Richard S. Muller
#50,767
Most Influential Person Now
American academic
Richard S. Muller's AcademicInfluence.com Rankings
Download Badge
Physics
Richard S. Muller's Degrees
- PhD Physics University of California, Berkeley
Why Is Richard S. Muller Influential?
(Suggest an Edit or Addition)According to Wikipedia, Richard Stephen Muller is an American professor in the Electrical Engineering and Computer Science Department of the University of California at Berkeley. He made contributions to the founding and growth of the field of MicroElectromechanical Systems . Together with student, Roger T. Howe, he made the initial seminal contribution of polysilicon sacrificially-released beams in 1982. This led to a class of micromanufacturing processes called surface micromachining. These processes preceded the creation of low cost, mass-produced commercial micro accelerometers, which are used in automotive collision sensors for airbag deployment. Together with Richard M. White, he created BSAC , an organization that produced many generations of academic researchers and intellectual properties in the MEMS field. MEMS is an activity that in 2013 accounted for multi-billion dollar revenue worldwide.
Richard S. Muller's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Device Electronics for Integrated Circuits (1977) (1435)
- Etch rates for micromachining processing (1996) (708)
- Surface micromachining for microelectromechanical systems (1998) (649)
- IC-processed electrostatic micromotors (1989) (436)
- Integrated movable micromechanical structures for sensors and actuators (1988) (313)
- Magnetically actuated, addressable microstructures (1997) (266)
- Resonant-microbridge vapor sensor (1986) (225)
- Silicon-processed overhanging microgripper (1992) (223)
- Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers (2016) (208)
- Polycrystalline Silicon Micromechanical Beams (1983) (197)
- Stroboscopic interferometer system for dynamic MEMS characterization (2000) (171)
- IC-processed electrostatic micro-motors (1988) (169)
- IC-processed electrostatic synchronous micromotors (1989) (164)
- Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning (1998) (161)
- Magnetic microactuation of polysilicon flexure structures (1995) (153)
- Hydrogen in lithium niobate (1996) (152)
- Electrostatic charge and field sensors based on micromechanical resonators (2003) (150)
- Surface-micromachined microoptical elements and systems (1998) (142)
- An analytical breakdown model for short-channel MOSFET's (1982) (139)
- Polysilicon microgripper (1990) (135)
- Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films (1990) (133)
- Silicon micromechanics: sensors and actuators on a chip (1990) (132)
- Thermal conductivity of heavily doped low‐pressure chemical vapor deposited polycrystalline silicon films (1988) (129)
- Frictional study of IC-processed micromotors (1990) (128)
- Piezoelectric microphone with on-chip CMOS circuits (1993) (126)
- A new NMOS temperature-stable voltage reference (1978) (119)
- Fluidic self-assembly of micromirrors onto microactuators using capillary forces (2002) (117)
- A FLAT HIGH-FREQUENCY SCANNING MICROMIRROR (2000) (113)
- Velocity of surface carriers in inversion layers on silicon (1980) (113)
- Why is (111) Silicon a Better Mechanical Material for MEMS (2001) (113)
- Investigations of porous silicon for vapor sensing (1990) (109)
- Stress in polycrystalline and amorphous silicon thin films (1983) (109)
- A raster-scanning full-motion video display using polysilicon micromachined mirrors (2000) (107)
- Integrated silicon microbeam PI-FET accelerometer (1982) (105)
- Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor (1991) (103)
- A unified model for hot-electron currents in MOSFET's (1981) (101)
- Measurement system for full three-dimensional motion characterization of MEMS (2002) (97)
- Investigations of the Electrical Properties of Porous Silicon (1991) (97)
- Micromachined polysilicon microscanners for barcode readers (1996) (92)
- Optical measurement methods to study dynamic behavior in MEMS (2001) (90)
- Solid-State Sensor and Actuator Workshop Held in Hilton Head Island, South Carolina on 4-7 June 1990 (1990) (89)
- Chemical Surface Modification of Porous Silicon (1993) (88)
- Electrical and optical characteristics of vacuum-sealed polysilicon microlamps (1992) (82)
- Conduction properties of lightly doped, polycrystalline silicon (1978) (79)
- A narrow-band interference filter with photorefractive LiNbO3 (1994) (78)
- Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties (1983) (76)
- Hot-electron currents in very short channel MOSFET's (1983) (72)
- Optoelectronic packaging using silicon surface-micromachined alignment mirrors (1995) (72)
- Pin joints, gears, springs, cranks, and other novel micromechanical structures (1987) (71)
- Carrier mobilities at weakly inverted silicon surfaces (1974) (63)
- Correlation between substrate and gate currents in MOSFET's (1982) (63)
- Statistical considerations in MOSFET calculations (1967) (60)
- Micromirrors for Adaptive-Optics Arrays (2001) (56)
- PAIR-PRODUCTION ENERGIES IN SILICON AND GERMANIUM BOMBARDED WITH LOW-ENERGY ELECTRONS. (1972) (55)
- IC-Processed piezoelectric microphone (1987) (55)
- Integrated multisensor chip (1986) (55)
- Lightly-doped polysilicon bridge as a flow meter (1988) (51)
- Microfabricated torsional actuators using self-aligned plastic deformation of silicon (2006) (51)
- VIA-4 avalanche-induced breakdown mechanisms in short-channel MOSFETs (1982) (51)
- Integrated microphone with CMOS circuits on a single chip (1989) (50)
- Lightweight, optically flat micromirrors for fast beam steering (2000) (46)
- Improved surface-micromachined hinges for fold-out structures (1998) (45)
- Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers (1996) (43)
- Fusing silicon wafers with low melting temperature glass (1990) (43)
- Vacuum-sealed silicon micromachined incandescent light source (1989) (42)
- A unified approach to the theory of space-charge-limited currents in an insulator with traps (1963) (41)
- Analysis of MOSFET degradation due to hot-electron stress in terms of interface-state and fixed-charge generation (1988) (40)
- Determination of H concentration in LiNbO3 by photorefractive fixing (1992) (39)
- A simplified model of short-channel MOSFET characteristics in the breakdown mode (1983) (39)
- Front-to-backside alignment using resist-patterned etch control and one etching step (1992) (39)
- Spatially resolved observation of visible-light emission from Si MOSFET's (1983) (38)
- Highly Scalable Digital Silicon Photonic MEMS Switches (2016) (38)
- Large-Scale Polarization-Insensitive Silicon Photonic MEMS Switches (2018) (37)
- Laser-to-fiber coupling module using a micromachined alignment mirror (1995) (36)
- MEMS: Quo vadis in century XXI? (2000) (36)
- Diamagnetically Levitated MEMS Accelerometers (2007) (35)
- Microfabricated incandescent lamps. (1991) (35)
- A metal-insulator-piezoelectric semiconductor electromechanical transducer (1965) (35)
- Electrical properties of tellurium thin films (1971) (34)
- Integrated silicon pi-fet accelerometer with proof mass (1984) (33)
- Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators (1998) (33)
- Charge-control analysis of the collector-base space-charge-region contribution to bipolar-transistor time constant τT (1987) (32)
- Vapor‐Deposited, Thin‐Film Heterojunction Diodes (1964) (32)
- Fracture strain of LPCVD polysilicon (1988) (32)
- Porous polycrystalline silicon: a new material for MEMS (1994) (32)
- 128×128 Silicon Photonic MEMS Switch with Scalable Row/Column Addressing (2018) (31)
- Hot-electron induced excess carriers in MOSFET's (1982) (31)
- Integrated resonant-microbridge vapor sensor (1984) (30)
- The development and application of a SiSiO2 interface-trap measurement system based on the staircase charge-pumping technique (1989) (29)
- 64×64 Low-loss and broadband digital silicon photonic MEMS switches (2015) (29)
- Polysilicon optical microscanners for laser scanning displays (1998) (28)
- Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors (2006) (28)
- Tuning of photorefractive interference filters in LiNbO3 (1994) (27)
- Miniature Cantilever Beams Fabricated by Anisotropic Etching of Silicon (1980) (26)
- IGFET Analysis through numerical solution of Poisson's equation (1968) (25)
- Fracture toughness characterization of brittle thin films (1990) (25)
- A simple punchthrough model for short-channel MOSFET's (1983) (24)
- Space-charge-limited currents and Schottky-emission currents in thin-film CdS diodes (1964) (24)
- Large grain tellurium thin films (1972) (23)
- MOEMS spatial light modulator development at the Center for Adaptive Optics (2003) (23)
- Magnetically Actuated Micromirrors for Fiber-Optic Switching (1998) (22)
- Flip Chip Packaging of Digital Silicon Photonics MEMS Switch for Cloud Computing and Data Centre (2017) (21)
- Silicon photonic wavelength cross-connect with integrated MEMS switching (2019) (21)
- Overhung electrostatic microgripper (1991) (21)
- Thin film CdS-CdTe heterojunction diodes (1968) (21)
- Actuated polysilicon micromirrors for raster-scanning displays (1997) (19)
- MEMS-Actuated 8×8 Silicon Photonic Wavelength-Selective Switches with 8 Wavelength Channels (2018) (19)
- Microfabricated torsional actuator using self-aligned plastic deformation (2003) (17)
- Acoustic-wave detection via a piezoelectric field-effect transducer. (1972) (17)
- Integrated Zinc oxide-on-silicon tactile-sensor array (1985) (16)
- Electrical Performance of Metal‐Insulator‐Piezoelectric Semiconductor Transducers (1967) (16)
- Time evolution of grating decay during photorefractive fixing processes in LiNbO3 (1995) (15)
- Highly sensitive silicon carrier-domain magnetometer (1984) (15)
- MEMS: Some Self-Assembly Required (2002) (14)
- TRANSDUCER ACTION IN A METAL‐INSULATOR‐PIEZOELECTRIC‐SEMICONDUCTOR TRIODE (1965) (14)
- Theoretical transducer properties of piezoelectric insulator FET transducers (1975) (14)
- Thermal conductivity of heavily doped LPCVD polysilicon (1987) (14)
- Monolithic integrated zinc-oxide on silicon pyroelectric anemometer (1983) (14)
- Heat and strain-sensitive thin-film transducers (1983) (13)
- Reactive ion etching of indium-tin-oxide films (1989) (13)
- Simple Fabrication Process for Self-Aligned, High-Performance Microscanners— Demonstrated Use to Generate a 2-D Ablation Pattern (2007) (13)
- Scalable Row/Column Addressing of Silicon Photonic MEMS Switches (2016) (13)
- Development and Prospects (2012) (12)
- Photovoltaic Effects at Rectifying Junctions to Deposited CdS Films (1965) (12)
- Microsensors for heat transfer and fluid flow measurements (1990) (12)
- IC-processed hot-filament vacuum microdevices (1992) (12)
- Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology (2003) (12)
- TIME-RESOLVED MEASUREMENT of OPTICAL MEMS USING STROBOSCOPIC INTERFEROMETRY (1999) (11)
- Compact 2D laser beam scanner with fan laser array and Si micromachined microscanner (1997) (11)
- Fully-integrated ZnO on silicon pyroelectric infrared detector array (1984) (11)
- 32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry (2021) (11)
- Oriented Te thin films. (1969) (11)
- Actuation of polysilicon surface-micromachined mirrors (1996) (11)
- HIGH-RESOLUTION ELECTROMETER WITH MICROMECHANICAL VARIABLE CAPACITOR (2002) (10)
- Piezoelectric DMOS strain transducers (1976) (10)
- A mutual capacitive normal-and shear-sensitive tactile sensor (1984) (10)
- Multicast silicon photonic MEMS switches with gap-adjustable directional couplers. (2019) (9)
- Aluminum oxide films made from evaporated sapphire (1972) (9)
- Fabrication and characterization of ZnO piezoelectric films for sensor devices (1979) (9)
- Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS (1999) (9)
- Reliability study of digital silicon photonic MEMS switches (2015) (9)
- Electric-Field Multiplexing of Volume Holograms in LiNbO3 (1995) (9)
- FAST, MEMS-BASED, PHASE-SHIFTING INTERFEROMETER 1 (2006) (8)
- Electron Emission from Metal‐BaO Systems (1967) (8)
- Precision and performance of polysilicon micromirrors for hybrid integrated optics (1995) (8)
- A theoretical derivation of the log-normal distribution of time-dependent dielectric breakdown in thin oxides (1989) (7)
- FAST , MEMS-BASED , PHASE-SHIFTING INTERFEROMETER (2006) (7)
- IC processed piezoelectric microphone (1991) (7)
- A planar-processed PI-FET accelerometer (1980) (7)
- WP-B6 silicon cantilever beam accelerometer utilizing a PI-FET capacitive transducer (1979) (7)
- Complementary DMOS process for LSI (1976) (7)
- Detection of Acoustic Waves with a PI-DMOS Transducer (1976) (7)
- Behavior of Gold Blocking Contacts to CdS at High Impressed Fields (1963) (6)
- Dual-gate depletion-mode DMOS transistor for linear gain-control application (1979) (6)
- An integrated piezoelectric-insulator DMOST surface-acoustic-wave convolver (1985) (6)
- Hall-effect studies in deposited CdS thin films (1964) (6)
- Micromachined ZnO on silicon nitride pressure sensor (1986) (6)
- Correlating the channel, substrate, gate and minority-carrier currents in MOSFETs (1983) (6)
- LINEAR VIBROMOTOR-ACTUATED MICROMACHINED MICROREFLECTOR FOR INTEGRATED OPTICAL SYSTEMS (1999) (5)
- A new ZnO-on-Si convolver structure (1982) (5)
- A resistive-gated IGFET tetrode (1971) (5)
- Poly-SiGe MEMS actuators for adaptive optics (2006) (5)
- A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner (2005) (5)
- Pyroelectric Properties and Applications of Sputtered Zinc-Oxide Thin Films (1985) (5)
- Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers (2001) (4)
- Erratum: ‘‘Thermal conductivity of heavily doped low‐pressure chemical vapor deposited polycrystalline silicon films’’ [J. Appl. Phys. 63, 1442 (1988)] (1989) (4)
- Devices, structures, and processes for optical MEMS (2007) (4)
- MEMS Process Characterization with an on-Chip Device (2006) (4)
- 12×12 packaged digital silicon photonic MEMS switches (2016) (4)
- WP-B1 surface-acoustic-wave vapor-sensing device (1980) (4)
- Characteristics of short-channel MOSFETs in the breakdown regime (1982) (4)
- Integrated polysilicon tactile sensor (1986) (4)
- Analytical Technique for the Design of DMOS Transistors (2015) (4)
- Ultrasonic Receiving Array Having Power Response (1979) (3)
- Solid-State Sensor and Actuator Workshop Held at Hilton Head Island, South Carolina on June 6-9, 1988 (1988) (3)
- Micromachined microscanners for optical scanning (1997) (3)
- Actuators with Integrated High-Precision for External-Cavity Semiconductor Lasers (1996) (3)
- Beam steering laser arrays and applications in 2D laser scanning (1997) (3)
- Piezoelectric Microphone with On-Chip (1993) (3)
- Technologies for microdynamic devices (1990) (3)
- Electronic processes in Au-CdS-In diodes (1962) (3)
- MICROCHOPPER-MODULATED IR MICROLAMP (1999) (3)
- Stroboscopic Interferometer System for Dynamic (2000) (3)
- Magnetic Microactuation of Flexure Structures (1995) (3)
- Surface Micromachined Silicon Photonic MEMS: A Scalable Technology Platform for Photonic Network Components (2018) (3)
- Surface Photovoltage Studies of Silicon‐Electrolyte Systems (1962) (3)
- Thin Zinc-Oxide Film Array for Programmable Filter and Scanned Receiving Transducer (1979) (2)
- Complementary DMOS process for LSI (1976) (2)
- Characterization of Thin-Film Impact Microactuators (1997) (2)
- A silicon magneto-coupler using a carrier-domain magnetometer (1985) (2)
- Studies of Localized Charge Injection in Surface Avalanched pn Junctions (1976) (2)
- Robustness and Reliability of Micromachined Scanning Mirrors (1999) (2)
- Insulated-gate field-effect transistor using single crystal cadmium sulfide☆ (1966) (2)
- FABRICATION PROCESSES FOR MAGNETIC MICROACTUATORS WITH POLYSILICON FLEXURES (1995) (2)
- Microfabricated Torsional Actuators Using (2006) (2)
- Hexagonal CdCl2 deposites on HCl-etched CdS films☆ (1965) (2)
- Plenty of Opportunity as Well as "Room at the Bottom" Some Examples in Optical MEMS (2007) (2)
- JTEC Panel report on microelectromechanical systems in Japan (1994) (2)
- Integrated stylus-force gauge (1990) (2)
- I-3 high frequency strain transducer for acoustic wave signal processing (1977) (2)
- Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools (2002) (2)
- Integrated Ultrasonic Transducer (1977) (2)
- Surface lifetime degradation in Si and Ge under low energy electron irradiation (1973) (2)
- Multicast 4×20 silicon photonic MEMS switches (2015) (2)
- Vision-based Teleoperation of a Stroboscopic Microscopic Interferometric System for Remote (2005) (2)
- Integrated micromachined scanning display systems (1999) (1)
- Row/column addressing of scalable silicon photonic MEMS switches (2015) (1)
- A Magnetically Actuated Scanner for Intravascular Ultrasound Imaging (2001) (1)
- VIB-3 correlation between substrate and gate currents in MOSFETs (1981) (1)
- Precision and performance of polysilicon micromirrors for optics (1995) (1)
- Actuated micromachined microreflector with two degrees of freedom for integrated optical systems (1996) (1)
- VI-4 piezoelectric diffused MOS (PI-DMOS) transistor as strain transducer (1975) (1)
- MIPS transducer microphone (1966) (1)
- Numerical calculation of the field distribution and related device parameters for MOS transistors in saturation (1968) (1)
- IVa-7 the effects of charge injection on gated-diode breakdown (1977) (1)
- Low stress nitrides for use in electronic devices (1986) (1)
- Vision-based teleoperation of a stroboscopic microscopic interferownetric system for remote dynamic MEMS testing (2005) (1)
- Integrating sensors and electronics—New challenges for silicon (1984) (1)
- Piezoelectric Field-Effect Transducers* (2018) (0)
- Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer (2007) (0)
- IDT-Generated Ultrasonic Lamb Waves in a Very Thin Membrane (1985) (0)
- SemiconductingTemperatureSensorsandtheirApplications by Herbert B. Sachse. Reviewer (1975) (0)
- TP-B2 material and device constraints in piezoelectric FET strain transducers (1978) (0)
- Research on field-effect transistor stress transducers Semiannual status report, 1 Jul. - 31 Dec. 1967 (1967) (0)
- VI-3 effective recombination velocity at a buried layer to epitaxial interface (1975) (0)
- Characterization of RF sputtered ZnO piezoelectric films using transmission electron microscope (1975) (0)
- to-Fiber CO icromachine (1996) (0)
- High-precision Si-micromachined micromirrors with on-chip actuation for external-cavity semiconductor lasers (1995) (0)
- Silicon Micromachined Microphotonics (1996) (0)
- MEMS—the view back…and the vistas ahead (2001) (0)
- PHOTOCONDUCTOR-SEMICONDUCTOR EMITTERS. (1966) (0)
- Microdynamic Systems in the Silicon Age (1998) (0)
- High-Quality Microlenses and High-Performance Systems For Optical Microelectromechanical Systems (2003) (0)
- Design and performance of resistive-gated MOSFETs for analog integrated circuits (1979) (0)
- Recent developments in research on metal-insulator-piezoelectric semiconductor transducers (1966) (0)
- 691 A Micromachined Kelvin Probe With Integrated Actuator for Microfluidic and Solid-State Applications (2005) (0)
- Field-effect transistor stress transducers Semiannual status report, 1 Jan. - 30 Jun. 1968 (1968) (0)
- VIA-5 hot-electron induced excess carriers in n-channel MOSFETs (1982) (0)
- Review Paper Devices, Structures, and Processes for Optical MEMS (2007) (0)
- Session 11 Solid state devices—Junction device phenomena (1980) (0)
- Berkeley Sensor and Actuator Center membership (1989) (0)
- Observation of Visible-Light from Si MO (1983) (0)
- VB-6 highly sensitive integrable silicon carrier-domain magnetometer (1981) (0)
- Publication Classi?cation (2013) (0)
- Erratum: Bistability, regular self-pulsing, and chaos in lasers with external feedback [J. Opt. Soc. Am. B 2, 184-192 (1985)] (1985) (0)
- The effects of constant-current stress on gate oxides in LDD MOSFET's (1987) (0)
- Comments on "Adaptive thin-film transistor" (1968) (0)
- Barrier model for carrier transport at weakly inverted Si surfaces (1973) (0)
- Session 26 Solid state devices — Modeling and MOS devices (1981) (0)
- Space-charge-limited currents and field emission currents in thin-film CdS diodes (1963) (0)
- Low temperature bonding with oxides for electronic device applications (1988) (0)
- Surface Transport Studies for MOS Devices. (1977) (0)
- Polycrystalline Silicon as a Mechanical Material (1990) (0)
- TP-A3 the effects of charge injection on avalanche injected oxide current (1978) (0)
- A Monolithic ZnO/Si PI-DMOS Convolver (1981) (0)
- Reactive Ion Etching of Indium-Tin-Oxide Films. (1989) (0)
- Field-effect conductance modulation in extremely thin films of cesium (1968) (0)
- Magnetically Actuated Microplatform Scanners for Intravascular Ultrasound Imaging (2000) (0)
- As-deposited low-strain LPCVD (low-pressure, chemical-vapor-deposition) polysilicon (1988) (0)
- IIIa-7 experimental determination of carrier velocities in inversion layers on silicon (1977) (0)
- Chemical Surface Modification of Porous Silicon. (1993) (0)
- SESSION V-A-HIGH FIELD DEVICES AND DIFFUSION (1963) (0)
- Cmos-compatible High-performance Microscanners, including Structures, High-yield Simplified Fabrication Methods and Applications Cmos-compatible High-performance Microscanners, including Structures, High-yield Simplified Fabrication Methods and Applications 5 (2007) (0)
- Schottky high-field emission at Au-CdS rectifying contacts (1963) (0)
This paper list is powered by the following services:
Other Resources About Richard S. Muller
What Schools Are Affiliated With Richard S. Muller?
Richard S. Muller is affiliated with the following schools:
