Roya Maboudian
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American academic and researcher
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Roya Maboudianchemistry Degrees
Chemistry
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Chemical Engineering
#438
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#455
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Chemistry
Roya Maboudian's Degrees
- PhD Chemical Engineering University of California, Berkeley
- Masters Chemical Engineering University of California, Berkeley
- Bachelors Chemical Engineering University of Tehran
Why Is Roya Maboudian Influential?
(Suggest an Edit or Addition)According to Wikipedia, Roya Maboudian is an American academic and researcher in the field of chemical engineering. She is professor of chemical and biomolecular engineering at the University of California, Berkeley. She is a co-director of the Berkeley Sensor and Actuator Center, and an editor of the IEEE Journal of Microelectromechanical Systems. She was one of the first women to earn tenure in the chemical engineering department at the University of California, Berkeley.
Roya Maboudian's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Strong interlayer coupling in van der Waals heterostructures built from single-layer chalcogenides (2014) (902)
- Critical Review: Adhesion in surface micromechanical structures (1997) (791)
- Hole selective MoOx contact for silicon solar cells. (2014) (435)
- Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines (1998) (410)
- Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments (2000) (340)
- High Surface Area MoS2/Graphene Hybrid Aerogel for Ultrasensitive NO2 Detection (2016) (290)
- Evidence of structural strain in epitaxial graphene layers on 6H-SiC(0001). (2008) (262)
- Metal-catalyzed crystallization of amorphous carbon to graphene (2010) (250)
- Surface processes in MEMS technology (1998) (239)
- Tribological Challenges in Micromechanical Systems (2013) (231)
- Silver dendrites from galvanic displacement on commercial aluminum foil as an effective SERS substrate. (2010) (227)
- Facile fabrication of flexible all solid-state micro-supercapacitor by direct laser writing of porous carbon in polyimide (2015) (201)
- Highly flexible, all solid-state micro-supercapacitors from vertically aligned carbon nanotubes (2014) (184)
- Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer (2001) (181)
- Surface chemistry and tribology of MEMS. (2004) (170)
- High friction from a stiff polymer using microfiber arrays. (2006) (165)
- High-performance surface-micromachined inchworm actuator (2003) (157)
- Graphene decoration with metal nanoparticles: towards easy integration for sensing applications. (2012) (156)
- Air-Stable n-Doping of WSe2 by Anion Vacancy Formation with Mild Plasma Treatment. (2016) (154)
- Thermal behavior of alkyl monolayers on silicon surfaces (1997) (152)
- Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS (2001) (149)
- Metallization and nanostructuring of semiconductor surfaces by galvanic displacement processes (2007) (144)
- Si Nanowire Bridges in Microtrenches: Integration of Growth into Device Fabrication (2005) (140)
- Thermal Behavior of Alkylsiloxane Self-Assembled Monolayers on the Oxidized Si(100) Surface (1997) (135)
- Silicon carbide nanowires as highly robust electrodes for micro-supercapacitors (2013) (134)
- Silicon carbide coated silicon nanowires as robust electrode material for aqueous micro-supercapacitor (2012) (130)
- Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method (2005) (129)
- Advances in silicon carbide science and technology at the micro- and nanoscales (2013) (129)
- High-performance all solid-state micro-supercapacitor based on patterned photoresist-derived porous carbon electrodes and an ionogel electrolyte (2014) (122)
- Gold Deposition by Galvanic Displacement on Semiconductor Surfaces: Effect of Substrate on Adhesion (2002) (122)
- A low-temperature CVD process for silicon carbide MEMS (2002) (121)
- Observation of Three Growth Mechanisms in Self-Assembled Monolayers (1998) (113)
- Vapor phase anti-stiction coatings for MEMS (2003) (106)
- Photoresist-derived porous carbon for on-chip micro-supercapacitors (2013) (104)
- Fully-differential poly-SiC Lame mode resonator and checkerboard filter (2005) (104)
- Highly crystalline MoS2 thin films grown by pulsed laser deposition (2015) (103)
- Single nanowire thermal conductivity measurements by Raman thermography. (2010) (100)
- Aluminum-induced dreierketten chain cross-links increase the mechanical properties of nanocrystalline calcium aluminosilicate hydrate (2017) (98)
- Adhesion Characteristics of PDMS Surfaces During Repeated Pull‐Off Force Measurements (2010) (93)
- General Thermal Texturization Process of MoS2 for Efficient Electrocatalytic Hydrogen Evolution Reaction. (2016) (92)
- Covalent attachment of organic monolayers to silicon carbide surfaces. (2008) (92)
- Gecko-inspired combined lamellar and nanofibrillar array for adhesion on nonplanar surface. (2009) (91)
- Wafer level anti-stiction coatings for MEMS (2003) (91)
- Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces (1997) (91)
- Synthesis of High Density, Size-Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask (2006) (90)
- Selective ultrathin carbon sheath on porous silicon nanowires: materials for extremely high energy density planar micro-supercapacitors. (2014) (88)
- Adhesion hysteresis of silane coated microcantilevers (2000) (86)
- MnOx-decorated carbonized porous silicon nanowire electrodes for high performance supercapacitors (2017) (83)
- Hierarchical Co3O4/CuO nanorod array supported on carbon cloth for highly sensitive non-enzymatic glucose biosensing (2019) (82)
- The chemistry and structure of calcium (alumino) silicate hydrate: A study by XANES, ptychographic imaging, and wide- and small-angle scattering (2019) (81)
- Direct observation of sulfur dimers in alkanethiol self-assembled monolayers on Au(111) (1999) (77)
- A direct thin-film path towards low-cost large-area III-V photovoltaics (2013) (72)
- Polymer-oligopeptide composite coating for selective detection of explosives in water. (2009) (71)
- In Situ Localized Growth of Ordered Metal Oxide Hollow Sphere Array on Microheater Platform for Sensitive, Ultra-Fast Gas Sensing. (2017) (71)
- Selective growth of Si nanowire arrays via galvanic displacement processes in water-in-oil microemulsions. (2005) (70)
- Stiction reduction processes for surfacemicromachines (1997) (70)
- Flexible micro-supercapacitors with high energy density from simple transfer of photoresist-derived porous carbon electrodes (2014) (70)
- Platinum Nanoparticle Loading of Boron Nitride Aerogel and Its Use as a Novel Material for Low‐Power Catalytic Gas Sensing (2016) (68)
- Factors enhancing the reliability of touch-mode electrostatic actuators (2000) (67)
- Atom‐resolved imaging and spectroscopy on the GaAs(001) surface using tunneling microscopy (1992) (67)
- Effects of ambient humidity and temperature on the NO2 sensing characteristics of WS2/graphene aerogel (2018) (66)
- Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology (2004) (66)
- High Speed Epitaxial Perovskite Memory on Flexible Substrates (2017) (65)
- Catalytic hydrogen sensing using microheated platinum nanoparticle-loaded graphene aerogel (2015) (64)
- Suspended mechanical structures based on elastic silicon nanowire arrays. (2007) (63)
- Temperature dependence of Raman spectra for individual silicon nanowires (2009) (63)
- Ammonium Fluoride Anti-stiction Treatments For Polysilicon Microstructures (1995) (63)
- Single-layer CVD-grown graphene decorated with metal nanoparticles as a promising biosensing platform. (2012) (60)
- Formation of alkanethiol monolayer on Ge(111). (2001) (59)
- Nanowire-Assembled Hierarchical ZnCo2O4 Microstructure Integrated with a Low-Power Microheater for Highly Sensitive Formaldehyde Detection. (2016) (59)
- Stability of ammonium fluoride‐treated Si(100) (1995) (58)
- Adhesion and Friction Issues Associated With Reliable Operation of MEMS (1998) (57)
- Poly(ethylene glycol) monolayer formation and stability on gold and silicon nitride substrates. (2008) (57)
- Selective Deposition of Thin Copper Films onto Silicon with Improved Adhesion (2001) (57)
- Micromechanical properties of silicon-carbide thin films deposited using single-source chemical-vapor deposition (2001) (55)
- Growth of branching Si nanowires seeded by Au–Si surface migration (2008) (51)
- Effects of CO2 and temperature on the structure and chemistry of C–(A–)S–H investigated by Raman spectroscopy (2017) (51)
- 3D MoS2 Aerogel for Ultrasensitive NO2 Detection and Its Tunable Sensing Behavior (2017) (50)
- In Situ Localized Growth of Porous Tin Oxide Films on Low Power Microheater Platform for Low Temperature CO Detection (2016) (49)
- Single-Source Chemical Vapor Deposition of 3 C SiC Films in a LPCVD Reactor I. Growth, Structure, and Chemical Characterization (2004) (48)
- Silver Nanostructures on Silicon Based on Galvanic Displacement Process (2009) (47)
- An investigation of sidewall adhesion in MEMS (2003) (46)
- Temperature-induced self-pinning and nanolayering of AuSi eutectic droplets. (2008) (46)
- Graphitization of n-type polycrystalline silicon carbide for on-chip supercapacitor application (2011) (46)
- Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments (2007) (45)
- High-Temperature All Solid-State Microsupercapacitors based on SiC Nanowire Electrode and YSZ Electrolyte. (2015) (44)
- Nitrogen doping of polycrystalline 3C-SiC films grown using 1,3-disilabutane in a conventional LPCVD reactor (2003) (44)
- Silver nanodesert rose as a substrate for surface-enhanced Raman spectroscopy. (2009) (44)
- Facile synthesis of ZnO-SnO2 hetero-structured nanowires for high-performance NO2 sensing application (2021) (43)
- Nanoelectromechanical relays with decoupled electrode and suspension (2011) (43)
- Formation of alkylsiloxane self-assembled monolayers on Si3N4 (1999) (42)
- Lubrication of polysilicon micromechanisms with self-assembled monolayers (1998) (42)
- Semiconductor nanowires directly grown on graphene--towards wafer scale transferable nanowire arrays with improved electrical contact. (2013) (42)
- Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications (2008) (41)
- Hole Selective MoO x Contact for Silicon Solar Cells (2014) (41)
- A silicon carbide array for electrocorticography and peripheral nerve recording (2017) (41)
- Gold-coated silver dendrites as SERS substrates with an improved lifetime. (2012) (41)
- Palladium nanostructures from galvanic displacement as hydrogen peroxide sensor (2010) (40)
- Nitrogen doping of polycrystalline 3C–SiC films grown by single-source chemical vapor deposition (2002) (39)
- Formation of fiber texture in β-SiC films deposited on Si(100) substrates (2007) (39)
- Strategies for controlling Si nanowire formation during Au-assisted electroless etching (2011) (38)
- Nonenzymatic glucose sensing based on deposited palladium nanoparticles on epoxy-silver electrodes (2011) (38)
- High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma (2003) (37)
- Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications (2010) (37)
- Laterally Actuated Platinum-Coated Polysilicon NEM Relays (2013) (37)
- Template assisted deposition of Ag nanoparticle arrays for surface-enhanced Raman scattering applications (2007) (36)
- Ultrasmooth gold thin films by self-limiting galvanic displacement on silicon. (2011) (35)
- Chemical and thermal stability of alkanethiol and sulfur passivated InP(100). (2004) (35)
- Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors (2006) (35)
- Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane (2009) (35)
- MEMS Rotary Engine Power System (2003) (34)
- Growth of Epitaxial 3C-SiC Films on Si(100) via Low Temperature SiC Buffer Layer (2010) (34)
- Selective deposition of gold nanoclusters on silicon by a galvanic displacement process (2002) (34)
- Low-Temperature, Ion Beam-Assisted SiC Thin Films With Antireflective ZnO Nanorod Arrays for High-Temperature Photodetection (2011) (34)
- Effect of fiber geometry on macroscale friction of ordered low-density polyethylene nanofiber arrays. (2011) (34)
- Silicon carbide coated MEMS strain sensor for harsh environment applications (2007) (33)
- Selective metallization of silicon micromechanical devices (2002) (32)
- Thermal behavior of perfluoroalkylsiloxane monolayers on the oxidized Si(100) surface. (2006) (32)
- Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices (1995) (31)
- OXIDATION MECHANISM OF THE AMMONIUM-FLUORIDE-TREATED SI(100) SURFACE (1996) (31)
- Study of the desorption mechanism of alkylsiloxane self-assembled monolayers through isotopic labeling and high resolution electron energy-loss spectroscopy experiments (1998) (30)
- Adhesion evaluation of immersion plating copper films on silicon by microindentation measurements (2003) (30)
- Cycling characteristics of high energy density, electrochemically activated porous-carbon supercapacitor electrodes in aqueous electrolytes (2013) (29)
- Electrical Characterization of n-Type Polycrystalline 3C-Silicon Carbide Thin Films Deposited by 1,3-Disilabutane (2006) (29)
- Microfabricated Thermally Isolated Low Work-Function Emitter (2014) (29)
- Investigation of quaternary ammonium silane‐coated sand filter for the removal of bacteria and viruses from drinking water (2012) (29)
- Characterization of polycrystalline 3C-SiC films deposited from the precursors 1,3-disilabutane and dichlorosilane (2008) (29)
- Copper Deposition onto Silicon by Galvanic Displacement: Effect of Silicon Dissolution Rate (2008) (28)
- Single-Source Chemical Vapor Deposition of SiC Films in a Large-Scale Low-Pressure CVD Growth, Chemical, and Mechanical Characterization Reactor (2006) (28)
- Conductometric gas sensing behavior of WS2 aerogel (2017) (27)
- High modulus polycrystalline 3C-SiC technology for RF MEMS (2003) (26)
- Structure and morphology of annealed gold films galvanically displaced on the Si(111) surface (2007) (26)
- Reversible Liquid−Liquid Transitions in the Early Stages of Monolayer Self-Assembly (2000) (25)
- Microfabricated silicon carbide thermionic energy converter for solar electricity generation (2012) (25)
- Characterization of residual strain in SiC films deposited using 1,3-disilabutane for MEMS application (2003) (24)
- Tunneling spectroscopy on the GaAs(110) surface: Effect of dopant concentration (1992) (24)
- Bonding characteristics of 3C-SiC wafers with hydrofluoric acid for high-temperature MEMS applications (2005) (23)
- Effect of formation temperature and roughness on surface potential of octadecyltrichlorosilane self-assembled monolayer on silicon surfaces. (2007) (23)
- Strain engineering of epitaxially transferred, ultrathin layers of III-V semiconductor on insulator (2011) (23)
- In situ formation of metal-organic framework derived CuO polyhedrons on carbon cloth for highly sensitive non-enzymatic glucose sensing. (2019) (23)
- Boron Doping and Defect Engineering of Graphene Aerogels for Ultrasensitive NO2 Detection (2018) (22)
- Galvanic deposition of Pt clusters on silicon: effect of HF concentration and application as catalyst for silicon nanowire growth. (2010) (22)
- Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC (2010) (22)
- Characterization of AFM cantilevers coated with diamond-like carbon (2001) (22)
- High Surface Area MoS 2 /Graphene Hybrid Aerogel for Ultrasensitive NO 2 Detection (2016) (22)
- Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated Microstructures (2012) (21)
- Evolution in Surface Morphology of Epitaxial Graphene Layers on SiC Induced by Controlled Structural Strain (2008) (21)
- Templated 3D ultrathin CVD graphite networks with controllable geometry: synthesis and application as supercapacitor electrodes. (2014) (21)
- Surface engineering for reliable operation of MEMS devices (2003) (21)
- Enhanced Ohmic contact via graphitization of polycrystalline silicon carbide (2010) (21)
- Comparative studies on electrochemical cycling behavior of two different silica-based ionogels (2016) (21)
- Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure (2010) (21)
- Fracture of polycrystalline 3C-SiC films in microelectromechanical systems (2004) (21)
- Reconstructing hydrophobic ZIF-8 crystal into hydrophilic hierarchically-porous nanoflowers as catalyst carrier for nonenzymatic glucose sensing (2020) (21)
- Determination of substrate pinning in epitaxial and supported graphene layers via Raman scattering (2011) (20)
- Solvent-induced formation of unidirectionally curved and tilted Si nanowires during metal-assisted chemical etching (2013) (20)
- Real-time observation of reactive spreading of gold on silicon. (2009) (20)
- Epitaxial Graphene Growth on 3C–SiC(111)/AlN(0001)/Si(100) (2011) (20)
- Step bunching and step equalization on vicinal GaAs(001) surfaces (1994) (19)
- Angle‐resolved velocity distributions of excited Rh atoms ejected from ion‐bombarded Rh{100} (1992) (19)
- Plasma assisted formation of 3D highly porous nanostructured metal oxide network on microheater platform for Low power gas sensing (2019) (19)
- Adhesion characteristics of MEMS in microfluidic environments (2005) (18)
- Direct Organization of Morphology-Controllable Mesoporous SnO2 Using Amphiphilic Graft Copolymer for Gas-Sensing Applications. (2017) (18)
- Synthesis and gas sensing properties of NiO/ZnO heterostructured nanowires (2021) (18)
- Electrodeposition of High-Purity Indium Thin Films and Its Application to Indium Phosphide Solar Cells (2014) (18)
- Energy‐ and angle‐resolved measurements of the Rh(4F9/2) and Rh(4F7/2) populations from ion bombarded Rh{100} (1992) (18)
- Electrochemical Fabrication of Supported Ni Nanostructures Through Transferred Porous Anodic Alumina Mask (2006) (18)
- Nanometer-thin titania films with SAM-level stiction and superior wear resistance for reliable MEMS performance (2004) (17)
- Cathodic corrosion of polycrystalline silicon MEMS (2008) (17)
- Electronic and nuclear effects in ion‐induced desorption from NaCl{100} (1992) (17)
- Surface functionalization of carbon cloth with cobalt-porphyrin-based metal organic framework for enhanced electrochemical sensing (2019) (16)
- Control of strain gradient in doped polycrystalline silicon carbide films through tailored doping (2006) (16)
- Interaction of H(D) Atoms with Octadecylsiloxane Self-Assembled Monolayers on the Si(100) Surface (1997) (16)
- Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS (2006) (16)
- Effect of repeated contact on adhesion measurements involving polydimethylsiloxane structural material (2009) (16)
- Effect of temperature on in-use stiction of cantilever beams coated with perfluorinated alkysiloxane monolayers (2006) (15)
- Silicon nanowire coupled micro-resonators (2008) (15)
- Pd Nanoclusters Confined in ZIF-8 Matrixes for Fluorescent Detection of Glucose and Cholesterol (2021) (15)
- Tuning the Friction Characteristics of Gecko-Inspired Polydimethylsiloxane Micropillar Arrays by Embedding Fe₃O₄ and SiO₂ Particles. (2015) (14)
- Dynamics of Copper Deposition onto Silicon by Galvanic Displacement (2008) (14)
- Scanning tunneling microscopy of flat and vicinal molecular‐beam epitaxy grown GaAs(001)‐(2×4) surfaces: The effect of growth rate (1993) (14)
- Interfacial Adhesion between Rough Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS Technology (2010) (14)
- Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating (2013) (13)
- Micellar block copolymer templated galvanic displacement for epitaxial nanowire device integration (2011) (13)
- Effects of Annealing on Residual Stress and Strain Gradient of Doped Polycrystalline SiC Thin Films (2008) (13)
- Transformer coupled plasma etching of 3C-SiC films using fluorinated chemistry for microelectromechanical systems applications (2004) (13)
- Role of counter-substrate surface energy in macroscale friction of nanofiber arrays. (2012) (13)
- Silicate Bond Characteristics in Calcium–Silicate–Hydrates Determined by High Pressure Raman Spectroscopy (2020) (13)
- Plastic deformation mechanism of calcium-silicate hydrates determined by deviatoric-stress Raman spectroscopy (2021) (13)
- Low-power catalytic gas sensing using highly stable silicon carbide microheaters (2017) (13)
- Deuterium etching of the Si-rich SiC(0001) (3×3) surface reconstruction (2000) (12)
- Transistor-based work function measurement of metal-organic frameworks for ultra-low-power, rationally designed chemical sensors. (2019) (12)
- Experimental Investigation of Silicon Surface Migration in Low Pressure Nonreducing Gas Environments (2009) (12)
- Hierarchical cobalt oxide-functionalized silicon carbide nanowire array for efficient and robust oxygen evolution electro-catalysis (2018) (12)
- Performance of an ultrahigh‐vacuum sample transfer system for investigation of molecular‐beam epitaxy grown semiconductor surfaces (1993) (11)
- Tuning micropillar tapering for optimal friction performance of thermoplastic gecko-inspired adhesive. (2014) (11)
- Copper deposition onto silicon by galvanic displacement : Effect of Cu complex formation in NH4F solutions (2009) (11)
- Nickel and platinum ohmic contacts to polycrystalline 3C-silicon carbide (2007) (11)
- Friction characteristics of polymeric nanofiber arrays against substrates with tailored geometry. (2013) (11)
- A finite element technique for accurate determination of interfacial adhesion force in MEMS using electrostatic actuation (2011) (11)
- Flexible micro-supercapacitors from photoresist-derived carbon electrodes on flexible substrates (2014) (11)
- Increased Optoelectronic Quality and Uniformity of Hydrogenated p-InP Thin Films (2016) (10)
- Silicon Carbide Thin Films using 1,3-Disilabutane Single Precursor for MEMS Applications - A Review (2006) (10)
- Surface science lettersScanning tunneling microscopy of the filled and empty arsenic states on the GaAs(001)-(2 × 4) surface (1992) (10)
- Nitrate amperometric sensor in neutral pH based on Pd nanoparticles on epoxy-copper electrodes (2013) (10)
- Electropolishing of n-Type Polycrystalline 3C-Silicon Carbide (2014) (10)
- Mutanofactin promotes adhesion and biofilm formation of cariogenic Streptococcus mutans (2021) (10)
- Application of principal component analysis to a full profile correlative analysis of FTIR spectra (2012) (10)
- Improved vapor-phase deposition technique for antistiction monolayers (2004) (10)
- Silicon carbide nanowires as an electrode material for high temperature supercapacitors (2012) (10)
- Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes (2011) (10)
- TiN diffusion barrier for stable W/SiC(0001) interfaces in inert ambient at high temperature (2019) (10)
- Branching induced faceting of Si nanotrees (2010) (10)
- Electrical and Mechanical Characterization of Doped and Annealed Polycrystalline 3C-SiC Thin Films (2009) (9)
- Well-connected ZnO nanoparticle network fabricated by in-situ annealing of ZIF-8 for enhanced sensitivity in gas sensing application (2021) (9)
- Inline Measurement of Adhesion Force Using Electrostatic Actuation and Capacitive Readout (2012) (9)
- Sequestration of solid carbon in concrete: A large-scale enabler of lower-carbon intensity hydrogen from natural gas (2021) (9)
- Magnetic micromechanical structures based on CoNi electrodeposited alloys (2010) (9)
- In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument (2009) (9)
- Ex situ vapor phase boron doping of silicon nanowires using BBr3. (2010) (9)
- THERMIONIC EMISSION FROM MICROFABRICATED SILICON-CARBIDE FILAMENTS (2009) (9)
- Single-Source CVD of 3 C SiC Films in a LPCVD Reactor II. Reactor Modeling and Chemical Kinetics (2004) (8)
- Room-Temperature Wet Etching of Polycrystalline and Nanocrystalline Silicon Carbide Thin Films with HF and HNO3 (2009) (8)
- Molecular Vapor Deposition - An Improved Vapor-Phase Deposition Technique of Molecular Coatings for MEMS Devices (2004) (8)
- Charging and discharging behavior in dielectric-coated MEMS electrodes probed by Kelvin probe force microscopy (2012) (8)
- Casting Nanoporous Platinum in Metal–Organic Frameworks (2019) (8)
- Layer-by-layer self-assembled conductive thin films for MEMS applications (2006) (7)
- Growth of 3C-SiC Thin Film on AlN/Si(100) with Atomically Abrupt Interface via Tailored Precursor Feeding Procedure (2010) (7)
- Antistiction coatings for surface micromachines (1998) (7)
- ENCAPSULATED THERMIONIC ENERGY CONVERTER WITH STIFFENED SUSPENSION (2012) (7)
- In-situ synthesized N-doped ZnO for enhanced CO2 sensing: experiments and DFT calculations (2022) (6)
- Demonstration of Hexagonal Phase Silicon Carbide Nanowire Arrays with Vertical Alignment (2016) (6)
- Morphological, Electrical, and Chemical Changes in Cyclically Contacting Polycrystalline Silicon Surfaces Coated with Perfluoroalkylsilane Self-Assembled Monolayer (2011) (6)
- Two-fluid wetting behavior of a hydrophobic silicon nanowire array. (2014) (6)
- SIDEWALL SILICON CARBIDE EMITTERS FOR TERAHERTZ VACUUM ELECTRONICS (2012) (6)
- Single crystal silicon nanopillars, nanoneedles and nanoblades with precise positioning for massively parallel nanoscale device integration (2012) (6)
- Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines (2003) (6)
- Effect of illlumination on thermionic emission from microfabricated silicon carbide structures (2011) (6)
- 3D Stretchable Arch Ribbon Array Fabricated via Grayscale Lithography (2016) (5)
- Tunable in situ growth of porous cubic silicon carbide thin films via methyltrichlorosilane-based chemical vapor deposition (2009) (5)
- Atomic-Scale Electronic Characterization of Defects in Silicon Carbide Nanowires by Electron Energy-Loss Spectroscopy (2018) (5)
- Amine-functionalized metal-organic framework ZIF-8 toward colorimetric CO2 sensing in indoor air environment (2021) (5)
- A simple soft lithographic nanopatterning of gold on gallium arsenide via galvanic displacement. (2010) (5)
- Graphitization of n-type polycrystalline silicon carbide and its application for micro- supercapacitors (2011) (5)
- Low-energy ion bombardment to tailor the interfacial and mechanical properties of polycrystalline 3C-silicon carbide (2010) (5)
- Analysis of GaAs(100) surfaces prepared with various wet and in situ sample treatments (1993) (5)
- Cobalt Oxide-Decorated Silicon Carbide Nano-Tree Array Electrode for Micro-Supercapacitor Application (2021) (5)
- MnO x-decorated carbonized porous silicon nanowire electrodes for high performance supercapacitors † (2017) (5)
- A silicon carbide electrode technology for the central and the peripheral nervous system (2017) (4)
- Functionalization of Scanning Force Microscopy Cantilevers via Galvanic Displacement Technique (2001) (4)
- Nanocrystalline SiC metal-semiconductor-metal photodetector with ZnO nanorod arrays for high-temperature applications (2011) (4)
- In-line adhesion monitoring and the effects of process variations on adhesion in MEMS (2013) (4)
- The nanomechanical properties of non-crosslinked calcium aluminosilicate hydrate: The influences of tetrahedral Al and curing age (2022) (4)
- Effect of growth rate on the surface morphology of MBE-grown GaAs(001)-(2 × 4) (1994) (4)
- Raman Spectroscopy for Characterization of Semiconducting Nanowires (2012) (4)
- Low power microheater-based combustible gas sensor with graphene aerogel catalyst support (2015) (4)
- Fabrication of all-silicon carbide neural interfaces (2017) (4)
- W/TaC/SiC sandwich stack for high temperature applications (2019) (4)
- Gas Sensors: Platinum Nanoparticle Loading of Boron Nitride Aerogel and Its Use as a Novel Material for Low-Power Catalytic Gas Sensing (Adv. Funct. Mater. 3/2016) (2016) (4)
- Atomically ordered intermetallic PdZn coupled with Co nanoparticles as a highly dispersed dual catalyst chemically bonded to N-doped carbon for boosting oxygen reduction reaction performance (2020) (4)
- Scanning tunneling microscopy studies of Ge/GaAs(100) interface formation (1993) (4)
- Vapor Phase Anti-Stiction Monolayer Coatings for MEMS (2003) (4)
- Theoretical and experimental study of the chemisorption of 1,3 disilabutane on the Si(100) surface (2003) (4)
- Frictional characteristics of stiff, high aspect ratio microfiber arrays based on cyclic olefin polymers (2017) (3)
- Graphene Growth On Electrodeposited Polycrystalline Copper and Ruthenium (2014) (3)
- Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements (1998) (3)
- Molecular vapor deposition (MVD) for improved SAM coatings (2005) (3)
- Atomic excitations in ion induced sputtering of a Rh(100) single crystal (1992) (3)
- Resolving sub-nm steps with a low-voltage miniature scanning electron microscope (2009) (3)
- Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC (2009) (3)
- Improved Hydrogen Sensitivity and Selectivity in PdO with Metal-Organic Framework Membrane (2020) (3)
- SILICON CARBIDE FOR ENHANCED MEMS RELIABILITY (2004) (3)
- A SiC metallization scheme using an ALD protective layer for harsh environment devices (2012) (3)
- Enhanced thermal stability by introducing TiN diffusion barrier layer between W and SiC (2019) (3)
- Al-2 % Si Induced Crystallization of Amorphous Silicon (2007) (2)
- All solid-state micro-supercapacitors using ionogel electrolyte (2013) (2)
- Adhesion, Adhesion Hysteresis and Friction in MEMS Under Controlled Humidity Ambients (1998) (2)
- Impact of Surface Acoustic Wave Sensors on Chemical Sciences. (2020) (2)
- Effects of Relative Humidity and Actuation Voltage on MEMS Reliability (2007) (2)
- Measurement of adhesion force at elevated temperatures in MEMS using thermal-structural actuation (2011) (2)
- Scanning tunneling microscopy of the filled and empty arsenic states on the GaAs(001)-(2 × 4) surface (1992) (2)
- OHMIC CONTACT WITH ENHANCED STABILITY TO POLYCRYSTALLINE SILICON CARBIDE VIA CARBON INTERFACIAL LAYER (2010) (2)
- Effect of Electrode Geometry and Surface Passivation on Corrosion of Polycrystalline Silicon under High Relative Humidity and Bias (2009) (2)
- Mutanofactin promotes bacterial adhesion and biofilm formation of cariogenic Streptococcus mutans (2020) (2)
- Large-Scale Polycrystalline SiC Micromachining Technologies (2008) (2)
- Anodic oxidation of polycrystalline 3C-silicon carbide thin films during MEMS operation (2009) (2)
- Growth Mechanism of (111)-Textured 3C-SiC Films on Si(100) Substrates (2003) (2)
- Graphene Synthesis on Electrodeposited Substrates and Its Integration in MEMS for Sensor Applications (2014) (2)
- Resonant scanning tunneling spectroscopy of a quantum-well heterostructure (1993) (1)
- 2-axis MEMS deflecting cantilever microinstrument for in-situ reliability studies (2009) (1)
- ROBUST CATALYTIC GAS SENSING USING A SILICON CARBIDE MICROHEATER (2016) (1)
- Erratum: Angle‐resolved velocity distributions of excited Rh atoms ejected from ion‐bombarded Rh{100} [J. Chem. Phys. 97, 3846 (1992)] (1994) (1)
- Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating (2011) (1)
- Erratum: Energy‐ and angle‐resolved measurements of the Rh(4F9/2) and Rh(4F7/2) populations from ion bombarded Rh{100} [J. Chem. Phys. 96, 6314 (1992)] (1994) (1)
- Ni-induced graphitization for enhanced long-term stability of ohmic contact to polycrystalline 3C-SiC (2015) (1)
- TIME EVOLUTION OF RELEASED HOLE ARRAYS INTO MEMBRANES VIA VACUUM SILICON MIGRATION (2010) (1)
- Surface morphology of MBE-grown GaAs(001)-(2×4) and GaAs(001)-faceted surfaces investigated by scanning tunneling microscopy (1993) (1)
- Small-scale surface engineering problems (2010) (1)
- Thin Film Processes in MEMS and NEMS Technologies (2005) (1)
- Electrochemical Deposition of Copper onto Silicon (2007) (1)
- A scanning tunneling microscopy study of low-temperature grown GaAs (1993) (1)
- Selective Deposition of Metallic Nanoclusters on Silicon by a Galvanic Displacement Process (2003) (0)
- Graphene Growth on Electrodeposited Polycrystalline Metals and Alloys (2014) (0)
- NANO HIGHLIGHT Functionalized Nanowires for Electromechanical Detection of Molecules (2005) (0)
- Selective Deposition of Thin Copper Films onto Silicon with Improved Adhesion. (2001) (0)
- Scalable Super-Resolution Synthesis of Core-Vest Composites Assisted by Surface Plasmons. (2018) (0)
- Functionalized Metal-Organic Framework Toward Colorimetric CO2 Sensing in Indoor Air Environment (2021) (0)
- Synthesis and Electrochemical Stability of Ultrahigh Aspect Ratio Nanoporous Gold after Calixarene-Phosphine Ligand Removal. (2019) (0)
- Angular and Energy Distributions of RH Atoms Desorbed in an Excited State from Ion-Bombarded Rh{100} (1990) (0)
- OF POLYSILICON MICROMECHANISMS WITH SELF-ASSEMBLED MONOLAYERS S J ~ ~-- Y q0 g 4 gG (2008) (0)
- Leveraging Work-Function Changes in Metal-Organic Frameworks Towards Selective Ultra-Low-Power Gas Sensing (2020) (0)
- Thermal Behavior of Self - Assembled Monolayers (SAMs) (1998) (0)
- A new chemresistive NO2 sensing material: Hafnium diboride (2021) (0)
- Uniaxial stress increases layer stacking disorder in calcium silicate hydrates with low calcium content (2023) (0)
- opper deposition onto silicon by galvanic displacement : ffect of Cu complex formation in NH 4 F solutions (2009) (0)
- Electrodeposition of High-Purity Continuous Indium Thin Films Towards Indium Phosphide Solar Cells (2013) (0)
- Oral Topic : Flexible , Stretchable and Wearable Sensors Non-enzymatic glucose biosensors for smart wearables (2018) (0)
- Functionalized Nanowires for Electromechanical Detection of Molecules (2004) (0)
- (Invited) Microheater-Based Gas Sensing Platform for Low-Power Environmental Monitoring (2016) (0)
- Control of Residual Stress in Large-scale LPCVD SiC Films for MEMS and NEMS Applications (2006) (0)
- WS.3 - Non-enzymatic glucose biosensors for smart wearables (2018) (0)
- Micro Devices: Stiction and Adhesion (2001) (0)
- Infrared and Ultraviolet Spectra of Fulleranes: HREELS Studies and Implications for the Interstellar Medium (2010) (0)
- Humidity Dependence of Adhesion for Silane Coated Microcantilevers (1999) (0)
- MEMS NEMS Fabrication (2016) (0)
- Scalable Ultra Low-Power Chemical Sensing with Metal-Organic Frameworks (2019) (0)
- LUMINATION ON THERMIONIC EMIS ABRICATED SILICON CARBIDE STRUC (2011) (0)
- A Scanning Tunneling Microscopy Study of Mbe-Grown GAAS(001)-Faceted Surfaces (1992) (0)
- High Surface Area MoS2/Graphene Hybrid Aerogel for Ultrasensitive NO2Detection (2016) (0)
- Energy and angular distributions of particles desorbed from surfaces using multiphoton resonance ionization detection (1990) (0)
- Phonon Polariton Reflectance Spectra In a Silicon Carbide Membrane Hole Array (2007) (0)
- Effect of Harsh Environment on Surfactant-Coated MEMS (2008) (0)
- (Invited) Microfabricated Chemical Sensors for Industrial, Health and Environmental Monitoring (2021) (0)
- Development of Micro-Supercapacitor Electrodes Based on Hybrid Transition Metal Oxide, Carbonized Silicon Nanowire Array (2016) (0)
- Integrated superhard and metallic coatings for MEMS : LDRD 57300 final report. (2004) (0)
- PHOTORESIST-DERIVED POROUS CARBON FOR INTEGRATED ON-CHIP ENERGY STORAGE (2012) (0)
- Surface Treatment and Planarization (2011) (0)
- Controlled Structural Strain in Epitaxial Graphene Layers on 6H-SiC and Effects on Surface Morphology (2009) (0)
- Surface and Materials Issues for High Reliability MEMS (2006) (0)
- The dependence of poly-crystalline SiC mid-infrared optical properties on deposition conditions (2008) (0)
- (Invited) Microfabricated Sensors for Industrial, Health and Environmental Monitoring (2020) (0)
- Extraordinary Transmission Through APoly-SiC Membranewith Subwavelength HoleArrays (2007) (0)
- Title Platinum Nanoparticle Loading of Boron Nitride Aerogel and Its Use as a Novel Material for Low-Power Catalytic Gas Sensing Permalink (2015) (0)
- In-situ observation of surface and near-surface modification using scattering of ballistic phonons (1989) (0)
- Transport Imaging of Semiconductor Nanowires (2016) (0)
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