser diagnostics for gas dynamics: introduction to the feature issue. (2005) (0)
Diode Laser Absorption Spectroscopy of Combustion Gases Near 1.57 Microns (1996) (0)
Electrothermal microactuators using PVDF‐TrFE (1992) (0)
Dual Optical Comb LWIR Source and Sensor (2017) (0)
An 8x8 Robust Capacitive Pressure Sensor Array (1998) (0)
Velocity measurements in supersonic reacting flows by using Doppler-shifted OH and NO fluorescence (1990) (0)
A microwell-based impedance sensor on an insertable microneedle for real-time in vivo cytokine detection (2021) (0)
Tunable Diode Laser Sensors for Combustion (2003) (0)
Sensitive Wavelength Modulation Spectroscopy of Ethane using a Mid-Infrared Interband Cascade Laser (2007) (0)
Microneedle devices and methods for their preparation (1999) (0)
Surface plasmon enhanced magneto-optic isolator (2009) (0)
Species imaging in spray flames (1986) (0)
A mid-IR ICL-based sensor for field measurements of ambient CH4 (2006) (0)
Applications of excimer lasers to combustion research (1991) (0)
Applications of room-temperature diode lasers to environmental- and process-flow monitoring (1995) (0)
An Electroplating-Based Approach to Volumetric Nanomanufacturing and its Application to Energy Storage and Conversion (2013) (0)
Fabrication of Glass-Metal Composite Micro/Nanonozzles (2008) (0)
Room-Temperature Diode Laser Monitors for Spacecraft Air Quality/Air Revitalization Control (1998) (0)
2003 Laser Diagnostic in Combustion Conference (2004) (0)
Nanowell array impedance sensor for label-free quantification of cytokines in serum at femtomolar level detection limits (2020) (0)
Magnetic Induction Machines Integrated Into (2006) (0)
Laser-based multiple gas sensor system for the metals processing industry (2003) (0)
In situ polarization of polymer films in microsensors (2012) (0)
Fabrication of micromachined magnetic microtiles (1995) (0)
Exit plane H2O concentration measurements correlated with OH PLIF near-injector mixing measurements for scramjet flows (1992) (0)
MEMS-Based Diagnostics for Turbulent Shear Flows. (1997) (0)
High-intensity infrared power measurements by double-resonance phosphorescence depletion in biacetyl vapor. (1988) (0)
ASSOCIATED WITH TRAUMATIC NEURONAL INJURY (2003) (0)
Fabrication of a Fully-integrated Multiwatt μ (2008) (0)
Diode laser-based sensors for environmental monitoring: from low-cost networked sensors to ultra-precision sensors based on advanced laser technology (2010) (0)
Laser applications to chemical and environmental analysis: introduction to the feature issue. (1999) (0)
Planar CMOS-Compatible Fusion-Bonded Silica Vacuum Packages (2021) (0)
High standoff dual-mode-actuation MEMS switches (2009) (0)
MEMS-based spectral decomposition of acoustic signals (2012) (0)
MODEL AND SUBCOMPONENT DEVELOPMENT FOR A PULSE-COMBUSTION-DRIVEN MICROGENERATOR Principal Investigators Professors (2004) (0)
CHAPTER 6 MICROSYSTEMS TECHNOLOGIES IN JAPAN (2003) (0)
Micromachined inductors with electroplated magnetically anisotropic alloy cores (1999) (0)
High winding ratio, high frequency, ultracompact step-up transformers with laminated metallic magnetic cores (2021) (0)

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