Mehran Mehregany
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Researcher ORCID ID = 0000-0003-0155-4235
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Mehran Mehreganyengineering Degrees
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Electrical Engineering
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#287
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Applied Physics
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Engineering
Mehran Mehregany's Degrees
- PhD Electrical Engineering University of California, Berkeley
- Masters Electrical Engineering University of California, Berkeley
- Bachelors Electrical Engineering University of California, Berkeley
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(Suggest an Edit or Addition)Mehran Mehregany's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Nanoelectromechanical systems: Nanodevice motion at microwave frequencies (2003) (486)
- Silicon carbide MEMS for harsh environments (1998) (443)
- SiC MEMS: Opportunities and challenges for applications in harsh environments (1999) (304)
- Contact physics of gold microcontacts for MEMS switches (1998) (292)
- Analysis of tip deflection and force of a bimetallic cantilever microactuator (1993) (274)
- Monocrystalline silicon carbide nanoelectromechanical systems (2001) (266)
- Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films (1987) (254)
- Epitaxial growth of 3C–SiC films on 4 in. diam (100) silicon wafers by atmospheric pressure chemical vapor deposition (1995) (214)
- Integrated fabrication of polysilicon mechanisms (1988) (213)
- Microfabricated electrohydrodynamic pumps (1990) (199)
- Low voltage nanoelectromechanical switches based on silicon carbide nanowires. (2010) (164)
- Microelectromechanical systems (1993) (158)
- A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications (2007) (156)
- Thin-film processing of TiNi shape memory alloy (1990) (154)
- Electromechanical Computing at 500°C with Silicon Carbide (2010) (151)
- In situ friction and wear measurements in integrated polysilicon mechanisms (1990) (148)
- Personal Navigation via High-Resolution Gait-Corrected Inertial Measurement Units (2010) (148)
- Silicon carbide for microelectromechanical systems (2000) (127)
- Extreme temperature 6H‐SiC JFET integrated circuit technology (2009) (123)
- Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications (2006) (121)
- Mechanical properties of 3C silicon carbide (1992) (118)
- VHF, UHF and microwave frequency nanomechanical resonators (2005) (116)
- A study of three microfabricated variable-capacitance motors (1990) (108)
- Surface-micromachined RF MEMs switches on GaAs substrates (1999) (106)
- Novel microstructures for the in situ measurement of mechanical properties of thin films (1987) (102)
- Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon (1995) (100)
- Electrothermal tuning of Al–SiC nanomechanical resonators (2006) (98)
- Performance impact of monolayer coating of polysilicon micromotors (1995) (97)
- Examination of Bulge Test for Determining Residual Stress, Young's Modulus, and Poisson's Ratio of 3C-SiC Thin Films (2003) (94)
- Electric micromotor dynamics (1992) (94)
- GaAs-compatible surface-micromachined RF MEMS switches (1999) (94)
- A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement (2008) (92)
- Surface micromachined mechanisms and micromotors (1991) (91)
- High-aspect-ratio photolithography for MEMS applications (1995) (91)
- Electromechanical Computing at 500 °C with Silicon Carbide. (2010) (88)
- Principles in design and microfabrication of variable-capacitance side-drive motors (1990) (82)
- Friction and wear in microfabricated harmonic side-drive motors (1990) (78)
- Theoretical modeling of microfabricated beams with elastically restrained supports (1993) (76)
- Quantitative evaluation of biaxial strain in epitaxial 3C-SiC layers on Si(100) substrates by Raman spectroscopy (2002) (75)
- Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines (1999) (73)
- Micromotor fabrication (1992) (66)
- SiC cantilever resonators with electrothermal actuation (2006) (65)
- Deposition of Polycrystalline 3C-SiC Films on 100 mm Diameter Si(100) Wafers in a Large-Volume LPCVD Furnace (2002) (65)
- Fabrication and characterization of polycrystalline SiC resonators (2002) (61)
- Internal stress and elastic modulus measurements on micromachined 3C-SiC thin films (1997) (61)
- Anisotropic etching of silicon in hydrazine (1988) (60)
- Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutions (1990) (58)
- Diffraction grating scanners using polysilicon micromotors (1995) (57)
- Microfabricated Shear Stress Sensors, Part 1: Design and Fabrication (1999) (56)
- Use of deposition pressure to control residual stress in polycrystalline SiC films (2004) (54)
- Measurement of wear in polysilicon micromotors (1992) (54)
- Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications (2005) (52)
- Mechanical properties of epitaxial 3C silicon carbide thin films (2005) (52)
- Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization (2001) (51)
- Fabrication of SiC microelectromechanical systems using one-step dry etching (2003) (47)
- A position-sensitive detector for neutron powder diffraction (1984) (47)
- Fully-monolithic, 600°C differential amplifiers in 6H-SiC JFET IC technology (2009) (47)
- Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition (2005) (46)
- A study of residual stress distribution through the thickness of p/sup +/ silicon films (thermal oxidation effects) (1993) (44)
- Fabrication and testing of surface micromachined polycrystalline SiC micromotors (2000) (44)
- Electroless plating of nickel on silicon for fabrication of high-aspect-ratio microstructures (1996) (44)
- A rotary electrostatic micromotor 1/spl times/8 optical switch (1998) (44)
- Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO/sub 2/ and polysilicon (1999) (44)
- Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon (1998) (43)
- Characterization of frequency tuning using focused ion beam platinum deposition (2007) (42)
- The mechanical properties of polycrystalline 3C-SiC films grown on polysilicon substrates by atmospheric pressure chemical-vapor deposition (2006) (41)
- Microfabricated Shear Stress Sensors, Part 2: Testing and Calibration (1999) (40)
- Fabrication and Testing of Single Crystalline 3C-SiC Piezoresistive Pressure Sensors (2001) (38)
- Mechanical properties of a 3C-SiC film between room temperature and 600 °C (2007) (38)
- A comparative study of bearing designs and operational environments for harmonic side-drive micromotors (1992) (38)
- Smart ice detection systems based on resonant piezoelectric transducers (1998) (36)
- Conventional and pendeo-epitaxial growth of GaN(0 0 0 1) thin films on Si(1 1 1) substrates (2001) (36)
- High temperature ohmic contacts to 3C–silicon carbide films (1998) (35)
- Fracture toughness of polycrystalline silicon carbide thin films (2005) (34)
- Electric and fluid field analysis of side-drive micromotors (1992) (34)
- Chemical‐Mechanical Polishing for Polysilicon Surface Micromachining (1997) (33)
- Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments (2009) (33)
- Fabrication of electrostatic nickel microrelays by nickel surface micromachining (1995) (33)
- 550 $^{\circ}\hbox{C}$ Integrated Logic Circuits using 6H-SiC JFETs (2012) (32)
- Personal navigation via shoe mounted inertial measurement units (2010) (32)
- Hybrid-integrated laser-diode micro-external mirror fabricated by [110] silicon micromachining (1995) (31)
- Operation of harmonic side-drive micromotors studied through gear ratio measurements (1991) (30)
- Etching of 3C-SiC using CHF3/O2 and CHF3/O2/He plasmas at 1.75 Torr (1998) (28)
- MEMS/NEMS Devices and Applications (2007) (28)
- Modeling of the electromechanical performance of piezoelectric laminated microactuators (1993) (26)
- A ROTARY ELECTROSTATIC MICROMOTOR OPTICAL SWITCH (1998) (26)
- Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD (1997) (26)
- A Silicon Carbide Capacitive Pressure Sensor for High Temperature and Harsh Environment Applications (2007) (26)
- Polycrystalline silicon-carbide surface-micromachined vertical resonators-part II: electrical testing and material property extraction (2005) (26)
- Micromachined silicon fuel atomizers for gas turbine engines (1996) (25)
- Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers (1998) (25)
- Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers (1998) (25)
- Fracture toughness of low-pressure chemical-vapor-deposited polycrystalline silicon carbide thin films (2006) (25)
- Low-stress, heavily-doped polycrystalline silicon carbide for MEMS applications (2005) (25)
- Polycrystalline silicon carbide for surface micromachining (1996) (24)
- Silicon carbide (SiC) nanoelectromechanical switches and logic gates with long cycles and robust performance in ambient air and at high temperature (2013) (24)
- A microfabricated three-degree-of-freedom parallel mechanism (1990) (24)
- Development of Nickel Wire Bonding for High-Temperature Packaging of SiC Devices (2009) (24)
- Dry release fabrication and testing of SiC electrostatic cantilever actuators (2005) (24)
- Review of pendeo-epitaxial growth and characterization of thin films of GaN and AlGaN alloys on 6H-SiC(0001) and Si(111) substrates (2001) (24)
- A simple fabrication process for polysilicon side-drive micromotors (1994) (23)
- Electrical properties of nickel oxide thin films for flow sensor application (2006) (23)
- Embedded two-phase cooling of high heat flux electronics on silicon carbide (SiC) using thin-film evaporation and an enhanced delivery system (FEEDS) manifold-microchannel cooler (2017) (23)
- Silicon carbide for MEMS and NEMS - an overview (2002) (23)
- A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD (2007) (22)
- Fabrication of low defect density 3C-SiC on SiO2 structures using wafer bonding techniques (1998) (22)
- 6H-SiC JFETs for 450 $^{\circ}\hbox{C}$ Differential Sensing Applications (2009) (22)
- Outer-rotor polysilicon wobble micromotors (1994) (22)
- Robust silicon carbide (SiC) nanoelectromechanical switches with long cycles in ambient and high temperature conditions (2013) (22)
- Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning Forks (2012) (22)
- Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD (1999) (21)
- Origin of the split Si–H stretch mode on hydrogen terminated 6H-SiC(0001): Titration of crystal truncation (2002) (21)
- A mobile wearable wireless fetal heart monitoring system (2011) (21)
- Pendeo-epitaxial growth of gallium nitride on silicon substrates (2000) (21)
- Microfabricated silicon electric mechanisms (1990) (20)
- Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication (2005) (19)
- Calibration Of Microfabricated Shear Stress Sensors (1995) (19)
- Characterization of microfabricated shear stress sensors (1995) (18)
- Fabrication and testing of single crystalline 3C-SiC devices using a novel SiC-on-insulator substrate (2003) (18)
- Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining (2002) (18)
- Micromotor dynamics in lubricating fluids (1994) (18)
- 3C-SiC as a future photovoltaic material (2003) (17)
- SiC JFET integrated circuits for sensing and control at temperatures up to 600°C (2012) (17)
- Roughness Reduction of 3C‐SiC Surfaces Using SiC‐Based Mechanical Polishing Slurries (1999) (17)
- Free-free beam silicon carbide nanomechanical resonators (2003) (17)
- Poly-SiC capacitive pressure sensors made by wafer bonding (2005) (17)
- Dissipation in Single-Crystal 3C-SiC Ultra-High Frequency Nanomechanical Resonators (2006) (16)
- Media compatible stainless steel capacitive pressure sensors (2013) (16)
- Miniature ice detection sensor systems for aerospace applications (1998) (16)
- Low stress polycrystalline SiC thin films suitable for MEMS applications (2011) (16)
- Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices (1998) (16)
- An experimental technique and a model for studying the operation of harmonic side-drive micrometers (1993) (16)
- Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches (2013) (15)
- Microelectromechanical Systems for Aerodynamics Applications. (1996) (15)
- Micro jet array heat sink for power electronics (1999) (15)
- Overview of microelectromechanical systems (1993) (15)
- Exploring Silicon Carbide For Thermal Infrared Radiators (2007) (14)
- Amorphous silicon carbide films by plasma-enhanced chemical vapor deposition (1993) (14)
- Application of electric microactuators to silicon meromechanics (1990) (14)
- Materials for Microelectromechanical Systems (2001) (13)
- Surface Roughness Control of 3C-SiC Films during the Epitaxial Growth Process (2004) (13)
- Chemical Mechanical Polishing of Cubic Silicon Carbide Films Grown on Si(100) Wafers (2002) (12)
- Stainless steel capacitive pressure sensor for high pressure and corrosive media applications (2010) (12)
- A Silicon Carbide Accelerometer for Extreme Environment Applications (2008) (12)
- Design, fabrication, and characterization of electrostatic microrelays (1995) (12)
- Modelling of HREM and nanodiffraction for dislocation kinks and core reconstruction (2000) (12)
- Fabrication and testing of surface micromachined silicon carbide micromotors (1999) (12)
- A high-voltage, high-current CMOS pulse generator ASIC for deep brain stimulation (2010) (12)
- Determination of Young’s modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process (1996) (11)
- Characterization of Silicon Carbide Differential Amplifiers at High Temperature (2007) (11)
- International Conference on Micro- and Nano- Engineering (2004) (11)
- High-aspect-ratio rotary polygon micromotor scanners (1999) (11)
- Quality factor issues in silicon carbide nanomechanical resonators (2003) (11)
- Thick glass film technology for polysilicon surface micromachining (1999) (11)
- Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures (1997) (11)
- Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates (2004) (11)
- Characterization of Polycrystalline SiC Grown on SiO2 and Si3N4 by APCVD for MEMS Applications (2000) (11)
- Silicon carbide micro- and nanoelectromechanical systems (2004) (11)
- MEMS for smart structures (1995) (10)
- 3-D microfabricated electrodes for targeted deep brain stimulation (2009) (10)
- Surface Micromachining: A Brief Introduction (2001) (10)
- Application of micromachined structures to the study of mechanical properties and adhesion of thin films (1986) (10)
- Microfabricated ice-detection sensor (1997) (10)
- Silicon carbide (SiC) top-down nanowire electromechanical resonators (2009) (9)
- A headband for classifying human postures (2010) (9)
- Time-domain AC characterization of silicon carbide (SiC) nanoelectromechanical switches toward high-speed operations (2013) (9)
- Latched valve manifolds for efficient control of pneumatically actuated valve arrays (1997) (9)
- Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction (2005) (9)
- Design, Operation, and Modeling of a Vertical APCVD Reactor for Silicon Carbide Film Growth (1998) (9)
- Silicon carbide pressure sensor for high temperature and high pressure applications: Influence of substrate material on performance (2011) (8)
- Energy Dissipation in Folded-Beam MEMS Resonators Made from Single Crystal and Polycrystalline 3C-SiC Films (2007) (8)
- High-temperature (>500°C) reconfigurable computing using silicon carbide NEMS switches (2011) (8)
- Micromotor grating optical switch. (1995) (8)
- A capacitive ice detection microsensor (2000) (8)
- A Fully Monolithic 6H-SiC JFET-Based Transimpedance Amplifier for High-Temperature Capacitive Sensing (2013) (7)
- Nickel surface micromachining (1995) (7)
- Measurement of Residual Stress-Induced Bending Moment of P+ Silicon Films (1991) (7)
- Nanomechanical non-volatile memory for computing at extreme (2013) (7)
- Characterization of Thermoelectric Properties of Heavily Doped n-Type Polycrystalline Silicon Carbide Thin Films (2013) (7)
- Integrated micro-opto-mechanical systems (1995) (7)
- Extreme temperature 6 H-SiC JFET integrated circuit technology (2009) (7)
- Micro flow sensor using polycrystalline silicon carbide (2009) (7)
- Process Routes for Low Defect-Density GaN on Various Substrates Employing Pendeo-Epitaxial Growth Techniques (1998) (7)
- New developments in MEMS using SiC and TiNi shape memory alloy materials (1997) (7)
- Silicon carbide as a new micromechanics material (1992) (7)
- Ohmic contacts on n-type polycrystalline silicon carbide with Ti/TaSi2/Pt (2009) (7)
- Deposition and Characterization of In-Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications (1999) (7)
- Polycrystalline silicon carbide NEMS for high-temperature logic (2009) (7)
- Contact Physics of Gold Microcontacts for ME (1998) (7)
- Stacking rearrangement at 6H-SiC(0 0 0 1) surfaces during thermal hydrogenation (2003) (6)
- Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique (2004) (6)
- Micro torque measurement using outer-rotor polysilicon micromotors (2002) (6)
- Fabrication of polygon mirror microscanner by surface micromachining (1994) (6)
- Opportunities and Obstacles in the Adoption of mHealth (2020) (6)
- Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence (1997) (6)
- In Situ Measurement of Young’s Modulus and Residual Stress of Thin Electroless Nickel Films for Mems Applications (1994) (6)
- Nitrogen-Doping of Polycrystalline 3C-SiC Films Deposited by Low Pressure Chemical Vapor Deposition (2006) (6)
- Thick PECVD silicon dioxide films for MEMS devices (2016) (6)
- Silicon Carbide Differential Amplifiers for High-Temperature Sensing (2008) (6)
- Material Aspects of Micro- and Nanoelectromechanical Systems (2010) (6)
- A Novel Micromechanical Temperature Memory Sensor (1995) (6)
- Fabrication of SiC JFET-Based Monolithic Integrated Circuits (2010) (6)
- Thermal oxidation of silicon carbide: A comparison of n-type and p-type doped epitaxial layers (2011) (5)
- Experimental Performance of a Micromachined Heat Flux Sensor (1997) (5)
- EVOLUTION OF THE HILTON HEAD WORKSHOP RESEARCH COMMUNITY (2006) (5)
- Effect of thermal oxidation on residual stress distribution through the thickness of p/sup +/ silicon films (1992) (5)
- On the stability of 𝛃-SiC with respect to chemical disorder induced by irradiation with energetic particles (2001) (5)
- Micromachining of SiC (2004) (5)
- High-temperature testing of nickel wire bonds for SiC devices (1999) (5)
- Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices (2004) (5)
- Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications (2006) (5)
- Mechanical characterization of SiC film at high temperatures by tensile test (2008) (5)
- High-energy femtosecond pulsed laser micromachining of thin film deposited silicon in self-focused air medium (2002) (5)
- THE DEVELOPMENT OF POLYSILICON MICROMOTORS FOR OPTICAL SCANNING APPLICATIONS (1999) (5)
- Doped polycrystalline 3C–SiC films with low stress for MEMS: part I. Deposition conditions and film properties (2014) (4)
- XRD and XTEM investigation of polycrystalline silicon carbide on polycrystalline silicon (1997) (4)
- Advanced Processing Techniques for Silicon Carbide MEMS and NEMS (2004) (4)
- MEMS resonator tuning using focused ion beam platinum deposition (2004) (4)
- Methodology for integrated MEMS designs (1996) (4)
- 3C-SiC coating of silicon micromachined atomizers (1997) (4)
- Silicon Carbide Micro/Nano Systems for Demanding and Harsh Environment Applications (2008) (4)
- Modeling of harmonic side-drive micromotor operation (1991) (4)
- Very thin poly-SiC films for micro/nano devices. (2008) (4)
- Stainless steel capacitive pressure sensor for hostile environments: Sample-to-sample variability and reliability characterization (2011) (4)
- Silicon carbide NEMS logic for high-temperature applications (2010) (4)
- Cross-sectional TEM studies of heavily boron-doped silicon (1991) (4)
- Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range (1999) (4)
- An Examination of Material-Related Performance in SiC Heated Elements for IR Emitter and Sensor Applications (2008) (3)
- Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions (1997) (3)
- The mechanical properties of polycrystalline silicon carbide films determined using bulk micromachined diaphragms (2001) (3)
- 1 1 Introduction to MEMS (2012) (3)
- A Comparison of SiO2 and Si3N4 Masks for Selective Epitaxial Growth of 3C-SiC Films on Si (2001) (3)
- Deposition and properties of polycrystalline β-SiC films using LPCVD with different dopant amount (2006) (3)
- Fabrication and testing of vertically-actuated polycrystalline SiC micromechanical resonators for MHz frequency applications (2003) (3)
- Advances in silicon carbide micro- and nano-electro-mechanical systems fabrication technology and applications (2013) (3)
- Doped polycrystalline 3C-SiC films with low stress for MEMS: part II. Characterization using micromachined structures (2014) (3)
- Observation of stacking faults formed during homoepitaxial growth of p-type 4H-SiC (2009) (3)
- Microelectromechanical systems (1995) (3)
- MEMS-Based Research in Integrated Monitoring and Actuation at Case Western Reserve University (1996) (3)
- A Piezoelectrically-Actuated Valve for Modulation of Liquid at High Flow Rate Under High Pressure (2007) (3)
- Deposition techniques for SiC MEMS (2006) (3)
- 6H-SiC Lateral JFETs for Analog Integrated Circuits (2008) (3)
- Development of a High-Throughput LPCVD Process for Depositing Low Stress Poly-SiC (2004) (3)
- Erratum: “Origin of the split Si–H stretch mode on hydrogen terminated 6H-SiC(0001): Titration of crystal truncation” [Appl. Phys. Lett. 80, 4726 (2002)] (2002) (3)
- Characterization of Poly-SiC Pressure Sensors for High Temperature and High Pressure Applications (2012) (2)
- MICRO MECHANICAL COMPONENTS. (1987) (2)
- The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process (2001) (2)
- Thickness-Dependant Electrical Characteristics of Nitrogen-Doped Polycrystalline 3C-SiC Thin Films Deposited by LPCVD (2009) (2)
- Roadmap for a Departmental Web Site (2005) (2)
- Innovation for engineers: Developing creative and entrepreneurial success (2018) (2)
- HIGH TEMPERATURE OHMIC CONTACTS TO 3C (1998) (2)
- Nitrogen Doped Polcrystalline 3C-Sic Films Deposited by LPCVD for MEMS Applications (2007) (2)
- SiC Resonant Devices for High Q and High Temperature Applications (2000) (2)
- Stress and strain gradient control of polycrystalline SiC films (2009) (2)
- Toward ultralow-power computing at exteme with silicon carbide (SiC) nanoelectromechanical logic (2014) (2)
- A Study of Residual Stress Distribution Through the (1993) (2)
- Analysis of practical scaling limits in nanoelectromechanical switches (2014) (2)
- Characteristics of Polycrystalline β-SiC Films Deposited by LPCVD with Different Doping Concentration (2005) (2)
- Mechanical properties and morphology of polycrystalline 3C-SiC films deposited on Si and SiO2 by LPCVD (2003) (2)
- Thermoelectric characteristics of n-type polycrystalline silicon carbide and comparison with conventional thermopiles (2009) (2)
- Analysis of motive torque, axial force, and viscous drag torque in side-drive micromotors (1992) (2)
- Effect of rotor slip on the gear ratio of harmonic side-drive micromotors (1993) (2)
- Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications (2002) (2)
- Surface Roughness of LPCVD Polysilicon and Its Influence on Overlying Electroless Plated Nickel (1997) (2)
- Micromachining techniques for advanced SiC MEMS (2000) (1)
- NANOMANUFACTURING OF SiC CIRCUITS — NANOMECHANICAL LOGIC AND NEMS-JFET INTEGRATION (2011) (1)
- A Multidisciplinary Research Proposal for MEMS-Based Smart Gas Turbine Engines (2000) (1)
- High temperature characterization of Ni, W and Al contacts to 3C-silicon carbide thin films (1997) (1)
- Fully-Integrated 6H-SiC JFET Amplifiers for High-Temperature Sensing (2010) (1)
- Seebeck Coefficient of Heavily Doped Polycrystalline 3C-SiC Deposited by LPCVD (2012) (1)
- Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process (1996) (1)
- Finite-Element Modeling of 3C-SiC Membranes (2000) (1)
- A MICROFABRICATED DEEP BRAIN STIMULATION ELECTRODE (2009) (1)
- Real-time, model based algorithm implementation for human posture classification (2011) (1)
- Fabrication of hall device structures in 3C-SiC using microelectromechanical processing technology (2006) (1)
- Ohio MEMSNet: an innovative approach to providing MEMS infrastructure (1999) (1)
- Fabrication of 3C-SiC on SiO2 Structures Using Wafer Bonding Techniques (1997) (1)
- Fabrication issues in micromachined tunable optical filters (1995) (1)
- Use of Vacuum as a Gate Dielectric: The SiC VacFET (2011) (1)
- Low temperature (300°C) formation of thermodynamically stable NiSi2 contacts to SiC (2000) (1)
- Raman Spectroscopy on Biaxially Strained Epitaxial Layers of 3C-SiC on Si (2000) (1)
- Microelectromechanical systems: a new technology for biomedical applications (1993) (1)
- Finite-Element Modeling of Residual Stress in SiC Diaphragms (1998) (1)
- Characterization of Low Stress, Undoped LPCVD Polycrystalline SiC Films for MEMS Applications (2006) (1)
- ELECTRICAL AND OPTICAL TRANSDUCTION OF SINGLE-CRYSTAL 3C-SIC COMB-DRIVE RESONATORS IN A SIC-ON-INSULATOR (SiCOI) TECHNOLOGY (2016) (1)
- Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors (1998) (1)
- Pendeo-epitaxial Growth and Characterization of Thin Films of Gallium Nitride and Related Materials on SiC(0001) and Si(111) Substrates (2001) (1)
- Silicon-Based Micromechanical Structures And Devices (1989) (1)
- Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining (2000) (1)
- Integrated wearable device for detection of fetal heart rate and material uterine contractions with wireless communication capability (2011) (1)
- All-silicon waveguides and bulk-etched alignment structures on (110) silicon for integrated micro-opto-mechanical systems (1996) (1)
- ELECTRICAL CHARACTERIZATION OF PECVD SILICON CARBIDE FOR APPLICATION IN MEMS VAPOR HF SACRIFICIAL RELEASE (2010) (1)
- Fabrication and Testing of Micromachined Silicon-Carbide and Nickel Fuel Atomizers for Gas Turbine Engines (1998) (0)
- Mechanical properties of a 3C-SiC layer between RT and 600 ºC (2007) (0)
- MEMS applications in optical systems (1996) (0)
- Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons (2006) (0)
- Feature Article Extreme temperature 6H-SiC JFET integrated circuit technology (2009) (0)
- Innovation and Entrepreneurship (2018) (0)
- 691 A Micromachined Kelvin Probe With Integrated Actuator for Microfluidic and Solid-State Applications (2005) (0)
- Celebrating the legacy of Wen H. Ko (1923–2017) (2018) (0)
- Mechanical properties of poly crystalline 3C-SiC heteroepitaxial layers (2007) (0)
- From sensors to wearables to wireless health (2015) (0)
- Identifying, Qualifying, and Financing Opportunities (2018) (0)
- Pendeo-epitaxial growth and characterization of GaN and related materials on 6H-SiC(0001) and Si(111) substrates (2000) (0)
- Detection and measurement of ice thickness using microprocessor-controlled resonant transducers (1998) (0)
- Modeling of electric and fluid fields in silicon microactuators (1993) (0)
- MODULAR MEDICATION CASE FOR IMPROVED REGIMEN COMPLIANCE (2018) (0)
- Mechanical Properties of Polycrystalline 3 CSiC Heteroepitaxial Layers (2007) (0)
- Message from the general chairs and the steering committee of 2012 Wireless Health (2012) (0)
- Toward Ultralow-Power Computing at Exteme with (2014) (0)
- Integrated process for smart microstructures (1996) (0)
- Fabrication of Micro- and Nanoscale SiC Structures Using Selective Deposition Processes (2003) (0)
- A Reduction of Defects in the SiO2-SiC System Using the SiC Vacuum Field-Effect Transistor (VacFET) (2012) (0)
- A Novel Method of Fabricating SiC-On-Insulator Substrates for Use in MEMS (2001) (0)
- Laboratory for Development, Calibration and Utilization of MEMS Devices. (1997) (0)
- MEMS Applications in Aerodynamic Measurement Technology (1998) (0)
- Ion beam analysis at the new CWRU-Ohio MatNet 1.7 MV tandem pelletron facility (1997) (0)
- Applications to Gas Turbines Health Monitoring (2004) (0)
- II Design and Fabrication 15 Materials for Microelectromechanical Systems (2002) (0)
- Electric micromotors on silicon (1992) (0)
- 6. Extreme Temperature 6H-SiC JFET Integrated Circuit Technology (2011) (0)
- A unique reliability data point: the start-stop operation of a polysilicon micromotor at the eight year mark (2005) (0)
- Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD (2006) (0)
- Micromachining techniques for silicon carbide MEMS (1999) (0)
- Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching (2000) (0)
- HIGH RESOLUTION SILICON CARBIDE RESONANT STRAIN GAUGE AT 600 0 C (2008) (0)
- Pendeo-epitaxial growth of GaN on SiC and silicon substrates via metalorganic chemical vapor deposition (1999) (0)
- Substrate Engineering { Paving the Way to Epitaxy Chairs (1999) (0)
- - Defense Technical Information Center Compilation Part Notice This paper is a part of the following report : " * (0)
- Lateral and pendeo-epitaxial overgrowth and defect reduction of GaN films (1999) (0)
- Development and Calibration of Wall-Shear-Stress Microsensor Systems (2001) (0)
- Wireless health to drive a trillion sensors (2016) (0)
- Message from the General Chairs and the Steering Committee of Wireless Health 2010 (2010) (0)
- The Innovative Mind (2018) (0)
- ADVISORY EMIRETUS EDITORS EDITOR-IN-CHIEF (2008) (0)
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What Schools Are Affiliated With Mehran Mehregany?
Mehran Mehregany is affiliated with the following schools:
