R. Oger T. Howe

Q: What Schools Are Affiliated With R. Oger T. Howe

R. Oger T. Howe is affiliated with the following schools: University of California, Berkeley, Stanford University

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R. Oger T. Howe

Engineering

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#4841

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Mechanical Engineering

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#296

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R. Oger T. Howe's Published Works

Number of citations in a given year to any of this author's works

Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author

Published Works

Critical Review: Adhesion in surface micromechanical structures (1997) (791)
Laterally driven polysilicon resonant microstructures (1989) (678)
Surface micromachining for microelectromechanical systems (1998) (649)
Laterally driven polysilicon resonant microstructures (1989) (517)
Electrostatic-comb drive of lateral polysilicon resonators (1990) (505)
Three-dimensional integration of nanotechnologies for computing and data storage on a single chip (2017) (448)
Microstructure to substrate self-assembly using capillary forces (2001) (423)
An integrated CMOS micromechanical resonator high-Q oscillator (1999) (411)
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines (1998) (410)
Photon-enhanced thermionic emission for solar concentrator systems. (2010) (377)
Surface micromachined accelerometers (1995) (314)
A vacuum packaged surface micromachined resonant accelerometer (2002) (312)
Microelectromechanical filters for signal processing (1992) (307)
Electrostatic Comb Drive Levitation And Control Method (1992) (298)
Surface micromachining for microsensors and microactuators (1988) (261)
Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films (1987) (254)
An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications (1995) (235)
Technologies for Cofabricating MEMS and Electronics (2008) (232)
Resonant-microbridge vapor sensor (1986) (225)
Design and calibration of a microfabricated floating-element shear-stress sensor (1988) (207)
Viscous damping model for laterally oscillating microstructures (1994) (204)
Polycrystalline Silicon Micromechanical Beams (1983) (197)
Parallel microassembly with electrostatic force fields (1998) (185)
A micromachining-based technology for enhancing germanium light emission via tensile strain (2012) (182)
Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry (1992) (178)
Polycrystalline silicon-germanium films for integrated microsystems (2003) (165)
The effect of release-etch processing on surface microstructure stiction (1992) (163)
A planar air levitated electrostatic actuator system (1990) (161)
Surface-micromachined resonant accelerometer (1997) (161)
Electrostatic charge and field sensors based on micromechanical resonators (2003) (150)
Design Considerations for Complementary Nanoelectromechanical Logic Gates (2007) (150)
Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS (2001) (149)
Microtransport induced by ultrasonic Lamb waves (1991) (148)
Thermal budget limits of quarter-micrometer foundry CMOS for post-processing MEMS devices (2005) (148)
Photon-enhanced thermionic emission from heterostructures with low interface recombination (2013) (143)
Dynamics and control of micromachined gyroscopes (1999) (143)
Design considerations for micromachined electric actuators (1988) (135)
Silicon micromechanics: sensors and actuators on a chip (1990) (132)
Polysilicon Integrated Microsystems: Technologies And Applications (1995) (131)
A review of the chemical reaction mechanism and kinetics for hydrofluoric acid etching of silicon dioxide for surface micromachining applications (1993) (130)
Optical MEMS: From Micromirrors to Complex Systems (2014) (129)
Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method (2005) (129)
A new nano-electro-mechanical field effect transistor (NEMFET) design for low-power electronics (2005) (128)
Batch transfer of microstructures using flip-chip solder bonding (1999) (127)
Microassembly technologies for MEMS (1998) (124)
A micro strain gauge with mechanical amplifier (1997) (123)
A low-temperature CVD process for silicon carbide MEMS (2002) (121)
Fluidic self-assembly of micromirrors onto microactuators using capillary forces (2002) (117)
CMOS integration of inkjet-printed graphene for humidity sensing (2015) (114)
An integrated microelectromechanical resonant output gyroscope (2002) (112)
Polysilicon microstructures to characterize static friction (1990) (109)
Stress in polycrystalline and amorphous silicon thin films (1983) (109)
Microbioreactor arrays with parametric control for high‐throughput experimentation (2004) (109)
Optimal emitter-collector gap for thermionic energy converters (2012) (108)
Ultrasonically induced microtransport (1991) (107)
Fully-differential poly-SiC Lame mode resonator and checkerboard filter (2005) (104)
Novel microstructures for the in situ measurement of mechanical properties of thin films (1987) (102)
Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments (1997) (101)
CMOS micromechanical resonator oscillator (1993) (101)
Hexsil tweezers for teleoperated micro-assembly (1997) (97)
Modeling of capillary forces and binding sites for fluidic self-assembly (2001) (96)
Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces (1997) (91)
Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions (2004) (90)
Process technology for the modular integration of CMOS and polysilicon microstructures (1994) (85)
Slide film damping in laterally driven microstructures (1994) (85)
Analytical Modeling of the Suspended-Gate FET and Design Insights for Low-Power Logic (2008) (82)
Efficient FPGAs using nanoelectromechanical relays (2010) (81)
Vacuum encapsulation of resonant devices using permeable polysilicon (1999) (79)
High-performance inductors using capillary based fluidic self-assembly (2004) (78)
Post-CMOS integration of germanium microstructures (1999) (77)
Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties (1983) (76)
Nanoelectromechanical (NEM) relays integrated with CMOS SRAM for improved stability and low leakage (2009) (76)
Control of DNA capture by nanofluidic transistors. (2012) (71)
Electrical and thermal conduction in atomic layer deposition nanobridges down to 7 nm thickness. (2012) (71)
Selective growth of Si nanowire arrays via galvanic displacement processes in water-in-oil microemulsions. (2005) (70)
Stiction reduction processes for surfacemicromachines (1997) (70)
Engineering Ultra-Low Work Function of Graphene. (2015) (69)
Quality factor control for micromechanical resonators (1992) (68)
Thermal assembly of polysilicon microstructures (1991) (67)
Surface-micromachining processes for electrostatic microactuator fabrication (1988) (67)
Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology (2004) (66)
A digital readout technique for capacitive sensor applications (1988) (65)
Integration of organic field-effect transistors and rubbery pressure sensors for artificial skin applications (2003) (63)
Suspended mechanical structures based on elastic silicon nanowire arrays. (2007) (63)
Ammonium Fluoride Anti-stiction Treatments For Polysilicon Microstructures (1995) (63)
Micromechanical structures for thin film characterization (1991) (61)
Highly Sensitive Monolithic Silicon Photonic Crystal Fiber Tip Sensor for Simultaneous Measurement of Refractive Index and Temperature (2011) (58)
Process Integration for active polysilicon resonant microstructures (1989) (57)
Self-adjusting microstructures (SAMS) (1991) (57)
Micromirrors for Adaptive-Optics Arrays (2001) (56)
Electrostatically balanced comb drive for controlled levitation (1990) (56)
Microelectronics: An Integrated Approach (1996) (55)
Batch transfer of microstructures using flip-chip solder bump bonding (1997) (55)
Nickel-filled Hexsil Thermally Actuated Tweezers (1995) (55)
Integration of nanoelectromechanical (NEM) relays with silicon CMOS with functional CMOS-NEM circuit (2011) (54)
A model for emission yield from planar photocathodes based on photon- enhanced thermionic emission or negative-electron-affinity photoemission (2012) (53)
Multimode digital control of a suspended polysilicon microstructure (1996) (53)
Surface micromachining: from vision to reality to vision [accelerometer] (1995) (51)
Anchor loss simulation in resonators (2005) (51)
Hydrofluoric Acid Etching of Silicon Dioxide Sacrificial Layers I . Experimental Observations (1994) (49)
Determination of the Etching Kinetics for the Hydrofluoric Acid/Silicon Dioxide System (1993) (49)
Back-gated graphene anode for more efficient thermionic energy converters (2017) (49)
Single-Source Chemical Vapor Deposition of 3 C SiC Films in a LPCVD Reactor I. Growth, Structure, and Chemical Characterization (2004) (48)
Integrated micro-electro-mechanical sensor development for inertial applications (1998) (48)
Pulsed-laser annealing, a low-thermal-budget technique for eliminating stress gradient in poly-SiGe MEMS structures (2004) (47)
Modal Coupling in Micromechanical Vibratory Rate Gyroscopes (2006) (47)
Ultrasonic micromotors (1989) (46)
The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter (2003) (45)
Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments (2007) (45)
Nitrogen doping of polycrystalline 3C-SiC films grown using 1,3-disilabutane in a conventional LPCVD reactor (2003) (44)
A vibrating beam MEMS accelerometer for gravity and seismic measurements (2020) (44)
A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS (2003) (43)
Nanoelectromechanical relays with decoupled electrode and suspension (2011) (43)
Silicon nitride-on-silicon bar resonator using internal electrostatic transduction (2005) (42)
Lubrication of polysilicon micromechanisms with self-assembled monolayers (1998) (42)
Performance comparison of integrated z-axis frame microgyroscopes (2003) (41)
Characterization of Polycrystalline Silicon-Germanium Film Deposition for Modularly Integrated MEMS Applications (2007) (41)
Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications (2008) (41)
Microassembly technologies for MEMS (1998) (41)
One-port active polysilicon resonant microstructures (1989) (41)
A microfabricated electrochemical oxygen generator for high-density cell culture arrays (2003) (41)
Permeable Polysilicon Etch-access Windows For Microshell Fabrication (1995) (40)
Stress in undoped LPCVD polycrystalline silicon (1991) (40)
Viscous energy dissipation in laterally oscillating planar microstructures: a theoretical and experimental study (1993) (40)
Nitrogen doping of polycrystalline 3C–SiC films grown by single-source chemical vapor deposition (2002) (39)
Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators (2010) (39)
Tensile-strained germanium-on-insulator substrate fabrication for silicon-compatible optoelectronics (2011) (39)
Fluid motion produced by ultrasonic Lamb waves (1990) (38)
Combinational Logic Design Using Six-Terminal NEM Relays (2013) (37)
Spiral microstructures for the measurement of average strain gradients in thin films (1990) (37)
High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma (2003) (37)
Hydrofluoric Acid Etching of Silicon Dioxide Sacrificial Layers II . Modeling (1994) (37)
Laterally Actuated Platinum-Coated Polysilicon NEM Relays (2013) (37)
Ultrasonic micromotors: physics and applications (1990) (36)
Tunable control of antibody immobilization using electric field (2015) (36)
Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors (2006) (35)
Design and performance of CMOS micromechanical resonator oscillators (1994) (34)
A passive, in situ micro strain gauge (1993) (34)
POLY-SIGE: A HIGH-Q STRUCTURAL MATERIAL FOR INTEGRATED RF MEMS (2002) (34)
Young's Modulus Of In Situ Phosphorus-doped Polysilicon (1995) (34)
In Situ Phosphorus-doped Polysilicon For Integrated Mems (1995) (34)
Microbioreactor arrays with parametric control for high-throughput experimentation. (2004) (33)
Recent progress in modularly integrated MEMS technologies (2002) (32)
An orbital-overlap model for minimal work functions of cesiated metal surfaces (2012) (31)
Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices (1995) (31)
Nano-Electro-Mechanical relays for FPGA routing: Experimental demonstration and a design technique (2012) (31)
Stress and Microstructure in Phosphorus Doped Polycrystalline Silicon (1992) (31)
Integrated resonant-microbridge vapor sensor (1984) (30)
Polysilicon hollow beam lateral resonators (1993) (30)
An integrated, vertical-drive, in-plane-sense microgyroscope (2003) (30)
Nonlinear mixing in surface-micromachined tuning fork oscillators (1997) (30)
Batch micropackaging by compression-bonded wafer-wafer transfer (1999) (30)
Microfabricated Thermally Isolated Low Work-Function Emitter (2014) (29)
Stress and Microstructure in Lpcvd Polycrystalline Silicon Films: Experimental Results and Closed Form Modeling of Stresses (1991) (29)
Microbead-separated thermionic energy converter with enhanced emission current. (2013) (29)
Statistical characterization of fracture of brittle MEMS materials (1999) (29)
Characterization of polycrystalline 3C-SiC films deposited from the precursors 1,3-disilabutane and dichlorosilane (2008) (29)
Full three-dimensional motion characterization of a gimballed electrostatic microactuator (2001) (29)
Photonic Crystal Fiber Tip Sensor for High-Temperature Measurement (2011) (29)
Electrical Characterization of n-Type Polycrystalline 3C-Silicon Carbide Thin Films Deposited by 1,3-Disilabutane (2006) (29)
Self‐assembled monolayer film for enhanced imaging of rough surfaces with atomic force microscopy (1994) (28)
Single-Source Chemical Vapor Deposition of SiC Films in a Large-Scale Low-Pressure CVD Growth, Chemical, and Mechanical Characterization Reactor (2006) (28)
Silicon Resonant Microsensors (2008) (28)
Surface-micromachined 1MHz oscillator with low-noise Pierce configuration (1998) (27)
Depletion of cells and abundant proteins from biological samples by enhanced dielectrophoresis. (2014) (27)
Integration of Nanoelectromechanical Relays With Silicon nMOS (2012) (27)
INTERNAL ELECTROSTATIC TRANSDUCTION FOR BULK-MODE MEMS RESONATORS (2004) (27)
COMPOSITE POLYSILICON-PLATINUM LATERAL NANOELECTROMECHANICAL RELAYS (2010) (26)
High modulus polycrystalline 3C-SiC technology for RF MEMS (2003) (26)
Sacrificial layer SiO/sub 2/ wet etching for micromachining applications (1991) (26)
Fracture toughness characterization of brittle thin films (1990) (25)
A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices (2010) (25)
Lpcvd Polycrystalline Silicon Thin Films: The Evolution of Structure, Texture and Stress (1990) (25)
Microfabricated silicon carbide thermionic energy converter for solar electricity generation (2012) (25)
ALD-metal uncooled bolometer (2011) (25)
Characterization of residual strain in SiC films deposited using 1,3-disilabutane for MEMS application (2003) (24)
Fully Differential Internal Electrostatic Transduction of a Lamé-Mode Resonator (2009) (23)
Fracture Strength of Polycrystalline Silicon (1998) (23)
Design and fabrication of silicon-tessellated structures for monocentric imagers (2016) (22)
Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC (2010) (22)
Applications of silicon micromachining to resonator fabrication (1994) (22)
Fracture of polycrystalline 3C-SiC films in microelectromechanical systems (2004) (21)
POLY-SIGE HIGH FREQUENCY RESONATORS BASED ON LITHOGRAPHIC DEFINITION OF NANO-GAP LATERAL TRANSDUCERS (2004) (21)
Ge-blade damascene process for post-CMOS integration of nano-mechanical resonators (2004) (21)
Integrated atomistic chemical imaging and reactive force field molecular dynamic simulations on silicon oxidation (2015) (21)
Redundant MEMS resonators for precise reference oscillators (2005) (20)
Materials characterization for MEMS: a comparison of uniaxial and bending tests (1999) (20)
Inherent Enhancement of Electronic Emission from Hexaboride Heterostructure (2014) (19)
FLUIDIC MICROASSEMBLY USING PATTERNED SELF-ASSEMBLED MONOLAYERS AND SHAPE MATCHING (2003) (18)
Fluidic self-assembly of micromirrors onto surface micromachined actuators (2000) (18)
Magnetic, Mechanical, and Optical Characterization of a Magnetic Nanoparticle-Embedded Polymer for Microactuation (2011) (17)
Thermal assembly of polysilicon microactuators with narrow-gap electrostatic comb drive (1992) (17)
Surface Photovoltage-Induced Ultralow Work Function Material for Thermionic Energy Converters (2019) (17)
Integrated MEMS Technologies (2001) (17)
Simulation tools for damping in high frequency resonators (2005) (17)
Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS (2006) (16)
Double-Layer Silicon Photonic Crystal Fiber-Tip Temperature Sensors (2014) (16)
Integrated sensor and electronics processing for >10^8 "iMEMS" inertial measurement unit components (2003) (16)
Differential internal dielectric transduction of a Lamé-mode resonator (2010) (16)
Recent Advances in Surface Micromachining (1996) (16)
Control of strain gradient in doped polycrystalline silicon carbide films through tailored doping (2006) (16)
Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion (2019) (16)
Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror (2000) (16)
Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators With Integrated Actuation Electrodes (2011) (15)
AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators (2011) (15)
Hexsil Bimorphs For Vertical Actuation (1995) (15)
Silicon nanowire coupled micro-resonators (2008) (15)
A thermally isolated microstructure suitable for gas sensing applications (1988) (15)
Micromechanical pierce oscillators for resonant sensing applications (2002) (15)
Properties of Phosphorus-Doped Poly-SiGe Films for Microelectromechanical System Applications (2003) (15)
Back-End-Of-Line Poly-Sige Disk Resonators (2006) (15)
OBSERVATIONS OF FIXED AND MOBILE CHARGE IN COMPOSITE MEMS RESONATORS (2008) (14)
Smart-cut layer transfer of single-crystal SiC using spin-on-glass (2012) (14)
Microsensor and microactuator applications of thin films (1989) (14)
A diffusion/chemical reaction model for HE etching of LPCVD phosphosilicate glass sacrificial layers (1992) (14)
MEMS: Some Self-Assembly Required (2002) (14)
Stress-Corrosion Cracking and Blistering of Thin Polycrystalline Silicon Films in Hydrofluoric Acid (1993) (14)
Improved Performance of Bottom-Contact Organic Thin-Film Transistor Using Al Doped HfO2 Gate Dielectric (2014) (14)
Effects of Annealing on Residual Stress and Strain Gradient of Doped Polycrystalline SiC Thin Films (2008) (13)
DFT Study of Atomically-Modified Alkali-Earth Metal Oxide Films on Tungsten (2014) (13)
Transformer coupled plasma etching of 3C-SiC films using fluorinated chemistry for microelectromechanical systems applications (2004) (13)
Electrostatic Self-Assembly Aided by Ultrasonic Vibration (1997) (13)
Electropermanent magnet actuation for droplet ferromicrofluidics. (2016) (13)
Hydrogen peroxide etching and stability of p-type poly-SiGe films (2004) (13)
Electrical isolation process for molded, high-aspect-ratio polysilicon microstructures (2000) (13)
Investigation of Texture and Stress in Undoped Polysilicon Films (1990) (12)
Model for micropart planarization in capillary-based microassembly (2003) (12)
PACKAGING OF LARGE LATERAL DEFLECTION MEMS USING A COMBINATION OF FUSION BONDING AND EPITAXIAL REACTOR SEALING (2010) (12)
Aqueous Transduction of Poly-Sige Disk Resonators (2007) (12)
Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays (2015) (12)
Experimental Investigation of Silicon Surface Migration in Low Pressure Nonreducing Gas Environments (2009) (12)
Pulsed Laser Annealing of Silicon-Germanium Films (2002) (12)
Low-Temperature LPCVD MEMS Technologies (2002) (12)
Integrated surface-micromachined z-axis frame microgyroscope (2002) (11)
Photonic crystal fiber tip sensor for precision temperature sensing (2009) (11)
ΣΔ capacitive interface for a vertically-driven XaY-axis rate gyroscope (2002) (11)
Position Sensing And Control Of Electrostatically-driven Polysilicon Microactuators (1995) (11)
Microgimbal torsion beam design using open, thin-walled cross sections (2001) (11)
Ultra-thin atomic layer deposition films for corrosion resistance (2013) (11)
Nickel and platinum ohmic contacts to polycrystalline 3C-silicon carbide (2007) (11)
Applications of Polysilicon Films in Microsensors and Microactuators (1987) (11)
Titanium nitride sidewall stringer process for lateral nanoelectromechanical relays (2010) (11)
Identification, position sensing, and control of an electrostatically-driven polysilicon microactuator (1995) (10)
Thermionic current densities from first principles. (2013) (10)
HIGH-RESOLUTION ELECTROMETER WITH MICROMECHANICAL VARIABLE CAPACITOR (2002) (10)
Higher-order mode internal electrostatic transduction of a bulk-mode ring resonator on a quartz substrate (2009) (10)
Application of principal component analysis to a full profile correlative analysis of FTIR spectra (2012) (10)
Energy-Reversible Complementary NEM Logic Gates (2008) (10)
Silicon Carbide Thin Films using 1,3-Disilabutane Single Precursor for MEMS Applications - A Review (2006) (10)
Microfluidic generation of tunable emulsions for templated monodisperse silica (2005) (10)
Optimization of Poly-SiGe Deposition Processes for Modular MEMS Integration (2003) (10)
Micromechanical resonators for frequency references and signal processing (1994) (10)
Dual sidewall lateral nanoelectromechanical relays with beam isolation (2011) (10)
Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes (2009) (9)
Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition (2013) (9)
A Super Stretchable Organic Thin-Film Diodes Network That Can Be Embedded Into Carbon Fiber Composite Materials for Sensor Network Applications (2016) (9)
Characterization of Thin Films using Micromechanical Structures (1992) (9)
Electrical and Mechanical Characterization of Doped and Annealed Polycrystalline 3C-SiC Thin Films (2009) (9)
Vacuum encapsulated resonators for humidity measurement (2010) (9)
LPCVD Silicon Dioxide Sacrificial Layer Etching for Surface Micromachining (1992) (9)
Experiments in micromanipulation and CAD-driven microassembly (1998) (9)
Effect of excimer laser annealing on the structural properties of silicon germanium films (2004) (9)
Light emission from strained germanium (2013) (8)
Design and fabrication of curved silicon image planes for miniature monocentric imagers (2015) (8)
Modeling of Droplet Generation in a Microfluidic Flow-Focusing Junction for Droplet Size Control (2021) (8)
Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy (2007) (8)
Epitaxial Silicon Microshell Vacuum-Encapsulated CMOS-Compatible 200 MHz Bulk-Mode Resonator (2009) (8)
Room-Temperature Wet Etching of Polycrystalline and Nanocrystalline Silicon Carbide Thin Films with HF and HNO3 (2009) (8)
Resonant structures for integrated sensors (1986) (8)
Monolithic silicon photonic crystal slab fiber tip sensor (2009) (8)
Electrochemical quantum tunneling for electronic detection and characterization of biological toxins (2012) (8)
Study of Poly-SiGe Structural Properties for Modularly Integrated MEMS (2006) (7)
Laterally actuated nanoelectromechanical relays with compliant, low resistance contact (2013) (7)
ENCAPSULATED THERMIONIC ENERGY CONVERTER WITH STIFFENED SUSPENSION (2012) (7)
Electromechanical sensing of charge retention on floating electrodes (2011) (7)
Reconstituted Wafer Technology for Heterogeneous Integration (2006) (7)
High-aspect-ratio, molded microstructures with electrical isolation and embedded interconnects (2001) (7)
Charge-drift elimination in resonant electrostatic MEMS (2010) (6)
Fabrication and testing of a micromachined shear sensor (1987) (6)
Technologies for Cofabricating MEMS and Electronics Several different strategies show commercial promise for fabricating electronic and micro electromechanical devices on the same substrate; a de-facto standard has not yet been chosen. (2008) (6)
SIDEWALL SILICON CARBIDE EMITTERS FOR TERAHERTZ VACUUM ELECTRONICS (2012) (6)
Effect of illlumination on thermionic emission from microfabricated silicon carbide structures (2011) (6)
Higher-order dielectrically transduced bulk-mode ring resonator with low motional resistance (2010) (6)
Single crystal silicon nanopillars, nanoneedles and nanoblades with precise positioning for massively parallel nanoscale device integration (2012) (6)
Surface Micromachined Z-Axis Vibratory Rate Gyroscope (2020) (6)
Anomalous hysteresis and current fluctuations in cyclic voltammograms at microelectrodes due to Ag leaching from Ag/AgCl reference electrodes (2019) (6)
Efficient internal electrostatic transduction of the 41st radial mode of a ring resonator (2010) (6)
ALD HfO2 Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications. (2019) (6)
Monolithic silicon photonic crystal fiber tip sensor for refractive index and temperature sensing (2010) (5)
2D analytical model for the study of NEM relay device scaling (2011) (5)
Laser print patterning of planar spiral inductors and interdigitated capacitors (2009) (5)
Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers (2013) (5)
Multilayered Monolithic Silicon Photonic Crystals (2011) (5)
Electromechanical Sensing of Charge Retention on Floating Electrodes (2010) (5)
ΣΔ capacitive interface for a vertically-driven X&Y-axis rate gyroscope (2002) (5)
Electrical and mechanical characterization of lateral NEMS Switches (2011) (5)
Performance Evaluation and Equivalent Model of Silicon Interconnects for Fully-Encapsulated RF MEMS Devices (2009) (5)
Polycrystalline silicon micromachining: A new technology for integrated sensors (2006) (5)
Microencapsulation of silicon cavities using a pulsed excimer laser (2012) (4)
Suspended microstructures made using silicon migration (2009) (4)
Silicon microbial bioreactor arrays (2000) (4)
Scalable methods for ultra-smooth platinum in nanoscale devices (2019) (4)
Magnetic nanoparticle-driven pumping in microchannels (2009) (4)
In-situ Doped Poly-SiGe LPCVD Process using BCl3 for Post-CMOS Integration of MEMS Devices (2004) (4)
A reel-to-reel compatible printed accelerometer (2011) (4)
Wafer Scale Encapsulation of Large Lateral Deflection MEMS Structures (2009) (4)
Interface quality control of monolithic photonic crystals by hydrogen annealing (2008) (4)
Interpretable Classification of Bacterial Raman Spectra With Knockoff Wavelets (2020) (4)
Low-Noise Integrated Potentiostat for Affinity-Free Protein Detection With 12 nV/rt-Hz at 30 Hz and 1.8 pArms Resolution (2019) (4)
Double-layer silicon photonic crystal fiber tip temperature sensor (2012) (3)
Coupling of resonant modes in micromechanical vibratory rate gyroscopes (2004) (3)
Temperature dependence of vacuum encapsulated resonators for humidity measurement (2011) (3)
Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC (2009) (3)
Electropermanent magnet-driven droplet size modulation for two-phase ferromicrofluidics (2020) (3)
Microelectromechanical structures for materials research. Materials Research Society symposium proceedings Volume 518 (1998) (3)
High temperature photonic crystal fiber tip sensor (2010) (3)
Technologies for microdynamic devices (1990) (3)
Three stage sample preparation for purification of proteins from complex biological samples (2013) (3)
Vacuum-insulated-gate field-effect transistor (1989) (3)
Optimized Deep Reactive-Ion Etching of Nanostructured Black Silicon for High-Contrast Optical Alignment Marks (2021) (3)
Vacuum microsystems for energy conversion and other applications (2011) (3)
Wafer reconstitution with precision dry front-to-front registration (2009) (3)
Stress Stability of Poly-SiGe and Various Oxide Films in Humid Environments (2004) (3)
Low thermal-budget silicon sealed-cavity microencapsulation process (2011) (3)
Quantum Tunneling Currents in a Nanoengineered Electrochemical System (2017) (3)
Multiband charge-coupled device (2012) (3)
Analysis of asperity dominated contacts in nanoelectromechanical relays using thin films (2014) (3)
Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements (1998) (3)
HETERODYNED ELECTROSTATIC TRANSDUCTION OSCILLATORS EVADE LOW FREQUENCY NOISE ALIASING (2010) (2)
Interpretable Signal Analysis with Knockoffs Enhances Classification of Bacterial Raman Spectra (2020) (2)
Stable Encapsulated Charge-Biased Resonators (2016) (2)
Photonic Crystal Mirrors for Free-Space Communication and Fiber-Optic Sensors (2010) (2)
Efficient Routing in Coarse-Grained Reconfigurable Arrays Using Multi-Pole NEM Relays (2022) (2)
Integrated resonant accelerometer based on rigidity change (1999) (2)
Stable charge-biased capacitive resonators with encapsulated switches (2014) (2)
Interconnect Issues for Integrated MEMS Technology (2004) (2)
Microsystems Research in Japan (2003) (2)
Developments in Plastic Optics for Projection Telvision Systems (1980) (2)
Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect (2017) (2)
Fatigue of polycrystalline silicon for MEMS applications: Crack growth and stability under resonant loading conditions (2001) (2)
Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics (2013) (2)
Active Control of Probability Amplitudes in a Mesoscale System via Feedback-Induced Suppression of Dissipation and Noise (2016) (2)
Large-Scale Polycrystalline SiC Micromachining Technologies (2008) (2)
Laser-printed magnetic-polymer microstructures (2009) (2)
A dry wafer-reconstitution process with zero insertion force by embedded alignment guide tabs (2012) (2)
Multi-spacer technique for low-voltage, high-aspect-ratio lateral electrostatic actuators (2011) (2)
Microassembly technologies for MEMS (1998) (2)
CVD HAFNIUM DIBORIDE AS A CONTACT MATERIAL FOR NANOELECTROMECHANICAL SWITCHES (2012) (2)
TIME EVOLUTION OF RELEASED HOLE ARRAYS INTO MEMBRANES VIA VACUUM SILICON MIGRATION (2010) (1)
Double-layer silicon photonic crystal fiber tip sensor (2011) (1)
Polyether Ether Ketone (PEEK) Fluidic Cell to Study Electrochemistry of Microelectrodes on Silicon Substrate (2015) (1)
Experimental demonstration and analysis of DNA passage in nanopore-based nanofluidic transistors (2011) (1)
Dual-beam, six-terminal nanoelectromechanical relays (2013) (1)
CHARACTERIZATION OF MAGNETIC NANOPARTICLE-EMBEDDED SU8 FOR MICROACTUATION (2008) (1)
Non-Adiabatic Electronic Relaxation Events at Monolayer-Modified Electrode-Electrolyte Interfaces: Physics and Applications (2010) (1)
Multimode Digital Control of a Suspended (1996) (1)
Nano-Electro-Mechanical (NEM) relays and their application to FPGA routing (2012) (1)
Neural network-based model of photoresist reflow (2019) (1)
Development of polymer cholesteric liquid crystal flake technology for electro-optic devices and particle displays (2007) (1)
Ashing Technique For Nano-gap Fabrication of Electrostatic Transducers (2003) (1)
IMMOBILIZATION OF ANTIBODIES ON SOLID-STATE SURFACES WITH CONTROLLED ORIENTATION USING ELECTRIC FIELD (2013) (1)
MICROFLUIDIC GENERATION OF TUNABLE MONODISPERSE DOUBLE EMULSIONS FOR TEMPLATED SILICA PARTICLES (2006) (1)
Vacuum Packaging for Microelectromechanical Systems (MEMS) (2002) (1)
MEASURING CHARGE AND CHARGE DECAY IN FLOATING-ELECTRODE ELECTROSTATIC ACTUATORS (2008) (1)
Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating (2011) (1)
Poly‐ SiGe Surface Micromachining (2021) (1)
Four-mask process based on spacer technology for scaled-down lateral NEM electrostatic actuators (2010) (1)
Effects of Boron Concentration on Si 1x Ge x Properties for Integrated MEMS Technology (2004) (1)
Heterostructure designs for photon-enhanced thermionic emission (2014) (0)
Session 5 Detectors, sensors and displays — Solid-state sensors and displays (1985) (0)
A MEMS Structure for Measuring the Fracture Strength of Thin Films (1998) (0)
The dependence of poly-crystalline SiC mid-infrared optical properties on deposition conditions (2008) (0)
Optimizing materials for photon-enhanced thermionic emission (2011) (0)
Identification, Position Sensin , and Control of an Electrostatically-driven Polys8icon Microactuator (1995) (0)
Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion (2019) (0)
3d printing of graphene-polymer composites (2014) (0)
EFFICIENT CONTROL OF DNA TRANSPORT IN NANOPORE-BASED NANOFLUIDIC TRANSISTORS (2011) (0)
Design and Modeling of a Linear Microactuator (1991) (0)
Vacuum Nanosystemsfor Energy Conversion (2013) (0)
Capacitive accelerometer laboratory using polymer-film rapid prototyping technology (2013) (0)
Engineering An Electrochemical Sensor for the Characterization of Bond Vibration Frequencies of a Chemical Analyte (2013) (0)
Control of Residual Stress in Large-scale LPCVD SiC Films for MEMS and NEMS Applications (2006) (0)
NANO HIGHLIGHT Functionalized Nanowires for Electromechanical Detection of Molecules (2005) (0)
Using STM tip as electrochemical sensor for the characterization of bond vibration frequencies of a chemical analyte (2014) (0)
Session 24 Integrating sensors and electronics: Where to draw the line? (1987) (0)
WetFET A Novel Fluidic Gate-Dielectric Transistor for Sensor Applications (2007) (0)
Contact Properties of Titanium Nitride Sidewall Coating for Nanoelectromechanical Electronics (2013) (0)
Integrated poly-SiGe nanomechanical resonators for wireless sensor nodes (2004) (0)
Encapsulated Cell Dynamics in Droplet Microfluidic Devices with Sheath Flow (2021) (0)
1994 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (1994) (0)
Panel Discussion on Nanotechnology Research Beyound 2025 (2016) (0)
A hybrid DMD-waveguide optical signal processor (2015) (0)
In Memoriam Harvey C. Nathanson 1936–2019 (2020) (0)
3-D coarse-grained reconfigurable array using multi-pole NEM relays for programmable routing (2022) (0)
Ultra dielectrophoresis: Electrothermal analysis and its applications in microfluidic sample preparation and proteomics (2013) (0)
“Deep approaches to learning” in a project‐based nanofabrication graduate course (2022) (0)
2D Analytical M (2011) (0)
A vibrating beam MEMS accelerometer for gravity and seismic measurements (2020) (0)
Process Integration for Active Polysilicon Resonant MicS (2001) (0)
Progress Toward Wafer-Scale Thermionic Energy Conversion (2016) (0)
Development of a Microsystem on a Chip Demonstrating i MEMSTM VLSI Technology (2008) (0)
Functionalized Nanowires for Electromechanical Detection of Molecules (2004) (0)
ELECTRICAL ACTUATION AT NANOSCALE: CONTROLLED ORIENTATION OF PROTEINS DURING IMMOBILIZATION (2014) (0)
Ink preparation and inkjet printing of eutectic gallium indium nanodroplets (2016) (0)
Co u pling of Resonant Modes in Micro m ec h anical Vibratory Rate Gyroscopes (2004) (0)
Errata to “A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays” (2004) (0)
Session 8 Detectors, sensors and displays — Microsensor fabrication technology (1986) (0)
Electrostatic nano electromechanical switches (NEMS) for energy-efficient digital systems (2014) (0)
Ultrasonic Micromo t ors (1989) (0)
Electrical properties of CuPc-based OTFTs with atomic layer deposited HfAlO gate dielectric (2012) (0)
Rapid Time Domain Molecular Conductance Measurement of Alkanedithiols Using STM (2014) (0)
Electrofluidic Self-Assembly with Molecular Control of Orientation (2013) (0)
Effect of a Vertical Stack of Aligned Subwavelength Metal Hole Arrays on Extraordinary Transmission Spectra (2007) (0)
pH sensor demonstrating a layout programmable squeeze pumped microfluidic platform (2010) (0)
Experimental demonstration of a stacked SOI multiband charged-coupled device (2014) (0)
Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect (2016) (0)
Phonon Polariton Reflectance Spectra In a Silicon Carbide Membrane Hole Array (2007) (0)
Microassembly technologies for MEMS (1998) (0)
Electrochemical Noise Reduction at Electrode-Electrolyte Interfaces (2011) (0)
Structure and Behavior of Materials for Micromechanical Devices (1998) (0)
Abstract Submitted for the MAR11 Meeting of The American Physical Society Optimizing materials for photon-enhanced thermionic emission (2012) (0)
Microassembly technologies for MEMS (1998) (0)
AC Polarization for Charge-Drift Elimination in (2011) (0)
Optimization and Characterization of Nanostructured Surfaces for Photon-Enhanced Thermionic Emission and Photoemission cathodes (2011) (0)
ADVISORY EMIRETUS EDITORS EDITOR-IN-CHIEF (2008) (0)

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