Masaru Hori

Q: What Schools Are Affiliated With Masaru Hori

Masaru Hori is affiliated with the following schools: Meijo University, Nagoya University

Masaru Hori's AcademicInfluence.com Rankings

Masaru Hori

Physics

#6277

World Rank

#8202

Historical Rank

physics Degrees

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Physics

Masaru Hori's Degrees

PhD Physics University of Tokyo

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Masaru Hori's Published Works

Number of citations in a given year to any of this author's works

Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author

Published Works

The 2012 Plasma Roadmap (2012) (534)
Effect of Indirect Nonequilibrium Atmospheric Pressure Plasma on Anti-Proliferative Activity against Chronic Chemo-Resistant Ovarian Cancer Cells In Vitro and In Vivo (2013) (331)
Fabrication of vertically aligned carbon nanowalls using capacitively coupled plasma-enhanced chemical vapor deposition assisted by hydrogen radical injection (2004) (318)
Plasma-Activated Medium Selectively Kills Glioblastoma Brain Tumor Cells by Down-Regulating a Survival Signaling Molecule, AKT Kinase (2011) (280)
Plasma-activated medium induces A549 cell injury via a spiral apoptotic cascade involving the mitochondrial-nuclear network. (2015) (266)
Selective killing of ovarian cancer cells through induction of apoptosis by nonequilibrium atmospheric pressure plasma (2012) (211)
Clinical experience with cold plasma in the treatment of locally advanced head and neck cancer (2018) (204)
Cell survival of glioblastoma grown in medium containing hydrogen peroxide and/or nitrite, or in plasma-activated medium. (2016) (188)
Non-thermal atmospheric pressure plasma activates lactate in Ringer’s solution for anti-tumor effects (2016) (145)
Current status and future prospects of agricultural applications using atmospheric‐pressure plasma technologies (2018) (131)
Behavior of atomic radicals and their effects on organic low dielectric constant film etching in high density N2/H2 and N2/NH3 plasmas (2002) (122)
Plasma damage mechanisms for low-k porous SiOCH films due to radiation, radicals, and ions in the plasma etching process (2008) (111)
Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas (1999) (109)
Vertical growth of carbon nanowalls using rf plasma-enhanced chemical vapor deposition (2005) (109)
Nonequilibrium atmospheric pressure plasma with ultrahigh electron density and high performance for glass surface cleaning (2008) (107)
Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition (2009) (102)
Selective cytotoxicity of indirect nonequilibrium atmospheric pressure plasma against ovarian clear-cell carcinoma (2014) (98)
Novel Intraperitoneal Treatment With Non-Thermal Plasma-Activated Medium Inhibits Metastatic Potential of Ovarian Cancer Cells (2017) (95)
Electrical conduction control of carbon nanowalls (2008) (95)
The origin of stress in sputter‐deposited tungsten films for x‐ray masks (1991) (94)
Effectiveness of plasma treatment on pancreatic cancer cells (2015) (90)
Fabrication of Carbon Nanowalls Using Novel Plasma Processing (2005) (87)
Rapid inactivation of Penicillium digitatum spores using high-density nonequilibrium atmospheric pressure plasma. (2010) (83)
Effectiveness of plasma treatment on gastric cancer cells (2015) (82)
Plasma Medical Science for Cancer Therapy: Toward Cancer Therapy Using Nonthermal Atmospheric Pressure Plasma (2014) (81)
Red blood cell coagulation induced by low-temperature plasma treatment. (2016) (80)
Measurement and control of absolute nitrogen atom density in an electron-beam-excited plasma using vacuum ultraviolet absorption spectroscopy (2000) (74)
State of the art in medical applications using non-thermal atmospheric pressure plasma (2017) (74)
Selective Killing of Ovarian Cancer Cells through Induction of Apoptosis by a Nonequilibrium Atmospheric Pressure Plasma (2012) (73)
Fabrication of carbon nanowalls using electron beam excited plasma-enhanced chemical vapor deposition (2008) (71)
Highly reliable growth process of carbon nanowalls using radical injection plasma-enhanced chemical vapor deposition (2008) (69)
Effects of •OH and •NO radicals in the aqueous phase on H2O2 and NO2− generated in plasma-activated medium (2017) (68)
Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp (2003) (65)
Cell survival and proliferation signaling pathways are downregulated by plasma-activated medium in glioblastoma brain tumor cells (2012) (65)
Non‐thermal plasma induces a stress response in mesothelioma cells resulting in increased endocytosis, lysosome biogenesis and autophagy (2017) (64)
Intraperitoneal Administration of Plasma-Activated Medium: Proposal of a Novel Treatment Option for Peritoneal Metastasis From Gastric Cancer (2017) (64)
Density control of carbon nanowalls grown by CH4/H2 plasma and their electrical properties (2014) (62)
Inactivation of Penicillium digitatum Spores by a High-Density Ground-State Atomic Oxygen-Radical Source Employing an Atmospheric-Pressure Plasma (2011) (62)
Development of Microelectrode Arrays Using Electroless Plating for CMOS-Based Direct Counting of Bacterial and HeLa Cells (2015) (60)
Effect of Plasma-Activated Lactated Ringer’s Solution on Pancreatic Cancer Cells In Vitro and In Vivo (2017) (58)
Infrared diode laser absorption spectroscopy measurements of CFX (X=1–3) radical densities in electron cyclotron resonance plasmas employing C4F8, C2F6, CF4, and CHF3 gases (1996) (58)
Absolute concentration and loss kinetics of hydrogen atom in methane and hydrogen plasmas (2001) (58)
EPR-Spin Trapping and Flow Cytometric Studies of Free Radicals Generated Using Cold Atmospheric Argon Plasma and X-Ray Irradiation in Aqueous Solutions and Intracellular Milieu (2015) (57)
Fluorocarbon radicals and surface reactions in fluorocarbon high density etching plasma. II. H2 addition to electron cyclotron resonance plasma employing CHF3 (1996) (55)
Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas (2001) (55)
Inactivation effects of neutral reactive-oxygen species on Penicillium digitatum spores using non-equilibrium atmospheric-pressure oxygen radical source (2013) (55)
Electron field emission enhancement of carbon nanowalls by plasma surface nitridation (2011) (54)
Cancer therapy using non-thermal atmospheric pressure plasma with ultra-high electron density (2015) (54)
Direct exposure of non-equilibrium atmospheric pressure plasma confers simultaneous oxidative and ultraviolet modifications in biomolecules (2014) (54)
Plasma with high electron density and plasma-activated medium for cancer treatment (2015) (53)
Surface reaction of CF2 radicals for fluorocarbon film formation in SiO2/Si selective etching process (1998) (53)
Plasma Blood Coagulation Without Involving the Activation of Platelets and Coagulation Factors (2015) (53)
Substrate bias effects on low temperature polycrystalline silicon formation using electron cyclotron resonance SiH4/H2 plasma (1997) (51)
N-Graphene Nanowalls via Plasma Nitrogen Incorporation and Substitution: The Experimental Evidence (2020) (51)
Plasma-activated medium suppresses choroidal neovascularization in mice: a new therapeutic concept for age-related macular degeneration (2015) (49)
Study on polymeric neutral species in high-density fluorocarbon plasmas (2000) (49)
Carbon Nanowalls: Synthesis and Emerging Applications (2010) (47)
Ultrathin fluorinated silicon nitride gate dielectric films formed by remote plasma enhanced chemical vapor deposition employing NH3 and SiF4 (2001) (46)
Oriented Carbon Nanostructures by Plasma Processing: Recent Advances and Future Challenges (2018) (46)
Langmuir probe and optical emission spectroscopy studies in magnetron sputtering plasmas for Al-doped ZnO film deposition (2015) (46)
Ultrahigh-Speed Synthesis of Nanographene Using Alcohol In-Liquid Plasma (2012) (44)
Plasma‐activated medium (PAM) kills human cancer‐initiating cells (2018) (42)
Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas (2009) (42)
Roles of oxidizing species in a nonequilibrium atmospheric-pressure pulsed remote O2/N2 plasma glass cleaning process (2008) (41)
Future perspective of strategic non-thermal plasma therapy for cancer treatment (2016) (40)
CFX radical generation by plasma interaction with fluorocarbon films on the reactor wall (1996) (40)
Etching organic low dielectric film in ultrahigh frequency plasma using N2/H2 and N2/NH3 gases (2003) (40)
Plasma agriculture (2012) (39)
Low‐temperature redistribution of As in Si during Ni silicide formation (1984) (39)
Radical behavior in fluorocarbon plasma and control of silicon oxide etching by injection of radicals (1996) (39)
Helium‐based cold atmospheric plasma‐induced reactive oxygen species‐mediated apoptotic pathway attenuated by platinum nanoparticles (2016) (39)
Measurement of Hydrogen Radical Density and Its Impact on Reduction of Copper Oxide in Atmospheric-Pressure Remote Plasma Using H2 and Ar Mixture Gases (2010) (37)
As-grown deep-level defects in n-GaN grown by metal–organic chemical vapor deposition on freestanding GaN (2012) (37)
Kinetics of Radicals in CF 4 and C 4F 8 Electron Cyclotron Resonance Plasmas (1997) (37)
Plasma-Treated Solutions (PTS) in Cancer Therapy (2021) (37)
Roles of SiH3 and SiH2 Radicals in Particle Growth in rf Silane Plasmas (1997) (36)
Evaluation of CF2 Radical as a Precursor for Fluorocarbon Film Formation in Highly Selective SiO2 Etching Process Using Radical Injection Technique (1996) (36)
CFX(X=1-3) radical densities during Si, SiO2, and Si3N4 etching employing electron cyclotron resonance CHF3 plasma (1997) (36)
Non‐equilibrium atmospheric pressure plasmas modulate cell cycle‐related gene expressions in melanocytic tumors of RET‐transgenic mice (2014) (36)
High-Rate Growth of Films of Dense, Aligned Double-Walled Carbon Nanotubes Using Microwave Plasma-Enhanced Chemical Vapor Deposition (2005) (36)
Synthesis of Platinum Nanoparticles on Two-Dimensional Carbon Nanostructures with an Ultrahigh Aspect Ratio Employing Supercritical Fluid Chemical Vapor Deposition Process (2009) (35)
Medical applications of non-thermal atmospheric pressure plasma (2016) (35)
Oxidative stress-dependent and -independent death of glioblastoma cells induced by non-thermal plasma-exposed solutions (2019) (35)
Effects of H, OH, and CH3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor (1997) (34)
Real-time in situ electron spin resonance measurements on fungal spores of Penicillium digitatum during exposure of oxygen plasmas (2012) (34)
Behavior of hydrogen atoms in ultrahigh-frequency silane plasma (2001) (34)
CFX(X=1–3) Radicals Controlled by On-Off Modulated Electron Cyclotron Resonance Plasma and Their Effects on Polymer Film Deposition (1994) (33)
Mechanism of plasma-induced damage to low-k SiOCH films during plasma ashing of organic resists (2011) (33)
Molecular mechanisms of non-thermal plasma-induced effects in cancer cells (2018) (33)
Nanopore formation process in artificial cell membrane induced by plasma-generated reactive oxygen species. (2016) (33)
Ultrahigh-speed etching of SiO2 with ultrahigh selectivity over Si in microwave-excited non equilibrium atmospheric pressure plasma (2004) (32)
Variable susceptibility of ovarian cancer cells to non-thermal plasma-activated medium (2016) (32)
Increase in galectin expression in healing wounded skin treated with low-temperature plasma: Comparison with treatment by electronical coagulation (2016) (32)
Insights into sticking of radicals on surfaces for smart plasma nano-processing (2007) (32)
Plasma-activated medium promotes autophagic cell death along with alteration of the mTOR pathway (2020) (31)
New Hopes for Plasma-Based Cancer Treatment (2018) (31)
Study of Plasma Properties for the Low-Temperature Deposition of Highly Conductive Aluminum Doped ZnO Film Using ICP Assisted DC Magnetron Sputtering (2016) (31)
Measurement of C2 radical density in microwave methane/hydrogen plasma used for nanocrystalline diamond film formation (2003) (31)
High-Rate Anisotropic Ablation and Deposition of Polytetrafluoroethylene Using Synchrotron Radiation Process (1995) (30)
Non-thermal plasma specifically kills oral squamous cell carcinoma cells in a catalytic Fe(II)-dependent manner (2019) (30)
Oxidation mechanism of Penicillium digitatum spores through neutral oxygen radicals (2015) (30)
Spatial distributions of O, N, NO, OH and vacuum ultraviolet light along gas flow direction in an AC-excited atmospheric pressure Ar plasma jet generated in open air (2017) (30)
Lysosomal nitric oxide determines transition from autophagy to ferroptosis after exposure to plasma-activated Ringer's lactate (2021) (30)
Spatial distributions of the absolute CF and CF2 radical densities in high-density plasma employing low global warming potential fluorocarbon gases and precursors for film formation (2001) (29)
Effectiveness of plasma diagnostic in ultra high frequency and radio frequency hybrid plasmas for synthesis of silicon nitride film at low temperature (2014) (29)
Surface chemical modification of carbon nanowalls for wide-range control of surface wettability (2013) (29)
Small size gold nanoparticles enhance apoptosis-induced by cold atmospheric plasma via depletion of intracellular GSH and modification of oxidative stress (2020) (29)
Analysis of GaN Damage Induced by Cl2/SiCl4/Ar Plasma (2010) (28)
Preparation of Dispersed Platinum Nanoparticles on a Carbon Nanostructured Surface Using Supercritical Fluid Chemical Deposition (2010) (28)
Quantitative clarification of inactivation mechanism of Penicillium digitatum spores treated with neutral oxygen radicals (2014) (27)
Laser Scattering Diagnosis of a 60-Hz Non-Equilibrium Atmospheric Pressure Plasma Jet (2011) (27)
Chemical bond modification in porous SiOCH films by H2 and H2/N2 plasmas investigated by in situ infrared reflection absorption spectroscopy (2011) (27)
Formation of polytetrafluoroethylene thin films by using CO2 laser evaporation and XeCl laser ablation (1996) (27)
Formation and mechanism of ultrahigh density platinum nanoparticles on vertically grown graphene sheets by metal-organic chemical supercritical fluid deposition (2011) (26)
Aligned Growth of Single-Walled and Double-Walled Carbon Nanotube Films by Control of Catalyst Preparation (2007) (26)
Progress of radical measurements in plasmas for semiconductor processing (2006) (26)
H2/N2 plasma damage on porous dielectric SiOCH film evaluated by in situ film characterization and plasma diagnostics (2011) (26)
In situ observation of hydrogenated amorphous silicon surfaces in electron cyclotron resonance hydrogen plasma annealing (1999) (25)
Nucleation Control of Carbon Nanowalls Using Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition (2013) (25)
Inactivation Process of Penicillium digitatum Spores Treated with Non-equilibrium Atmospheric Pressure Plasma (2013) (25)
Low-Temperature Plasma for Biology, Hygiene, and Medicine: Perspective and Roadmap (2021) (25)
Development of atomic radical monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing (2009) (24)
Precursors of fluorocarbon film growth studied by mass spectrometry (2000) (24)
Plasma-activated medium selectively eliminates undifferentiated human induced pluripotent stem cells (2016) (24)
Biphasic effects of l-ascorbate on the tumoricidal activity of non-thermal plasma against malignant mesothelioma cells. (2016) (24)
Hydrogen peroxide sensor based on carbon nanowalls grown by plasma-enhanced chemical vapor deposition (2017) (24)
CFX (X=1-3) Radical Measurements in ECR Etching Plasma Employing C4F8 Gas by Infrared Diode Laser Absorption Spectroscopy (1995) (24)
Direct current superposed dual-frequency capacitively coupled plasmas in selective etching of SiOCH over SiC (2012) (24)
Radical-controlled plasma processing for nanofabrication (2011) (24)
Intracellular responses to reactive oxygen and nitrogen species, and lipid peroxidation in apoptotic cells cultivated in plasma‐activated medium (2017) (24)
Non-thermal plasma-activated medium modified metabolomic profiles in the glycolysis of U251SP glioblastoma. (2019) (24)
Low temperature plasma processing for cell growth inspired carbon thin films fabrication. (2016) (23)
Monolithic self‐sustaining nanographene sheet grown using plasma‐enhanced chemical vapor deposition (2010) (23)
Synergistic Formation of Radicals by Irradiation with Both Vacuum Ultraviolet and Atomic Hydrogen: A Real-Time In Situ Electron Spin Resonance Study. (2011) (23)
Cold atmospheric helium plasma causes synergistic enhancement in cell death with hyperthermia and an additive enhancement with radiation (2017) (23)
Experimental evidence of warm electron populations in magnetron sputtering plasmas (2015) (23)
Anti‐Cancer Effects of Nonequilibrium Atmospheric Pressure Plasma on Cancer‐Initiating Cells in Human Endometrioid Adenocarcinoma Cells (2015) (22)
Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units (2009) (22)
Perspective of strategic plasma therapy in patients with epithelial ovarian cancer: A short review of plasma in cancer treatment (2014) (22)
Atomic layer etching of SiO2 by alternating an O2 plasma with fluorocarbon film deposition (2017) (22)
X-Ray photoelectron spectroscopy analysis of plasma–polymer interactions for development of low-damage plasma processing of soft materials (2010) (21)
Kinetics and role of C, O, and OH in low-pressure nanocrystalline diamond growth (2000) (21)
Fabrication of Carbon Nanowalls on Carbon Fiber Paper for Fuel Cell Application (2011) (21)
Polyethylene terephthalate (PET) surface modification by VUV and neutral active species in remote oxygen or hydrogen plasmas (2019) (21)
Graphene Nanowalls (2013) (21)
The role of plasma chemistry on functional silicon nitride film properties deposited at low-temperature by mixing two frequency powers using PECVD. (2016) (20)
Effects of assisted magnetic field to an atmospheric-pressure plasma jet on radical generation at the plasma-surface interface and bactericidal function (2016) (20)
Control of Super Hydrophobic and Super Hydrophilic Surfaces of Carbon Nanowalls Using Atmospheric Pressure Plasma Treatments (2012) (20)
A High-Temperature Nitrogen Plasma Etching for Preserving Smooth and Stoichiometric GaN Surface (2013) (20)
Preparation of dense carbon nanotube film using microwave plasma-enhanced chemical vapor deposition (2005) (20)
Effect of gas flow on transport of O (3Pj) atoms produced in ac power excited non-equilibrium atmospheric-pressure O2/Ar plasma jet (2013) (20)
Bactericidal pathway of Escherichia coli in buffered saline treated with oxygen radicals (2017) (19)
Effects of photoirradiation in UV and VUV regions during plasma exposure to polymers (2011) (19)
Etching characteristics of organic low-k films interpreted by internal parameters employing a combinatorial plasma process in an inductively coupled H2/N2 plasma (2010) (19)
Histological and Nuclear Medical Comparison of Inflammation After Hemostasis with Non-Thermal Plasma and Thermal Coagulation (2015) (19)
Ultrahigh-speed etching of organic films using microwave-excited nonequilibrium atmospheric-pressure plasma (2005) (19)
Evaluation of Property Changes due to Radiation, Radicals, and Ions on Organic Low-k Films in H2/N2 Plasma Etching (2008) (19)
Spontaneous formation of highly regular superlattice structure in InGaN epilayers grown by molecular beam epitaxy (2011) (19)
Carbon nanowall scaffold to control culturing of cervical cancer cells (2014) (19)
Plasma diagnostics and low-temperature deposition of microcrystalline silicon films in ultrahigh-frequency silane plasma (2000) (19)
Suppression of plasma-induced damage on GaN etched by a Cl2 plasma at high temperatures (2015) (18)
Highly Selective Etching of SiO2 over Si3N4 and Si in Capacitively Coupled Plasma Employing C5HF7 Gas (2012) (18)
Possible therapeutic option of aqueous plasma for refractory ovarian cancer (2016) (17)
A study on the time evolution of surface loss probability on hydrogenated amorphous silicon films in rf discharges using infrared diode-laser absorption spectroscopy (1998) (17)
Electron paramagnetic resonance study on the annealing behavior of vacuum deposited amorphous silicon on crystalline silicon (1981) (17)
An atmospheric pressure inductively coupled microplasma source of vacuum ultraviolet light (2014) (17)
Critical Factors for Nucleation and Vertical Growth of Two Dimensional Nano-Graphene Sheets Employing a Novel Ar+ Beam with Hydrogen and Fluorocarbon Radical Injection (2010) (17)
Simultaneous achievement of antimicrobial property and plant growth promotion using plasma‐activated benzoic compound solution (2019) (17)
Epitaxial growth of GaN by radical-enhanced metalorganic chemical vapor deposition (REMOCVD) in the downflow of a very high frequency (VHF) N2/H2 excited plasma – effect of TMG flow rate and VHF power (2014) (17)
Subsurface reactions of silicon nitride in a highly selective etching process of silicon oxide over silicon nitride (2002) (16)
Growth control of Saccharomyces cerevisiae through dose of oxygen atoms (2015) (16)
Optical Properties of Evolutionary Grown Layers of Carbon Nanowalls Analyzed by Spectroscopic Ellipsometry (2010) (16)
Formation and micromachining of Teflon (fluorocarbon polymer) film by a completely dry process using synchrotron radiation (1999) (16)
Interactions between a Plasma-Activated Medium and Cancer Cells (2016) (16)
Measurement techniques of radicals, their gas phase and surface reactions in reactive plasma processing (2002) (16)
Surface loss probabilities of H and N radicals on different materials in afterglow plasmas employing H2 and N2 mixture gases (2010) (16)
Plasma interactions with aminoacid (l-alanine) as a basis of fundamental processes in plasma medicine (2013) (16)
High sensitivity of a carbon nanowall-based sensor for detection of organic vapours (2015) (16)
Direct Treatment of Liquids Using Low-Current Arc in Ambient Air for Biomedical Applications (2019) (15)
Thermal cyclic etching of silicon nitride using formation and desorption of ammonium fluorosilicate (2016) (15)
Etching process of silicon dioxide with nonequilibrium atmospheric pressure plasma (2005) (15)
Synthesis of Diamond Using RF Magnetron Methanol Plasma Chemical Vapor Deposition Assisted by Hydrogen Radical Injection (1995) (15)
Improvement of yield and grain quality by periodic cold plasma treatment with rice plants in a paddy field (2020) (15)
Non-thermal atmospheric pressure plasmas as a novel candidate for preventive therapy of melanoma (2014) (15)
Selective production of reactive oxygen and nitrogen species in the plasma-treated water by using a nonthermal high-frequency plasma jet (2017) (15)
Synthesis of isolated carbon nanowalls via high-voltage nanosecond pulses in conjunction with CH4/H2 plasma enhanced chemical vapor deposition (2020) (15)
Hydrogen‐radical‐assisted radio‐frequency plasma‐enhanced chemical vapor deposition system for diamond formation (1996) (15)
Scanning tunneling microscopic and spectroscopic characterization of diamond film prepared by capacitively coupled radio frequency CH3OH plasma with OH radical injection (1997) (15)
Influence on selective SiO2/Si etching of carbon atoms produced by CH4 addition to a C4F8 permanent magnet electron cyclotron resonance etching plasma (1997) (15)
The effects of non-thermal atmospheric pressure plasma irradiation on expression levels of matrix metalloproteinases in benign melanocytic tumors in RET-transgenic mice (2014) (14)
Diagnostics of Fluorocarbon Radicals in a Large-area Permanent Magnet Electron Cyclotron Resonance Etching Plasma (1996) (14)
Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N2/SiH4 PECVD Process (2016) (14)
Effects of nitrogen on the apoptosis of and changes in gene expression in human lymphoma U937 cells exposed to argon-based cold atmospheric pressure plasma. (2016) (14)
Synthesis of carbon nanowalls on the surface of nanoporous alumina membranes by RI-PECVD method (2020) (14)
Spatiotemporal behaviors of absolute density of atomic oxygen in a planar type of Ar/O2 non-equilibrium atmospheric-pressure plasma jet (2014) (14)
Influences of substrate temperatures on etch rates of PECVD-SiN thin films with a CF4/H2 plasma (2021) (14)
Diagnostic and analytical study on a low-pressure limit of diamond chemical vapor deposition in inductively coupled CO–CH4–H2 plasmas (2004) (14)
Numerical simulations of stable, high-electron-density atmospheric pressure argon plasma under pin-to-plane electrode geometry: effects of applied voltage polarity (2020) (14)
Investigation on the long‐term bactericidal effect and chemical composition of radical‐activated water (2019) (14)
Surface reactions during low-k etching using H2∕N2 plasma (2008) (14)
Measurement of Si, SiF, and SiF2 radicals and SiF4 molecule using very high frequency capacitively coupled plasma employing SiF4 (2003) (14)
Oxygen-radical pretreatment promotes cellulose degradation by cellulolytic enzymes (2017) (14)
Behaviors of Absolute Densities of N, H, and NH3 at Remote Region of High-Density Radical Source Employing N2–H2 Mixture Plasmas (2011) (14)
Utility of dual frequency hybrid source for plasma and radical generation in plasma enhanced chemical vapor deposition process (2015) (14)
CH3 Radical Density in Electron Cyclotron Resonance CH3OH and CH3OH/H2 Plasmas (1995) (14)
Reduction of contact resistivity by As redistribution during Pd2Si formation (1983) (14)
Low temperature plasma irradiation products of sodium lactate solution that induce cell death on U251SP glioblastoma cells were identified (2021) (14)
Silicon nitride etching performance of CH2F2 plasma diluted with argon or krypton (2015) (13)
In situ monitoring of surface reactions during atomic layer etching of silicon nitride using hydrogen plasma and fluorine radicals. (2019) (13)
Preclinical Verification of the Efficacy and Safety of Aqueous Plasma for Ovarian Cancer Therapy (2021) (13)
Wavelength Dependence of Photon-Induced Interface Defects in Hydrogenated Silicon Nitride/Si Structure during Plasma Etching Processes (2013) (13)
Non-thermal plasma prevents progression of endometriosis in mice (2016) (13)
Plasma processing of soft materials for development of flexible devices (2011) (13)
X-ray photoelectron spectroscopy for analysis of plasma–polymer interactions in Ar plasmas sustained via RF inductive coupling with low-inductance antenna units (2010) (13)
Feature Profiles on Plasma Etch of Organic Films by a Temporal Control of Radical Densities and Real-Time Monitoring of Substrate Temperature (2011) (13)
A CMOS sensor platform with 1.2 µm × 2.05 µm electroless-plated 1024 × 1024 microelectrode array for high-sensitivity rapid direct bacteria counting (2014) (13)
A study of radiation damage in SiN and SiC mask membranes (1991) (13)
Systematic diagnostics of the electrical, optical, and physicochemical characteristics of low-temperature atmospheric-pressure helium plasma sources (2019) (13)
Preparation of platinum nanoparticles on carbon nanostructures using metal-organic chemical fluid deposition employing supercritical carbon dioxide. (2010) (13)
Nanographene synthesis employing in-liquid plasmas with alcohols or hydrocarbons (2018) (13)
Non-thermal plasma-activated lactate solution kills U251SP glioblastoma cells in an innate reductive manner with altered metabolism. (2020) (13)
Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition (2020) (13)
Effect of Low Level O2 Addition to N2 on Surface Cleaning by Nonequilibrium Atmospheric-Pressure Pulsed Remote Plasma (2007) (13)
Diagnostics of plasma-biological surface interactions in low pressure and atmospheric pressure plasmas (2014) (13)
Low-damage surface modification of polymethylmethacrylate with argon–oxygen mixture plasmas driven by multiple low-inductance antenna units (2010) (13)
Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma (2004) (13)
Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma (2005) (12)
Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials (2017) (12)
Effect of Sn in plasma copolymerized methylmethacrylate and tetramethyltin resist on plasma development for x‐ray irradiation (1986) (12)
Rapid growth of micron-sized graphene flakes using in-liquid plasma employing iron phthalocyanine-added ethanol (2017) (12)
Scalable Treatment of Flowing Organic Liquids Using Ambient-Air Glow Discharge for Agricultural Applications (2020) (12)
Free radical generation by non-equilibrium atmospheric pressure plasma in alcohol–water mixtures: an EPR-spin trapping study (2018) (12)
Dynamic analysis of reactive oxygen nitrogen species in plasma-activated culture medium by UV absorption spectroscopy (2017) (12)
Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode (2011) (12)
Rapid measurement of substrate temperatures by frequency-domain low-coherence interferometry (2013) (12)
Loss kinetics of carbon atoms in low-pressure high density plasmas (2000) (12)
Combinatorial Plasma Etching Process (2009) (12)
Investigation of effects of ion energies on both plasma-induced damage and surface morphologies and optimization of high-temperature Cl2 plasma etching of GaN (2017) (12)
Spatial distribution of the absolute densities of CFx radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence (2001) (12)
Achieving high‐growth‐rate in GaN homoepitaxy using high‐density nitrogen radical source (2011) (12)
Chemical reactions during plasma-enhanced atomic layer deposition of SiO2 films employing aminosilane and O2/Ar plasma at 50 °C (2013) (12)
Effects of nitrogen plasma post-treatment on electrical conduction of carbon nanowalls (2014) (12)
Low-k SiOCH Film Etching Process and Its Diagnostics Employing Ar/C5F10O/N2 Plasma (2006) (12)
Plasma Induced Subsurface Reactions for Anisotropic Etching of Organic Low Dielectric Film Employing N2 and H2 Gas Chemistry (2003) (12)
Small size gold nanoparticles enhance apoptosis-induced by cold atmospheric plasma via depletion of intracellular GSH and modification of oxidative stress (2020) (11)
Fabrication of Dense Carbon Nanotube Films Using Microwave Plasma-Enhanced Chemical Vapor Deposition (2005) (11)
Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study (2020) (11)
Fabrication of vertically aligned carbon nanostructures by microwave plasma-enhanced chemical vapor deposition (2003) (11)
Supercritical Fluid Deposition of High-Density Nanoparticles of Photocatalytic TiO2 on Carbon Nanowalls (2013) (11)
Effect of ions and radicals on formation of silicon nitride gate dielectric films using plasma chemical vapor deposition (2001) (11)
Formation of Nanoporous Features, Flat Surfaces, or Crystallographically Oriented Etched Profiles by the Si Chemical Dry Etching Using the Reaction of F2 + NO → F + FNO at an Elevated Temperature (2013) (11)
Investigation of Nitrogen Atoms in Low-Pressure Nitrogen Plasmas Using a Compact Electron-Beam-Excited Plasma Source (2002) (11)
Reduced HeLa cell viability in methionine‐containing cell culture medium irradiated with microwave‐excited atmospheric‐pressure plasma (2018) (11)
Critical flux ratio of hydrogen radical to film precursor in microcrystalline silicon deposition for solar cells (2012) (11)
Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes (2007) (11)
Atomic layer etching of AlGaN using Cl2 and Ar gas chemistry and UV damage evaluation (2019) (11)
Measurement of Carbon Atom Density in High Density Plasma Process (1997) (11)
Diamond Film Formation by OH Radical Injection from Remote Microwave H2/H2O Plasma into Parallel-Plate RF Methanol Plasma (1996) (10)
Low dielectric constant film formation by oxygen-radical polymerization of laser-evaporated siloxane (1997) (10)
An ultra‐low stress tungsten absorber for x‐ray masks (1991) (10)
Simultaneous monitoring of multimetallic atom densities in plasma processes employing a multimicrohollow cathode lamp (2007) (10)
Role of surface-electrical properties on the cell-viability of carbon thin films grown in nanodomain morphology (2016) (10)
Surface roughness development on ArF-photoresist studied by beam-irradiation of CF4 plasma (2013) (10)
Selective etching of SiN against SiO2 and poly-Si films in hydrofluoroethane chemistry with a mixture of CH2FCHF2, O2, and Ar (2020) (10)
Adjusted multiple gases in the plasma flow induce differential antitumor potentials of plasma‐activated solutions (2020) (10)
Absolute density and temperature of O(D21) in highly Ar or Kr diluted O2 plasma (2008) (10)
Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas (2017) (10)
High-durability catalytic electrode composed of Pt nanoparticle-supported carbon nanowalls synthesized by radical-injection plasma-enhanced chemical vapor deposition (2017) (10)
Hydrofluorocarbon ion density of argon- or krypton-diluted CH2F2 plasmas: generation of CH2F+ and CHF2+ by dissociative-ionization in charge exchange collisions (2015) (10)
Hydrophobic treatment of organics against glass employing nonequilibrium atmospheric pressure pulsed plasmas with a mixture of CF4 and N2 gases (2011) (10)
Reactive Ion Etching of Carbon Nanowalls (2011) (10)
Quantum Chemical Investigation for Chemical Dry Etching of SiO2 by Flowing NF3 into H2 Downflow Plasma (2011) (9)
Robust characteristics of semiconductor-substrate temperature measurement by autocorrelation-type frequency-domain low-coherence interferometry (2014) (9)
Combinatorial analyses of plasma–polymer interactions (2011) (9)
Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Microplasma (2012) (9)
Plasma‐Polymerized Dry‐Developable Resist for Synchrotron Radiation Lithography (1987) (9)
Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering (2015) (9)
Impact of hydrogen radical-injection plasma on fabrication of microcrystalline silicon thin film for solar cells (2013) (9)
Atomic Oxygen Etching from the Top Edges of Carbon Nanowalls (2013) (9)
New Compact Continuous Spectrum Light Source Using Atmospheric Pressure Microplasma with High-Velocity Ar Gas Flow (2008) (9)
Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique (1999) (9)
Low temperature polycrystalline silicon film formation with and without charged species in an electron cyclotron resonance SiH4/H2 plasma-enhanced chemical vapor deposition (1999) (9)
Minimising plasma irradiation area by micronozzle device towards single-cell treatment (2012) (9)
Photoluminescence recovery by in-situ exposure of plasma-damaged n-GaN to atomic hydrogen at room temperature (2012) (9)
Fabrication of Graphene-Based Films Using Microwave-Plasma-Enhanced Chemical Vapor Deposition (2013) (9)
Review of methods for the mitigation of plasma‐induced damage to low‐dielectric‐constant interlayer dielectrics used for semiconductor logic device interconnects (2019) (9)
Effects of Oxygen and Nitrogen Atoms on SiOCH Film Etching in Ultrahigh-Frequency Plasma (2003) (9)
Area-selective growth of aligned single-walled carbon nanotube films using microwave plasma-enhanced CVD (2007) (9)
A 65-nm CMOS Fully Integrated Analysis Platform Using an On-Chip Vector Network Analyzer and a Transmission-Line-Based Detection Window for Analyzing Circulating Tumor Cell and Exosome (2019) (9)
Oxygen radical based on non-thermal atmospheric pressure plasma alleviates lignin-derived phenolic toxicity in yeast (2020) (9)
Facile synthesis of SnO2-graphene composites employing nonthermal plasma and SnO2 nanoparticles-dispersed ethanol (2019) (9)
Formation of silicon nitride gate dielectric films at 300 °C employing radical chemical vapor deposition (2000) (9)
Cancer treatments using low-temperature plasma. (2021) (9)
Growth of preferentially oriented microcrystalline silicon film using pulse-modulated ultrahigh-frequency plasma (2001) (9)
Nitriding of a tool steel with an electron-beam-excited plasma (2006) (9)
Growth and Energy Bandgap Formation of Silicon Nitride Films in Radical Nitridation (2007) (8)
Electron impact ionization of perfluoro-methyl-vinyl-ether C3F6O (2018) (8)
Localized plasma irradiation through a micronozzle for individual cell treatment (2014) (8)
Control of seed layer for a low temperature formation of polycrystalline silicon with high crystallinity and a smooth surface (1999) (8)
Non-thermal plasma-induced DMPO-OH yields hydrogen peroxide. (2021) (8)
Effect of electrical stimulation on proliferation and bone-formation by osteoblast-like cells cultured on carbon nanowalls scaffolds (2019) (8)
Negative Bias Dependence of Sulfur and Fluorine Incorporation in Diamond Films Etched by an SF 6 Plasma (2001) (8)
Rapid electron density decay observed by surface-wave probe in afterglow of pulsed fluorocarbon-based plasma (2016) (8)
Densities and Surface Reaction Probabilities of Oxygen and Nitrogen Atoms During Sputter Deposition of ZnInON on ZnO (2017) (8)
Evidence of near-the-limit energy cost NO formation in atmospheric spark discharge (2021) (8)
Fabrication of Multilayered SiOCH Films with Low Dielectric Constant Employing Layer-by-Layer Process of Plasma Enhanced Chemical Vapor Deposition and Oxidation (2003) (8)
Decreased expression levels of cell cycle regulators and matrix metalloproteinases in melanoma from RET-transgenic mice by single irradiation of non-equilibrium atmospheric pressure plasmas. (2015) (8)
Investigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine (2013) (8)
Effects of Radical Species on Structural and Electronic Properties of Amorphous Carbon Films Deposited by Radical‐Injection Plasma‐Enhanced Chemical Vapor Deposition (2016) (8)
Self-limiting reactions of ammonium salt in CHF3/O2 downstream plasma for thermal-cyclic atomic layer etching of silicon nitride (2019) (8)
Mass density control of carbon films deposited by H-assisted plasma CVD method (2013) (8)
Rapid thermal-cyclic atomic-layer etching of titanium nitride in CHF3/O2 downstream plasma (2019) (8)
Plasma-polymerized electron beam resists prepared from methyl methacrylate using various carrier gases (1987) (8)
Optical-Fiber-Type Broadband Cavity Ring-Down Spectroscopy Using Wavelength-Tunable Ultrashort Pulsed Light (2013) (8)
Effects of deposition rate and ion bombardment on properties of a-C:H films deposited by H-assisted plasma CVD method (2015) (7)
Dissociation Channels of c-C4F8 to CF2 Radical in Reactive Plasma (2010) (7)
Dependence of Surface-Loss Probability of Hydrogen Atom on Pressures in Very High Frequency Parallel-Plate Capacitively Coupled Plasma (2010) (7)
SiCxHy-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures (2015) (7)
Laser-drilling formation of through-glass-via (TGV) on polymer-laminated glass (2019) (7)
Individual Roles of Atoms and Ions during Hydrogen Plasma Passivation of Surface Defects on GaN Created by Plasma Etching (2012) (7)
Effects of Dilution Gases on Si Atoms and SiHx + (x = 0–3) Ions in Electron Cyclotron Resonance SiH4 Plasmas (1997) (7)
Feedback Control System of Wafer Temperature for Advanced Plasma Processing and its Application to Organic Film Etching (2015) (7)
Absolute density measurement of cyanogen fluoride in CHF3/N2 electron cyclotron resonance plasma using infrared diode laser absorption spectroscopy (1997) (7)
Effects of Carbon Nanowalls (CNWs) Substrates on Soft Ionization of Low-Molecular-Weight Organic Compounds in Surface-Assisted Laser Desorption/Ionization Mass Spectrometry (SALDI-MS) (2021) (7)
Surface Loss Probability of Nitrogen Atom on Stainless-Steel in N2 Plasma Afterglow (2010) (7)
On the mechanism of polytetrafluoroethylene ablation using a synchrotron radiation-induced photochemical process (2001) (7)
Dual-electrode biasing for controlling ion-to-adatom flux ratio during ion-assisted deposition of diamond (2001) (7)
Ion-to-CH3 flux ratio in diamond chemical-vapor deposition (2002) (7)
Effect of plasma-activated medium on the decrease of tumorigenic population in lymphoma. (2017) (7)
Synthesis of calcium oxalate crystals in culture medium irradiated with non-equilibrium atmospheric-pressure plasma (2016) (7)
Codeposition on diamond film surface during reactive ion etching in SF6 and O2 plasmas (2000) (7)
Nanographene synthesized in triple-phase plasmas as a highly durable support of catalysts for polymer electrolyte fuel cells (2018) (7)
Lipid droplets exhaustion with caspases activation in HeLa cells cultured in plasma-activated medium observed by multiplex coherent anti-Stokes Raman scattering microscopy. (2017) (7)
Behavior of Si atoms in a silane electron cyclotron resonance plasma at high dissociations (1996) (7)
Low-damage plasma processing of polymers for development of organic-inorganic flexible devices (2010) (7)
Control of sp2-C cluster incorporation of amorphous carbon films grown by H-radical-injection CH4/H2 plasma-enhanced chemical vapor deposition (2019) (7)
Advanced research and development for plasma processing of polymers with combinatorial plasma-process analyzer (2010) (7)
Vacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation (2012) (7)
l-Dehydroascorbic acid recycled by thiols efficiently scavenges non-thermal plasma-induced hydroxyl radicals. (2019) (7)
Formation mechanism of sidewall striation in high-aspect-ratio hole etching (2019) (7)
Room-Temperature Si Etching in NO/F2 Gases and the Investigation of Surface Reaction Mechanisms (2013) (7)
Deposition profile control of carbon films on patterned substrates using a hydrogen-assisted plasma CVD method (2009) (6)
Intraperitoneal Treatment With Plasma-Activated Liquid Inhibits Peritoneal Metastasis In Ovarian Cancer Mouse Model (2018) (6)
Ion attachment mass spectrometry of nonequilibrium atmospheric-pressure pulsed remote plasma for SiO2 etching (2006) (6)
Cytotoxicity of cancer HeLa cells sensitivity to normal MCF10A cells in cultivations with cell culture medium treated by microwave-excited atmospheric pressure plasmas (2018) (6)
Low-temperature plasma in biology and medicine. (2016) (6)
Behavior of absolute densities of atomic oxygen in the gas phase near an object surface in an AC-excited atmospheric pressure He plasma jet (2017) (6)
Single-Step, Low-Temperature Simultaneous Formations and in Situ Binding of Tin Oxide Nanoparticles to Graphene Nanosheets by In-Liquid Plasma for Potential Applications in Gas Sensing and Lithium-Ion Batteries (2019) (6)
Novel process for SiO2/Si selective etching using a novel gas source for preventing global warming (1999) (6)
Similarities And Differences In The Cellular Resposnses Between Plasma-Activated Medium-Treated Glioblastomas And Plasma-Activated Ringer’s Lactate Solution-Treated Glioblastomas (2018) (6)
Measurement of Einstein's A coefficient of the 296.7 nm transition line of the carbon atom (1997) (6)
Environmentally harmonious etching process for cleaning amorphous silicon and tungsten in chemical vapor deposition chamber (1999) (6)
Effects of Irradiation with Ions and Photons in Ultraviolet–Vacuum Ultraviolet Regions on Nano-Surface Properties of Polymers Exposed to Plasmas (2012) (6)
Properties of atmospheric pressure plasmas with microwave excitations for plasma processing (2005) (6)
Gold particles containing plasma-polymerized styrene as an X-ray absorber (1987) (6)
L-Dehydroascorbate efficiently degrades non-thermal plasma-induced hydrogen peroxide. (2021) (6)
Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing (2012) (6)
Intracellular-molecular changes in plasma-irradiated budding yeast cells studied using multiplex coherent anti-Stokes Raman scattering microscopy. (2017) (6)
Atmospheric Pressure Plasma-Treated Carbon Nanowalls’ Surface-Assisted Laser Desorption/Ionization Time-of-Flight Mass Spectrometry (CNW-SALDI-MS) (2019) (6)
Quantum Chemical Investigation of Si Chemical Dry Etching by Flowing NF3 into N2 Downflow Plasma (2012) (6)
Surface loss probability of H radicals on silicon thin films in SiH 4 /H 2 plasma (2013) (6)
Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass (2019) (6)
Electron behaviors in afterglow of synchronized dc-imposed pulsed fluorocarbon-based plasmas (2017) (6)
Improving the gas barrier properties of a-SiOxCyNz film at low temperature using high energy and suitable nitrogen flow rate (2013) (6)
Effects of BCl3 addition to Cl2 gas on etching characteristics of GaN at high temperature (2019) (6)
Tunable low-energy Ar fast atom source with large diameter (2007) (6)
H2/N2 Plasma Etching Rate of Carbon Films Deposited by H-Assisted Plasma Chemical Vapor Deposition (2013) (5)
Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H2/Ar plasma at atmospheric pressure (2020) (5)
Plasma-inspired biomaterials (2017) (5)
Pt nanoparticle-supported carbon nanowalls electrode with improved durability for fuel cell applications using C2F6/H2 plasma-enhanced chemical vapor deposition (2018) (5)
Hydrogen peroxide in lactate solutions irradiated by non-equilibrium atmospheric pressure plasma (2020) (5)
Surface Modification Process of Contact Lens Using Three-Phase AC Excited Nonequilibrium Atmospheric Pressure Ar Plasma (2008) (5)
Temperature and Density of CF Radicals in 60 MHz Capacitively Coupled Fluorocarbon Gas Plasma (2007) (5)
Spatial Distributions of Electron, CF, and CF2 Radical Densities and Gas Temperature in DC-Superposed Dual-Frequency Capacitively Coupled Plasma Etch Reactor Employing Cyclic-C4F8/N2/Ar Gas (2011) (5)
Impacts of CF+, CF2+, CF3+, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist (2011) (5)
High Performance of Silicon Oxide Selective Etching Using F2 Gas and Graphite Instead of Perfluorinated Compound Gases (2004) (5)
Effect of gas residence time on near-edge X-ray absorption fine structures of hydrogenated amorphous carbon films grown by plasma-enhanced chemical vapor deposition (2016) (5)
Chemical bonding structure in porous SiOC films (k < 2.4) with high plasma-induced damage resistance (2019) (5)
Electronic properties and primarily dissociation channels of fluoroethane compounds (2019) (5)
High performance of compact radical monitoring probe in H2/N2 mixture plasma (2010) (5)
Effects of N2 addition on density and temperature of radicals in 60MHz capacitively coupled c-C4F8 gas plasma (2006) (5)
Deposition of AZO thin film using RF and ICP at facing magnetron sputtering system (2014) (5)
Glioblastoma Cell Lines Display Different Sensitivities to Plasma-Activated Medium (2018) (5)
Atmospheric Pressure Fluorocarbon-Particle Plasma Chemical Vapor Deposition for Hydrophobic Film Coating (2006) (5)
Novel Silicon Wafer Slicing Technology Using Atmospheric-Pressure Reactive Microplasma (2008) (5)
Silicon oxide selective etching process keeping harmony with environment by using radical injection technique (1999) (5)
In-plane modification of hexagonal boron nitride particles via plasma in solution (2020) (5)
Deposition of Diamond-Like Carbon Using Compact Electron-Beam-Excited Plasma Source (2002) (5)
Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence (2014) (5)
Characteristics of low energy atom and molecule beams generated by the charge exchange reaction (2008) (5)
H2 plasma development of X-ray imaged patterns on plasma-polymerized resists (1984) (5)
Novel Epitaxy for Nitride Semiconductors Using Plasma Technology (2020) (5)
Transparent elongation and compressive strain sensors based on aligned carbon nanowalls embedded in polyurethane (2020) (5)
Effects of gas residence time of CH4/H2 on sp2 fraction of amorphous carbon films and dissociated methyl density during radical-injection plasma-enhanced chemical vapor deposition (2018) (5)
CF3+ fragmentation by electron impact ionization of perfluoro-propyl-vinyl-ethers, C5F10O, in gas phase (2015) (5)
Study of the effect of normal load on friction coefficient and wear properties of CNx thin films (2020) (4)
Real-time temperature monitoring of Si substrate during plasma processing and its heat-flux analysis (2015) (4)
Temporal changes in absolute atom densities in H2 and N2 mixture gas plasmas by surface modifications of reactor wall (2014) (4)
Analysis of the dispersion of electrical parameters and characteristics of FinFET devices (2009) (4)
On the Etching Mechanism of Highly Hydrogenated SiN Films by CF4/D2 Plasma: Comparison with CF4/H2 (2021) (4)
Nucleation and Vertical Growth of Nano-Graphene Sheets (2011) (4)
Inactivation mechanism of fungal spores through oxygen radicals in atmospheric-pressure plasma (2020) (4)
Isotropic atomic level etching of tungsten using formation and desorption of tungsten fluoride (2018) (4)
Gene Expression of Osteoblast-like Cells on Carbon-Nanowall as Scaffolds during Incubation with Electrical Stimulation. (2019) (4)
Geometric characteristics of silicon cavities etched in EDP (2007) (4)
High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System (2013) (4)
Characteristics of optical emissions of arc plasma processing for high-rate synthesis of highly crystalline single-walled carbon nanotubes (2017) (4)
Recovery of atom density drift caused by change in reactor wall conditions by real-time autonomous control (2014) (4)
Plasma‐activated Ringer's lactate solution inhibits the cellular respiratory system in HeLa cells (2021) (4)
Thermally enhanced formation of photon-induced damage on GaN films in Cl2 plasma (2017) (4)
Temperature Measurement of Si Substrate Using Optical-Fiber-Type Low-Coherence Interferometry Employing Supercontinuum Light (2013) (4)
Temperature dependence of protection layer formation on organic trench sidewall in H2/N2 plasma etching with control of substrate temperature (2017) (4)
Measurements of the CF, CF2 and CF3 Radicals in a CHF3 Electron Cyclotron Resonance Plasma (1993) (4)
Hierarchical regrowth of flowerlike nanographene sheets on oxygen-plasma-treated carbon nanowalls (2014) (4)
Special Issue on Plasma Medicine (2018) (4)
Measurements of the CF, CF_2 and CF_3 Radicals in a CHF_3 Electron Cyclotron Resonance Plasma (1993) (4)
Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma (2019) (4)
Synchrotron x-ray analyses of crystalline and electronic structures of carbon nanowalls (2011) (4)
Dissociations of C5F8 and C5HF7 in Etching Plasma (2013) (4)
Radical-controlled plasma processes (2022) (4)
Measurement of Spatial Distribution of SiF4 and SiF2 Densities in High Density SiF4 Plasma Using Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique (2001) (4)
Formation of a SiOF reaction intermixing layer on SiO2 etching using C4F6/O2/Ar plasmas (2016) (4)
Initial growth analysis of ALD Al2O3 film on hydrogen-terminated Si substrate via in situ XPS (2020) (4)
Development of the sputtering yields of ArF photoresist after the onset of argon ion bombardment (2013) (4)
Low-autofluorescence fluoropolymer membrane filters for cell filtration (2018) (4)
Development of High-Density Nitrogen Radical Source for Low Mosaicity and High Rate Growth of InGaN Films in Molecular Beam Epitaxy (2013) (4)
New line plasma source excited by 2.45 GHz microwave at atmospheric pressure (2015) (4)
Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF 4 /H 2 plasma at different substrate temperatures (2021) (3)
Introduction to Diamond‐Like Carbons (2010) (3)
Self Development of Polymethylmethacrylate by Synchrotron Radiation Exposure (1988) (3)
Polycrystalline silicon film formation at low temperature using ultra-high-frequency plasma enhanced chemical vapor deposition (1999) (3)
Effects of discharge voltage on the characteristics of a-C:H films prepared by H-assisted Plasma CVD method (2015) (3)
Nanostructure modification to carbon nanowall surface employing hydrogen peroxide solution (2014) (3)
Growth of InN films by radical-enhanced metal organic chemical vapor deposition at a low temperature of 200 °C (2017) (3)
Decomposition Removal of the Polymers for Resist Material by the Hydrogen Radical Generated Using Tungsten Hot-Wire Catalyzer (2012) (3)
In situ surface analysis of an ion-energy-dependent chlorination layer on GaN during cyclic etching using Ar+ ions and Cl radicals (2020) (3)
Surface morphology on high-temperature plasma-etched gallium nitride (2013) (3)
Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature (2020) (3)
Electrochemical Reaction in Hydrogen Peroxide and Structural Change of Platinum Nanoparticle-Supported Carbon Nanowalls Grown Using Plasma-Enhanced Chemical Vapor Deposition (2019) (3)
Effects of 3D structure on electrochemical oxygen reduction characteristics of Pt-nanoparticle-supported carbon nanowalls (2019) (3)
Numerical analysis of coaxial dielectric barrier helium discharges: three-stage mode transitions and internal bullet propagation (2020) (3)
Development of density-inclination plasmas for analysis of plasma nano-processes via combinatorial method (2009) (3)
Effects of plasma shield plate design on epitaxial GaN films grown for large-sized wafers in radical-enhanced metalorganic chemical vapor deposition (2019) (3)
Photoluminescence Study of Plasma-Induced Damage of GaInN Single Quantum Well (2013) (3)
Narrow free-standing features fabricated by top-down self-limited trimming of organic materials using precisely temperature-controlled plasma etching system (2019) (3)
Development of Compact C2F4 Gas Supply Equipment and Its Application to Etching of Dielectrics in an Environmental Benign Process (2005) (3)
Oxygen reduction reaction properties of nitrogen-incorporated nanographenes synthesized using in-liquid plasma from mixture of ethanol and iron phthalocyanine (2018) (3)
Dissociative properties of 1,1,1,2-tetrafluoroethane obtained by computational chemistry (2018) (3)
Physics of Carbon Nanowalls (2010) (3)
Study of the decomposition mechanism of PMMA-type polymers by hydrogen radicals (2015) (3)
Absolute density of precursor SiH3 radicals and H atoms in H2-diluted SiH4 gas plasma for deposition of microcrystalline silicon films (2017) (3)
Generation and Diagnostics of Ambient Air Glow Discharge in Centimeter-Order Gaps (2020) (3)
Combinatorial Analysis of Plasma–Surface Interactions of Poly(ethylene terephthalate) with X-ray Photoelectron Spectroscopy (2010) (3)
Etching Enhancement Followed by Nitridation on Low-k SiOCH Film in Ar/C5F10O Plasma (2013) (3)
Elevated-temperature etching of gallium nitride (GaN) in dual-frequency capacitively coupled plasma of CH4/H2 at 300–500 °C (2018) (3)
Evolution of paired luminous rings in capacitive radio-frequency hydrogen discharges (1997) (3)
Optical measurements of paired luminous rings in capacitive radio-frequency hydrogen discharges. (1999) (3)
Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures (2020) (3)
Investigations on Plasma Interactions with Soft Materials for Fabrication of Flexible Devices (2011) (3)
Line-Profiles and Translational Temperatures of Pb Atoms in Multi-Micro Hollow Cathode Lamp Measured by Diode Laser Absorption Spectroscopy (2012) (3)
Future Perspective for Emerging Applications Using Carbon Nanowalls (2010) (3)
Novel diffraction gratings fabricated by means of plasma nanotechnologies (2012) (2)
Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition (2020) (2)
In‐Liquid Plasma Synthesis of Nanographene with a Mixture of Methanol and 1‐Butanol (2020) (2)
Wide range applications of process plasma diagnostics using vacuum ultraviolet absorption spectroscopy (2022) (2)
Crystallization of calcium oxalate dihydrate in a buffered calcium-containing glucose solution by irradiation with non-equilibrium atmospheric pressure plasma (2017) (2)
Plasma Processes and Cancer - Special Topical Cluster of the 2nd IWPCT Meeting (2015) (2)
Hetero-epitaxial growth of a GaN film by the combination of magnetron sputtering with Ar/Cl2 gas mixtures and a separate supply of nitrogen precursors from a high density radical source (2019) (2)
(Invited) Thermal Cyclic Atomic-Level Etching of Nitride Films: A Novel Way for Atomic-Scale Nanofabrication (2017) (2)
Carbon Layer Formation on Hexagonal Boron Nitride by Plasma Processing in Hydroquinone Aqueous Solution. (2022) (2)
Electrical, Optical and Structural Properties of AZO Thin Film Deposited Using Facing Targets Magnetron Sputtering System with Inductively Coupled Plasma (2015) (2)
Temperature dependence on plasma-induced damage and chemical reactions in GaN etching processes using chlorine plasma (2018) (2)
Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source (2012) (2)
Control over size and density of sub-5nm gold dots by retarding-field single ion deposition (RSID) (1999) (2)
Microfluidic Transport Through Microsized Holes Treated by Nonequilibrium Atmospheric-Pressure Plasma (2016) (2)
Low‐temperature reduction of SnO 2 by floating wire‐assisted medium‐pressure H 2 /Ar plasma (2022) (2)
Plasma-activated solution alters the morphological dynamics of supported lipid bilayers observed by high-speed atomic force microscopy (2019) (2)
Effect of N2/H2 plasma on GaN substrate cleaning for homoepitaxial GaN growth by radical-enhanced metalorganic chemical vapor deposition (REMOCVD) (2018) (2)
Atomic oxygen radical‐induced intracellular oxidization of mould spore cells (2020) (2)
Environmentally friendly dry de-smear of fine-via by ultra high density nonequilibrium atmospheric pressure plasma (2012) (2)
Impacts of CF+, CF (2011) (2)
Influence of chamber pressure on the crystal quality of homo-epitaxial GaN grown by radical-enhanced MOCVD (REMOCVD) (2020) (2)
Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate (2019) (2)
Fabrication of an ultra Low Stress Tungsten Absorber for X-Ray Masks : Lithography Technology : (1989) (2)
Sub-5 nm gold dot formation using retarding-field single ion deposition (1998) (2)
Measurements of nitrogen atom density in a microwave‐excited plasma jet produced under moderate pressures (2020) (2)
Cleaning of Glass Disk in Oxygen Plasma by Using Compact Electron-Beam-Excited Plasma Source (2002) (2)
Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources (2020) (2)
Electronic properties and primary dissociation channels of fluoromethane compounds (2020) (2)
Field Emissions from Organic Nanorods Armored with Metal Nanoparticles (2013) (2)
Biomedical Application of Non Thermal Atmospheric Pressure Plasma and Its Usefulness (2016) (2)
Effect of substrate temperature on sidewall erosion in high-aspect-ratio Si hole etching employing HBr/SF6/O2 plasma (2018) (2)
Nanoplatform Based on Vertical Nanographene (2015) (2)
Power Generation Characteristics of Polymer Electrolyte Fuel Cells Using Carbon Nanowalls as Catalyst Support Material (2022) (2)
Modulated expression levels of tyrosine kinases in spontaneously developed melanoma by single irradiation of non-thermal atmospheric pressure plasmas (2016) (2)
Synchrotron radiation induced SiC formation on Si substrate employing methanol and H radical (1998) (2)
Substrate temperature dependence of feature profile of carbon films on substrate with submicron trenches (2010) (2)
Tetrachloroaurate (III)-induced oxidation increases non-thermal plasma-induced oxidative stress (2022) (2)
Study on Effects of Hydrogen Flow Rates on the Properties of ZnO Thin Film Deposited by Facing Targets Sputtering System (2013) (2)
Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave (2015) (2)
Tetrachloroaurate (III)–induced Oxidation Increases Non-thermal Plasma-induced Oxidative Stress (2021) (2)
Computational study on SiH4 dissociation channels and H abstraction reactions (2016) (2)
Nagoya University Photo‐Science Nanofactory Project (2007) (2)
Adhesion enhancement and amine reduction using film redeposited at the interface of a stack of plasma-enhanced CVD dielectrics for Cu/low-k interconnects (2019) (2)
Contrast Enhancement of Wavelength-Selective Detection of Mid-Infrared Using Localized Atmospheric-Pressure Plasma Treatment (2010) (2)
Hard X-ray photoelectron spectroscopy analysis for organic-inorganic hybrid materials formation (2010) (2)
Plasma-Activated Medium Inhibites Metastatic Activities Of Ovarian Cancer Cells In Vitro Via Repressing Mapk Pathway (2018) (2)
A novel and distinctive mode of cell death revealed by using non-thermal atmospheric pressure plasma: the involvements of reactive oxygen species and the translation inhibitor Pdcd4. (2021) (2)
Estimation of activation energies for decomposition reaction of polymer by hydrogen radicals generated using hot-wire catalyzer (2015) (2)
Analysis of GaN Damage Induced by Cl (2011) (2)
Scaffolds with isolated carbon nanowalls promote osteogenic differentiation through Runt-related transcription factor 2 and osteocalcin gene expression of osteoblast-like cells (2022) (2)
Amorphous Silicon and Tungsten Etching Employing Environmentally Benign Plasma Process. (2001) (2)
Residue‐Free Etching of the Al‐Si‐Cu Alloy Employing Magnetron Reactive Ion Etching (1994) (2)
An Autonomously Controllable Plasma Etching System Based on Radical Monitoring (2012) (2)
Carbon Nanowalls Formation by Radical Controlled Plasma Process (2006) (1)
Silver film etching using halogen gas plasma (2020) (1)
Study on the Absolute Density and Translational Temperature of Si Atoms in Very High Frequency Capacitively Coupled SiH4 Plasma with Ar, N2, and H2 Dilution Gases (2004) (1)
Steering of surface discharges on through-glass-vias combined with high-density nonequilibrium atmospheric pressure plasma generation (2020) (1)
A microplasma chip for VUV light source (2013) (1)
Mechanical Properties of Maze-Like Carbon Nanowalls Synthesized by the Radial Injection Plasma Enhanced Chemical Vapor Deposition Method (2023) (1)
Preparation of polysiloxane thin films using CO2 laser evaporation assisted by remote radical source (1996) (1)
Cytotoxicity of plasma-irradiated lactate solution produced under atmospheric airtight conditions and generation of the methyl amino group (2022) (1)
Synthesis of vertical nanographene network as platform for electrochemical applications * (2017) (1)
Scale-up approach for industrial plasma enhanced chemical vapor deposition processes and SiOx thin film technology (2013) (1)
Identification of key neutral species in atmospheric‐pressure plasma for promoting proliferation of fibroblast cells (2021) (1)
Study of optical emission spectroscopy using modified Boltzmann plot in dual-frequency synchronized pulsed capacitively coupled discharges with DC bias at low-pressure in Ar/O2/C4F8 plasma etching process. (2022) (1)
Deposition of Carbon Films on PMMA Using H-assisted Plasma CVD (2014) (1)
Brain cell proliferation in adult rats after irradiation with nonequilibrium atmospheric pressure plasma (2021) (1)
Radical Controlled Plasma and Its Application (2009) (1)
Deposition profile control of carbon films on submicron wide trench substrate using H-assisted plasma CVD (2011) (1)
Inactivation mechanism of Penicillium digitatum using atmospheric pressure plasma (2010) (1)
Effect of Shielding a Floating Electrode on the Power Efficiency of a Micro-plasma VUV Light Source (2015) (1)
Oxygen plasma etching resistance of plasma polymerized organometallic film (1989) (1)
Silicon Oxide Selective Etching Employing Dual Frequency Superimposed Magnetron Sputtering of Carbon Using F2/Ar Gases (2007) (1)
Using Carbon Nanowalls as Templates (2010) (1)
Substrate temperature dependence of deposition profile of plasma CVD carbon films in trenches (2008) (1)
Facile fabrication of a poly(ethylene terephthalate) membrane filter with precise arrangement of through-holes (2018) (1)
Effects of initial layers on surface roughness and crystallinity of microcrystalline silicon thin films formed by remote electron cyclotron resonance silane plasma (2002) (1)
Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma (2022) (1)
Dependence of absolute photon flux on infrared absorbance alteration and surface roughness on photoresist polymers irradiated with vacuum ultraviolet photons emitted from HBr plasma (2017) (1)
Impact of helium pressure in arc plasma synthesis on crystallinity of single-walled carbon nanotubes (2018) (1)
Controlled Synthesis of Carbon Nanowalls for Carbon Channel Engineering (2011) (1)
Wavelength dependence for silicon-wafer temperature measurement by autocorrelation-type frequency-domain low-coherence interferometry. (2015) (1)
Effects of photon irradiation in UV and VUV regions during plasma processing of organic materials (2010) (1)
Synthesis of carbon nanowalls by the method of plasma enhanced chemical vapor deposition in a radio-frequency discharge plasma (2019) (1)
Molecular Organization of Nonlinear Organic Films Laminated by Langmuir-Blodgett Method (2005) (1)
Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp (2012) (1)
Enhancement of antitumor effect of plasma-activated medium (2017) (1)
Mechanism of asymmetric etched profiles in trimming process (2018) (1)
Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy (2020) (1)
Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4 Plasmas (2003) (1)
Cover Picture: Plasma Process. Polym. 12∕2015 (2015) (1)
Responses of cells in plasma-activated medium (2015) (1)
Repairing of Cr-photo-mask by ultrafast- pulse laser (1999) (1)
High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism (2011) (1)
Reduction in photon-induced interface defects by optimal pulse repetition rate in the pulse-modulated inductively coupled plasma (2020) (1)
Molecular Structure of Plasma-polymerized Methyl Methacrylate and Evaluation as a Resist (1984) (1)
Silicon–oxide etching process employing an electron-beam-excited plasma (2004) (1)
Control of Structure and Electrical Properties of Carbon Nanowalls : Effect of N 2 /O 2 Addition to Fluorocarbon Plasma CVD with H Radical Injection (2008) (1)
Study on change of electrical properties of ZnO thin films deposited in low temperature facing targets magnetron sputtering ( FTS ) system with H 2 and O 2 flow rate changes (2013) (1)
Non-thermal plasma elicits ferrous chloride-catalyzed DMPO-OH (2022) (1)
Cell Deposition Microchip with Micropipette Control over Liquid Interface Motion (2018) (1)
Reaction mechanisms between chlorine plasma and a spin-on-type polymer mask for high-temperature plasma etching (2018) (1)
Differential data on the responsiveness of multiple cell types to cell death induced by non-thermal atmospheric pressure plasma-activated solutions (2021) (1)
Effects of deposition precursors of hydrogenated amorphous carbon films on the plasma etching resistance based on mass spectrometer measurements and machine learning analysis (2022) (1)
Effects of Ion Bombardment Energy Flux on Chemical Compositions and Structures of Hydrogenated Amorphous Carbon Films Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition (2019) (1)
Reduction of chlorine radical chemical etching of GaN under simultaneous plasma-emitted photon irradiation (2017) (1)
Surface roughening of photoresist after change of the photon/radical and ion treatment sequence (2017) (1)
Sticking coefficient of hydrogen radicals on ArF photoresist estimated by parallel plate structure in conjunction with numerical analysis (2011) (1)
Etching characteristics of PECVD-prepared SiN films with CF4/D2 and CF4/H2 plasmas at different temperatures (2020) (1)
Silicon dioxide etching process for fabrication of micro-optics employing pulse-modulated electron-beam-excited plasma (2006) (1)
Si Oxidation Mechanism in Ar/O2 Surface Wave Plasma (2007) (1)
Ion-induced interface defects in a-Si:H/c-Si heterojunction: possible roles and kinetics of hot mobile hydrogens (2022) (1)
Antitumor effect of synergistic contribution of nitrite and hydrogen peroxide in the plasma activated medium (2015) (1)
Morphological control of carbon nanowalls by reactive ion etching (2010) (1)
Silicon oxide contact hole etching employing an environmentally benign process (2002) (1)
Nanosecond-scale impulse generator for biomedical applications of atmospheric-pressure plasma technology. (2022) (1)
Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique (2003) (1)
Environmentally benign etching process of amorphous silicon and tungsten using species evaporated from polytetrafluoroethylene and fluorinated ethylene propylene (2003) (1)
Control and Stabilization of Centimeter Scale Glow Discharge in Ambient Air Using Pulse-Width Modulation (2020) (1)
Cyclic C4F8 and O2 plasma etching of TiO2 for high-aspect-ratio three-dimensional devices (2021) (1)
Growth Mechanism of Carbon Nanowalls (2010) (1)
Measurement of peptide by surface-assisted laser desorption / ionization mass spectrometry using carbon nanowalls (2017) (1)
Live demonstration: A CMOS sensor platform with 1.2 µm × 2.05 µm electroless-plated 1024 × 1024 microelectrode array for high-sensitivity rapid direct bacteria counting (2014) (1)
Radical activated solutions with bactericidal and plant-growth effects (2019) (0)
High growth rate of GaN homoepitaxy by molecular beam epitaxy using high density nitrogen radical source (2010) (0)
Dissociations of C₅F₈ and C₅HF₇ in Etching Plasma (Special Issue : Dry Process) (2013) (0)
Effect of solution irradiated with oxygen radicals on molecular diffusion in lipid bilayer membrane (2016) (0)
Enhancement of ethanol production and cell growth in budding yeast by direct irradiation of low-temperature plasma (2021) (0)
Quantitative inactivation-mechanisms of P. digitatum and A. niger spores based on atomic oxygen dose (2014) (0)
Evaluation of fluorescent staining and analysis of electron microscopy images on inactivated mold spores using oxygen radical treatment (2017) (0)
Chamber cleaning process keeping harmony with environment by using laser ablation (1999) (0)
Time dependence measurement of electron density and temperature of a 60 Hz nonequilibrium atmospheric pressure plasma by laser Thomson scattering (2010) (0)
Generation mechanism of bactericidal efficacy in the radical-activated water (2018) (0)
J164031 Micro plasma irradiation utilizing MEMS nozzles (2012) (0)
Growth of InN by Radical Enhanced Metal Organic Chemical Vapor Deposition (2016) (0)
Laser diagnostics of properties of atmospheric pressure plasmas (2017) (0)
Plant growth promotion using radical-activated phosphate buffered solution containing phenylalanine (2019) (0)
High Density Radical Source for GaN Epitaxial Growth GaN結晶成長用高密度ラジカル源 (2014) (0)
The effect of time modulation of RF bias power on bonding structure of amorphous carbon films grown by radical injection plasma enhanced chemical vapor deposition (2017) (0)
Selective isotropic atomic-layer etching of thin films by using dry chemical removal tool (2023) (0)
Atomic nitrogen density measurements by actinometry method in the toroidal device NAGDIS-T (2020) (0)
Total Dry Electron-Beam Vacuum Lithography System Using 4 Rotary Chambers (1986) (0)
High Deposition Rate of Poly-Silicon at Low Temperature Using UHF Plasma System. (1998) (0)
Study on Characteristic of Hydrogen Peroxide Using Carbon Nanowalls (2018) (0)
Effect of transient behavior of pulse modulated inductively coupled plasma on photon-induced interface defects (2015) (0)
Effects of Fluorine Termination of Carbon Nanowall Edges on Their Electrical Properties by Ar/NO/F$_{2}$ Mixture Gas Treatments (2015) (0)
Quantitative Measuring of Damage on Porous SiOCH by H2/N2 Plasma Ashing Process (2008) (0)
Diagnostics of Oxygen Atoms in Surface Wave Plasma with Vacuum Ultraviolet Laser Absorption Spectroscopy (2005) (0)
Ultrafast Synthesis of Nanographene Employing an Ultrahigh-density In-liquid Alcohol Plasma (2011) (0)
Behavior of radicals in SiH$_4$/H$_2$ plasma for fabrication of solar cell using silicon thin film (2011) (0)
Synthesis of few-layer graphene using microwave-exited atmospheric pressure plasma (2019) (0)
Effects of gas-phase reactive species on generation of hydrogen peroxide and nitrite ion in plasma-activated medium (2017) (0)
In-situ observation using fluorescence images of interaction between oxygen radicals and supported lipid bilayer (2017) (0)
Effects of High Energy Ar Ions on Synthesis of Carbon Nanowalls (2008) (0)
Inside Front Cover: Plasma Process. Polym. 1/2021 (2021) (0)
Analysis of the surface reactions of ArF photoresist during fluorocarbon plasma etching by XPS (2009) (0)
Indoor Floor Heel Mark Removal Using Spark Discharges and Pressurized Airflow (2022) (0)
Challenge towards controlling atomic level interactions of plasma with surfaces (2016) (0)
100{\%} N$_{\mathrm{2}}$ atmospheric-pressure microwave-line-plasma production with a modified waveguide structure (2016) (0)
Deposition Profile Control of Carbon Films on the Surface of Fine Structures using Plasma CVD (2010) (0)
Carrent Status and Future Vision of High Density Plasma Processing (2007) (0)
Proliferative effects of nitric oxide radical irradiation on budding yeast cells (2017) (0)
Fabrication of Nanoplatform Based on Vertical Nanographene (2015) (0)
Oxygen reduction characteristics of iron-containing carbon nanoflake synthesized by in-liquid plasma (2018) (0)
Control of deposition profile of plasma CVD hard carbon films on substrates with trenches (2008) (0)
Field Emission from Carbon Nanowalls (2010) (0)
Control of Ion Bombardment and Species for Ultra Low Temperature Formation of Silicon Nitride Gate Dielectric Films Using Plasma Chemical Vapor Deposition (1999) (0)
Phase-resolved interelectrode distribution of electron density in afterglow of synchronized dc imposed pulsed plasmas for advance dielectric etching processes (2016) (0)
Effects of oxygen radical irradiation on cell viability of mouse fibroblasts (2016) (0)
Electronic Structure of Carbon Nanowalls using Resonant Soft-X-Ray Emission Spectroscopy (2009) (0)
Main bactericidal factors of escherichia coli in solutions treated with neutral oxygen radicals (2016) (0)
A mechanism on generation of calcium oxalate crystals in plasma-irradiated solutions (2017) (0)
A microplasma chip for radical monitor (2013) (0)
(Invited) Plasma Synthesis and Structural Control for Carbon Nanowalls for Novel Nano-Bio Devices (2016) (0)
Controlled synthesis and electrocatalytic characteristics of Pt nanoparticles-supported nanographene synthesized by in-liquid plasma (2014) (0)
Enhanced contrast of wavelength selective Mid-IR detector stable against temperature change (2010) (0)
Spatiotemporal behavior of OH radical in AC-excited atmospheric pressure Ar plasma jet generated in open air (2018) (0)
Fabrication of Carbon Nanowalls Using Plasma-Enhanced Chemical Vapor Deposition (2010) (0)
Redox-active cytocompatible phospholipid polymer hydrogels for three-dimensional electrical control of encapsulated living cells (2015) (0)
Real time in situ electron spin resonance (ESR) study of surface reactoin on polymer interacted with plasma (2012) (0)
Roughness formation on photoresist during etching examined by HBr plasma-beam (2014) (0)
Electrical Characterization of Carbon Nanowalls (2006) (0)
Effect of Kr Gas Dilution on O Atom Density in Surface Wave Excited Kr/O2 Plasma for Low -Temperature and Damage-free Plasma Oxidation Processes (2004) (0)
Growth of graphene-based films using afterglow of inductively coupled plasma (2014) (0)
Physicochemical analyses of Plasma-Activated Lactate (2018) (0)
In Situ Analysis of Plasma-Induced Modification on Porous SiOCH Films (2011) (0)
Electron-spin-resonance analysis of liquid irradiated with reactive oxygen radicals for inactivating microorganisms 微生物殺菌のための酸素ラジカル照射された溶液の電子スピン共鳴解析 (2014) (0)
High-aspect-ratio organic-pattern formation with self-limiting manner by controlling plasma process based on substrate temperature measurement. (2019) (0)
Plasma activated Ringer’s lactate solution (2023) (0)
Plasma-enhanced CVD growth of GaN films (2017) (0)
Synthesis of SiNx:H films in PECVD using RF/UHF hybrid sources (2015) (0)
Quantum chemical investigation for Chemical dry etching by flowing NF$_{3 }$into H$_{2}$ down flow plasma (2011) (0)
Surface loss rate of H and N radicals in H$_{2}$/N$_{2}$ plasma etching process (2008) (0)
Dry De-smear of Via Bottom Residue Using 60 Hz Nonequilibrium Atmospheric Pressure Plasma with Trifluoromethyle Trifluorovinyl Ether Mixing Gas (2012) (0)
Development of surface assisted laser desorption / ionization mass spectrometry using carbon nanowalls (2017) (0)
Anti-tumor substances in plasma activated Ringer's solution treatments (2019) (0)
CF_X(X=1-3) Radicals Controlled by On-Off Modulated Electron Cyclotron Resonance Plasma and Their Effects on Polymer Film Deposition ( Plasma Processing) (1994) (0)
Inactivation mechanism of \textit{Penicillium digitatum} spores by atmospheric pressure argon plasma (2010) (0)
Plasma-Enhanced Controlled Synthesis of Carbon Nanowalls and Their Nano-bio Applications (2018) (0)
Plasma-etching processes for future nanoscale devices (2012) (0)
Temporal control of radicals for high crystallinity of microcrystalline silicon films in UHF SiH/sub 4//H/sub 2/ pulse-modulated plasma CVD (2002) (0)
Promotion of growth of mouse fibroblasts by nitric oxide radical supplementation (2018) (0)
The effect of intermittent hydrogen plasma treatment on bonding structure of amorphous carbon film grown by radical injection-PECVD (2018) (0)
Control of Deposition Profile of Hard Carbon Films on Substrates Having Trenches (2008) (0)
Study on Hydrogen Peroxide Sensor Using Carbon Nanowalls (2017) (0)
Cell metabolism analysis of HeLa cells incubated in plasma activated Ringer’s lactate solution (2019) (0)
Dissociation Processes of Fluorocarbons in ECR Etching Plasmas (1996) (0)
Electron and negative ion densities in a CW and pulsed 100 MHz capacitively coupled plasma discharge (2016) (0)
Color change of raw horse meat with reduction treatment using H-radical irradiation (2017) (0)
Development of high-density radical source and its application to high-speed growth of nitride semiconductors by plasma-assisted molecular beam epitaxy (2015) (0)
Dependence of CCP power on Near-Edge X-Ray Absorption Fine Structure of Amorphous Carbon Films Grown by Plasma-Enhanced Chemical Vapor Deposition (2016) (0)
Increase of antioxidant content in strawberry fruit with plasma treatment (2019) (0)
Dependence of wafer temperature on etch reaction by radical on organic film surfaces (2016) (0)
Erratum to “Chemical bonding structure in porous SiOC films (k < 2.4) with high plasma-induced damage resistance” [Micro and Nano Engineering Vol. 3 (2019) 1–6] (2019) (0)
Preface: Special Issue on Plasma Systems for Biological/Medical Applications (2015) (0)
Fabrication of Carbon Nanowalls Using Radical Injection Plasma Enhanced CVD (2010) (0)
Ion densities of CH$_{2}$F$^{+}$ and CHF$_{2}^{+}$ generated by dissociative ionization of charge exchange collisions in Ar or Kr diluted CH$_{2}$F$_{2}$ Plasmas (2014) (0)
Etching Processes of Carbon Nanowalls Using Dual-frequency Parallel-plate Capacitively Coupled Plasma (2007) (0)
Advanced Plasma Diagnostics in Plasma Processing Science and Technology ~Comprehensively understanding of plasma processes from gas phase to surface reactions~ (2014) (0)
Change in surface morphology of fluorinated Si surface by Ar ion irradiation (2018) (0)
Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride (2022) (0)
The silicon mold fabrication of a kind of micro-optical resonator and coupler (2007) (0)
Cold atmospheric helium plasma causes synergistic enhancement in cell death with hyperthermia and an additive enhancement with radiation (2017) (0)
Promotion of cell proliferation using atmospheric-pressure radical source (2016) (0)
Atmospheric Pressure Micro Inductively Coupled Plasma Light Source towards Portable Spectrometry System (2010) (0)
Etching of Organic Low k Dielectric, their Gas Phase and Subsurface Reactions in Ultra High Frequency Plasma (2002) (0)
Diagnostics of a nanosecond atmospheric plasma jet. Electron and ro-vibrational excitation dynamics (2022) (0)
Perspective of strategic plasma therapy for prognostic improvement of patients with ovarian cancer (2013) (0)
Generation and annihilation of plasma-induced defects ~effects of Ar ion irradiation~ (2020) (0)
Reaction model for etching surface interacted with hydrofluorocarbon plasmas (2012) (0)
Color change of raw horse meet through irradiation of various neutral reactive species (2016) (0)
Dependence of mold species on inactivation effects of oxygen radical irradiation (2016) (0)
Development of ultracompact absolute density measurement system for atomic radicals and simultaneous measurement technique of H, N, O radicals employing the system (2005) (0)
Inactivation effects of microorganisms in deionized distilled water treated with oxygen radicals (2016) (0)
Plasma in Human Life, Environment and Biotechnology (2003) (0)
Microcrystalline silicon thin film formation using pulse modulated microwave plasma (2003) (0)
Plasma Activated Medium (2018) (0)
Precise and High-rate Etching of Polymer Film and Its Surface Modification Using High-density Plasma (2004) (0)
Study on modification process of photoresist by fluorocarbon ions and radicals (2011) (0)
Electronic properties and dissociation channels of HFC-1234yf (2016) (0)
In-situ observation of interaction between supported lipid bilayer and reactive species in radical-treated solution (2017) (0)
Growth control of budding yeast cells by oxygen-radical treatment (2013) (0)
Plasma Processing for Graphene-Based Materials (2018) (0)
Student Award Finalist) Calcium oxalate syntheses in a solution containing glucose by the atmospheric pressure plasma irradiation (2016) (0)
Proliferation and morphology of cultured cells on carbon nanowalls scaffold with electrical stimulation (2017) (0)
【Highlighted Presentation】Demonstration of Self-limiting Characteristics and Selectivity Control in Annealing Steps for Rapid Thermal-Cyclic ALE (2018) (0)
High resolution measurement of silicon wafer temperature using super-continuum light on optical low-coherence interferometry (2010) (0)
N-Graphene Nanowalls via Plasma Nitrogen Incorporation and Substitution: The Experimental Evidence (2020) (0)
Hydrogen plasma modification mechanism of silicon nitride surface by in-situ surface analysis (2018) (0)
Plasma Interactions with Biological Molecules in Aqueous Solution (2013) (0)
Vacuum Ultraviolet Absorption Spectroscopy of Hydrogen Plasma Using a Self-Absorbing Micro-Discharge Hollow Cathode Light Source (2019) (0)
Electronic properties and dissociation channels of CH 3 F (2019) (0)
Nitrogen Atom Density Measurements in NAGDIS-T Using Vacuum Ultraviolet Absorption Spectroscopy (2022) (0)
Behavior of Electron and Negative Ion Density in Very High Frequency Capacitively Coupled Plasma (2017) (0)
Spatial Distribution Measurements of Absolute CFx Radical Densities (1998) (0)
Atomic oxygen behavior at downstream of AC excited atmospheric pressure He plasma jet (2016) (0)
Preface (2006) (0)
Density and translational temperature of Pb atom in the multi-Micro Hollow Cathode Lamp measured by diode laser absorption spectroscopy (2010) (0)
Structural change of carbon nanowall electrode surface by oxidation-reduction of hydrogen peroxide (2018) (0)
Electronic properties of HBr, O2 and Cl2 used in Si etching (2015) (0)
Organic decomposition and synthesis reactions in lactated solution exposed to nonequilibrium atmospheric pressure plasma (2023) (0)
Elucidation of radical adsorption mechanism for atomic layer etching of gallium nitride (2018) (0)
Discharge properties of the nonequilibrium atmospheric pressure plasma source (2017) (0)
Temporal variation of Ar metastable density in pulse modulated inductively coupled plasma and its impact on the VUV/UV radiation-induced damage (2018) (0)
Effects of plasma-activated Ringer’s lactate solution on cancer cells: evaluation of genotoxicity (2023) (0)
Plasma-activated medium induced apoptosis on tumor cells (2013) (0)
Controlled Synthesis and Device Applications of Carbon Nanowalls Grown by Plasma-enhanced Chemical Vapor Deposition (2010) (0)
Diagnostics of Plasma Induced Damages on Low-k SiOCH Films (2008) (0)
Enhancement on adhesion of poly(carbonate) surfaces after plasma treatments (2017) (0)
A novel fast and flexible technique of radical kinetic behaviour investigation based on pallet for plasma evaluation structure and numerical analysis (2013) (0)
GaN damage-free cyclic etching by sequential exposure to Cl2 plasma and Ar plasma with low Ar+-ion energy at substrate temperature of 400 °C (2023) (0)
Effect of ultrasound on synthesis of nanographene by using in-liquid plasma (2017) (0)
Plasma Etching Technology for Low-k Porous SiOCH Films (2007) (0)
Synthesis of copper nanoparticles using gas-liquid interface plasma (2016) (0)
Selective antitumor effect of plasma-activated medium produced by microwave excited plasma treatment (2017) (0)
Combinatorial analysis of plasma-polymer interactions for formation of inorganic-soft materials hybrid structure (2010) (0)
Bridging Growth and Electrical Properties of Single Carbon Nanowall (2010) (0)
Reaction mechanism between cell membranes of P. digitatum spores and oxygen radicals (2013) (0)
Electrochemical durability of Pt-supported carbon nanowalls synthesized using C 2 F 6 /H 2 plasma (2016) (0)
Localized Plasma Treatment for Individual Cells (2013) (0)
Effects of Plasma-Activated Solution on Shapes of Cholesterol-Containing Lipid Bilayers (2019) (0)
Ar ion energy dependence on characteristics of atomic layer etching for GaN by Cl adsorption (2021) (0)
Kinetics of SiF_x(x=0-2) and SiF 4 molecule in RF 60MHz parallel-plate capacitively coupled plasma employing SiF_4 (2002) (0)
Development of a low pressure microwave excited plasma and its application to the formation of microcrystalline silicon films (2006) (0)
Growth of carbon nanowalls using inductively coupled plasma-enhanced chemical vapor deposition (2010) (0)
Manufacturing method for X-ray exposure mask and device for voltage measurement of thin layers (1990) (0)
Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature (2016) (0)
Investigation of growth and yield with periodic treatment of cold plasma in rice field (II) (2019) (0)
Invited) The Mechanism of Surface Modifications of Photoresist Material in Plasma Etching Nano Processes (2018) (0)
Different influence on diffusion of lipid molecules due to oxygen-radical-exposed solutions (2018) (0)
Development of Novel Etching Process based on Real-time Monitoring of Substrate Temperature (2009) (0)
Effect of hypochlorous acid in solution treated with oxygen radicals on activity of yeast cells (2016) (0)
Elucidation on effects of surface state of carbon nanowalls on electrochemical durability for fuel cell application (2018) (0)
Pseudo-continuous meter-scale microwave plasma production under atmospheric pressure (2014) (0)
Field Emission Properties of 10-nm Pillars of Organics Fabricated by Pt particles and Plasma Etching (2011) (0)
Temperature-Lowered Plasma Treatment by Controlling Direction of Supplying Reactive Species for Biological Application (2015) (0)
In-situ transmission electron microscopy observation of layer-by-layer etching of graphene under remote oxygen plasma irradiation (2019) (0)
Ag film etching by using halogen gas plasma (2017) (0)
Activation of apoptosis-inducing factor caspase-9 in melanoma cells treated with radical-irradiated medium (2017) (0)
Spatiotemporal density in the Non-equilibrium Atmospheric Pressure Ar Plasma (2018) (0)
Ultrathin Fluorinated Silicon Nitride Gate Dielectric Films Formed by Plasma Enhanced Chemical Vapor Deposition Employing NH3 and SiF4 (2000) (0)
Carbon Radical Measurement In Inductively Coupled CO Plasma (1996) (0)
Molecular Diffusion Rates of Supported Lipid Bilayer in Phosphate Buffered Saline Irradiated with Oxygen Radicals (2018) (0)
Diagnostics of reactive species on liquid surface and in gas-phase of atmospheric pressure plasma (2016) (0)
Investigation of Plasma Interactions with Soft Materials via Combinatorial Plasma-Process Analyzer for Plasma Nano Processes (2010) (0)
Investigation of selective induction of breast cancer cells to death with treatment of plasma-activated medium (2015) (0)
[Plasma-Activated Solution: Mechanism of Action, Clinical Application, and Industrialization]. (2015) (0)
Plasma-Assisted Deposition of Carbon Nanowalls for Detection of Organic Vapours (2016) (0)
Growth Process of Carbon Nanowalls Fabricated Using Radical Injection Plasma Enhanced Chemical Vapor Deposition (2007) (0)
Analysis of radical-treated amino acid using absorption spectroscopy (2018) (0)
Measurement of Atomic Species in High-Density Reactive Plasmas using Vacuum Ultraviolet Absorption Spectroscopy with High Pressure Microdischarge Hollow Cathode Lamp (1999) (0)
Measurement of Absolute Density of Atomic Species Using Vacuum Ultraviolet Absorption Spectroscopy with Microdischage Lamp (2001) (0)
Mechanism of Si Oxidation in H$_{2}$/O$_{2}$/Ar Surface Wave Plasma (2010) (0)
Synthesis of copper nanoparticles via reduction reaction induced by gas-liquid interface plasma (2017) (0)
Behaviors of carbon atom density in hydrocarbon and fluorocarbon plasmas (1997) (0)
Fabrication of Two-Dimensional Carbon Nanostructures Using Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition (2003) (0)
Fluorocarbon radical behavior of synchronized dc-imposed pulsed plasmas for advanced dielectric etching processes (2017) (0)
Temporal variation on activity of apoptosis-inducing factor in melanoma cells treated with oxygen radical-irradiated medium (2018) (0)
Multiplex coherent anti-Stokes Raman scattering microspectroscopy for monitoring molecular structural change in biological samples (2014) (0)
Raman Spectroscopy of $a$-C:H Films Deposited Using Ar $+$ H$_{2}+$ C$_{7}$H$_{8}$ Plasma CVD (2015) (0)
Cancer-specific cytotoxicity of Ringer's acetate solution irradiated by cold atmospheric pressure plasma. (2023) (0)
Effect of H 2 gas addition on Si Oxidation Process with Ar and O 2 Mixture Surface Wave Plasma (2011) (0)
Effects of dispersion solvents on oxygen reduction characteristics of carbon nanoflakes synthesized by liquid plasma (2018) (0)
Wall to wall distance dependence of carbon nanowalls for surface-assisted laser desorption/ionization mass spectrometry (2020) (0)
Effects of Ar Dilution and Exciting Frequency on Absolute Density and Translational Temperature of Si Atom in Very High Frequency-Capacitively Coupled SiH4 Plasmas (2003) (0)
Proliferation enhancement of budding yeast and mammalian cells with periodic oxygen radical treatment (2015) (0)
Abstract Submitted for the GEC16 Meeting of The American Physical Society Promotion of cell proliferation using atmospheric-pressure rad- (2016) (0)
Evaluation of Penicillium digitatum sterilization using non-equilibrium atmospheric pressure plasma by terahertz time-domain spectroscopy (2011) (0)
B-10-1 Synthesis of Fluorinated SiN , Gate Dielectric Films Using ECR-PECVD Employing siFr , / Nz , / IIu Gases (2008) (0)
Optical probe for space resolved measurement of atom densities in reactive plasmas (2007) (0)
Loss Kinetics of Carbon Atoms in Diamond Deposition Employing Low-Pressure Inductively Coupled Plasma (2000) (0)
Variation in photon-induced interface defects due to transient behavior of pulse modulated inductively coupled plasma (2016) (0)
Control Capabilities of Low-Inductance-Antenna-Driven RF Plasmas for Low-Damage Processing of Polymers (2008) (0)
Bactericidal Effect of E. coli in Phosphate Buffered Solutions including Tryptophan Irradiated with Oxygen Radicals (2019) (0)
Plasma-activated medium as a novel cancer therapeutic approach (2016) (0)
Initial Formation of Carbon Nanowalls Synthesized by Ar Ions and CF$_{X}$/H Radicals (2008) (0)
The effect on activation of apoptosis-inducing factor in melanoma cells treated with oxygen radical-irradiated medium (2017) (0)
Development of light source using micro hollow cathode plasma for monitoring absolute densities of metal atoms in magnetron sputtering (2007) (0)
Measurement of absolute density of N atom in sputtering plasma for epitaxial growth ZnO films via nitrogen mediated crystallization (2015) (0)
Measurement of activated species generated by 60 Hz excited atmospheric pressure Ar plasma in atmospheric gas (2012) (0)
Abstract Submitted for the GEC11 Meeting of The American Physical Society Evaluation of Penicillium digitatum sterilization using non- equilibrium atmospheric pressure plasma by terahertz time-domain spectroscopy (2012) (0)
\textit{in situ} Electron Spin Resonance Study for Plasma-Surface interactions (2010) (0)
Effect of ozone on sterilization of Penicillium digitatum using non-equilibrium atmospheric pressure plasma (2008) (0)
Future Outlooks in Plasma Medical Science (2019) (0)
Electronic properties of HBr, O (2015) (0)
Generation of stable centimeter-scale glow discharge in presence of external gas flow. (2020) (0)
(Invited) Radical-Controlled Plasma Nano Processing for Green and Life Innovations (2016) (0)
Effects of nitric oxide ragicals on growth promotion of budding yeast cells (2018) (0)
Inside Back Cover Picture: Plasma Process. Polym. 10/2020 (2020) (0)
Dry Etching of Low-k Dielectrics (2006) (0)
Abstract Submitted for the GEC15 Meeting of The American Physical Society Investigation of selective induction of breast cancer cells to death with treatment of plasma-activated medium1 (2015) (0)
Evaluation of Plasma Ashing Damages on Porous SiOCH Films by Measurement of H and N Radical Densities (2008) (0)
Dissociations of C (2013) (0)
Downflow Plasma-Enhanced Chemical Vapor Deposition Using Hexamethyldisiloxane for Preparation of Low Dielectric Constant Interlayer Dielectrics (1997) (0)
Proliferative effect of budding yeast cells in various solutions irradiated with nitric oxide radicals (2017) (0)
Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode (2023) (0)
Activated organic matters in plasma-irradiated monosaccharide solutions at crystallization process of calcium oxalate (2018) (0)
Formation mechanism of indium-zinc-oxide film using RF magnetron sputtering based on optical diagnostics of gas phase (2010) (0)
SiO$_{2}$ Film Etching Process Using Environment-Friendly New Gas C$_{5}$F$_{7}$H (2009) (0)
Structure Control of Vertical Nanographene toward Electrochemical and Bio Applications (2016) (0)
Measurements of nitrogen atom density in N2/Ar sputtering plasma for fabrication of high-mobility amorphous In2O3:Sn films (2015) (0)
Abstract 18: Therapeutic potential of cold physical plasma in palliative cancer care: Introduction and perspectives (2017) (0)
Improvement of Power Generation on Polymer Electrolyte Fuel Cell Using Carbon Nanowalls (2017) (0)
Shield effect of floating electrode for power efficient micro-plasma VUV light source (2014) (0)
Oxygen reduction characteristics of Fe-containing nanographene synthesized by in-liquid plasma (2017) (0)
Plasma Etching Process based on Real-time Monitoring of Radical Density and Substrate Temperature (2016) (0)
Behavior of hydrogen atoms in plasma enhanced chemical vapor deposition of microcrystalline silicon film (2009) (0)
Dependence of the plasma and substrate distances on the sputtering growth of GaN (2018) (0)
Plasma parameter measurements of Ar+H2+C7H8 plasmas in H-assisted plasma CVD reactor (2010) (0)
Quantum Chemical Investigation for Chemical Dry Etching of SiO₂ by Flowing NF₃ into H₂ Downflow Plasma (2012) (0)
Edge Termination on Electrical Properties of Vertically-grown Graphene Sheets employing N 2 /H 2 mixture plasma (2012) (0)
Mechanism of Highly Selective SiO$_{2}$ Etching over Si using New Alternative Gas, C$_{5}$HF$_{7}$ (2011) (0)
Electron Spin Resonance (ESR) Observation of Radicals on Biological Organism Interacted with Plasmas (2012) (0)
Synergistic Effects on Hyperthermic Cancer Therapy Using Plasma-activated Acetated Ringer’s Solution (2021) (0)
Glutamate biosensor based on carbon nanowalls grown using plasma enhanced chemical vapor deposition (2015) (0)
Effects of in-situ irradiation of nitrogen-hydrogen plasma on flatness and composition of GaN surfaces before epitaxial growth by a radical-enhanced metalorganic chemical vapor deposition (2018) (0)
Power Generation Characteristics of Polymer Electrolyte Fuel Cell Using Carbon Nanowalls for Catalyst Layer (2017) (0)
Measurement of Absolute Carbon Atom Density in Reactive Plasmas using Vacuum Ultraviolet Absorption Spectroscopy with Microdischarge Hollow Cathode Lamp (2007) (0)
Analysis of chemical species in plasma-treated water (2017) (0)
Behavior of Excited Oxygen Atoms in Rare gas mixture O$_{2}$ Surface Wave Excited Plasma (2007) (0)
Real-time measurement of fluorescent images of supported lipid bilayer irradiated with oxygen-radicals (2018) (0)
(Invited) Synthesis, Functionalization, and Three-Dimensional Structuring of Carbon Nanomaterials By Gas-Liquid Interface Plasma (2022) (0)
Nucleation controll of carbon nanowalls using inductivily coupled plasma enhanced chemical vapor deposition (2013) (0)
Formation of microcrystalline diamond using a low-pressure inductively coupled plasma assisted by thermal decomposition of di-t-alkyl peroxide (2007) (0)
Influence of Liquid Layer Thickness on Lateral diffusion coefficient of Supported Lipid Bilayer Irradiated with Oxygen Radicals (2019) (0)
Manipulation of etch selectivity of silicon nitride over silicon dioxide to a-carbon by controlling substate temperature with a CF4/H2 plasma (2023) (0)
Synthesis of highly dense and multi-branched carbon nanowalls by two-step growth combining different plasma chemical vapor deposition methods (2023) (0)
Plasma-Assisted Priming: Improved Germination and Seedling Performance of Papaya (2023) (0)
Control of initial layer for low temperature and high deposition rate polycrystalline silicon film formation process (1999) (0)
Spectroscopic characteristics in non-equilibrium atmospheric pressure plasma for inactivation of micro-organism (2009) (0)
Development of incoherent-light absorption spectroscopic technique for measuring atomic species in process plasmas (1998) (0)
Dissociation channels of c-C4F8 to C2F4 in reactive plasma (2022) (0)
Mechanism of action of cell death by plasma activated solutions (2020) (0)
Modeling molecules responsible for the sidewall protection during the chemical dry etching of silicon related materials using F$_{2} + $ NO$_{x} \to $ F $+$ FNO$_{x}$ (2015) (0)
Rapid Thermal Cyclic Atomic-Level Etching of Tungsten (2018) (0)
Batch Fabrication of Nano-Gap Electrode Array Using Photo-Patterning and Resist UV-Curing (2019) (0)
(Invited) Advanced Plasma Etching Processing: Atomic Layer Etching for Nanoscale Devices (2017) (0)
Study on synthesis processes and crystallinity changes of nanographene materials synthesized by alcohol liquid-plasma (2012) (0)
Plasmatreatment induces blood clot formation; protein aggregation and hemolysis (2016) (0)
Control of Electric Conduction of Carbon Nanowalls (2007) (0)
[JSAP Young Scientist Award Speech] Production of microwave-excited meter-scale atmospheric-pressure plasma and its characteristics (2017) (0)
Radical density measurement in VHF C2F6/H2 plasma used for carbon nanowall growth (2007) (0)
Temperature measurement of substrate with a thin film using low-coherence interference (2012) (0)
Spectroscopic diagnostics of microwave excited atmospheric pressure Ar plasma jet in open air (2019) (0)
Measurement of Si atom density in ultra high frequency discharge silane plasma (1997) (0)
Application of Atmospheric-Pressure Microwave Line Plasma for Low Temperature Process (2015) (0)
Exploring plasma-activated organic acid precursors and their super biofunctions (2019) (0)
Crystallographic and Electrical Properties of Semiconducting Graphene Nanoribbon Grown Employing CH 4 /H 2 plasma (2011) (0)
A Novel Silicon-Dioxide Etching Process Employing Pulse-Modulated Electron-Beam-Excited Plasma (2004) (0)
Growth control of purple photosynthetic bacteria using nitric-oxide-radical treatment (2018) (0)
Effect of Radical-Treated Phenylalanine Solution on Lateral Diffusion of Supported Lipid Bilayer (2019) (0)
Novel Method of Rebound Tailing Pulse (RTP) for Water Dissociation (2021) (0)
Measurements of absolute densities of nitrogen and oxygen atoms in sputtering plasma for fabrication of ZnInON films (2015) (0)
[INVITED] Computational analyses of chemical reactions in gas phase and on surface in process plasmas (2017) (0)
Nucleation control for the fabrication of carbon nanoplatform based on vertical nanographene (2015) (0)
Numerical analysis of plasma formation process in a coaxial dielectric barrier discharge (2021) (0)
Effects of duty ratio in electrical stimulation-applied cell culture on carbon nanowall scaffold (2019) (0)
Chemical dry etching of Si using F2 and NO2 gases at elevated temperature (2013) (0)
Effect of mixing alcohol source on synthesis of nanographene by in-liquid plasma (2019) (0)
Control of Deposition Profile and Properties of Plasma CVD Carbon Films (2012) (0)
Inactivation of Melanoma Cells by Nitrogen-Oxide-Radical-Activated Lactate Ringer Solution (2019) (0)
Analysis of Surface Microfabrication for Metal-Containing Glass (2016) (0)
Cytotoxic effects of plasma-irradiated fullerenol (2018) (0)
Attractive Plasma-Induced Surface Science (2010) (0)
Surface Cleaning and Etching Technology Employing Nonequilibrium Atmospheric Pressure Plasma (2008) (0)
Evaluation of Plasma Activated Water using Yeast Fungus (2017) (0)
Fabrication of vertically standing carbon nanowalls by electron beam excited plasma-enhanced CVD (2007) (0)
On the Structure Control of Vertical Nanographene Network (2017) (0)
Current State and Related Issues of Plasma Medical Science (2015) (0)
Low Temperature Synthesis of Silicon Nitride Thin Film by UHFAssisted RF PECVD (2015) (0)
Diamond film formation using RF plasma CVD assisted by water vapor enhanced hydrogen radical source (1995) (0)
Generation of Reactive Species and Antitumor Effects of LPAM (2017) (0)
Development of a Combinatorial Plasma Process Analyzer for Advanced R&D of Next Generation Nanodevice Fabrication (2010) (0)
Anti-Tumor Effects of Plasma-Activated Medium added with Fullerenol (2017) (0)
Fabrication of Carbon Whisker, Pyramid and Steeple Using a Novel Plasma CVD and their Application to Field Electron Emitter (2002) (0)
Crystallographic analyses of carbon nanowalls using synchrotron X-ray (2010) (0)
Precise plasma process control based on combinatorial plasma etching (2012) (0)
Effects of phosphate buffered saline treated with oxygen radicals on inactivation of microorganism (2016) (0)
Leukocyte Depletion and Size-Based Enrichment of Circulating Tumor Cells Using a Pressure-Sensing Microfiltration Device (2022) (0)
Measurement of activated species generated by AC power excited non-equilibrium atmospheric pressure Ar plasma jet with air engulfment (2013) (0)
Effects of solutions treated with oxygen radicals in neutral pH region on inactivation of microorganism (2015) (0)
Rapid precise measurements of film-covered-substrate temperatures during plasma processes (2013) (0)
Mechanism of Aqueous Reactions in Non-equilibrium Atmospheric Pressure Plasma-activated Lactec Solutions (2019) (0)
Development of Combinatorial Plasma Apparatus for Autonomous Nano-Processing Technology (2008) (0)
Formation of Preferentially Oriented Polycrystalline Silicon Thin Films Employing Pulse-Modulated Plasma PE CVD (2002) (0)
Reduction Mechanism of Surface Roughness on ArF-Photoresist Using C$_{5}$HF$_{7}$ Gas Plasma (2013) (0)
Fabrication of Graphene Film on Cu Substrate using Microwave Plasma Enhanced Chemical Vapor Deposition マイクロ波プラズマCVD法を用いた銅基板へのグラフェン膜の作製 (2011) (0)
Electronic properties and dissociation channels of C 2 H x F y compounds(II) (2018) (0)
A Low-Pressure Limit of Diamond Chemical-Vapor Deposition Studied by Plasma Diagnostics (2003) (0)
ESR Measurements of aqueous extract of raw horse meat irradiated with oxygen radicals. (2017) (0)
Anaysis of photoresist surface modified by fluorocarbon ions and radicals (2012) (0)
Laser-induced-plasma-activated medium enables killing of HeLa cells (2020) (0)
Clarification of a SiOF layer formed on SiO2 under fluorocarbon plasma etching (2015) (0)
Plasma Diagnostics and Characteristics of Hydrofluorocarbon Films in Capacitively Coupled CF4/H2 Plasmas (2022) (0)
Impact of synergism of nitrite and hydrogen peroxide on cell survivals in Plasma-Activated-Medium (PAM) (2016) (0)
Dependence of chlorine adsorption layer on ion energy on Ar ion-irradiated GaN surface (2019) (0)
State of the art in medical applications using non-thermal atmospheric pressure plasma (2017) (0)
Synthesis of Carbon Nanowalls and Challenge for New Functional Devices (2007) (0)
Emission characteristics on light source array using micro hollow cathode plasma (2008) (0)
Ultrahigh Speed Etching of SiO 2 and Fabrication of Carbon Nanotubes Using Microwave Excited Non-equilibrium Atmospheric Pressure Plasma (2006) (0)
Measurement of Oxygen Radicals using Ambient Mass Spectrometry (2016) (0)
Microwave-Excited Pure N 2 Line Plasma Production under Atmospheric Pressure Using a Modified Waveguide Structure (2016) (0)
Creation of unique shapes by coordination of alumina nanopores and carbon nanowalls (2022) (0)
Electron spin resonance (ESR) study of radicals on biological organism created by interaction with plasma (2012) (0)
Primary dissociation channels of SiH4 (2015) (0)
Study on modified surface layer of photoresist employing fluorocarbon ion beam and radicals (2010) (0)
Radical density measurements in microwave plasma with carbon-containing gases used for carbon nanotube and nanocrystalline diamond film growth (2011) (0)
Fluorescent observation of Penicillium digitatum on atmospheric pressure plasma treatment (2011) (0)
Elucidation of the antitumor effect of Plasma-Activated Lactec (2018) (0)
Bactericide of E. coli on raw horse meat using NO-radical and H-radical irradiation (2018) (0)
Dynamic Behavior of Mammalian (HeLa) Cells in Plasma-Activated Medium (2016) (0)
Atomic Layer Etching of TiN Using Formation and Desorption of Modified Layer (2016) (0)
Deposition profile control of carbon films on trenched substrate by simultaneous plasma CVD and plasma etching (2011) (0)
Growth mechanism of graphene sheets in initial phase (2009) (0)
Inactivation of Pseudomonas aeruginosa through direct or indirect irradiation using atmospheric-pressure oxygen radical source (2018) (0)
Plant growth promotion using radical-activated L-alanine solution (2020) (0)
Effects of oxygen radical irradiation on purple photosynthetic bacteria (2017) (0)
Metabolomics of glioblastoma cells incubated with plasma-activated lactate (2018) (0)
Plasma-activated medium induced apoptosis on glioblastoma brain tumor cells by inhibiting growth / survival signaling (2013) (0)
Line profile and translational temperature of Pb and metastable He atoms at middle pressures in micro hollow cathode discharge (2012) (0)
Plasma-Activated Solution in Cancer Treatment (2020) (0)
Measurement of spatial distribution of absolute CF/sub x/ radical densities in a plasma reactor using infrared diode laser absorption spectroscopy and laser-induced fluorescence (1999) (0)
Fabrication of graphene-based films using remote plasma CVD (2012) (0)
Oxygen reduction reaction on highly-durable Pt/nanographene fuel cell catalyst synthesized employing in-liquid plasma (2016) (0)
Cell-Responses with Active Species in Medium Irradiated with Laser-generated Plasmas (2016) (0)
Irradiation time dependence in nanographene synthesis using liquid plasma [II] (2020) (0)
Multiplex coherent anti-Stokes Raman analysis of plasma-cells interactions (2017) (0)
Inactivation and morphological change of Aspergillus spores irradiated with oxygen radicals (2017) (0)
Abstract Submitted for the GEC19 Meeting of The American Physical Society Radical activated solutions with bactericidal and plant-growth effects1 (2019) (0)
Multi-electrodes Atmospheric Pressure Plasma Jet Aiming Bio-applications (2015) (0)
Elucidation of HeLa cell response mechanisms of HeLa cell responses incubated in by plasma activated lactec (2018) (0)
Scavenging effect of reactive oxygen and nitrogen species in the plasma-activated-medium (2016) (0)
Morphological Analysis of Lipid Bilayers in Plasma-Activated Lactec (2018) (0)
Nano-Gap Electrode Array Prepared by Photolithography and UV Curing Processing (2016) (0)
Analysis of gallium nitride (GaN) surface interacted with chlorine etching plasma beams (2010) (0)
(Invited) Controlled Synthesis of Functional Carbon Nanomaterials By Gas-Liquid Interface Plasma (2021) (0)
Growth inhibition effect on Trypanosoma brucei gambiense by the oxidative stress supplied from low-temperature plasma at atmospheric pressure (2021) (0)
Effect of ion bombardment on the initial growth in low temperature poly-Si formation (1998) (0)
Effect of medium treated with neutral oxygen radicals on growth of \textit{Saccharomyces cerevisiae} (2015) (0)
[Highlight]Electron spin resonance measurement of hexagonal BN fine particles surface-modified via plasma in solution (2020) (0)
In‐liquid plasma synthesis of iron–nitrogen‐doped carbon nanoflakes with high catalytic activity (2022) (0)
Electronic properties and dissociation channels of BF 3 and BCl 3 compounds (2019) (0)
Plasma-Induced Damage of GaN and Its Recovery by Atomic Hydrogens at a Room Temperature (2011) (0)
Electrical stimulated effects of carbon-nanowall-scaffolds on cell proliferations (2018) (0)
Vibrational analysis of biological samples treated with plasma using multiplex coherent anti-Stokes Raman scattering microspectroscopy (2013) (0)
Generation mechanism of reactive oxygen and nitrogen species in medium due to gas-phase reactive species generated by atmospheric pressure plasma (2017) (0)
Effects of hydroxy group in nanographene synthesis employing in-liquid plasma (2018) (0)
Antitumor effects of medium activated with oxygen and nitrogen radicals (2019) (0)
Vacuum ultraviolet spectroscopic analysis of AC excited non-equilibrium atmospheric pressure Ar plasma jet (2014) (0)
Electromagnetic Simulation of Long-Slotted Waveguide Antenna for Production of Meter-Scale Plasma under Atmospheric Pressure (2013) (0)
Chemically chlorine radical-etch of GaN at elevated temperatures (2017) (0)
Diagnostics of AC excited Atmospheric Pressure Plasma Jet with He for Biomedical Applications (2014) (0)
Investigation of Pulse-Modulation Effect in Electron Beam Excited Plasma with Time Resolved Optical Emission Spectroscopy (2005) (0)
In-liquid plasma formation at low temperature for in-situ binding of SnO 2 /Graphene (2019) (0)
Amylolysis promotion by Aspergillus spores irradiated with oxygen radicals (2018) (0)
Plasma etching resistance of plasma anisotropic CVD carbon films (2012) (0)
Soluble Proteins Form Film by the Treatment of Low Temperature Plasma (2015) (0)
Novel Intraperitoneal Treatment With Non-Thermal Plasma-Activated Medium Inhibits Metastatic Potential of Ovarian Cancer Cells (2017) (0)
Reconsideration Of Fundamental Processes And Molecular Design Principles For High Sensitivity Dry Developable X-Ray Resist (1986) (0)
Measurement of surface loss probabilities of hydrogen radicals in plasma-enhanced Si CVD process for solar cell (2010) (0)
Measurement of Einstein's A Coefficient of Transition Line at 296.7 nm for Carbon Atom (1997) (0)
Area-selective plasma-enhanced atomic layer etching (PE-ALE) of silicon dioxide using a silane coupling agent (2022) (0)
Invited) Control of Internal Plasma Parameters Toward Atomic Level Processing (2016) (0)
21408 Growth Mechanism of Carbon Nanowalls Synthesized by Plasma Enhanced CVD (2008) (0)
Plasma Application for Nitride Crystal Growth (2017) (0)
Change in polarization characteristics of Pt nanoparticles-supported carbon nanowalls electrodes during the potential cycle test (2018) (0)
Time Evolution of Discharge Profiles and Spatial Distribution of Hydrogen Radical Density in the Nonequilibrium Atmospheric Pressure Ar Plasma (2019) (0)
Kinetics of metastable He atom at middle pressure in micro hollow cathode discharge (2011) (0)
Novel Process Of SiO/sub 2//Si Selective Etching Using New Gas System Against Global Warning (1998) (0)
Formation of tunnel junction contact for GaN grown by pico-second laser PLD method (2019) (0)
Generation Mechanism of Etching Damages on Low-k SiOCH Films and Development of Novel Damage Evaluation Technique (2007) (0)
Defect termination mechanism of amorphous carbon films by atomic hydrogen (2018) (0)
Diamond Film Formation Using a Low Pressure Radio Frequency Inductively Coupled Plasma (1997) (0)
Control of liquid transport through micro-sized holes: wettability of hole inside treated by nonequilibrium atmospheric pressure plasma processes (2016) (0)
P2.01-91 Exosomal Analysis of ALK Rearrangements by Spin Column with Porous Glass Filter (2019) (0)
High-performance glass filters for capturing and culturing circulating tumor cells and cancer-associated fibroblasts (2023) (0)
The Roles of Plasma Species on Polycrystalline Silicon Film Formation by ECR SiH_4/H 2 Plasma (1996) (0)
Observation of death/proliferation of breast cancer cells treated with plasma-activated medium (2016) (0)
Surface Material Dependence of Radially Resolved Oxygen Dissociation Degree and Local Mean Electron Energy in Oxygen Plasma (2017) (0)
Active species of hydrofluorocarbon plasma and etch performances of dielectric films - 2 (2017) (0)
[INVITED] Plasma etching technology of ULSI devices in IoT (2018) (0)
Advanced Surface Engineering on Material Processing Employing Ultrahigh Density Atmospheric Pressure Plasma (2013) (0)
The effect of gas residence time on electronic properties of amorphous carbon films grown by radical injection plasma enhanced chemical vapor deposition (2017) (0)
Spatial distribution measurement of absolute CFx radical densities in Electron Cyclotron Resonance C_4F 8 plasma (1998) (0)
High Speed Surface Modification in Fine-Pitch Package Substrate Manufacturing Process with High Density 60 Hz Nonequilibrium Atmospheric Pressure Plasma (2012) (0)
Molecular structure analysis on surface of glucose film using sum frequency generation spectroscopy (2019) (0)
SiO2 etching for optical device using pulse-modulated electron-beam-excited plasma (2005) (0)
Electronic properties and dissociation channels of C 4 F 6 molecule (2016) (0)
Time Evolution Of Reactive Oxygen Nitrogen Species in Plasma-Activated Essential Media and Water (2017) (0)
Graphene forest devices as cell scaffolds for stem cells (2012) (0)
Wide range applications of process plasma diagnostics using vacuum ultraviolet absorption spectroscopy (2022) (0)
Investigation of chemical bonding states at interface of Zn/organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation (2012) (0)
Transport mechanism on reactive species in down-flow reactors for F-based Si etch (2016) (0)
Through-via Formation by Dielectric Breakdown on Glass Coated with Liquid Insulator (2017) (0)
Growth promotion of rice seedling with plasma-activated Ringer’s lactate solution (PAL) (2019) (0)
Interaction of AC excited Atmospheric Pressure Ar Plasma Jet with Medium (2015) (0)
Control of crystalline and electronic structures of carbon nanowalls for their device applications (2010) (0)
Time evolution of radicals in solutions treated with atmospheric-pressure radicals (2018) (0)
Floating-wire-assisted remote generation of high-density atmospheric pressure inductively coupled plasma (2018) (0)
Oxygen Radical Assisted Laser Evaporation of Polysiloxane for Preparation of Insulating Films with Low Dielectric Constant (1996) (0)
Development of a compact arc discharge light source for measurement of radicals (2005) (0)
Control of structures of Carbon Nanowalls in plasma enhanced CVD (2007) (0)
Effect of Hydrogen Radical-Injection on Growth Property and Crystallinity of Microcrystalline Silicon Thin Film (2011) (0)
Elucidation of polarization characteristics of fuel cell catalytic electrodes using Pt-nanoparticles supported carbon nanowalls (2017) (0)
Modeling Considerations and Performance Estimation of Single Carbon Nano Wall based Field Effect Transistor by 3D TCAD Simulation Study (2010) (0)
Synthesis of Fluorinated SiNx Gate Dielectric Films Using ECR-PECVD Employing SiF4/N2/H2 Gases (2001) (0)
Fabrication of fuel cell using nanographene synthesized by in-liquid plasma (2017) (0)
Surface-Enhanced Raman Spectroscopy of a-C:H film after defect termination with hydrogen plasma treatment (2020) (0)
Inactivation effciencies of reactive oxygen specias on inactivation of penicilium degitatum spores by atmospheric-pressure O 2 /Ar plasma (2012) (0)
Effects of ion bombardments on electronic properties of amorphous carbon films grown by plasma-enhanced chemical vapor deposition (2015) (0)
Development of Combinatorial Plasma-Process Analyzer for Advanced R & D of Plasma Nano Processes (2009) (0)
In-situ etching reaction analysis of silicon nitride in ALE by fluorine radicals (2019) (0)
Synthesis of microcrystalline silicon thin films using a low-pressure microwave plasma (2001) (0)
Measurement of Ground State Oxygen Radical [O($^{3}$P)] in Surface Cleaning Process Employing Nonequilibrium Atmospheric-Pressure Pulsed Remote Plasma (2007) (0)
Plasma generated reactive oxygen species oxidized mold spores (2017) (0)
Biocompatibility of conformal silicon carbide on carbon nanowall scaffolds (2022) (0)
Inactivation of microorganism in liquid phase treated with neutral oxygen radical source (2013) (0)
Inactivation of melanoma cells treated with nitrogen oxide radical activated medium (2018) (0)
Effects of High-Quality Carbon Nanowalls Ionization-Assisting Substrates on Surface-Assisted Laser Desorption/Ionization Mass Spectrometry Performance (2022) (0)
Diagnostics of O Atoms in Inductively Coupled O 2 Plasma Employing Vacuum Ultraviolet Absorption Spectroscopy (2002) (0)
Modification of Si-O-Si Structure in Porous SiOCH Low-$k$ Films with Ions, Radicals, and VUV Radiation in O$_{2}$ Plasma (2010) (0)
21409 Morphology Control of Carbon Nanowalls Fabricated by Plasma Enhanced CVD (2008) (0)

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What Schools Are Affiliated With Masaru Hori?

Masaru Hori is affiliated with the following schools: