Steven M. George
#86,935
Most Influential Person Now
Chemist, researcher ; chemistry professor
Steven M. George's AcademicInfluence.com Rankings
Steven M. Georgechemistry Degrees
Chemistry
#1331
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#2023
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Physical Chemistry
#139
World Rank
#169
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Chemistry
Steven M. George's Degrees
- Masters Chemistry Stanford University
- Bachelors Chemistry University of California, Berkeley
Why Is Steven M. George Influential?
(Suggest an Edit or Addition)According to Wikipedia, Steven M. George from the University of Colorado, Boulder, was awarded the status of Fellow in the American Physical Society, after they were nominated by their Division of Chemical Physics in 1997, for "advancements in our understanding of gas-surface energy transfer dynamics, surface kinetics and diffusion processes, environmental chemistry at gas-surface interfaces, heterogeneous catalysis, and chemically controlled eptiaxy of novel thin film materials."
Steven M. George's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Atomic layer deposition: an overview. (2010) (4370)
- Low-Temperature Al2O3 Atomic Layer Deposition (2004) (1167)
- Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates (2002) (611)
- Surface Chemistry for Atomic Layer Growth (1996) (593)
- Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition (2003) (520)
- Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries (2010) (465)
- Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition (2002) (461)
- Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry (1997) (417)
- Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence (1995) (406)
- Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers (2006) (390)
- Fe3O4 Nanoparticles Confined in Mesocellular Carbon Foam for High Performance Anode Materials for Lithium‐Ion Batteries (2011) (384)
- Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers (2005) (369)
- Gas diffusion barriers on polymers using Al2O3 atomic layer deposition (2006) (358)
- Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition (2008) (355)
- Ultrathin coatings on nano-LiCoO2 for Li-ion vehicular applications. (2011) (337)
- Ultra-Low Thermal Conductivity in W/Al2O3 Nanolaminates (2004) (328)
- Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques (2003) (321)
- Enhanced Stability of LiCoO2 Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition (2010) (310)
- Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition (2012) (283)
- Surface chemistry for molecular layer deposition of organic and hybrid organic-inorganic polymers. (2009) (282)
- Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol (2008) (278)
- Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry (2008) (270)
- Al2O3 and TiO2 atomic layer deposition on copper for water corrosion resistance. (2011) (244)
- ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements (2002) (228)
- Three-dimensional Ni/TiO2 nanowire network for high areal capacity lithium ion microbattery applications. (2012) (219)
- Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition (2009) (214)
- Desorption kinetics of hydrogen and deuterium from Si(111) 7×7 studied using laser‐induced thermal desorption (1988) (203)
- Electrochemical effects of ALD surface modification on combustion synthesized LiNi1/3Mn1/3Co1/3O2 as a layered-cathode material (2011) (195)
- Comparison of hydrogen desorption kinetics from Si(111)7 × 7 and Si(100)2 × 1 (1991) (194)
- The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems (2006) (192)
- Improved Functionality of Lithium‐Ion Batteries Enabled by Atomic Layer Deposition on the Porous Microstructure of Polymer Separators and Coating Electrodes (2012) (191)
- H2O Condensation Coefficient and Refractive Index for Vapor-Deposited Ice from Molecular Beam and Optical Interference Measurements (1996) (190)
- Unexpected Improved Performance of ALD Coated LiCoO2/Graphite Li‐Ion Batteries (2013) (189)
- Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices (2003) (187)
- Condensation and evaporation of water on ice surfaces (1992) (185)
- Atomic Layer Deposition of TiO2 on Graphene for Supercapacitors (2012) (182)
- Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition (2011) (177)
- Atomic Layer Deposition of Al 2 O 3 Films on Polyethylene Particles (2004) (173)
- Thermal Stability of Hydroxyl Groups on a Well-Defined Silica Surface (1995) (171)
- Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles (2000) (167)
- Progress and future directions for atomic layer deposition and ALD-based chemistry (2011) (165)
- Using atomic layer deposition to hinder solvent decomposition in lithium ion batteries: first-principles modeling and experimental studies. (2011) (162)
- Effect of Al2O3 Coating on Stabilizing LiNi0.4Mn0.4Co0.2O2 Cathodes (2015) (162)
- Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction (2000) (153)
- Nanoscale Interface Modification of LiCoO2 by Al2O3 Atomic Layer Deposition for Solid-State Li Batteries (2012) (151)
- FTIR Studies of H2O and D2O Decomposition on Porous Silicon Surfaces (1991) (151)
- Reversible High‐Capacity Si Nanocomposite Anodes for Lithium‐ion Batteries Enabled by Molecular Layer Deposition (2014) (146)
- Molecular layer deposition of poly(p-phenylene terephthalamide) films using terephthaloyl chloride and p-phenylenediamine. (2008) (142)
- Thickness dependence of sensor response for CO gas sensing by tin oxide films grown using atomic layer deposition (2008) (140)
- Atomic Layer Deposition of SiO2 and TiO2 in Alumina Tubular Membranes: Pore Reduction and Effect of Surface Species on Gas Transport (2000) (139)
- Atomic layer deposited protective coatings for micro-electromechanical systems (2003) (139)
- Surface chemistry and film growth during TiN atomic layer deposition using TDMAT and NH3 (2003) (139)
- Molecular Layer Deposition of Nylon 66 Films Examined Using in Situ FTIR Spectroscopy (2007) (133)
- Properties of ZnO / Al2 O 3 Alloy Films Grown Using Atomic Layer Deposition Techniques (2003) (131)
- SiO2 Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy (2009) (126)
- Adsorption of H2O on a Single-Crystal α-Al2O3(0001) Surface (1998) (123)
- Growth and Properties of Hybrid Organic‐Inorganic Metalcone Films Using Molecular Layer Deposition Techniques (2013) (122)
- ALD of SiO2 at Room Temperature Using TEOS and H 2 O with NH 3 as the Catalyst (2004) (122)
- Conformal surface coatings to enable high volume expansion Li-ion anode materials. (2010) (121)
- Protection of polymer from atomic-oxygen erosion using Al2O3 atomic layer deposition coatings (2008) (118)
- Rotary reactor for atomic layer deposition on large quantities of nanoparticles (2007) (116)
- ZrO2 film growth by chemical vapor deposition using zirconium tetra-tert-butoxide (1999) (116)
- Effects of Atomic Layer Deposition of Al2O3 on the Li[Li0.20Mn0.54Ni0.13Co0.13]O2 Cathode for Lithium-Ion Batteries (2011) (114)
- Low-Temperature Al 2 O 3 Atomic Layer Deposition (2004) (114)
- Nanocoating Individual Silica Nanoparticles by Atomic Layer Deposition in a Fluidized Bed Reactor (2005) (112)
- Surface diffusion of hydrogen on Ru(001) studied using laser-induced thermal desorption (1986) (112)
- Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry (1996) (110)
- Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen (2009) (110)
- The Mechanical Robustness of Atomic-Layer- and Molecular-Layer-Deposited Coatings on Polymer Substrates (2009) (109)
- Atomic Layer Growth of SiO2 on Si(100) using SiCl4 and H2O in a Binary Reaction Sequence (1995) (108)
- Synthesis of ZnO quantum dot/graphene nanocomposites by atomic layer deposition with high lithium storage capacity (2014) (108)
- Surface-coating regulated lithiation kinetics and degradation in silicon nanowires for lithium ion battery. (2015) (107)
- Novel Processing to Produce Polymer/Ceramic Nanocomposites by Atomic Layer Deposition (2007) (105)
- Nanocoating individual cohesive boron nitride particles in a fluidized bed by ALD (2004) (105)
- Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions (2000) (104)
- Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma (2011) (103)
- Molecular Layer Deposition of Hybrid Organic‐Inorganic Polymer Films using Diethylzinc and Ethylene Glycol (2009) (103)
- Steady-state and transient photoconductivity in c-axis GaN nanowires grown by nitrogen-plasma-assisted molecular beam epitaxy (2010) (103)
- Charge Storage in Cation Incorporated α-MnO2 (2014) (102)
- Pseudocapacitance of Amorphous TiO2 Thin Films Anchored to Graphene and Carbon Nanotubes Using Atomic Layer Deposition (2013) (100)
- Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride. (2015) (100)
- Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition (2012) (99)
- Protecting polymers in space with atomic layer deposition coatings. (2010) (99)
- Tin Monosulfide Thin Films Grown by Atomic Layer Deposition Using Tin 2,4-Pentanedionate and Hydrogen Sulfide (2010) (98)
- In2S3 Atomic Layer Deposition and Its Application as a Sensitizer on TiO2 Nanotube Arrays for Solar Energy Conversion (2010) (98)
- In situ transmission electron microscopy probing of native oxide and artificial layers on silicon nanoparticles for lithium ion batteries. (2014) (97)
- Atomic layer deposition on gram quantities of multi-walled carbon nanotubes (2009) (97)
- Vibro-fluidization of fine boron nitride powder at low pressure (2001) (96)
- Molecular Layer Deposition of Titanicone Films using TiCl4 and Ethylene Glycol or Glycerol: Growth and Properties (2012) (94)
- Conformal nanocoating of zirconia nanoparticles by atomic layer deposition in a fluidized bed reactor (2005) (94)
- Molecular Layer Deposition of Hybrid Organic−Inorganic Alucone Polymer Films Using a Three-Step ABC Reaction Sequence (2009) (94)
- Surface diffusion of n‐alkanes on Ru(001) (1990) (92)
- Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3 (2002) (90)
- Ultrathin oxide films by atomic layer deposition on graphene. (2012) (89)
- Surface diffusion of hydrogen on Ni(100) studied using laser-induced thermal disorption (1985) (89)
- Thermo-Mechanical Properties of Alumina Films Created Using the Atomic Layer Deposition Technique (2010) (88)
- Introduction: Heterogeneous Catalysis (1995) (88)
- Multilayer and Functional Coatings on Carbon Nanotubes using Atomic Layer Deposition (2005) (86)
- History of atomic layer deposition and its relationship with the American Vacuum Society (2013) (85)
- Atomic layer deposition of amorphous TiO2 on graphene as an anode for Li-ion batteries (2013) (85)
- Ultralow thermal conductivity of atomic/molecular layer-deposited hybrid organic-inorganic zincone thin films. (2013) (85)
- Coating Fine Nickel Particles with Al2O3 Utilizing an Atomic Layer Deposition‐Fluidized Bed Reactor (ALD–FBR) (2004) (85)
- Effect of thermal annealing and surface coverage on porous silicon photoluminescence (1992) (84)
- Adsorption and desorption kinetics for SiCl4 on Si(111)7×7 (1990) (84)
- Biocompatibility of atomic layer-deposited alumina thin films. (2007) (84)
- Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions. (2016) (82)
- TiO2 atomic layer deposition on ZrO2 particles using alternating exposures of TiCl4 and H2O (2004) (81)
- Temperature-induced apparent mass changes observed during quartz crystal microbalance measurements of atomic layer deposition (2003) (80)
- ATOMIC LAYER CONTROLLED GROWTH OF SIO2 FILMS USING BINARY REACTION SEQUENCE CHEMISTRY (1997) (80)
- Adsorption and desorption kinetics for SiH2Cl2 on Si(111) 7×7 (1992) (79)
- Nucleation and growth during tungsten atomic layer deposition on SiO2 surfaces (2001) (76)
- Unexpected high power performance of atomic layer deposition coated Li[Ni1/3Mn1/3Co1/3]O2 cathodes (2014) (76)
- Kinetics of desorption, adsorption, and surface diffusion of CO2 on MgO(100) (1992) (76)
- Quartz crystal microbalance studies of Al2O3 atomic layer deposition using trimethylaluminum and water at 125 degrees C. (2010) (76)
- Atomic layer controlled growth of Si3N4 films using sequential surface reactions (1998) (76)
- X-ray reflectivity characterization of ZnO/Al2O3multilayers prepared by atomic layer deposition (2002) (71)
- Effects of laser pulse characteristics and thermal desorption parameters on laser induced thermal desorption (1986) (71)
- Desorption product yields following Cl2 adsorption on Si(111)7 × 7: Coverage and temperature dependence (1991) (70)
- Inhomogeneous broadening of vibrational linewidths in polyatomic liquids (1980) (70)
- Monte Carlo studies of diffusion on inhomogeneous surfaces (1988) (70)
- Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O (2009) (69)
- Trimethylaluminum as the Metal Precursor for the Atomic Layer Etching of Al2O3 Using Sequential, Self-Limiting Thermal Reactions (2016) (69)
- Atomic layer controlled deposition of SiO2 and Al2O3 using ABAB… binary reaction sequence chemistry (1994) (68)
- Modification of Porous Alumina Membranes Using Al2O3 Atomic Layer Controlled Deposition (1997) (68)
- Metalcones: hybrid organic-inorganic films fabricated using atomic and molecular layer deposition techniques. (2011) (68)
- Highly Conductive and Transparent Hybrid Organic–Inorganic Zincone Thin Films Using Atomic and Molecular Layer Deposition (2012) (68)
- Thermal Atomic Layer Etching of SiO2 by a "Conversion-Etch" Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride. (2017) (68)
- Diethylsilane Decomposition on Silicon Surfaces Studied Using Transmission FTIR Spectroscopy (1992) (67)
- Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H2O (2009) (67)
- SnO2 atomic layer deposition on ZrO2 and Al nanoparticles: Pathway to enhanced thermite materials (2005) (66)
- Adsorption and desorption kinetics of H2O on a fully hydroxylated SiO2 surface (1996) (66)
- Tantalum Nitride Atomic Layer Deposition Using (tert-Butylimido)tris(diethylamido)tantalum and Hydrazine (2008) (65)
- Atomic Layer Etching of HfO2 Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)2 and HF (2015) (65)
- Nanoparticle Coating for Advanced Optical, Mechanical and Rheological Properties (2007) (65)
- Metal–Insulator–Metal Diodes: Role of the Insulator Layer on the Rectification Performance (2013) (64)
- General Trends for Bulk Diffusion in Ice and Surface Diffusion on Ice (2002) (63)
- Atomic Layer Deposition of SiO2 Films on BN Particles Using Sequential Surface Reactions (2000) (63)
- Desorption of H2O from a hydroxylated single-crystal α-Al2O3(0001) surface (1998) (62)
- Atomic Layer Deposition of Tungsten Nitride Films Using Sequential Surface Reactions (2000) (62)
- Tungsten atomic layer deposition on polymers (2008) (60)
- Coating Solution for High-Voltage Cathode: AlF3 Atomic Layer Deposition for Freestanding LiCoO2 Electrodes with High Energy Density and Excellent Flexibility. (2017) (60)
- Determination of absolute photon yields under single‐collision conditions (1977) (59)
- Nucleation and growth during the atomic layer deposition of W on Al2O3 and Al2O3 on W (2004) (59)
- Selectivity in Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions (2016) (59)
- Nanocoating hybrid polymer films on large quantities of cohesive nanoparticles by molecular layer deposition (2009) (59)
- Surface diffusion of hydrogen on sulfur-covered Ru(001) surfaces studied using laser-induced thermal desorption (1988) (58)
- Surface chemistry and infrared absorbance changes during ZnO atomic layer deposition on ZrO2 and BaTiO3 particles (2005) (58)
- Amorphous vanadium oxide coating on graphene by atomic layer deposition for stable high energy lithium ion anodes. (2014) (58)
- Surface poisoning in the nucleation and growth of palladium atomic layer deposition with Pd(hfac)(2) and formalin (2011) (57)
- Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys (2007) (55)
- Thermal Atomic Layer Etching of ZnO by a “Conversion-Etch” Mechanism Using Sequential Exposures of Hydrogen Fluoride and Trimethylaluminum (2017) (55)
- In situ examination of tin oxide atomic layer deposition using quartz crystal microbalance and Fourier transform infrared techniques (2005) (54)
- Nucleation period, surface roughness, and oscillations in mass gain per cycle during W atomic layer deposition on Al2O3 (2009) (54)
- Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6 (2005) (54)
- Analysis of Al2O3 Atomic Layer Deposition on ZrO2 Nanoparticles in a Rotary Reactor (2007) (54)
- Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition (2009) (54)
- Mechanism of Pyridine-Catalyzed SiO2 Atomic Layer Deposition Studied by Fourier Transform Infrared Spectroscopy (2007) (53)
- Coverage dependence of the surface diffusion coefficient for hydrogen on Ru(001) (1987) (53)
- Atomic Layer Deposition of AlF3 Using Trimethylaluminum and Hydrogen Fluoride (2015) (53)
- SiO2 Chemical Vapor Deposition at Room Temperature Using SiCl4 and H 2 O with an NH 3 Catalyst (2000) (52)
- Effects of coadsorbed carbon monoxide on the surface diffusion of hydrogen on Ru(001) (1988) (52)
- Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition (2001) (52)
- Refractive index and density of vapor‐deposited ice (1995) (51)
- Surface diffusion of hydrogen on carbon‐covered Ru(001) surfaces studied using laser‐induced thermal desorption (1987) (51)
- Singlet and triplet exciton percolation in benzene isotopic mixed crystals (1977) (51)
- Thermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions: Oxidation to TiO2 and Fluorination to Volatile TiF4 (2017) (50)
- Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties (2013) (50)
- Improved Mechanical Integrity of ALD-Coated Composite Electrodes for Li-Ion Batteries (2011) (50)
- Surface and Bulk Diffusion of H218O on Single-Crystal H216O Ice Multilayers (1996) (50)
- Molecular Layer Deposition for Surface Modification of Lithium‐Ion Battery Electrodes (2016) (50)
- In situ resistivity measurements during the atomic layer deposition of ZnO and W thin films (2002) (49)
- Atomic Layer Deposition of LiOH and Li2CO3 Using Lithium t-Butoxide as the Lithium Source (2010) (49)
- Porous Silicon Photoluminescence Versus HF Etching: No Correlation with Surface Hydrogen Species (1993) (49)
- Amorphous Ultrathin SnO2 Films by Atomic Layer Deposition on Graphene Network as Highly Stable Anodes for Lithium-Ion Batteries. (2015) (49)
- Atomic layer deposition of Al2O3 and SiO2 on BN particles using sequential surface reactions (2000) (48)
- Ultrahigh x-ray reflectivity from W∕Al2O3 multilayers fabricated using atomic layer deposition (2006) (48)
- Mechanism of Thermal Al2O3 Atomic Layer Etching Using Sequential Reactions with Sn(acac)2 and HF (2015) (48)
- Thermal atomic layer etching of crystalline aluminum nitride using sequential, self-limiting hydrogen fluoride and Sn(acac)2 reactions and enhancement by H2 and Ar plasmas (2016) (48)
- Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions (2000) (47)
- CO gas sensing by ultrathin tin oxide films grown by atomic layer deposition using transmission FTIR spectroscopy. (2008) (47)
- Gas phase reaction products during tungsten atomic layer deposition using WF6 and Si2H6 (2004) (47)
- Enhancing the nucleation of palladium atomic layer deposition on Al2O3 using trimethylaluminum to prevent surface poisoning by reaction products (2009) (47)
- Mechanisms of Thermal Atomic Layer Etching. (2020) (47)
- Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition (2011) (47)
- SiO2 film growth at low temperatures by catalyzed atomic layer deposition in a viscous flow reactor (2005) (47)
- Surface diffusion of carbon monoxide on Ru(001) studied using laser-induced thermal desorption (1989) (46)
- Barrier properties of polymer/alumina nanocomposite membranes fabricated by atomic layer deposition (2008) (46)
- Rapid SiO2 Atomic Layer Deposition Using Tris(tert-pentoxy)silanol (2008) (46)
- Desorption kinetics of C60 multilayers from Al2O3 (0001) (1991) (45)
- Amorphous Ultrathin TiO2 Atomic Layer Deposition Films on Carbon Nanotubes as Anodes for Lithium Ion Batteries (2015) (44)
- Real refractive indices of infrared-characterized nitric-acid/ice films: Implications for optical measurements of polar stratospheric clouds (1994) (44)
- Surface Modification of Titania Nanoparticles Using Ultrathin Ceramic Films (2006) (44)
- Alucone interlayers to minimize stress caused by thermal expansion mismatch between Al₂O₃ films and Teflon substrates. (2013) (44)
- Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic—Inorganic Polymers (2009) (44)
- Optimization and Structural Characterization of W/Al2O3 Nanolaminates Grown Using Atomic Layer Deposition Techniques (2005) (44)
- Pyrolysis of Titanicone Molecular Layer Deposition Films as Precursors for Conducting TiO2/Carbon Composite Films (2013) (43)
- Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition (2012) (43)
- Pyrolysis of Alucone Molecular Layer Deposition Films Studied Using In Situ Transmission Fourier Transform Infrared Spectroscopy (2015) (43)
- Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition (2009) (43)
- Importance of trimethylaluminum diffusion in three-step ABC molecular layer deposition using trimethylaluminum, ethanolamine, and maleic anhydride. (2010) (43)
- Alumina atomic layer deposition nanocoatings on primary diamond particles using a fluidized bed reactor (2008) (43)
- Growth of continuous and ultrathin platinum films on tungsten adhesion layers using atomic layer deposition techniques (2012) (42)
- Picosecond studies of the temperature dependence of homogeneous and inhomogeneous vibrational linewidth broadening in liquid acetonitrile (1984) (42)
- In situ monitoring of atomic layer controlled pore reduction in alumina tubular membranes using sequential surface reactions (1998) (42)
- Porous Fe2O3 nanorods anchored on nitrogen-doped graphenes and ultrathin Al2O3 coating by atomic layer deposition for long-lived lithium ion battery anode (2014) (42)
- Improved nucleation of TiN atomic layer deposition films on SiLK low-k polymer dielectric using an Al2O3 atomic layer deposition adhesion layer (2003) (41)
- Isotope effect in the surface diffusion of hydrogen and deuterium on Ru(001) (1987) (41)
- ATOMIC LAYER DEPOSITION OF SiO2 USING CATALYZED AND UNCATALYZED SELF-LIMITING SURFACE REACTIONS (1999) (41)
- Adsorption, desorption, and surface diffusion kinetics of NH3 on MgO(100) (1991) (41)
- Stabilizing an amorphous V2O5/carbon nanotube paper electrode with conformal TiO2 coating by atomic layer deposition for lithium ion batteries (2016) (41)
- Atomic Layer Deposition of Metal Fluorides Using HF–Pyridine as the Fluorine Precursor (2016) (40)
- The decomposition of methanol on Ru(001) studied using laser induced thermal desorption (1986) (40)
- Conformal hydrophobic coatings prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors (2005) (40)
- Molybdenum Atomic Layer Deposition Using MoF6 and Si2H6 as the Reactants (2011) (40)
- Molecular layer deposition of aluminum alkoxide polymer films using trimethylaluminum and glycidol. (2011) (40)
- Growth and properties of hafnicone and HfO(2)/hafnicone nanolaminate and alloy films using molecular layer deposition techniques. (2014) (39)
- WO3 and W Thermal Atomic Layer Etching Using "Conversion-Fluorination" and "Oxidation-Conversion-Fluorination" Mechanisms. (2017) (39)
- Interaction of HCl with Ice: Investigation of the Predicted Trihydrate, Hexahydrate, and Monolayer Regimes (1997) (39)
- Capillary evaporation on micromembrane-enhanced microchannel wicks with atomic layer deposited silica (2013) (38)
- Ammonia decomposition on silicon surfaces studied using transmission Fourier transform infrared spectroscopy (1991) (38)
- The Decomposition of NH3 on Si (111) 7x7 Studied Using Laser-Induced Thermal Desorption (1989) (38)
- Refractive Indices of Amorphous and Crystalline HNO3/H2O Films Representative of Polar Stratospheric Clouds (1994) (37)
- Spatial atomic layer deposition on flexible substrates using a modular rotating cylinder reactor (2015) (37)
- A simplified method to determine the coverage dependence of surface diffusion coefficients (1986) (36)
- Surface modification of acetaminophen particles by atomic layer deposition. (2017) (36)
- Diethylsilane on silicon surfaces: Adsorption and decomposition kinetics (1992) (36)
- Effect of HF Pressure on Thermal Al2O3 Atomic Layer Etch Rates and Al2O3 Fluorination (2019) (36)
- Surface diffusion and desorption of pentane isomers on Ru(001) (1990) (35)
- Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition (2009) (35)
- Thermal Atomic Layer Etching of Silicon Using O2, HF, and Al(CH3)3 as the Reactants (2018) (34)
- Modification of opal photonic crystals using Al2O3 atomic layer deposition (2006) (34)
- Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques (2013) (33)
- Sodium Charge Storage in Thin Films of MnO2 Derived by Electrochemical Oxidation of MnO Atomic Layer Deposition Films (2015) (33)
- Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS (2005) (33)
- Utilization of Al2O3 Atomic Layer Deposition for Li Ion Pathways in Solid State Li Batteries (2015) (33)
- Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates (2015) (32)
- ALD tungsten NEMS switches and tunneling devices (2011) (32)
- Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment. (2015) (32)
- Coverage dependent surface diffusion of noble gases and methane on Pt(111) (1993) (31)
- Molecular Layer Deposition of Conductive Hybrid Organic-Inorganic Thin Films Using Diethylzinc and Hydroquinone (2011) (31)
- Silicon Algae with Carbon Topping as Thin-film Anodes for Lithium-ion Microbatteries by a Two-step facile Method (2015) (31)
- Competition between Al2O3 atomic layer etching and AlF3 atomic layer deposition using sequential exposures of trimethylaluminum and hydrogen fluoride. (2017) (30)
- Band Diagram and Rate Analysis of Thin Film Spinel LiMn2O4 Formed by Electrochemical Conversion of ALD‐Grown MnO (2016) (30)
- Molecular layer deposition on carbon nanotubes. (2013) (30)
- Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing (2005) (30)
- GaN nanowire functionalized with atomic layer deposition techniques for enhanced immobilization of biomolecules. (2010) (29)
- Thermal atomic layer etching: A review (2021) (29)
- Surface chemistry of In2O3 deposition using In(CH3)3 and H2O in a binary reaction sequence (1997) (28)
- Depth-profiling and diffusion measurements in ice films using infrared laser resonant desorption. (2000) (28)
- Structure and Reactivity of Alucone-Coated Films on Si and Li(x)Si(y) Surfaces. (2015) (28)
- Ftir Studies of Water and Ammonia Decomposition on Silicon Surfaces (1990) (28)
- Atomic Layer Deposition of Platinum Nanoparticles on Titanium Oxide and Tungsten Oxide Using Platinum(II) Hexafluoroacetylacetonate and Formalin as the Reactants (2014) (28)
- X-ray mirrors on flexible polymer substrates fabricated by atomic layer deposition (2007) (28)
- Adsorption and decomposition of trichlorosilane and trichlorogermane on porous silicon and Si(100)2×1 surfaces (1995) (27)
- Surface diffusion of xenon on Pt(111) (1993) (27)
- Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100 °C Using Sequential Surface Reactions. (2016) (27)
- Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes (2016) (27)
- Surface diffusion of tetramethylsilane and neopentane on Ru(001) (1990) (27)
- Coverage dependence of n-butane surface diffusion on a stepped Ru(001) surface (1992) (26)
- Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head (2012) (26)
- Attenuation of hydrogen radicals traveling under flowing gas conditions through tubes of different materials (2006) (26)
- Thermo-mechanical evolution of multilayer thin films: Part I. Mechanical behavior of Au/Cr/Si microcantilevers (2007) (26)
- Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C. (2018) (26)
- Thermal atomic layer etching of HfO2 using HF for fluorination and TiCl4 for ligand-exchange (2018) (26)
- Thermal atomic layer etching of crystalline GaN using sequential exposures of XeF2 and BCl3 (2019) (26)
- Diffusion of HDO into Single-Crystal H216O Ice Multilayers: Comparison with H218O (1997) (26)
- Diffusion Kinetics of HCl Hydrates in Ice Measured Using Infrared Laser Resonant Desorption Depth-Profiling (2001) (25)
- Erratum to Al2O3 thin film growth on Si (100) using binary reaction sequence chemistry [Thin Solid Films 292 (1997) 135―144] (2009) (25)
- Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes (2016) (25)
- Cross-linked aluminum dioxybenzene coating for stabilization of silicon electrodes (2016) (25)
- MOSFETs Made From GaN Nanowires With Fully Conformal Cylindrical Gates (2012) (25)
- A simple and versatile liquid nitrogen cooled cryostat on a differentially pumped rotary feedthrough (1986) (24)
- DISTANCE DEPENDENCE OF ELECTRONIC ENERGY TRANSFER BETWEEN DONOR AND ACCEPTOR ADLAYERS : P-TERPHENYL AND 9,10-DIPHENYLANTHRACENE (1994) (24)
- Coverage-dependent surface diffusion expected from a multiple-site hopping model (1991) (24)
- HWCVD MoO3 nanoparticles and a-Si for next generation Li-ion anodes (2011) (24)
- Adsorption and desorption of HCl on a single-crystal α-Al2O3(0001) surface (2000) (24)
- Thermal Atomic Layer Etching of Al2O3, HfO2, and ZrO2 Using Sequential Hydrogen Fluoride and Dimethylaluminum Chloride Exposures (2019) (24)
- Rapid atomic layer etching of Al2O3 using sequential exposures of hydrogen fluoride and trimethylaluminum with no purging (2018) (23)
- Critical test of vibrational dephasing theories in liquids by use of selective, coherent, picosecond Stokes scattering (1980) (23)
- Isothermal desorption kinetics of crystalline H2O, H218O, and D2O ice multilayers (2003) (23)
- Suppression of inelastic deformation of nanocoated thin film microstructures (2004) (23)
- In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures (2011) (22)
- Modeling silicon epitaxial growth with SiH2Cl2 (1993) (22)
- A comparison of different experimental configurations in pulsed laser induced molecular fluorescence (1978) (22)
- Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching (2020) (22)
- Thermo-mechanical evolution of multilayer thin films: Part II. Microstructure evolution in Au/Cr/Si microcantilevers (2007) (22)
- H2O vapor transmission rate through polyethylene naphthalate polymer using the electrical Ca test. (2013) (22)
- Micromachined resonators of high Q-factor based on atomic layer deposited alumina (2009) (22)
- Fluorescence quenching of the phenanthrene excimer on Al2O3(0001): Coverage and distance dependence (1990) (21)
- Ion-Exchangeable Functional Binders and Separator for High Temperature Performance of Li1.1Mn1.86Mg0.04O4 Spinel Electrodes in Lithium Ion Batteries (2013) (21)
- Surface diffusion of potassium on Ru(001) (1993) (21)
- (Invited) Molecular Layer Deposition of Flexible, Transparent and Conductive Hybrid Organic-Inorganic Thin Films (2011) (21)
- Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition (2009) (21)
- Infrared spectroscopic study of atomic layer deposition mechanism for hafnium silicate thin films using HfCl2[N(SiMe3)2]2 and H2O (2004) (20)
- Surface diffusion of hydrogen on Ru(001): transition state theory calculations (1987) (20)
- Surface and bulk diffusion of HDO on ultrathin single-crystal ice multilayers on Ru(001) (1998) (20)
- Adsorption and desorption kinetics of tetrakis(dimethylamino)titanium and dimethylamine on TiN surfaces (1999) (19)
- Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions? (2017) (19)
- Spatial atomic layer deposition for coating flexible porous Li-ion battery electrodes (2018) (19)
- EFFECT OF HNO3 AND HCL ON D2O DESORPTION KINETICS FROM CRYSTALLINE D2O ICE (1998) (19)
- Probing the atomic-scale structure of amorphous aluminum oxide grown by atomic layer deposition. (2020) (19)
- Hemispherical micro-resonators from atomic layer deposition (2014) (19)
- Thermal atomic layer etching of silicon nitride using an oxidation and “conversion etch” mechanism (2020) (18)
- Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals (2009) (18)
- ZnO quantum dots-graphene composite for efficient ultraviolet sensing (2013) (18)
- Tungsten atomic layer deposition on cobalt nanoparticles (2008) (18)
- Ultra‐thin 3D Nano‐Devices from Atomic Layer Deposition on Polyimide (2014) (18)
- Temperature-dependent absolute fluorescence quantum yield of C60 multilayers (1993) (17)
- Atomic Layer Deposition of Zn(O,S) Alloys Using Diethylzinc with H2O and H2S: Effect of Exchange Reactions (2017) (17)
- FTIR studies reveal that silicon-containing laser-induced desorption products are surface reaction intermediates (1991) (17)
- In situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multi-gate MOSFETs. (2019) (17)
- Effect of crystallinity on thermal atomic layer etching of hafnium oxide, zirconium oxide, and hafnium zirconium oxide (2020) (17)
- Anisotropy and coverage dependence of CO surface diffusion on Ru(S)-[15(001) × 2(100)] (1994) (17)
- Adsorption and decomposition of diethylgermane on Si(111) 7×7 (1992) (17)
- Improving Powder Characteristics by Surface Modification Using Atomic Layer Deposition (2019) (16)
- Anisotropic diffusion of n‐butane on a stepped Ru(001) surface (1992) (16)
- Metalcone and Metalcone/Metal Oxide Alloys Grown Using Atomic and Molecular Layer Deposition (2011) (16)
- Electron-enhanced atomic layer deposition of silicon thin films at room temperature (2018) (16)
- Summary Abstract: Surface diffusion of cycloalkanes on Ru(001) (1988) (16)
- First Transistor Demonstration of Thermal Atomic Layer Etching: InGaAs FinFETs with sub-5 nm Fin-width Featuring in situ ALE-ALD (2018) (15)
- Infrared Resonant Desorption of H 2 O from Ice Multilayers (1998) (15)
- Surface diffusion of hydrogen on a stepped Ru(001) surface (1995) (15)
- Atomic layer deposition-A novel method for the ultrathin coating of minitablets. (2017) (15)
- Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor (2018) (15)
- SF4 as the Fluorination Reactant for Al2O3 and VO2 Thermal Atomic Layer Etching (2019) (15)
- Atomic layer deposition (ALD) technology for reliable RF MEMS (2002) (15)
- CO desorption kinetics from clean and sulfur‐covered Ru(001) surfaces (1990) (15)
- Disorder-order transition and energy transfer in phenanthrene adlayers on Al sub 2 O sub 3 (11 2 0) (1989) (14)
- Surface Sensitive Studies of the Reactive Uptake of Chlorine Nitrate on Ice (1997) (14)
- DYNAMIC ICE SURFACE IN THE POLAR STRATOSPHERE (1997) (14)
- Adsorption kinetics for ethylsilane, diethylsilane, and diethylgermane on Si(111) 7×7 (1993) (14)
- Rapid Growth of Crystalline Mn5O8 by Self-Limited Multilayer Deposition using Mn(EtCp)2 and O3. (2016) (14)
- Ethyl group decomposition kinetics following adsorption of diethylsilane, diethylgermane, and ethylsilane on Si(111)7 × 7 (1993) (13)
- Mitigating irreversible capacity losses from carbon agents via surface modification (2015) (13)
- Isothermal H2 desorption kinetics from Si(100) 2 × 1: dependence on disilane and atomic hydrogen precursors (1994) (13)
- Ultrafast metal-insulator varistors based on tunable Al2O3 tunnel junctions (2008) (13)
- Xenon diffusion on a stepped Pt(11,11,9) surface (1994) (12)
- Nucleation and growth of Pt atomic layer deposition on Al 2 O 3 substrates using ( methylcyclopentadienyl )-trimethyl platinum and O 2 plasma (2011) (12)
- Spatial Molecular Layer Deposition of Ultrathin Polyamide To Stabilize Silicon Anodes in Lithium-Ion Batteries (2019) (12)
- Origin of non-zero-order H2O desorption kinetics from crystalline ice multilayers on Ru(001) (1999) (12)
- Theory for selective-vibrational-dephasing experiments with the use of transient stimulated Raman scattering in high laser depletion (1983) (12)
- Surface diffusion of carbon monoxide and potassium coadsorbed on Ru(001): Confirmation of a 1:1 CO:K trapping interaction (1996) (12)
- Sample manipulator employing a gas‐thermal switch designed for high pressure experiments in an ultrahigh vacuum apparatus (1995) (12)
- Surface science lettersLaser-induced thermal desorption of Silicon-containing surface reaction intermediates from Si(111)7 × 7 (1989) (11)
- Summary Abstract: The decomposition kinetics of methanol on Ru(001) studied using laser induced thermal desorption (1987) (11)
- Ultra-thin multilayer nanomembranes for short wavelength deformable optics (2004) (11)
- Effect of HNO3 and HCl on HDO Diffusion on Crystalline D2O Ice Multilayers (1999) (11)
- Efficient Capacitive Deionization Using Thin Film Sodium Manganese Oxide (2018) (11)
- Comparison of H 2 Desorption Kinetics from Si(111)7×7 and Si(100)2×l (1990) (11)
- Effect of Sodium on HCl Hydrate Diffusion in Ice: Evidence for Anion−Cation Trapping (2002) (11)
- Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide (2014) (11)
- Smoothing surface roughness using Al2O3 atomic layer deposition (2021) (11)
- Reaction kinetics of H2O with chlorinated Si(111)-(7 × 7) and porous silicon surfaces (1996) (11)
- H2O adsorption kinetics on Si(111)7×7 and Si(111)7×7 modified by laser annealing (1995) (11)
- Thermal Atomic Layer Etching of Gallium Oxide Using Sequential Exposures of HF and Various Metal Precursors (2020) (11)
- Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films (2011) (11)
- Adsorption and decomposition of dichlorosilane on porous silicon surfaces (1995) (11)
- Summary Abstract: Surface diffusion of CO on Ru(001) studied using laser‐induced thermal desorption (1988) (11)
- Surface diffusion and desorption kinetics for perfluoro‐n‐butane on Ru(001) (1991) (11)
- Thermomechanical response of bare and Al2O3-nanocoated Au/Si bilayer beams for microelectromechanical systems (2003) (11)
- Thermal atomic layer etching of amorphous and crystalline Al2O3 films (2021) (10)
- High-k dielectrics grown by atomic layer deposition (2003) (10)
- Laser induced photoelectrochemistry. Dependence of photoemission-related currents on laser characteristics (1978) (10)
- Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum (2021) (10)
- Molecular Layer Deposition of Organic and Hybrid Organic-Inorganic Films (2007) (9)
- Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism (2021) (9)
- Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry (2008) (9)
- Infrared resonant desorption of butane from Al2O3(112̄0): Evidence for an ordered adlayer from vibrational mode selectivity (1989) (9)
- Laser-induced desorption of H2 from Si(111) 7 × 7 (1991) (9)
- Oxidation Kinetics of Calcium Films by Water Vapor and Their Effect on Water Vapor Transmission Rate Measurements (2014) (9)
- Atomic layer deposition α-Al2O3 diffusion barriers to eliminate the memory effect in beta-gamma radioxenon detectors (2013) (9)
- HBr Uptake on Ice: Uptake Coefficient, H2O/HBr Hydrate Formation, and H2O Desorption Kinetics (2001) (9)
- H2O and HCl adsorption on single crystal α-Al2O3(0001) at stratospheric temperatures (2001) (9)
- UV absorption spectra of H2O/HNO3 films (1996) (9)
- Laser-induced thermal desorption studies of surface reaction kinetics (1987) (9)
- Thermal etching of AlF3 and thermal atomic layer etching of Al2O3 (2020) (9)
- Doped Si nanoparticles with conformal carbon coating and cyclized-polyacrylonitrile network as high-capacity and high-rate lithium-ion battery anodes (2015) (8)
- GaN nanowire coated with atomic layer deposition of tungsten: a probe for near-field scanning microwave microscopy (2014) (8)
- Atomic Layer Deposition (ALD) Tungsten NEMS Devices via a Novel Top-Down Approach (2009) (8)
- Reaction kinetics of GeCl4 on Si(111)7 × 7 (1992) (8)
- Growth of cobalt films at room temperature using sequential exposures of cobalt tricarbonyl nitrosyl and low energy electrons (2019) (8)
- Coverage-dependent electronic absorption spectrum of pyrene on Al2O3(1120) (1989) (8)
- Surface chemistry and film growth during TiN atomic layer deposition 4 using TDMAT and NH 3 (8)
- Molecular layer deposition for the fabrication of desalination membranes with tunable metrics (2021) (8)
- Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors (2004) (8)
- Atomic layer deposition of Al/sub 2/O/sub 3//ZnO nano-scale films for gold RF MEMS (2004) (8)
- Desorption kinetics and excimer formation of pyrene on Al2O3(112̄0) (1989) (8)
- Spontaneous Etching of Metal Fluorides Using Ligand-Exchange Reactions: Landscape Revealed by Mass Spectrometry (2021) (8)
- Dependence of inhomogeneous vibrational linewidth broadening on attractive forces from local liquid number densities (1982) (8)
- Decomposition of silicon hydrides following disilane adsorption on porous silicon surfaces (1993) (8)
- Temperature-programmed spectroscopy for surface kinetic analysis: Absorption and laser-induced fluorescence techniques (1988) (8)
- Area-selective molecular layer deposition of nylon 6,2 polyamide: Growth on carbon and inhibition on silica (2021) (8)
- Adsorption and decomposition of diethyldiethoxysilane on silicon surfaces: New possibilities for SiO2 deposition (1995) (8)
- Growth of Zircone on Nanoporous Alumina Using Molecular Layer Deposition (2014) (7)
- Surface diffusion of H and CO on Cu/Ru(001): evidence for long-range trapping by copper islands (1996) (7)
- Low stress atomic layer deposited alumina for nano electro mechanical systems (2005) (7)
- Surface science lettersAdsorption and decomposition of diethylgermane on porous silicon surfaces (1993) (7)
- Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength (2005) (7)
- Effect of sulfur on the decomposition kinetics of methanol on Ru(001) (1990) (7)
- Atomic Layer Deposition of thin Films Using Sequential Surface Reactions (2000) (7)
- Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges. (2015) (7)
- A novel method for fabricating capacitive micromachined ultrasonic transducers with ultra-thin membranes (2004) (7)
- Effect of Surface Coverage on Porous Silicon Photoluminescence: Transmission FTIR Studies (1991) (6)
- ZrO2 Monolayer as a Removable Etch Stop Layer for Thermal Al2O3 Atomic Layer Etching Using Hydrogen Fluoride and Trimethylaluminum (2020) (6)
- Molecular Layer Deposition of Hybrid Organic–Inorganic Films (2012) (6)
- Passively mode‐locked Nd:glass laser oscillator optimized for TEM00 selectivity and long term stability and reliability (1981) (6)
- Metalcone and Metalcone/Metal Oxide Alloys Grown Using Atomic & Molecular Layer Deposition Techniques (2011) (6)
- Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition (2020) (6)
- Pressure on Thermal Al 2 O 3 Atomic Layer Etch Rates and Al 2 O 3 Fluorination (2019) (6)
- Decomposition of H2O on Si(111)7×7 studied using laser-induced thermal desorption (1989) (5)
- Summary Abstract: Interactions and electronic energy transfer between molecules on dielectric surfaces: Phenanthrene on Al2O3(112̄0) (1988) (5)
- Thermal management of vertical gallium nitride nanowire arrays: Cooling design and tip temperature measurement (2010) (5)
- Prediction and Validation of the Process Window for Atomic Layer Etching: HF Exposure on TiO2 (2021) (5)
- (Invited) In Situ Characterization of Plasma-Assisted Pt ALD on W ALD Adhesion Layers with Spectroscopic Ellipsometry (2013) (5)
- Coverage-dependent electronic absorption spectrum of phenanthrene on alumina (0001) and butane multilayer surfaces (1991) (5)
- Thermal Atomic Layer Etching of Nickel Using Sequential Chlorination and Ligand-Addition Reactions (2021) (5)
- Atomic layer etching of ferroelectric hafnium zirconium oxide thin films enables giant tunneling electroresistance (2022) (4)
- Atomic layer deposition (ALD) tungsten nano-electromechanical transistors (2010) (4)
- Packaging and interconnect technologies for the development of GaN nanowire-based light emitting diodes (2009) (4)
- Spontaneous etching of B2O3 by HF gas studied using infrared spectroscopy, mass spectrometry, and density functional theory (2022) (4)
- Deposit and etchback approach for ultrathin Al2O3 films with low pinhole density using atomic layer deposition and atomic layer etching (2021) (4)
- Adsorption and decomposition of 1,4-disilabutane (SiH3CH2CH2SiH3) on Si(100) 2×1 and porous silicon surfaces (1998) (4)
- Nucleation and Growth During Tungsten Atomic Layer Deposition on Oxide Surfaces (2001) (4)
- Low-level determination of silicon in steels by anodic stripping voltammetry on a hanging mercury drop electrode. (2010) (4)
- FLUIDIZED BED POLYMER PARTICLE ALD TM PROCESS FOR PRODUCING HDPE/ALUMINA NANOCOMPOSITES (2007) (4)
- Tin monosulfide thin films grown by atomic layer deposition using tin 2,4 pentandionate and hydrogen sulfide (2010) (4)
- Infrared free-electron laser as a probe of vibrational dynamics on surfaces (1989) (3)
- Thermal Atomic Layer Etching of Aluminum Nitride Using HF or XeF2 for Fluorination and BCl3 for Ligand Exchange (2022) (3)
- Suppression of Stress Relaxation in MEMS Multilayer Film Microstructures by Use of ALD Nanocoatings (2002) (3)
- Diethylsilane Decomposition on Silicon Surfaces Studied Using Transmission FTIR Spectroscopy. (1992) (3)
- Application of Atomic Layer Deposition for Gas Permeation Barrier Thin Films (2007) (3)
- Summary Abstract: Surface diffusion of hydrogen on carbon‐ and sulfur‐covered Ru(001) studied using laser‐induced thermal desorption (1988) (3)
- Adsorption and Desorption Kinetics for Chlorosilanes on Si(111) 7×7 (1990) (3)
- Volatile Products from Ligand Addition of P(CH3)3 to NiCl2, PdCl2, and PtCl2: Pathway for Metal Thermal Atomic Layer Etching (2022) (3)
- Optimization of a rotary Q-switched Er:YAG laser (2002) (3)
- Protection of Polymers from the Space Environment by Atomic Layer Deposition (2009) (3)
- Atomic layer deposition enabled interconnect technology for vertical nanowire array devices (2009) (3)
- Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers (2011) (3)
- Transient stimulated raman scattering in high laser depletion and its effects on vibrational dynamics experiments (1983) (3)
- Surface nucleation in the crystallization kinetics of phenanthrene multilayers on Al2O3(1120) (1989) (3)
- Porous Fe 2 O 3 nanorods anchored on nitrogen-doped graphenes and ultrathin Al 2 O 3 coating by atomic layer deposition for long-lived lithium ion battery anode (2014) (3)
- Atomic layer Deposition for continuous Roll-to-Roll Processing (2011) (3)
- Fracture of atomic layer deposited tungsten films (2005) (2)
- Molecular layer deposition of Nylon 2,6 polyamide polymer on flat and particle substrates in an isothermal enclosure containing a rotary reactor (2021) (2)
- Hybrid organic-inorganic films fabricated using atomic and molecular layer deposition (2013) (2)
- orphous V 2 O 5 / carbon nanotube paper electrode with conformal TiO 2 coating by atomic layer deposition for lithium ion batteries † (2015) (2)
- Atomic Layer Controlled Deposition Of Al2O3 Films Employing Trimethylaluminum (TMA) And H2O Vapor (1995) (2)
- Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition (2021) (2)
- PROTECTING POLYMERS WITH ATOMIC LAYER DEPOSITION COATINGS (2009) (2)
- Effect of Al/sub 2/O/sub 3/ ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures (2003) (2)
- Hybrid Organic-Inorganic Films Grown Using Molecular Layer Deposition (2011) (2)
- Atomic layer deposition of aluminum oxyfluoride thin films with tunable stoichiometry (2020) (2)
- 4225 - FRACTURE OF ATOMIC LAYER DEPOSITED TUNGSTEN FILMS (2004) (2)
- Adsorption and Decomposition of Diethylsilane on Silicon Surfaces (1990) (2)
- Mechanism of Pseudocapacitive Charge Storage in MnO2 (2014) (2)
- Computer Aided Medical Assistant (CAMA) System. (1997) (2)
- A Photoemission Study of Electrochemically Etched Light Emitting Silicon (1992) (2)
- Atomic layer deposition of hafnium and zirconium oxyfluoride thin films (2021) (2)
- Erratum : History of atomic layer deposition and its relationship with the American Vacuum Society (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2013)31 (050818) DOI: 10.1116/1.4816548) (2020) (1)
- Atomic layer Deposition on Polymers for u ltralow Water v apor t ransmission Rates: t he ca t est (2011) (1)
- Atomic layer deposition of tungsten thin films on opals in the visible region (2008) (1)
- Adsorption and decomposition of diethylgermane on porous silicon surfaces (1993) (1)
- Surface Diffusion Measured Using Laser Induced Thermal Desorption: Hydrogen on Ru (001) (1988) (1)
- Effects of Hydrogen Coverage on Silicon Surface Reactivity (1992) (1)
- Atomic Layer Deposition on Quantities of Multiwalled Carbon Nanotubes (2007) (1)
- Luminescence Efficiency of Gd 2 O 2 S : Eu Powder Phosphors as X-ray to Light Converter (2010) (1)
- Fabrication of Nanolaminates with Ultrathin Nanolayers Using Atomic Layer Deposition: Nucleation & Growth Issues (2009) (1)
- 5518 - PROPERTIES AND FRACTURE OF TUNGSTEN-ALUMINA ATOMIC LAYER DEPOSITED NANOLAMINATES (2005) (1)
- Thermal Atomic Layer Etching of Al2O3 Using Sequential HF and BCl3 Exposures: Evidence for Combined Ligand-Exchange and Conversion Mechanisms (2022) (1)
- Germanium Deposition on Silicon: Surface Chemistry of (CH 3 CH 2 ) 2 GeH 2 and GeC1 4 (1992) (1)
- SYNTHESIS AND CHARACTERIZATION OF HYBRID ORGANIC-INORGANIC THIN FILMS VIA ATOMIC LAYER DEPOSITION FOR MEMS/NEMS (2008) (1)
- Atomic Layer Deposition of LiF and Lithium Ion Conducting (AlF3)(LiF)x Alloys Using Trimethylaluminum, Lithium Hexamethyldisilazide and Hydrogen Fluoride (2017) (1)
- Decomposition of Alkylsilanes on Silicon Surfaces Using Transmission Ftir Spectroscopy (1991) (1)
- Atomic Layer Deposition of Oxidizer Coatings on Aluminum, Nanoparticles to Fabricate Superthermite Explosives (2003) (1)
- Surface Diffusion of Hydrogen on Ru(00l) Studied Using Laser-Induced Thermal Desorption. (1986) (1)
- Selective Modification of Opal Photonic Crystals Using Atomic Layer Deposition (2006) (1)
- Specific heat capacity of ultra-thin atomic layer deposition nanobridges for microbolometers (2015) (1)
- Thermal Atomic Layer Etching of Amorphous and Crystalline Hafnium Oxide, Zirconium Oxide, and Hafnium Zirconium Oxide (2019) (1)
- Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides (2022) (1)
- (Invited) Atomic Layer Etching Using Thermal Reactions: Atomic Layer Deposition in Reverse (2015) (1)
- Laser applications in photoelectrochemistry (1978) (1)
- Atomic Layer Deposited Films for Micro- and Nano-Scale Electro-Mechanical Systems (2007) (1)
- Elastic modulus of polyamide thin films formed by molecular layer deposition (2022) (1)
- The Dynamics and Structure of Liquids Revealed by the Homogeneous and Inhomogeneous Broadening of Liquid Vibrational Transitions (1980) (1)
- Atomic layer deposition enabled interconnect technology for vertical nanowire arrays (2011) (1)
- Reversible High Capacity Si Nanocomposite Anodes Enabled By Molecular Layer Deposition (2013) (1)
- Growth of Zircone on Nanoporous Alumina Using Molecular Layer Deposition (2014) (1)
- Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)] (2020) (1)
- Adsorption of Silicon Tetrachloride on Si(111) 7×7 (1988) (1)
- Picosecond Vibrational Dephasing Experiments in Liquids under High Laser Depletion Conditions (1984) (0)
- Thermal atomic layer etching of VO2 using sequential BCl3 and SF4 exposures: Observation of conversion, ligand-exchange, and oxidation state changes (2023) (0)
- Thermal atomic layer etching using sequential, self-limiting surface reactions (Conference Presentation) (2018) (0)
- Atomic layer growth of SiO 2 on Si(100) using the sequential deposition of SiCl 4 and H 2 O (1993) (0)
- ATOMIC LAYER DEPOSITION, AN ENABLING COATING TECHNOLOGY FOR THE NANOTECHNOLOGY FUTURE (2004) (0)
- Band-Diagram Framework for Materials Development in Cation Intercalation Charge Storage (2016) (0)
- Atomic Layer Deposition for Solid-State Li Batteries 3 O 2 by Al 2 Nanoscale Interface Modification of LiCoO (2012) (0)
- Scanning Probe Microscope for the Analysis of Thermal and Electrical Properties of Nanolaminates (2001) (0)
- Modification of Thermal Emission via Metallic Photonic Crystals (2012) (0)
- Characterization of Particulate Matter Transport across the Lung-Surfactant Barrier using Langmuir Monolayers (2014) (0)
- Desorption kinetics of hydrogen from silicon surfaces using transmission FTIR (2008) (0)
- Novel Membrane and Systems for Industrial and Municipal Water Purification and Reuse (2019) (0)
- Silicon surface kinetics studied using laser-induced thermal desorption (1990) (0)
- Atomic Layer Deposition of W/Al2O3 Nanolaminates: Applications and Challenges (2006) (0)
- Effect of Pressure on the Charge Transfer Processes in Stable Free-Radical Organic Polymer Cathode Materials (2014) (0)
- Kinetics of Semiconductor Processing Chemistry: SiGe and GaAs Growth on Silicon Surfaces (1990) (0)
- Thermal Atomic Layer Etching of Microelectronic Materials (2021) (0)
- Oxidation Kinetics of Silicon Surfaces Studied Using Laser Induced Thermal Desorption (1989) (0)
- Atomic Layer Controlled Growth of SiO2 Using Binary Reaction Sequence Chemistry (1997) (0)
- Persistent photoconductivity studies of c-axis GaN nanowires grown by MBE (2007) (0)
- ALD Enabled Nickel MEMS Switches for Digital Logic (2011) (0)
- Growth of SiO 2 on Si(111)7×7 Using SiCl 4 and H 2 O (1992) (0)
- Laser-induced thermal desorption studies of surface kinetics (1990) (0)
- Studies of Chemistry and Diffusion on Silicon and Gallium Arsenide Surfaces Using Laser-Induced Thermal Desorption (1990) (0)
- P‐106: Real‐Time Inspection of a Moisture Barrier Film Buried by a Protective Layer for Flexible Displays (2010) (0)
- Effect of Current Collector-Cathode Interface On the Charge Transfer Processes in Stable Free-Radical Organic Polymer Cathode Materials (2013) (0)
- A life-cycle model approach to multimedia waste reduction measuring performance for environmental cleanup projects (1993) (0)
- Reaction kinetics of GeCl4 on (1992) (0)
- Effect of Atomic Layer Etching on Residual Stress of Al2o3 Ald Ultra-Thin Film Suspended Structures (2019) (0)
- Photophysics And Spectroscopy Of Surface Adlayers: Pyrene On Al2O3(1120) (1989) (0)
- (Student Award, 1st Place, Invited) Thermal Etching of Metal Oxides: Mechanisms Revealed By Quadrupole Mass Spectrometry (2022) (0)
- Mitigating Irreversible Capacity Losses from Conducting Carbon Agents via Surface Modification (2015) (0)
- Thermomechanical behavior and reliability of Au/Si MEMS structures (2004) (0)
- Electron-Enhanced Atomic Layer Deposition of Titanium Nitride Films Using an Ammonia Reactive Background Gas (2022) (0)
- ALD-enabled hermetic sealing for polymer-based wafer level packaging of MEMS (2010) (0)
- Atomic layer deposition of ultrathin and continuous metal films (2014) (0)
- Study on the Photocatalytic Reaction of TiO2 ALD-Coated Phosphor Particles (2009) (0)
- PICOSECOND PULSE SHORTENING USING DYE #5 AS A SATURABLE ABSORBER (2012) (0)
- Tailored Growth of Novel Battery Materials by Molecular Layer Deposition (MLD) (2010) (0)
- X-Ray Diffractometer for the Analysis of Structure and Thermal Stability of Nanolaminate Thin Films (2003) (0)
- Oxidation Kinetics of Silicon Surfaces: Reactive Sticking Coefficient, Apparent Saturation Coverage and Effect of Surface Hydrogen (1988) (0)
- Atomic Layer Deposition of Zn ( O , S ) Alloys Using Diethylzinc with H 2 O and H 2 S : E ff ect of Exchange Reactions (2017) (0)
- Packaging and interconnect technologies for GaN nanowire-based light emitting diodes (2009) (0)
- High-Capacity and High-Rate Anodes for Li-Ion Batteries (2010) (0)
- Characterization of model polar stratospheric cloud films using laser-induced thermal desorption and optical interference techniques (1994) (0)
- New Calcium Test to Determine Water Vapor Transmission Rates Based on Quartz Crystal Microbalance Measurements (2014) (0)
- Thermal atomic layer etching of cobalt using sulfuryl chloride for chlorination and tetramethylethylenediamine or trimethylphosphine for ligand addition (2023) (0)
- Fluorescence Tags-Based Inspection of Barrier Coatings for Organic Light Emitting Diodes and Polymer Packages (2008) (0)
- An innovative approach to multimedia waste reduction: Measuring performance for environmental cleanup projects (1993) (0)
- Vibrational linewidth-broadening mechanisms in liquids revealed by the separation of the rapidly and slowly varying intermolecular forces. [Acetonitril] (1982) (0)
- Morphology and Microstructure Evolution of Multilayer Au/Cr/Si Thin Films Subject to Annealing (2004) (0)
- Thermal Atomic Layer Etching of CoO, ZnO, Fe2O3, and NiO by Chlorination and Ligand Addition Using SO2Cl2 and Tetramethylethylenediamine (2023) (0)
- Diethyldiethoxysilane as a New Precursor for SiO 2 Growth on Silicon (1993) (0)
- ATOMIC LAYER DEPOSITION(ALD)TUNGSTENNEMS DEVICESVIAA NOVEL TOP-DOWN APPROACH (2009) (0)
- Fracture of Atomic Layer Deposited Nanolaminate Films (2006) (0)
- PICOSECOND STUDIES OF VIBRATIONAL LINEWIDTH BROADENING IN LIQUIDS (1983) (0)
- enabled by Molecular Layer Deposition (2013) (0)
- All-Organic Spatial MLD: Troubleshooting Deposition onto Porous (2020) (0)
- Atomic layer deposition innovations in Li-ion battery technology (2014) (0)
- Exploration of the Surface Reactions During Platinum Atomic Layer Deposition for Control of Dispersion and Size of Pt Nanoparticles (2011) (0)
- Development of Continuous and Ultrathin Pt Electrocatalysts Using Plasma-Assisted ALD (2014) (0)
- Fabrication and Properties of Nanolaminates Using Self-Limiting Surface Chemistry Techniques (2003) (0)
- Fluorescence Quenching of the Phenanthrene Excimer on Al2O3(0001): Coverage and Distance Dependence. (1990) (0)
- Fabrication and Properties of Organic-Inorganic Nanolaminates Using Molecular and Atomic Layer Deposition Techniques (2012) (0)
- Adsorption and Desorption Kinetics for Si(Csub 2 H sub 5)Sub 2 H sub 2 on Si(111) 7x7 (1992) (0)
- Comparison of Trichlorosilane and Trichlorogermane Decomposition on Silicon Surfaces Using FTIR Spectroscopy (1992) (0)
- Thermal Atomic Layer Etching Using Sequential, Self-Limiting Surface Reactions (2018) (0)
- Atomic Layer Deposition on Particles (2006) (0)
- Nanolaminates with Novel Properties Fabricated Using Atomic Layer Deposition Techniques (2006) (0)
- Heterogeneous Reactions on Aluminum Oxide Surfaces Modeling Rocket Exhaust Particles (1999) (0)
- MOF@ALD: A New Integrated Materials Platform to Improve Dye-Sensitized Solar Cells. (2015) (0)
- Atomic layer deposition of boron nitride using sequential exposures of BCl and NH 3 3 (2002) (0)
- ALD Surface Coatings for High Rate Performance of Nanoparticle LiCoO2 (2010) (0)
- (Invited) Volatile Products during Thermal Atomic Layer Etching of Metal Oxides and Elemental Metals (2021) (0)
- Li2MnO3-Stabilized LiMO2 Cathode and ALD Coated MoO3 Anode as a High Energy-Density Lithium-Ion Battery (2010) (0)
- Atomic Layer Deposition of Metal Oxides on sp2-Graphitic Carbon Substrates (2014) (0)
- ALD and MLD Surface Coatings for Performance and Safety Enhancement of Li-Ion Batteries (2010) (0)
- Kinetics of Semiconductor Surface Chemistry: Silicon Atomic Layer Processing (1993) (0)
- ATOMIC LAYER ETCHING OF SUSPENDED ULTRA-THIN STRUCTURES (2016) (0)
- Sub-part-per-trillion detection of organics in aqueous solution by laser induced molecular fluorescence (1978) (0)
- Polymer/Ceramic Nanocomposites Prepared by the Extrusion of Alumina Coated Polyethylene Particles (2006) (0)
- Atomic Layer Deposition of V2O5-Carbon Nanotube Cathode With TiO2 Protecting Layer for Lithium Ion Batteries (2013) (0)
- Electronic Energy Transfer Between Donor and Acceptor Adlayers on Single-Crystal Surfaces: Distance and Coverage Dependence (1992) (0)
- Ceramic Coatings on Metals Using Atomic Layer Controlled Chemical Vapor Deposition (ASSERT-96) (2000) (0)
- Atomic Layer Control of Thin Film Growth Using Binary Reaction Sequence Chemistry (1997) (0)
- Separation of rapidly and slowly varying intermolecular forces in liquids using the temperature dependence of coherent picosecond Stokes scattering (1982) (0)
- Adsorption and Desorption Kinetics for Si (C2H5)2H2 on Si(111) 7x7 (1991) (0)
- Atomic Layer Deposition – A Novel Method for the Ultrathin Coating of 1 Minitablets (2020) (0)
- EFFECT OF AL~O? ALD NANOCOATINGS ON THE THERMO-MECHANICAL BEHAVIOR OF Au/SI MEMS STRUCTURES (2003) (0)
- X-Ray Absorption Spectroscopy of Nitrogenase Mo-Fe Protein (1993) (0)
- LDRD Project 52523 final report :Atomic layer deposition of highly conformal tribological coatings. (2005) (0)
- Invited: Development of Nstf Electrode for PEMFC (2014) (0)
- ALD of Al2O3 for Highly Improved Performance in Li-Ion Batteries (2012) (0)
- The Temperature Dependence of Homogeneous and Inhomogeneous Vibrational Linewidth Broadening Studies Using Coherent Picosecond Stokes Scattering (1982) (0)
- Electron Enhanced Atomic Layer Deposition (EE-ALD) (2019) (0)
- (Invited) Ligand Addition for Thermal Atomic Layer Etching of Metals (2022) (0)
- 12.3: Defect Visualization of Atomic Layer Deposition Enabled Polymer Barriers Using Fluorescent Tags (2008) (0)
- Surface Diffusion of n-Alkanes on Ru(001). (1990) (0)
- Ammonia Decomposition on Silicon Surfaces Studied Using Transmission FTIR Spectroscopy (1990) (0)
- Interfacial Engineering by Atomic Layer Deposition for Highly Durable and Safe Lithium-Ion Batteries (2010) (0)
- Vibrational resonant desorption from surfaces using the infrared free-elctron laser (1990) (0)
- Laser-induced thermal desorption of silicon-containing surface reaction intermediates from Si(111)7×7 (1989) (0)
- Study of Molecular Layer Deposition Coating for Silicon-Based Lithium-Ion Anodes (2015) (0)
- (Tutorial) Thermal Atomic Layer Etching (2021) (0)
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