Stephen D. Senturia
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Stephen D. Senturiaengineering Degrees
Engineering
#4975
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#6205
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Applied Physics
#1337
World Rank
#1366
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Electrical Engineering
#1320
World Rank
#1411
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Engineering
Stephen D. Senturia's Degrees
- PhD Electrical Engineering Stanford University
- Masters Electrical Engineering Stanford University
Why Is Stephen D. Senturia Influential?
(Suggest an Edit or Addition)Stephen D. Senturia's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Microsystem Design (2000) (1900)
- M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures (1997) (854)
- Extending the travel range of analog-tuned electrostatic actuators (1999) (471)
- Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs (1999) (310)
- Effect of surface roughness on the response of thickness-shear mode resonators in liquids (1993) (289)
- Dynamics and Response of Polymer-Coated Surface Acoustic Wave Devices: Effect of Viscoelastic Properties and Film Resonance (1994) (269)
- Macro Power from Micro Machinery (1997) (269)
- Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films (1987) (254)
- MICRO-HEAT ENGINES, GAS TURBINES, AND ROCKET ENGINES -THE MIT MICROENGINE PROJECT- (1997) (245)
- CAD challenges for microsensors, microactuators, and microsystems (1998) (238)
- A computer-aided design system for microelectromechanical systems (MEMCAD) (1992) (231)
- Dielectric Analysis of Thermoset Cure. (1986) (225)
- The reliability of microelectromechanical systems (MEMS) in shock environments (2002) (214)
- Design and calibration of a microfabricated floating-element shear-stress sensor (1988) (207)
- Simulating the behavior of MEMS devices: computational methods and needs (1997) (203)
- Power MEMS and microengines (1997) (194)
- Fast capacitance extraction of general three-dimensional structures (1991) (188)
- Computer-aided generation of nonlinear reduced-order dynamic macromodels. I. Non-stress-stiffened case (2000) (186)
- Operation of microfabricated harmonic and ordinary side-drive motors (1990) (179)
- Thermoelastic damping in fine-grained polysilicon flexural beam resonators (2002) (133)
- Pull-in time dynamics as a measure of absolute pressure (1997) (127)
- Electrical conductivity in disordered systems (1973) (124)
- Moisture diffusion in poltimide films in integrated circuits (1985) (120)
- Speed-energy optimization of electrostatic actuators based on pull-in (1999) (119)
- Self-consistent simulation and modelling of electrostatically deformed diaphragms (1994) (118)
- Radiation effects in nitrided oxides (1983) (113)
- A study of three microfabricated variable-capacitance motors (1990) (108)
- 3D coupled electro-mechanics for MEMS: applications of CoSolve-EM (1995) (106)
- Novel microstructures for the in situ measurement of mechanical properties of thin films (1987) (102)
- Electron scattering interaction with coupled plasmon-polar-phonon modes in degenerate semiconductors (1978) (102)
- Analysis of Critical Debonding Pressures of Stressed Thin Films in the Blister Test (1988) (98)
- Electric micromotor dynamics (1992) (94)
- Computer-aided generation of nonlinear reduced-order dynamic macromodels. II. Stress-stiffened case (2000) (93)
- Principles in design and microfabrication of variable-capacitance side-drive motors (1990) (82)
- Low-order models for fast dynamical simulation of MEMS microstructures (1997) (80)
- The role of boundary layer capacitance at blocking electrodes in the interpretation of dielectric cure data in adhesives (1985) (80)
- In-Situ Measurement of the Properties of Curing Systems with Microdielectrometry. (1982) (79)
- Nuclear Spin-Lattice Relaxation of Liquids Confined in Porous Solids (1970) (79)
- Effect of air damping on the dynamics of nonuniform deformations of microstructures (1997) (78)
- IVB-2 Inversion layer mobility of MOSFET's with Nitrided Oxide gate dielectrics (1985) (77)
- Effect of support compliance and residual stress on the shape of doubly supported surface-micromachined beams (2000) (74)
- Synthetic spectra: a tool for correlation spectroscopy. (1997) (73)
- Simulation and design of microsystems: a 10-year perspective (1998) (67)
- Micromotor fabrication (1992) (66)
- Effect of Nitridation of Silicon Dioxide on Its Infrared Spectrum (1984) (65)
- Nuclear-Magnetic-Resonance Studies in PbTe andPb1−xSnxTe: An Experimental Determination ofk→·p→Band Parameters and Magnetic Hyperfine Constants (1973) (64)
- Annealing studies of PbTe and Pb1−xSnxTe (1973) (62)
- Anisotropic etching of silicon in hydrazine (1988) (60)
- Dielectric properties of bisphenol‐a epoxy resins (1989) (59)
- A thin-film capacitance humidity sensor (1981) (58)
- Application of the Island Blister Test for Thin Film Adhesion Measurement (1989) (57)
- Electrical properties of ion‐implanted poly(p‐phenylene sulfide) (1983) (57)
- Correction To "M-test: A Test Chip For Mems Material Property Measurement Using Electrostatically Actuated Test Structures" (1997) (57)
- CAD For Microelectromechanical Systems (1995) (54)
- Measurement of wear in polysilicon micromotors (1992) (54)
- Stress in Polyimide Coatings (1994) (52)
- The constitution of nitrided oxides and reoxidized nitrided oxides on silicon (1985) (49)
- The charge-flow transistor - A new MOS device. [for integrated sensor applications] (1977) (46)
- The Polychromator: A programmable MEMS diffraction grating for synthetic spectra (2000) (46)
- Electronic Circuits and Applications (1974) (45)
- Programmable diffraction gratings and their uses in displays, spectroscopy, and communications (2004) (45)
- IIIB-5 high-field electron capture and emission in nitrided oxides (1984) (44)
- The use of linear predictive modeling for the analysis of transients from experiments on semiconductor defects (1984) (44)
- k→·p→Model for the Magnetic Energy Levels in PbTe andPb1−xSnxTe (1973) (41)
- Computer aided macromodeling for mems (1998) (40)
- Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions (1993) (40)
- Dielectric analysis of the cure of thermosetting epoxy/amine systems (1986) (40)
- PULL-IN DYNAMICS OF ELECTROSTATICALLY-ACTUATED BEAMS (1996) (40)
- Moisture Effects on the Electrical Conductivity of Kapton Polyimide (1990) (39)
- Nonlinear electromechanical behaviour of an electrostatic microrelay (1997) (39)
- An MOS device for AC measurement of surface impedance with application to moisture monitoring (1982) (37)
- Plastic Deformation of Highly Doped Silicon (1989) (35)
- Material property measurements of micromechanical polysilicon beams (1996) (35)
- A CAD architecture for microelectromechanical systems (1990) (35)
- Perspectives on MEMS, past and future: the tortuous pathway from bright ideas to real products (2003) (34)
- Chemical interpretation of the relaxed permittivity during epoxy resin cure (1986) (32)
- Plastic deformation of higly doped Silicon (1990) (32)
- Pull-in time–energy product of electrostatic actuators: comparison of experiments with simulation (2000) (32)
- Calibrated measurements of elastic limit, modulus, and the residual stress of thin films using micromachined suspended structures (1988) (32)
- Introductory Applied Quantum and Statistical Mechanics (2004) (31)
- A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures (1993) (31)
- "Membuilder": An Automated 3D Solid Model Construction Program For Microelectromechanical Structures (1995) (30)
- Monitoring the cure of a composite matrix resin with microdielectrometry (1989) (29)
- Nuclear Resonance in Ferromagnetic Chromium Tribromide from 4.2°K to the Curie Point (1966) (29)
- The In-Situ Measurement of Biaxial Modulus and Residual Stress of Multi-Layer Polymeric Thin Films (1990) (28)
- Extending the Travel Range of Analog-Tuned (1999) (27)
- Optical dielectric constant of Pb1−xSnxTe in the narrow‐gap region (1976) (26)
- Monitoring of laminate cure with microdielectrometry (1986) (26)
- Resistive damping of pulse-sensed capacitive position sensors (1997) (26)
- The Feasibility of Electrical Monitoring of Resin Cure with the Charge-Flow Transistor. (1981) (26)
- Microsensor packaging and system partitioning (1988) (22)
- Diffractive-MEMS implementation of a Hadamard near-infrared spectrometer (2005) (22)
- Knight Shifts and Band Structure in the Lead-Salt Semiconductors (1970) (22)
- Automatic generation of a 3-D solid model of a microfabricated structure (1990) (20)
- Sodium transport in polyimide-SiO2 systems (1985) (19)
- Transport properties of a memory-type chalcogenide glass☆ (1970) (17)
- The role of the MOS structure in integrated sensors (1983) (17)
- Polyimides in Microelectronics (1987) (16)
- Sensitivity of Marginal Oscillator Spectrometers (1971) (16)
- Microdielectrometry: A New Method for In Situ Cure Monitoring. (1980) (16)
- MEMCAD capacitance calculations for mechanically deformed square diaphragm and beam microstructures (1991) (15)
- Megarad-Resistant 10nm Gate Dielectrics (1981) (15)
- A thermally isolated microstructure suitable for gas sensing applications (1988) (15)
- Viscoelasticity and creep recovery of polyimide thin films (1990) (14)
- A large-Travel vertical planar actuator with improved stability (2003) (13)
- IVa-3 the use of the charge-flow transistor to distinguish surface and bulk components of thin-film sheet resistance (1977) (13)
- NMR Study of a Memory‐Type Amorphous Semiconductor (1970) (13)
- Monolithic integrated circuit implementations of the charge-flow transistor oscillator moisture sensor (1981) (13)
- Design and analysis of an ARROW-waveguide-based silicon pressure transducer (1993) (13)
- THICK BURIED OXIDE IN SILICON ( TBOS ) : AN INTEGRATED FABRICATION TECHNOLOGY FOR MULTI-STACK WAFER-BONDED MEMS PROCESSES (1999) (12)
- The Feasibility of Embedded Electronics for Intelligent Structures (1992) (12)
- Selective, pulsed CVD of platinum on microfilament gas sensors (1996) (12)
- The future of microsensor and microactuator design (1996) (11)
- Optical waveguiding as a method for characterizing the effect of extended cure and moisture on polyimide films (1992) (10)
- The Moisture Dependence of the Electrical Sheet Resistance of Aluminum Oxide Thin Films with Application to Integrated Moisture Sensors (1982) (10)
- A MEMS-based programmable diffraction grating for optical holography in the spectral domain (2001) (10)
- Self-consistent Temperature Compensation For Resonant Sensors With Application To Quartz Bulk Acoustic Wave Chemical Sensors (1995) (10)
- Determination of the field effect in low‐conductivity materials with the charge‐flow transistor (1981) (10)
- Monitoring plasma over-etching of Wafer-bonded Microstructures (1995) (9)
- A MEMS-based correlation radiometer (2004) (9)
- Microsensors vs. ICs: a study in contrasts (1990) (9)
- A wafer-bonded silicon load cell operating in the tensioned-wire regime (1992) (8)
- A computationally practical approach to simulating complex surface-micromachined structures with fabrication non-idealities (1995) (8)
- The Design and Analysis of Shock Resistant Microsystems (MEMS) (2001) (7)
- Cure Monitoring and Control with Combined Dielectric/Temperature Probes. (1983) (7)
- Fabrication and testing of a micromachined shear sensor (1987) (6)
- Implementation Of A Memcad System For Electrostatic And Mechanical Analysis Of Complex Structures Fr (1992) (6)
- A twin-interferometer fiber-optic readout for diaphragm pressure transducers (1988) (6)
- Mechanical Properties of Microsensor Materials: How to Deal with the Process Dependences? (1991) (6)
- A metal-gate self-aligned MOSFET using nitride oxide (1985) (6)
- Microsensors vs. integrated circuits: a study in contrasts (1989) (6)
- Feynman revisited (1994) (6)
- An efficient 3-dimensional CAD tool for field-emission devices (1998) (6)
- Diffractive MEMS: the polychromator and related devices (2002) (6)
- Evaluation of a Process for Achieving Low Between‐Metal Contact Resistance in Plasma Etched Polyimide Vias (1983) (5)
- The aging of hydrated aluminum oxide thin films (1983) (5)
- Polyimide planarization in integrated circuits (1984) (5)
- Mechanical Properties of Microelectronics Thin Films: Silicon DiOxide (SiO2) (1989) (5)
- CALIBRATED SENSITIVITY MEASUREMENTS OF NUCLEAR MAGNETIC RESONANCE SPECTROMETERS. (1969) (5)
- Automatic Reduced-Order Modeling in MEMCAD using Modal Basis Functions (2001) (4)
- A MEMS-based programmable diffraction grating for optical holography in the spectral domain (2001) (4)
- A charge-flow transistor oscillator circuit (1979) (4)
- An MOS chip for surface impedance measurement and moisture monitoring (1980) (4)
- Na+ and Cl− transport across polyimide films (1991) (4)
- Electrical Properties of Ion Implanted Poly (P-Phenylene Sulfide) (1981) (4)
- Micro Gas Turbine Generators (2000) (4)
- Nuclear Resonance in Ferromagnetic Chromium Tribromide: Applications to High‐Precision Thermometry in the Range 2°–25°K (1970) (4)
- A Dielectric Study of the Time-Temperature-Transformation (TTT) Diagram of DGEBA Epoxy Resins Cured with DDS (Diaminodiphenylsulfone). (1983) (4)
- How to avoid the reviewer's axe: one editor's view. (2003) (3)
- Physical Characterization Of Microelectronic Polymeric Thin Films (1991) (3)
- A Process for Multi‐level Copper‐polyimide High Density Interconnect Structures, Flex Circuits and TAB Tape (1990) (3)
- Microtextured resonators for measuring liquid properties (1994) (3)
- Space-charge modified transients in polyimide (1988) (3)
- Origin and prevention of high contact resistance in multilevel metal-polyimide structures (1982) (3)
- The charge-flow transistor (1976) (2)
- Molding Of Plastic Components Using Micro-EDM Tools (1992) (2)
- Chemical microsensors based on surface impedance changes (1986) (2)
- How to avoid the reviewer's axe: one editor's view - Guest Editorial (2004) (2)
- In-Situ Monitoring of Polyamic Acid Imidization with Microdielectrometry (1984) (2)
- Charge-flow structures as polymeric early-warning fire alarm devices. M.S. Thesis; [metal oxide semiconductors] (1977) (2)
- Reduced-Order Models of Stress-Stiffened MEMS Structures (2000) (2)
- Reduced-order modeling of Lorentz force actuation with modal basis functions (1999) (2)
- Microfabricated Structures for the Measurement of Adhesion and MechanicaL Properties of Polymer Films (1988) (2)
- Correlation between Dielectric and Structural Properties during Epoxy Cure. (1987) (2)
- Characterization of Polyimide Thin Films on Metals (1992) (2)
- Conduction Transients in Polyimides (1989) (2)
- Characterization of Fluorinated Polyimide Films (1992) (1)
- Electrical Monitoring of Polymerization Reactions with the Charge-Flow Transistor. (1984) (1)
- Fabrication and evaluation of polymeric early-warning fire-alarm devices. [combustion products] (1975) (1)
- How to Avoid the Reviewer's Axe: One Editor's View (2004) (1)
- Transient field-effect and time-of-flight investigation of chalcogenide glasses (1986) (1)
- Perspectives on Microsensor Systems : Past, Present, and Future (20周年記念特集) -- (記念講演) (2008) (1)
- Reduced-order models of stress-stiffened MEMS strucutres (2000) (0)
- SODIUM TIL~qSPORT IN POLYINIDE-SiO 2 SYSTEMS (1985) (0)
- IIB-7 elimination of radiation-induced interface states by nitridation (1983) (0)
- The Disappearing Bottles (2006) (0)
- Studies of Conduction Mechanisms in Gas-Sensitive Polymer Films. (1981) (0)
- Effect of Population Mobility on the Location of Communal Shelters (1958) (0)
- Design considerations for a pilot process for separating municipal refuse. Final report (1975) (0)
- Credit and Time Pressure (2006) (0)
- Computer-Aided Fabrication of Integrated Circuits (1989) (0)
- Is There an Error (2006) (0)
- Summary Report of Activities Concerning Fundamental Electronic Properties of some Lead-Salt Semiconductors. (1971) (0)
- CAD FOR MIC'ROELECTROMECHANICAL SYSTEMS (1995) (0)
- WLF (Williams-Landel-Ferry) Model for Conductivity Changes during Epoxy/Amine Cure. (1986) (0)
- TP-B3 an integrated humidity sensor based on the charge-flow transistor (1978) (0)
- Diffractive MEMS: a versatile tool (2004) (0)
- Recent Developments in CAD and CIM for Microsystems (1992) (0)
- WLF (Williams-Landel-Ferry) Dependence of the Dielectric Properties of DGEBA (Diglycidyl Ether of Bisphenol-A) Epoxy Resins (1985) (0)
- Section 2 Digital Signal Processing (2009) (0)
- The Infinite Thesis: Introduction (2006) (0)
- ADVISORY EMIRETUS EDITORS EDITOR-IN-CHIEF (2008) (0)
- Dynamic MEMS (2003) (0)
- Chapter 2 . Computational Prototyping Tools and Techniques (2009) (0)
- Resonator response to Non-Newtonian fluids (1994) (0)
- How to Avoid The Reviewer ’ s Axe : (2004) (0)
- Understanding Dielectric Cure Monitoring. (1982) (0)
- WP-B2 chemical reaction monitoring with the charge-flow transistor (1980) (0)
- Computational Prototyping Tools and Techniques (1997) (0)
- A chromatographic analysis of the response of polymeric fire-detection devices to combustion products (1977) (0)
- Influence of Support Compliance and Residual Stress on the Shape of Doubly-Supported Surface-Micromachined Beams (1999) (0)
- Nuclear magnetic resonance in chromium tribromide. (1966) (0)
- Peanuts vs. Pyramids: Two Perspectives on MEMS (2009) (0)
- Investigations of Curing Chemistry and Hydrolytic Stability of Polyimide - on - Metal Interfaces (1993) (0)
- IVB-5 fatigued-induced defects in MNOS devices (1981) (0)
- MICROMACHINE DESIGN:An Important Goal (1996) (0)
- The analysis of non-oscillating transients using the covariance method with many different orders (1984) (0)
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