Toh‐ming Lu
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Physics
Toh‐ming Lu's Degrees
- PhD Physics University of California, Berkeley
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(Suggest an Edit or Addition)Toh‐ming Lu's Published Works
Number of citations in a given year to any of this author's works
Total number of citations to an author for the works they published in a given year. This highlights publication of the most important work(s) by the author
Published Works
- Ultrafast optical switching properties of single-wall carbon nanotube polymer composites at 1.55 μm (2002) (410)
- Nanostructured silicon anodes for lithium ion rechargeable batteries. (2009) (373)
- Defect-induced photoluminescence in monolayer semiconducting transition metal dichalcogenides. (2015) (348)
- Aging of Transition Metal Dichalcogenide Monolayers. (2016) (310)
- Characterization of Amorphous and Crystalline Rough Surface: Principles and Applications (2001) (304)
- Nanostructured electrodes for high-power lithium ion batteries (2012) (300)
- Terahertz optical rectification from a nonlinear organic crystal (1992) (245)
- Novel Nano-Column and Nano-Flower Arrays by Glancing Angle Deposition (2002) (216)
- Vertically Oriented Arrays of ReS2 Nanosheets for Electrochemical Energy Storage and Electrocatalysis. (2016) (212)
- Scaling during shadowing growth of isolated nanocolumns (2003) (172)
- Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films (2003) (170)
- Designing nanostructures by glancing angle deposition (2003) (169)
- Transition‐Metal Substitution Doping in Synthetic Atomically Thin Semiconductors (2016) (162)
- Surface-roughness effect on capacitance and leakage current of an insulating film (1999) (160)
- Diffraction from Rough Surfaces and Dynamic Growth Fronts (1993) (144)
- Effect of surface roughness on magnetic domain wall thickness, domain size, and coercivity (2001) (142)
- Evolution of Thin Film Morphology: Modeling and Simulations (2007) (134)
- Diffraction from surfaces with randomly distributed steps (1982) (125)
- A Model for the Chemical Vapor Deposition of Poly(para-xylylene) (Parylene) Thin Films (2002) (121)
- Surface roughening in shadowing growth and etching in 2¿1 dimensions (2000) (116)
- Physical self-assembly and the nucleation of three-dimensional nanostructures by oblique angle deposition (2004) (116)
- β-phase tungsten nanorod formation by oblique-angle sputter deposition (2003) (114)
- Functionally strain-graded nanoscoops for high power Li-ion battery anodes. (2011) (107)
- Photon Transport in One-Dimensional Incommensurately Epitaxial CsPbX3 Arrays. (2016) (104)
- Chemical Vapor Deposition Polymerization (2004) (102)
- Very low-refractive-index optical thin films consisting of an array of SiO2 nanorods. (2006) (101)
- Protecting Silicon Film Anodes in Lithium-Ion Batteries Using an Atomically Thin Graphene Drape. (2017) (98)
- Deposition of amorphous fluoropolymer thin films by thermolysis of Teflon amorphous fluoropolymer (1992) (95)
- Uniform Si nanostructures grown by oblique angle deposition with substrate swing rotation (2005) (89)
- Electric field directed self-assembly of cuprous oxide nanostructures for photon sensing. (2009) (88)
- Growth-front roughening in amorphous silicon films by sputtering (2001) (86)
- Real time resistivity measurements during sputter deposition of ultrathin copper films (2002) (85)
- Mechanisms for plasma and reactive ion etch-front roughening (2000) (83)
- Low temperature melting of copper nanorod arrays (2006) (81)
- Kinetic roughening in polymer film growth by vapor deposition. (2000) (78)
- Roughening in Plasma Etch Fronts of Si(100) (1999) (77)
- Phase transitions in the chemisorbed layer W(110) p (2×1)–O as a function of coverage. I. Experimental (1978) (75)
- Metal drift behavior in low dielectric constant organosiloxane polymer (2001) (74)
- Metal-coated Si springs: Nanoelectromechanical actuators (2004) (73)
- Quasi-periodic nanostructures grown by oblique angle deposition (2003) (72)
- Structural dynamics of ribosome subunit association studied by mixing-spraying time-resolved cryogenic electron microscopy. (2015) (69)
- The resolving power of a low-energy electron diffractometer and the analysis of surface defects☆ (1980) (68)
- Carrier lifetime enhancement in halide perovskite via remote epitaxy (2019) (67)
- Monolithic microfluidic mixing-spraying devices for time-resolved cryo-electron microscopy. (2009) (67)
- Magnetic properties of Co nanocolumns fabricated by oblique-angle deposition (2003) (67)
- Stress reduction in tungsten films using nanostructured compliant layers (2004) (65)
- FABRICATION OF Si NANOCOLUMNS AND Si SQUARE SPIRALS ON SELF-ASSEMBLED MONOLAYER COLLOID SUBSTRATES (2002) (65)
- Manipulating the column tilt angles of nanocolumnar films by glancing-angle deposition (2002) (65)
- Epitaxial Halide Perovskite Lateral Double Heterostructure. (2017) (65)
- Plasma‐Assisted Atomic Layer Deposition of Palladium (2005) (65)
- Substrate‐Independent Palladium Atomic Layer Deposition (2003) (63)
- Sampling-induced hidden cycles in correlated random rough surfaces (1997) (62)
- Surface texture evolution of polycrystalline and nanostructured films: RHEED surface pole figure analysis (2007) (61)
- High‐Temperature Ionic Epitaxy of Halide Perovskite Thin Film and the Hidden Carrier Dynamics (2017) (61)
- A chiral switchable photovoltaic ferroelectric 1D perovskite (2020) (61)
- Breakdown of dynamic scaling in surface growth under shadowing. (2006) (61)
- Evolution of Thin Film Morphology (2008) (61)
- Band gap engineering of a soft inorganic compound PbI2 by incommensurate van der Waals epitaxy (2016) (60)
- Island Dissolution Phase Transition in a Chemisorbed Layer. (1977) (59)
- Low temperature chemical vapor deposition of Co thin films from Co2(CO)8 (2005) (58)
- Effects of nanoscale surface roughness on the resistivity of ultrathin epitaxial copper films (2015) (56)
- Dynamics of two-dimensional ordering: oxygen chemisorbed on the W(112) surface (1983) (56)
- Sputter-Deposited Pt PEM Fuel Cell Electrodes: Particles vs Layers (2009) (55)
- Enhanced step coverage by oblique angle physical vapor deposition (2005) (53)
- Double modulated differential THz-TDS for thin film dielectric characterization (2002) (53)
- Numerical analysis of the noisy Kuramoto-Sivashinsky equation in 2+1 dimensions (1999) (52)
- Growth of uniformly aligned nanorod arrays by oblique angle deposition with two-phase substrate rotation (2004) (52)
- Unusual magnesium crystalline nanoblades grown by oblique angle vapor deposition. (2007) (52)
- Water electrolysis activated by Ru nanorod array electrodes (2006) (52)
- Densification induced dielectric properties change in amorphous BaTiO3 thin films (1992) (51)
- Electrical conductivity and thin-film growth dynamics (2000) (50)
- Room-temperature epitaxy of Cu on Si(111) using partially ionized beam deposition (1990) (50)
- Growth front roughening in silicon nitride films by plasma-enhanced chemical vapor deposition (2002) (50)
- A high ionization efficiency source for partially ionized beam deposition (1988) (49)
- Low Temperature Wafer Bonding by Copper Nanorod Array (2009) (48)
- Enhanced cold field emission from (100) oriented β-W nanoemitters (2004) (46)
- High-density plasma patterning of low dielectric constant polymers: A comparison between polytetrafluoroethylene, parylene-N, and poly(arylene ether) (2001) (45)
- Ultraviolet radiation induced degradation of poly-para-xylylene (parylene) thin films (2001) (45)
- Large Single Crystal SnS2 Flakes Synthesized from Coevaporation of Sn and S (2016) (45)
- Diffraction from diffusion-barrier-induced mound structures in epitaxial growth fronts (1998) (44)
- High charge storage in amorphous BaTiO3 thin films (1991) (44)
- Phase transformation of single crystal β-tungsten nanorods at elevated temperatures (2005) (43)
- A Method Toward Fabricating Semiconducting 3R-NbS2 Ultrathin Films (2015) (43)
- Surface Chemistry of Mercaptan and Growth of Pyridine Short-Chain Alkoxy Silane Molecular Layers (2002) (43)
- Epitaxial growth of Al(111)/Si(111) films using partially ionized beam deposition (1987) (42)
- Chemisorption: Island formation and adatom interactions (1978) (42)
- Biaxially oriented CaF2 films on amorphous substrates (2008) (41)
- Mechanics of patterned helical Si springs on Si substrate. (2003) (41)
- Stress reduction in sputter deposited films using nanostructured compliant layers by high working-gas pressures (2005) (41)
- Utilizing van der Waals Slippery Interfaces to Enhance the Electrochemical Stability of Silicon Film Anodes in Lithium-Ion Batteries. (2018) (41)
- The measurement of the dielectric and optical properties of nano thin films by THz differential time-domain spectroscopy (2003) (41)
- Atomic Layer Deposition of Pd on an Oxidized Metal Substrate (2006) (40)
- Initial bridges between two ribosomal subunits are formed within 9.4 milliseconds, as studied by time-resolved cryo-EM (2014) (40)
- Texture of Ru columns grown by oblique angle sputter deposition (2006) (39)
- Frequency-dependent electrical transport in carbon nanotubes (2001) (39)
- Defect-engineered epitaxial VO2±δ in strain engineering of heterogeneous soft crystals (2018) (39)
- Interaction of amorphous fluoropolymer with metal (1994) (39)
- Humidity sensing using vertically oriented arrays of ReS2 nanosheets deposited on an interdigitated gold electrode (2016) (39)
- Atomic correlations of stepped surfaces and interfaces (1984) (39)
- Study of silver diffusion into Si(111) and SiO2 at moderate temperatures (1991) (39)
- Improved growth and thermal stability of Parylene films (1997) (38)
- Pulsed bias magnetron sputtering of thin films on insulators (1999) (38)
- Tuning the Phase and Optical Properties of Ultrathin SnSx Films (2016) (37)
- X-ray photoelectron spectroscopy study of Al/Ta2O5 and Ta2O5/Al buried interfaces (1997) (37)
- Reactive sputtering deposition of low temperature tantalum suboxide thin films (1993) (37)
- Mechanical testing of isolated amorphous silicon slanted nanorods. (2005) (36)
- Passive Microfluidic device for Sub Millisecond Mixing. (2010) (36)
- Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces (2005) (36)
- Novel growth mechanism of single crystalline Cu nanorods by electron beam irradiation (2003) (36)
- A model for column angle evolution during oblique angle deposition (2010) (35)
- Electrical characteristics of thin Ta2O5 films deposited by reactive pulsed direct-current magnetron sputtering (2000) (34)
- In situ reflection high energy electron diffraction surface pole figure study of biaxial texture evolution in anisotropic Mg nanoblades during shadowing growth (2007) (34)
- van der Waals Epitaxy of Antimony Islands, Sheets, and Thin Films on Single-Crystalline Graphene. (2018) (34)
- Small angle grain boundary Ge films on biaxial CaF2/glass substrate (2010) (34)
- Vapor deposition of parylene‐F by pyrolysis of dibromotetrafluoro‐p‐xylene (1993) (34)
- High deposition rate parylene films (1998) (33)
- Diffraction from a surface with incommensurate domain walls (1985) (33)
- Diffraction from Overlayer Islands with Positional Correlation. (1982) (33)
- Effect of substrate surface roughness on the columnar growth of Cu films (1991) (33)
- Plasma‐Enhanced Atomic Layer Deposition of Palladium on a Polymer Substrate (2007) (32)
- Island formation and condensation of a chemisorbed overlayer (1980) (32)
- Physical properties of nanostructures grown by oblique angle deposition (2005) (32)
- Evidence of enhanced electron-phonon coupling in ultrathin epitaxial copper films (2013) (32)
- A simple growth method for Nb2O5 films and their optical properties (2015) (32)
- Surface reaction and stability of parylene N and F thin films at elevated temperatures (1995) (32)
- Chemical interactions at Ta/fluorinated polymer buried interfaces (1998) (32)
- Exact one‐dimensional pair correlation functions of a monolayer/substrate system (1985) (32)
- Incident flux angle induced crystal texture transformation in nanostructured molybdenum films (2012) (31)
- Morphology transition during low-pressure chemical vapor deposition. (2001) (31)
- Texture evolution during shadowing growth of isolated Ru columns (2005) (31)
- The Pd catalyst effect on low temperature hydrogen desorption from hydrided ultrathin Mg nanoblades (2008) (31)
- An Environmentally Stable and Lead‐Free Chalcogenide Perovskite (2019) (31)
- DIFFRACTION FROM NON-GAUSSIAN ROUGH SURFACES (1997) (31)
- Wetting and electrowetting properties of carbon nanotube templated parylene films. (2007) (31)
- Observation of a new Al(111)/Si(111) orientational epitaxy (1990) (30)
- Metal-Dielectric Interfaces in Gigascale Electronics (2012) (30)
- A two-step dry process for Cs2SnI6 perovskite thin film (2017) (30)
- Dielectric constant dependence of Poole-Frenkel potential in tantalum oxide thin films (1994) (30)
- Characterization of random rough surfaces by in-plane light scattering (1998) (30)
- Mobile Ion Detection in Organosiloxane Polymer Using Triangular Voltage Sweep (2002) (30)
- Effect of hydrophilic group on water droplet contact angles on surfaces of acid modified SiLK and Parylene polymers (2006) (29)
- Texture analysis of Al/SiO2 films deposited by a partially ionized beam (1989) (29)
- High-Crystallinity Epitaxial Sb2Se3 Thin Film on Mica for Flexible Near-Infrared Photodetectors. (2020) (29)
- Real-time observation of initial stages of copper film growth on silicon oxide using reflection high-energy electron diffraction (2004) (28)
- Mass spectrometry study during the vapor deposition of poly-para-xylylene thin films (2000) (28)
- Theoretical and Experimental Insight into the Mechanism for Spontaneous Vertical Growth of ReS2 Nanosheets (2018) (28)
- Continuum model for nanocolumn growth during oblique angle deposition (2004) (28)
- Effects of hydrogen ion implantation on Al/Si Schottky diodes (1987) (28)
- Traditional Semiconductors in the Two-Dimensional Limit. (2018) (28)
- Misoriented surfaces with randomly distributed steps (1984) (27)
- Revealing the Crystalline Integrity of Wafer-Scale Graphene on SiO2/Si: An Azimuthal RHEED Approach. (2017) (27)
- AFM, SEM and in situ RHEED study of Cu texture evolution on amorphous carbon by oblique angle vapor deposition (2005) (27)
- Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films (1997) (27)
- Diffusion and formation energies of adatoms and vacancies on magnesium surfaces (2009) (27)
- Secondary ion mass spectrometry study of the thermal stability of Cu/refractory metal/Si structures (1991) (27)
- Low hydrogen containing amorphous carbon films—Growth and electrochemical properties as lithium battery anodes (2010) (26)
- Low temperature synthesis of single crystalline ZnO nanorods by oblique angle deposition (2008) (26)
- Reactive partially ionized beam deposition of BaTiO3 thin films (1990) (26)
- Conduction Mechanisms of Ta/Porous SiCOH Films under Electrical Bias (2008) (26)
- Dielectric constant measurement of thin films using goniometric terahertz time-domain spectroscopy (2001) (25)
- Room temperature epitaxial growth of Ag on low‐index Si surfaces by a partially ionized beam (1992) (25)
- Study of tantalum oxide thin film capacitors on metallized polymer sheets for advanced packaging applications (1997) (25)
- High-temperature metal coating for modification of photonic band edge position (2009) (25)
- Time-domain dielectric constant measurement of thin film in GHz–THz frequency range near the Brewster angle (1999) (25)
- Surface roughening in low-pressure chemical vapor deposition (2001) (24)
- Engineering Epitaxial-Nanospiral Metal Films Using Dynamic Oblique Angle Deposition (2013) (24)
- Direct Copper Electroless Deposition on a Tungsten Barrier Layer for Ultralarge Scale Integration (2005) (24)
- Direct observation of BaTiO3 microcrystallites in thin amorphous BaTiO3 films (1991) (24)
- Phase diagram of chemisorbed oxygen layer on the tungsten (112) surface (1983) (24)
- Atomic correlations during the first stages of epitaxy (1984) (23)
- Thermal stability of mercaptan terminated self-assembled multilayer films on SiO2 surfaces (2002) (23)
- Study of amorphous Ta2O5 thin films by DC magnetron reactive sputtering (1997) (23)
- Cu penetration into low-k dielectric during deposition and bias-temperature stress (2010) (23)
- Reduction of interface hydrogen content by partially ionized beam deposition technique (1988) (23)
- CdTe/ZnTe/GaAs Heterostructures for Single-Crystal CdTe Solar Cells (2014) (23)
- Nonconformal Al via filling and planarization by partially ionized beam deposition for multilevel interconnection (1987) (23)
- Power-law scaling during shadowing growth of nanocolumns by oblique angle deposition (2007) (23)
- Molecular Caulking: A Pore Sealing CVD Polymer for Ultralow k Dielectrics (2004) (22)
- The facile surface modification of poly(p-xylylene) ultrathin films (2003) (22)
- Reflection high-energy electron diffraction measurements of reciprocal space structure of 2D materials (2016) (22)
- In situ phase evolution study in magnetron sputtered tantalum thin films (2002) (22)
- Vapor Deposition Of Very Low K Polymer Films, Poly(Naphthalene), Poly(Fluorinated Naphthalene) (1995) (22)
- Partially ionized beam deposition of oriented films (1989) (22)
- Tera Tool [terahertz time-domain spectroscopy] (2002) (22)
- Surface pole figures by reflection high-energy electron diffraction (2006) (22)
- van der Waals epitaxy of CdS thin films on single-crystalline graphene (2017) (22)
- Si nanocolumns as novel nanostructured supports for enzyme immobilization. (2003) (22)
- Condensation of metal and semiconductor vapors during nozzle expansion (1985) (21)
- van der Waals epitaxy of CdTe thin film on graphene (2016) (21)
- Epitaxial growth of CdTe thin film on cube-textured Ni by metal-organic chemical vapor deposition (2012) (21)
- How does a multiwalled carbon nanotube atomic force microscopy probe affect the determination of surface roughness statistics (2002) (21)
- Van Der Waals Hybrid Perovskite of High Optical Quality by Chemical Vapor Deposition (2017) (21)
- Gas-assisted annular microsprayer for sample preparation for time-resolved cryo-electron microscopy (2014) (21)
- Surface characterization of copper electroless deposition on atomic layer deposited palladium on iridium and tungsten (2006) (20)
- Novel photocurable epoxy siloxane polymers for photolithography and imprint lithography applications (2008) (20)
- Unique structure/properties of chemical vapor deposited parylene E (2002) (20)
- Biaxial CdTe/CaF2 films growth on amorphous surface (2009) (20)
- Remote Phononic Effects in Epitaxial Ruddlesden-Popper Halide Perovskites. (2018) (20)
- Damping Properties of Epoxy Films with Nanoscale Fillers (2006) (20)
- A reconfigurable remotely epitaxial VO2 electrical heterostructure. (2019) (20)
- The morphology and texture of Cu nanorod films grown by controlling the directional flux in physical vapor deposition (2008) (20)
- Diffraction from surfaces with interacting steps (1985) (20)
- Channeling study of structural effects at the Al(111)/Si(111) interface formed by ionized cluster beam deposition (1987) (20)
- α α’ α‘ α‴ Poly‐tetrafluoro‐p‐xylylene as an interlayer dielectric for thin film multichip modules and integrated circuits (1993) (20)
- Surface defects and thermodynamics of chemisorbed layers (1980) (20)
- Low‐resistivity Cu thin‐film deposition by self‐ion bombardment (1990) (20)
- Power law behavior in diffraction from fractal surfaces (1998) (20)
- Quantitative island size determination in the chemisorbed layer W(110)p(2×1)—O: II. Theoretical models☆ (1981) (20)
- Experimental study of electron-phonon coupling and electron internal thermalization in epitaxially grown ultrathin copper films (2015) (20)
- van der Waals epitaxy of Ge films on mica (2017) (19)
- Low-temperature fabrication of amorphous BaTiO/sub 3/ thin-film bypass capacitors (1993) (19)
- Extraction of real‐space correlation function of a rough surface by light scattering using diode array detectors (1996) (19)
- Surface and interface of epitaxial CdTe film on CdS buffered van der Waals mica substrate (2017) (19)
- Remote epitaxy of copper on sapphire through monolayer graphene buffer (2018) (19)
- Field ionization of argon using β-phase W nanorods (2004) (19)
- Low Temperature Copper-Nanorod Bonding for 3D Integration (2006) (19)
- Selective Deposition of Ultrathin Poly(p-xylene) Films on Dielectrics Versus Copper Surfaces (2004) (19)
- Deposition of High Purity Parylene- F Using Low Pressure Low Temperature Chemical Vapor Deposition (1997) (19)
- Deposition of Cu film on SiO2 using a partially ionized beam (1990) (19)
- Characterization of pitting corrosion in aluminum films by light scattering (1998) (18)
- Size control of Cu nanorods through oxygen-mediated growth and low temperature sintering (2009) (18)
- Calculated sheath dynamics under the influence of an asymmetrically pulsed dc bias. (2002) (18)
- Morphology and texture evolution of nanostructured CaF2 films on amorphous substrates under oblique incidence flux (2010) (18)
- Asymmetry of magneto-optical Kerr effect loops of Co nano-columns grown by oblique incident angle deposition (2004) (18)
- Enhanced pyroelectric crystal D–D nuclear fusion using tungsten nanorods (2009) (18)
- Metal/polymer adhesion enhancement by reactive ion assisted interface bonding and mixing (1997) (18)
- Influence of nanotips on the hydrophilicity of metallic nanorod surfaces. (2008) (18)
- Measured energy distributions of ions driven by an asymmetrically pulsed bias during magnetron sputtering (2002) (18)
- Growth of epitaxial Ag/Si films by the partially ionized beam deposition technique (1991) (18)
- Pressure dependent Parylene-N pore sealant penetration in porous low-κ dielectrics (2005) (17)
- A review on low dimensional metal halides: Vapor phase epitaxy and physical properties (2017) (17)
- High frequency response of amorphous tantalum oxide thin films (2001) (17)
- Pulsed and pulsed bias sputtering : principles and applications (2003) (17)
- Summary Abstract: Quantitative analysis of step densities using a two‐dimenional random probability model (1980) (17)
- A novel polycarbosilane-based low-k dielectric material (2006) (17)
- Integral representation of the diffracted intensity from one‐dimensional stepped surfaces and epitaxial layers (1985) (17)
- Energy-dispersive, x-ray reflectivity density measurements of porous SiO2 xerogels (2000) (17)
- Self‐cleaning effect in partially ionized beam deposition of Cu films (1989) (17)
- RHEED Transmission Mode and Pole Figures: Thin Film and Nanostructure Texture Analysis (2013) (17)
- Reflection high-energy electron diffraction from carbon nanotubes (2001) (17)
- Kinetics of Ta ions penetration into porous low-k dielectrics under bias-temperature stress (2010) (17)
- Dielectric barriers, pore sealing, and metallization (2006) (16)
- Electromigration in Al/SiO2 films prepared by a partially ionized beam deposition technique (1989) (16)
- Effects of three-dimensional Ehrlich-Schwoebel barrier on texture selection during Cu nanorod growth (2007) (16)
- Diffraction from anisotropic random rough surfaces (1998) (16)
- Real time technique to measure the electrical resistivity of ultrathin films during growth in plasma environments (2003) (16)
- Effects of substrate temperature on properties of pulsed dc reactively sputtered tantalum oxide films (2005) (16)
- UV nanoimprint lithography of sub-100nm nanostructures using a novel UV curable epoxy siloxane polymer (2010) (16)
- Low Dielectric Constant Polymers For On-Chip Interlevel Dielectrics With Copper Metallization (1995) (16)
- RHEED Transmission Mode and Pole Figures (2014) (16)
- Achieving a photonic band edge near visible wavelengths by metallic coatings (2006) (16)
- Efficient and stable flexible Sb2Se3 thin film solar cells enabled by an epitaxial CdS buffer layer (2021) (15)
- Monolayer MoS2 on sapphire: an azimuthal reflection high-energy electron diffraction perspective (2020) (15)
- Al/Si(100) Schottky barrier formation using nozzle jet beam deposition (1987) (15)
- In situ real‐time study of chemical etching process of Si(100) using light scattering (1996) (15)
- A two-dimensional random growth model in layer-by-layer epitaxy (1984) (15)
- Frequency-dependent pulsed direct current magnetron sputtering of titanium oxide films (2001) (15)
- TEXTURE OF VAPOR DEPOSITED PARYLENE THIN FILMS (1994) (15)
- Instability of Metal Barrier with Porous Methyl Silsesquioxane Films (2006) (15)
- Diffusion in Ni/Cu bilayer films (1992) (15)
- Texture evolution of vertically aligned biaxial tungsten nanorods using RHEED surface pole figure technique (2010) (15)
- Transient charging effects on insulating surfaces exposed to a plasma during pulse biased dc magnetron sputtering (2001) (15)
- Biaxially textured Mo films with diverse morphologies by substrate-flipping rotation (2011) (15)
- High‐frequency response of capacitors fabricated from fine grain BaTiO3 thin films (1995) (15)
- Deposition of amorphous BaTiO3 optical films at low temperature (1993) (15)
- Instrument response of reflection high energy electron diffraction pole figure (2014) (14)
- Atomic layer deposition of Pd on TaN for Cu electroless plating (2005) (14)
- van der Waals epitaxial ZnTe thin film on single-crystalline graphene (2018) (14)
- Structural study of a low dielectric thin film using X-ray reflectivity and grazing incidence small angle X-ray scattering (2005) (14)
- Image plate X-ray diffraction and X-ray reflectivity characterization of protective coatings and thin films (2000) (14)
- Epitaxial CdTe Thin Films on Mica by Vapor Transport Deposition for Flexible Solar Cells (2020) (14)
- Time Invariant Surface Roughness Evolution during Atmospheric Pressure Thin Film Depositions (2016) (14)
- Charge transport model to predict intrinsic reliability for dielectric materials (2015) (14)
- Intrinsic Cu gettering at a thermally grown SiO2/Si interface (1990) (14)
- Formation of low‐temperature Al/n‐Si Schottky contacts using a partially ionized beam deposition technique (1988) (14)
- Field-induced cation migration in Cu oxide films by in situ scanning tunneling microscopy (2003) (13)
- Metal-Dielectric Interfaces in Gigascale Electronics: Thermal and Electrical Stability (2011) (13)
- Low-temperature cycling of hydrogenation-dehydrogenation of Pd-decorated Mg nanoblades (2011) (13)
- Phosphorus Atomic Layers Promoting the Chemisorption of Highly Polarizable Transition Metallorganics (2002) (13)
- Bias-temperature stability of ultrathin parylene-capped dielectrics: influence of surface oxygen on copper ion diffusion (2004) (13)
- Current leakage relaxation and charge trapping in ultra-porous low-k materials (2014) (13)
- Vacuum deposition of nonlinear chromophore‐polymer composite thin films (1994) (13)
- Thin film characterization using terahertz differential time-domain spectroscopy and double modulation (2001) (13)
- Composite and multilayered TaO/sub x/-TiO/sub y/ high dielectric constant thin films (1998) (13)
- Ballistic aggregation on two-dimensional arrays of seeds with oblique incident flux : Growth model for amorphous Si on Si (2007) (13)
- Plasma surface modification for ion penetration barrier in organosiloxane polymer (2002) (13)
- In situ reflection high energy electron diffraction study of dehydrogenation process of Pd coated Mg nanoblades (2008) (13)
- Deformation of amorphous silicon nanostructures subjected to monotonic and cyclic loading (2008) (13)
- Aqueous ammonium sulfide to modify the surface of low κ dielectric thin films (2003) (12)
- Thermoplastic and spectroscopic properties of amorphous fluoropolymer thin films (1994) (12)
- Residual Stress Reduction in Sputter Deposited Thin Films by Density Modulation (2009) (12)
- Hindered Copper Ion Penetration in Parylene-N Films (2003) (12)
- Electroless copper on refractory and noble metal substrates with an ultra-thin plasma-assisted atomic layer deposited palladium layer (2006) (12)
- Monte Carlo simulation of submonolayer vapor-deposition polymerization. (1999) (12)
- The formation of vertically aligned biaxial tungsten nanorods using a novel shadowing growth technique (2009) (12)
- On the dynamics of Cu ions injection into low-k nanoporous materials under oscillating applied fields (2013) (12)
- Study of electron trapping in the amorphous tantalum oxide thin films prepared by d.c. magnetron reactive sputtering (1997) (12)
- Reconstructed domains on a stepped W(100) surface (1981) (12)
- Growth of epitaxial CdTe thin films on amorphous substrates using single crystal graphene buffer (2019) (12)
- Shadowing growth of three-dimensional nanostructures on finite size seeds (2008) (12)
- Interactions between silica xerogel and tantalum (2001) (12)
- Enhanced photoemission from nanostructured surface topologies (2006) (12)
- Onset of thermal degradation in poly(p-phenylene vinylene) films deposited by chemical vapor deposition (2007) (12)
- Naturally formed ultrathin V 2 O 5 heteroepitaxial layer on VO 2 /sapphire(001) film (2017) (12)
- Two-dimensional atomic correlations of epitaxial layers (1985) (11)
- Creation of biaxial body center cubic tungsten nanorods under dynamic shadowing effect (2013) (11)
- Bias-temperature stress of Al on porous low-k dielectrics (2011) (11)
- Texture Development in Thin Metallic Films (1991) (11)
- Thermally stable amorphous BaxTi2−xOy thin films (1995) (11)
- Photocatalytic properties of porous titania grown by oblique angle deposition (2012) (11)
- Reduced stability of copper interconnects due to wrinkles and steps on hexagonal boron nitride substrates (2014) (11)
- LEED investigation of extended defects at the surface of Ge films grown epitaxially on GaAs(110) (1981) (11)
- Nanostructured porous silicon films for terahertz optics (2012) (11)
- Slow oxidation kinetics in an epitaxial copper(1 0 0) film (2016) (11)
- Nanoridge domains in α-phase W films (2003) (11)
- Fanlike aggregations on seeds by parallel ballistic flux : Experimental results and Monte Carlo simulations of the growth of three-dimensional Si structures (2007) (11)
- Study of metal adhesion on porous low-k dielectric using telephone cord buckling (2011) (11)
- Low temperature epitaxial growth of Ge on CaF2 buffered cube-textured Ni (2012) (11)
- Orientational domains in metalorganic chemical vapor deposited CdTe(111) film on cube-textured Ni (2013) (10)
- Single-Crystal CdTe Homojunction Structures for Solar Cell Applications (2015) (10)
- Growth of Single Crystal Tungsten Nanorods by Oblique Angle Sputter Deposition (2003) (10)
- Unusual orientation relationship for a copper film on Si(111) (1990) (10)
- Epitaxial quality of thin Ag films on GaAs(100) surfaces cleaned with various wet etching techniques (1996) (10)
- On the metal cluster formation in ionized cluster beam deposition (1988) (10)
- Metalorganic vapor phase epitaxy of large size CdTe grains on mica through chemical and van der Waals interactions (2018) (10)
- Large-angle in-plane light scattering from rough surfaces. (2000) (10)
- ANISOTROPY IN GROWTH-FRONT ROUGHENING (1998) (10)
- Metal cluster size distributions during nozzle jet expansion (1986) (10)
- Metal-Parylene Interconnection Systems (1995) (10)
- Defect analysis of epitaxial Ag films on silicon by MeV ion channeling (1990) (10)
- Measurement of roughness exponent for scale‐invariant rough surfaces using angle resolved light scattering (1995) (10)
- Low Temperature Physical-Chemical Vapor Deposition of Ti-Si-N-O Barrier Films (2006) (9)
- High electro-optic side-chain polymer by vapor deposition polymerization (1996) (9)
- Effect of CdCl 2 heat treatment on ZnTe back electron reflector layer in thin film CdTe solar cells (2016) (9)
- Quasi van der Waals epitaxy of copper thin film on single-crystal graphene monolayer buffer (2018) (9)
- Room-temperature electrically switchable spin–valley coupling in a van der Waals ferroelectric halide perovskite with persistent spin helix (2022) (9)
- Electron transport and dielectric breakdown in silicon nitride using a charge transport model (2016) (9)
- Type B epitaxy of Ge on CaF2(111) surface (2010) (9)
- Physical self-assembly and the nucleation of 3D nanostructures* (2003) (9)
- Formation of biaxially textured molybdenum thin films under the influence of recrystallization conditions (2011) (9)
- Fiber texture of sputter deposited molybdenum films and structural zone model (2014) (9)
- Texture Analysis of CoGe2 Alloy Films Grown Heteroepitaxially on GaAs(100) Using Partially Ionized Beam Deposition (1997) (9)
- Vapor Deposition of Low-k Polymeric Dielectrics (2003) (9)
- Strain measurement of ultrathin epitaxial films using electron diffraction techniques (2019) (9)
- Resistivity of sub-50 nm copper lines epitaxially grown on Si(100) substrate (2012) (9)
- Substrate-independent sulfur-activated dielectric and barrier-layer surfaces to promote the chemisorption of highly polarizable metallorganics (2004) (9)
- Photoluminescence of GaInN/GaN multiple quantum well heterostructures on amorphous surface through biaxial metal buffer layers (2014) (9)
- Frequency domain (1 kHz-40 GHz) characterisation of thin films for multichip module packaging technology (1994) (9)
- Nonlinear Electron‐Lattice Interactions in a Wurtzite Semiconductor Enabled via Strongly Correlated Oxide (2016) (9)
- Partially ionized beam deposition of Ag films on insulating substrates (1995) (9)
- Study of interface impurity sputtering in partially ionized beam deposition of Cu on Si (1990) (8)
- Microstructures of parylene-N thin films and the effect on copper diffusion (1996) (8)
- Probing the interface strain in a 3D-2D van der Waals heterostructure (2017) (8)
- Correlation Between Bond Cleavage in Parylene N and the Degradation of Its Dielectric Properties (2004) (8)
- Rapid ultraviolet-curing of epoxy siloxane films (2011) (8)
- Self-assembled monolayer growth on chemically modified polymer surfaces (2006) (8)
- Reduced sulfur-terminated silanes to promote the interaction of palladium(II) hexafluoroacetylacetonate with dielectric surfaces (2003) (8)
- Evolution of the Cu-Al Alloy/ SiO2 Interfaces during Bias Temperature Stressing (2001) (8)
- Copper drift in high-dielectric-constant tantalum oxide thin films under bias temperature stress (2006) (8)
- Mechanism for the formation of isolated poly(p-xylylene) fibrous structures under shadowing growth. (2011) (8)
- Biaxially textured Al film growth on CaF2 nanostructures toward a method of preparing single-crystalline Si film on glass substrates. (2010) (8)
- van der Waals epitaxy of SnS film on single crystal graphene buffer layer on amorphous SiO 2 /Si (2018) (8)
- Metal diffusion barriers for porous SiO2 (2000) (8)
- Photoluminescence properties of poly (p-phenylene vinylene) films deposited by chemical vapor deposition (2014) (8)
- Pulse bias sputtering of copper onto insulating surfaces (2001) (8)
- Vapor-Depositable Polymers with Low Dielectric Constants (1995) (8)
- Novel Mechanisms on the Growth Morphology of Films (2002) (8)
- Copper Penetration into Porous Ultra‐low‐κ Methyl Silsesquioxane during Selective CVD (2003) (8)
- Deposition Kinetics for Polymerization via the Gorham Route (2004) (8)
- Metal-enhanced Ge1−xSnx alloy film growth on glass substrates using a biaxial CaF2 buffer layer (2014) (7)
- Orientation Modulated Epitaxy of Cu Nanorods on Si(1 0 0) Substrate (2012) (7)
- Metal–Dielectric Diffusion Processes: Fundamentals (2012) (7)
- Epitaxial Growth of Thick Ag/Si(111) Films (1987) (7)
- Growth of CdTe Films on Amorphous Substrates Using CaF2 Nanorods as a Buffer Layer (2009) (7)
- Preferred orientation in Ru nanocolumns induced by residual oxygen. (2007) (7)
- Large Metallic Vanadium Disulfide Ultrathin Flakes for Spintronic Circuits and Quantum Computing Devices (2019) (7)
- Surface area and porosity in obliquely grown photocatalytic titanium dioxide for air purification (2014) (7)
- Separation of copper ion-induced and intrinsic polymer instabilities in polyarylether using triangular voltage sweep (2004) (7)
- Room‐temperature epitaxial growth of Ag(110)/GaAs(100) films (1992) (7)
- Bias-Temperature Stability of Ti–Si–N–O Films (2006) (7)
- Nozzle beam deposition of SiO2 films (1985) (7)
- Impact of Frequency From a Bipolar Applied Field on Dielectric Breakdown for Low- $k$ Materials (2012) (7)
- Model relating process variables to film electrical properties for reactively sputtered tantalum oxide thin films (2003) (7)
- Single-Crystal Graphene-Directed van der Waals Epitaxial Resistive Switching. (2018) (7)
- Retardation of oxidation in Co nanocolumns: Scanning tunneling microscopy study (2002) (7)
- High frequency measurement of dielectric thin films (1994) (7)
- Anisotropic scaling of hard disk surface structures (2000) (7)
- Vertically aligned biaxially textured molybdenum thin films (2011) (7)
- Giant pyroelectricity in nanomembranes (2022) (7)
- Publisher Correction: Carrier lifetime enhancement in halide perovskite via remote epitaxy (2019) (7)
- Reduction in diffusion of copper in parylene by thermal pretreatment (1992) (7)
- RHEED Transmission Mode and RHEED Pole Figure (2014) (7)
- Large scale epitaxial graphite grown on twin free nickel(111)/spinel substrate (2020) (7)
- Analyses of orientational superlattice domains in epitaxial ZnTe thin films grown on graphene and mica (2018) (7)
- Ion Beam Techniques for Low K Materials Characterization (1998) (7)
- Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier (2007) (6)
- Effects of Deposition Conditions onTexture in Copper ThinFilms on Si (111) (1991) (6)
- Copper Wetting of a Tetrasulfide Self-Assembled Monolayer (2002) (6)
- Secondary ion mass spectroscopic characterization of silver and aluminum diffusion in parylene (1992) (6)
- Mechanical properties of porous methyl silsesquioxane and nanoclustering silica films using atomic force microscope (2010) (6)
- A study of Parylene coated Pd/Mg nanoblabes for reversible hydrogen storage (2013) (6)
- Large artificial anisotropic growth rate in on-lattice simulation of obliquely deposited nanostructures. (2011) (6)
- Effect of elemental plasma on metal/Si films by partially ionized beam deposition (1991) (6)
- Modular Approach for Metal–Semiconductor Heterostructures with Very Large Interface Lattice Misfit: A First-Principles Perspective (2016) (6)
- Discrete β-Ta2O5 crystallite formation in reactively sputtered amorphous thin films (1998) (6)
- Thermal stability of xerogel films (2001) (6)
- Universal stability of two-dimensional traditional semiconductors (2016) (6)
- Introduction of molecular scale porosity into semicrystalline polymer thin films using supercritical carbon dioxide (2009) (6)
- Decoupling interface effect on the phase stability of CdS thin films by van der Waals heteroepitaxy (2017) (6)
- NON-LOCAL EFFECTS IN THIN FILM GROWTH (2007) (6)
- Self-shadowing in ballistic fan formation from point seeds (2007) (6)
- Low Temperature Processing for Multilevel Interconnection and Packaging (1990) (6)
- Non-contact atomic force microscopy characterization of micro-cantilevers and piezo electric transducers with frequencies up to the tens of MHz (2008) (6)
- When Interface Gets Rough (1994) (6)
- Temperature dependent biaxial texture evolution in Ge films under oblique angle vapor deposition (2011) (6)
- Tuning phase transition kinetics via van der Waals epitaxy of single crystalline VO2 on hexagonal-BN (2020) (6)
- Observation of a Novel Double-Step Phase in Pb(110) Surface (1992) (6)
- The sticking coefficient of Ar on small Ar clusters (1987) (6)
- Real time copper resistivity measurements during sputter deposition (2001) (6)
- Fluid Transport through Nanochannels using Nanoelectromechanical Actuators (2006) (6)
- High-Density Plasma Etching of Low Dielectric Constant Materials (1998) (6)
- Extended bulk defects induced by low-energy ions during partially ionized beam deposition (1988) (6)
- Coherent Phonon Transport Measurement and Controlled Acoustic Excitations Using Tunable Acoustic Phonon Source in GHz-sub THz Range with Variable Bandwidth (2018) (6)
- Vapor Deposition of Parylene Films from Precursors (1992) (5)
- Cu deposition on rough ceramic substrate: Physical structure, microstructure, and resistivity (1991) (5)
- Enhanced photoluminescence of PPV thin film coated on a nanostructured substrate by glancing angle deposition (2004) (5)
- Metal/polymer interface adhesion by partially ionized beam deposition (1996) (5)
- Penetration of Copper-Manganese Self-Forming Barrier into SiO2 Pore-Sealed SiCOH during Deposition (2013) (5)
- Van der Waals epitaxy and remote epitaxy of LiNbO3 thin films by pulsed laser deposition (2021) (5)
- Orientation-Controlled Large-Area Epitaxial PbI2 Thin Films with Tunable Optical Properties. (2021) (5)
- Comparative study on the antioxidation behaviors of polycrystalline multilayer and single-crystalline monolayer graphene (2018) (5)
- Parylene as a conformal insulator for submicron multilayer interconnection (1993) (5)
- Surface modification of silicon by partially ionized beam deposited aluminum (1989) (5)
- Anisotropic band structure of TiS3 nanoribbon revealed by polarized photocurrent spectroscopy (2020) (5)
- Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers (2003) (5)
- Low‐temperature epitaxial growth of CoGe2(001)/GaAs(100) films using the partially ionized beam deposition technique (1996) (5)
- Vacancy-enhanced submonolayer nucleation of Si on Si(111) (2002) (5)
- Morphological evolution in ballistic deposition (2010) (5)
- Study on the interfaces of Cu/PA‐N and PA‐N/Si by secondary ion mass spectroscopy and scanning electron microscopy (1996) (5)
- X‐ray photoelectron spectroscopy study of the atomic structure change of amorphous carbon films annealed in vacuum (1991) (5)
- Electrical characteristics of hydrogen implanted silicon Schottky diodes having large difference in metal work function (1988) (5)
- Heteroepitaxy of large grain Ge film on cube-textured Ni(001) foils through CaF2 buffer layer (2016) (5)
- Weakly coupled two‐dimensional correlations in finite‐level epitaxy and chemisorption (1986) (5)
- Thermal Stability Study of Pore Sealing Using Parylene N (2008) (5)
- Compositional control of plasma enhanced chemical vapor deposited diamond-like carbon/SiO2 nanocomposite thin films (2003) (5)
- Vapor deposition of parylene-F using hydrogen as carrier gas (1999) (5)
- Chromium as an adhesion promoter/diffusion barrier for Cu on parylene (1991) (5)
- Channeling study of epitaxial Al and Ag films on Si(111) substrates (1989) (4)
- Coherent acoustic vibrations in silicon submicron spiral arrays (2009) (4)
- Study of fluorine diffusion in metallized polymers using ion beam techniques (1999) (4)
- Direct determination of the island size distribution for parallelogram-shaped islands☆ (1982) (4)
- Dielectric Breakdown in Gigascale Electronics: Time Dependent Failure Mechanisms (2016) (4)
- Dielectric Property Measurement of Sub-micron Thin Film by Differential Time-domain Spectroscopy (2001) (4)
- Island coalescence in a chemisorbed overlayer (1986) (4)
- Detection of charge carrier confinement into mobile ionic defects in nanoporous dielectric films for advanced interconnects (2014) (4)
- Control of cluster size in nozzle jet expansion (1987) (4)
- Thin Film Integral Capacitor Fabricated on a Polymer Dielectric for High Density Interconnect (HDI) Applications (1995) (4)
- Grazing Incidence Small Angle X-Ray Scattering Study on Low Dielectric Thin Films (2000) (4)
- Development of an in-line X-ray reflectivity technique for metal film thickness measurement (2001) (4)
- Noise-Induced Roughening Evolution of Amorphous Si films Grown by Thermal Evaporation [Phys. Rev. Lett. 76, 3774 (1996)] (1996) (4)
- Non-activated metal cluster growth during nozzle jet expansion (1986) (4)
- Interface Stability of Metal Barrier and low K Dielectrics (2007) (4)
- Orientation domain dispersions in wafer scale epitaxial monolayer WSe2 on sapphire (2021) (4)
- Molecular Caulk: A Pore Sealing Technology for Ultra-low k Dielectrics (2004) (4)
- Texture Evolution During Grain Growth of Aluminum Films (1990) (4)
- Unit-Cell-Thick Oxide Synthesis by Film-Based Scavenging (2020) (4)
- Water-assisted exfoliation of epitaxial CdTe film from mica analyzed with azimuthal RHEED (2021) (4)
- Demonstration of integral passives on double sided polyimide flex (2000) (3)
- Enhanced cold field emission from Š 100 ‹ oriented b – W nanoemitters (2004) (3)
- Surface and interface structures of epitaxial Sb2Se3 on mica (2021) (3)
- Resistivity of epitaxial copper nanolines with trapezoidal cross-section (2016) (3)
- Zero step coverage using a nozzle jet expansion deposition technique (1986) (3)
- Hydrogen generation using ruthenium nano-rod array electrodes (2006) (3)
- Beyond Intensity Oscillations (1998) (3)
- Partially ionized beam deposition of 2‐methyl‐4‐nitroaniline thin films (1991) (3)
- Charge transport model to predict dielectric breakdown as a function of voltage, temperature, and thickness (2018) (3)
- Orientation epitaxy of Ge1−xSnx films grown on single crystal CaF2 substrates (2016) (3)
- Pulsed and pulsed bias sputtering (2003) (3)
- Evaluation of a novel Cu(I) precursor for chemical vapor deposition (2005) (3)
- Shadowing growth of biaxially textured nanostructured films (2008) (3)
- Unidirectional deposition of aluminum using nozzle jet beam technique (1987) (3)
- Size effect and strain rate sensitivity in benzocyclobutene film (2004) (3)
- Biaxially oriented CdTe films on glass substrate through nanostructured Ge/CaF2 buffer layers (2015) (3)
- Enhancement of Cu(hfac)2 chemisorption on the parylene surface by N2 plasma surface modification (2007) (3)
- Scaling behavior of columnar structure during physical vapor deposition (2017) (3)
- Impurity effects in partially ionized beam metal via filling (1990) (3)
- Correlation between Plasma Damage and Dielectric Reliability for Ultra-Porous Low-k Materials (2014) (3)
- The Effect of Interfacial Chemistry on Metal Ion Penetration into Polymeric Films (2002) (3)
- Crystal Lattices and Reciprocal Lattices (2014) (3)
- Control of Al Orientation on Si(100) Substrate Using a Partially Ionized Beam (1987) (3)
- Composite and Multilayered TaO -TiO High Dielectric Constant Thin Films (1998) (3)
- PHYSICAL SELF-ASSEMBLY AND NANO-PATTERNING* (2004) (3)
- Effective pore sealing of ultralow-k dielectrics (2004) (3)
- An alternative approach to the quantitative determination of grain size distribution in X‐ray diffraction (1982) (3)
- Domain boundaries in incommensurate epitaxial layers on weakly interacting substrates (2021) (3)
- Diffusion and Adhesion of Cu/Parylene (1990) (2)
- Self-Forming Barriers (2012) (2)
- Time Resolved Cryo-Electron Microscopy Of Ribosome Assembly using Microfluidic Mixing (2009) (2)
- Deposition, Structural Characterization, and Broadband (1KHz-40GHz) Dielectric Behavior of Ba x Ti 2-x O y Thin Films (1993) (2)
- PtSi/n-type Si Schottky barrier height change by H+ ion implantation near the interface region (1987) (2)
- Quasi-single Crystal Semiconductors on Glass Substrates Through Biaxially Oriented Buffer Layers (2010) (2)
- Structural Effects in Al(111)/Si(111) Heteroepitaxy by Partially Ionized Beam Deposition α (1988) (2)
- Step-by-Step Guide to Depositing Parylene (2004) (2)
- Interfacial interaction of in situ Cu growth on tetrasulfide self-assembled monolayer on plasma treated parylene surface (2006) (2)
- Ultrathin Ruthenium Films on Graphene Buffered SiO2 via Quasi Van der Waals Epitaxy (2022) (2)
- Fixed-angle, energy-dispersive x-ray reflectivity measurement of thin tantalum film thickness (2002) (2)
- Erratum: Monte Carlo simulation of the submonolayer vapor-deposition polymerization [Phys. Rev. E60, 4310 (1999)] (2000) (2)
- Organic photonics: materials and devices strategy for computational and communication systems (1992) (2)
- Enhanced Layer Coverage of Thin Films by Oblique Angle Deposition (2004) (2)
- Photonic multichip packaging (PMP) using electro-optic organic materials and devices (1991) (2)
- Rapid Thermal Annealing of Deposited Sio 2 Films (1984) (2)
- Defect Structure Analysis of Thick Epitaxial Films with Very Large Lattice Mismatch: Ag/Si(1l1) and Ag/Si(001). (1988) (2)
- Microfluidic Mixing System for Time Resolved Cryo-Electron Microscopy (2008) (2)
- RHEED Pole Figure Measurements of Biaxial Thin Film Growth Front Evolution (2011) (2)
- Effects of Self-Ion Bombardment on Al/Si(n) Schottky Barrier Formation (1986) (2)
- Modeling structural and chemical relaxation at the Al/Si epitaxial interface (1991) (2)
- Impact of step edges on W(001) surface reconstruction (1987) (2)
- Surface Roughness Evolution in Amorphous Tantalum Oxide Films Deposited by Pulsed Reactive Sputtering (2002) (2)
- Copper-parylene interactions in multilevel interconnection structures (1990) (2)
- H-Atom Assisted jet Vapor Deposition of Parylene-n polymer (1998) (2)
- The effect of instrumental broadening on LEED intensity-energy profiles (1981) (2)
- Erratum: Electrical conductivity and thin film growth dynamics (2001) (1)
- Use of ultra-thin aluminum oxide layer to reduce photoluminescence decay in poly(p-phenylene vinylene) films (2010) (1)
- The Importance of Self-Sputtering by Low Energy Ions in Partially Ionized Beam Deposition (1989) (1)
- Optical Thin Films with Very Low Refractive Index and Their Application in Photonic Devices (2005) (1)
- Reflection High-energy Electron Diffraction Study of Nanostructures: From Diffraction Patterns to Surface Pole Figure (2009) (1)
- Dielectric, Conducting, and Photonic Polymers for Devices in Multichip Packaging (1989) (1)
- Full 3D Monte Carlo simulation of pit-type defect evolution during extreme ultraviolet lithography multilayer deposition (2013) (1)
- Partially Ionized Beam Deposition of Thin Films (1989) (1)
- Chemical reaction induced carrier localization in nanometer-thin Al/Ru, Al/Co, and Al/Mo superlattices (2019) (1)
- Educational and training program of THz Science and Technology at Rensselaer (2003) (1)
- Low temperature plasma amorphous carbon encapsulation for reliable multilevel interconnections-with applications to wafer scale multichip packaging (1989) (1)
- Enhanced van der Waals epitaxy via electron transfer-enabled interfacial dative bond formation (2016) (1)
- A transport model describing how defect accumulation leads to intrinsic dielectric breakdown and post-breakdown conduction (2022) (1)
- Unidirectional self-patterning of CaF 2 nanorod arrays using capillary pressure (2011) (1)
- Kinetics of Cluster Formation During Rapid Quenching (1987) (1)
- "Choices for future interconnect materials and processing" (2006) (1)
- Characterization of surface defect structure by low energy electron diffraction (1984) (1)
- Stability of Cu on Epoxy Siloxane Polymer under Bias Temperature Stress (2006) (1)
- Stress Reduction in Sputter Deposited Thin Films Using Physically Self-Assembled Nanostructures as Compliant Layers (2004) (1)
- Measurements of X-rays from nanotubes and nanorods (2007) (1)
- Association of the Ribosomal Subunits as Studied by Time-resolved Cryo-EM (2010) (1)
- Modification of Low ĸ Materials for ULSI Multilevel Interconnects by Ion Implantation (2002) (1)
- Electrical conductivity and thin film growth dynamics (vol B 61, pg 11 109, 2000) (2001) (1)
- Room Temperature Deposition of High Dielectric Constant, High Density Ceramic Thin Films (1995) (1)
- Method to Determine the Root Cause of Low- $\kappa$ SiCOH Dielectric Failure Distributions (2017) (1)
- Why is KPZ type surface roughening so hard to observe (2000) (1)
- Structural and electro‐optical investigation of a vapor‐deposited chromophore‐polymer thin film (1995) (1)
- Characteristics Of SiO2 Films Deposited By Ionized Nozzle-Beam Technique (1985) (1)
- Growth front smoothing effects in extremely high pressure vapor deposition (2020) (1)
- Microstructure of Epitaxial Al(111)/Si(111) Films Studied by Synchrotron Grazing Incidence X-Ray Diffraction (1990) (1)
- Contact potential induced carrier localization in nanometer-thin Cu/Ru, Cu/Co, and Cu/Mo superlattices (2020) (1)
- Preliminary evaluation of interfacial stability of surface modified porous methyl silsesquioxane by ion implantation for copper metallization scheme (2005) (1)
- Instrumentation for RHEED Pole Figure (2014) (1)
- Applications of a Pulsed Waveform to a Substrate: Pulsed Bias Sputtering (2003) (1)
- Diffusion Barriers for Fluorinated Low-k Dielectrics (1999) (1)
- Diffraction from reconstructed surfaces with incommensurate domain walls (1995) (1)
- Barrier Metal Ions Drift into Porous Low k Dielectrics under Bias-Temperature stress (2010) (1)
- Effect of tip geometry on photo-electron-emission from nanostructures. (2009) (1)
- Influences of Hydrogen on the Evolution of the Electrical Resistivity Of Ultra-Thin Sputtered Copper Films Measured in Real-Time (2002) (1)
- X-ray Photoelectron Spectroscopic Studies of Cu-AI alloy/SiO 2 Interfaces (1999) (1)
- Kinetics of Overlayer Growth (1991) (1)
- Development of 3D Monte Carlo simulations for predicting multilayer geometry of pit-type EUV defects (2013) (1)
- Electron Transport in Highly Textured Metal Films Grown by Partially Ionized Beam Deposition (1995) (1)
- Summary Abstract: Kinetics of antiphase domains coarsening in an overlayer (1984) (1)
- The Development of the Charge Transport Model To Predict Dielectric Failure (2018) (1)
- Al/Si Interface Characteristics Formed by Partially Ionized Beam Deposition at 2.5Kv (1987) (1)
- Kinetics of Ion Drift (2012) (0)
- Thin film measurement on semiconductor surface in GHz-Thz frequency range (1999) (0)
- A moisture-related breakdown mechanism in low-k dielectrics using a multiple I-V ramp test (2015) (0)
- Nano-engineered Silicon Anodes for Lithium-Ion Rechargeable Batteries (2012) (0)
- Response of a Plasma to an Applied Bias (2003) (0)
- Measurement of the dielectric constant of thin films using goniometric time-domain spectroscopy (2001) (0)
- Quasi-two-dimensional crystal growth on structureless 3-methylmethoxy-nitrostilbene thin films (1993) (0)
- Coherent Phonon Transport Measurement and Controlled Acoustic Excitations Using Tunable Acoustic Phonon Source in GHz-sub THz Range with Variable Bandwidth (2018) (0)
- Monotonic and fatigue tests of amorphous silicon nanostructures using atomic force microscope (2007) (0)
- Ionized-Cluster Beam/Partially Ionized Beam Deposition of Electro- Optical and Nonlinear Optical Organic Materials and Device Development (1993) (0)
- X-Ray Digital Image Plate Detector for Phase and Texture Analyses of Thin Tantalum Films (2000) (0)
- Structural Characteristics of CoGe 2 Alloy Films Grown Heteroepitaxially on GaAs(100) Substrates Using the Partially Ionized Beam Deposition Technique (1996) (0)
- Techniques to Control Thin-Film Textures (2014) (0)
- The Effects of High and Low Dose Hydrogen Ion Implantations on Al/n-Si Schottky Diodes (1987) (0)
- METALORGANIC VAPOR PHASE EPITAXY OF CdTe THIN FILMS ON GRAPHENE AND MICA THROUGH CHEMICAL AND VAN DER WAALS MIXED INTERACTIONS (2018) (0)
- Kinetics of Charge Carrier Confinement in Thin Dielectrics (2016) (0)
- Summary Abstract: Low‐energy electron diffraction beam shapes and fluctuation phenomena near an order–disorder transition (1981) (0)
- Near surface structure of ultrathin epitaxial Ru films on graphene/amorphous SiO2 revealed by azimuthal RHEED (2023) (0)
- Basic Plasma Phenomenon (2003) (0)
- Erratum: Direct Copper Electroless Deposition on a Tungsten Barrier Layer for Ultralarge Scale Integration [ J. Electrochem. Soc. , 152 , C89 (2005) ] (2005) (0)
- Nanostructured electrodes for efficient gas ionization (2005) (0)
- A Time-Resolved CRYO-EM Study of Ribosome Subunit Association by Mixing-Spraying (2014) (0)
- Application of a Pulsed Waveform to a Target: Pulsed Reactive Sputtering (2003) (0)
- Spinodal Decomposition-Enabled Halide Perovskite Double Heterostructure with Reduced Fröhlich Electron-Phonon Coupling (2016) (0)
- Nanoindentation Study of the Mechanical Behavior of Silicon Nano‐springs (2003) (0)
- Novel Epoxy Siloxane Polymer as Low-K Dielectric (2004) (0)
- Structural Effects in the Initial Stages of Epitaxy (1983) (0)
- Free-Standing [001]-Oriented One-Dimensional Crystal-Structural Antimony Selenide Films for Self-Powered Flexible Near-Infrared Photodetectors (2023) (0)
- Mechanical testing of slanted and isolated copper nanorods using Atomic Force Microscope (2006) (0)
- Low Temperature Deposition of High Dielectric Constant Thin Films for Decoupling Capacitor Applications (1990) (0)
- Wetting of nanostructured germanium electrodes by polyethylene oxide (2011) (0)
- Inverse metal-assisted chemical etching of germanium with gold and hydrogen peroxide (2022) (0)
- Drotar, J. et al. Reflection high-energy electron diffraction from carbon nanotubes. Phys. Rev. B 64, 125417 (2001) (0)
- Fabrication of sub-20 nm metal lines on Si substrates (2013) (0)
- Optical Thin Films with Extremely Low Refractive Index (2006) (0)
- Correction to Epitaxial Halide Perovskite Lateral Double Heterostructure. (2017) (0)
- Distribution of domain sizes during overlayer growth (1985) (0)
- Dynamic Oblique Angle Deposition of Nanostructures for Energy Applications (2013) (0)
- FUNDAMENTALS OF DIFFRACTION (1993) (0)
- Reliability of ultra-porous low-k materials for advanced interconnects (2014) (0)
- Chemical vapor deposition of fluorinated polymers (1993) (0)
- Two-Dimensional First-Order Phase Separation in an Epitaxial Layer (1988) (0)
- RHEED Reflection Mode (2014) (0)
- Testing mechanical response of nanovolumes of material (2005) (0)
- Theory of Dielectric Breakdown in Nano-Porous Thin Films (2016) (0)
- Fluorinated Parylene as an Interlayer Dielectric for Thin Film MCM's (1992) (0)
- Measurement Tools and Test Structures (2016) (0)
- Lithography for sub<30 nm design rules: materials challenges (2004) (0)
- Erratum: Phase diagram of chemisorbed oxygen layer on the tungsten (112) surface (1984) (0)
- Time-Dependent Dielectric Breakdown (TDDB) and Future Directions (2012) (0)
- Plasma Sources used for Sputter Deposition (2003) (0)
- Fabrication and Imaging of Protein Crossover Structures (2002) (0)
- GROWTH DYNAMICS: SELF-AFFINE SCALING (1993) (0)
- 2D reciprocal space map of etched metalorganic chemical vapor deposited CdTe(001) film surface on miscut GaAs(001) (2023) (0)
- Vertically Aligned One-Dimensional Crystal-Structured Sb2Se3 for High-Efficiency Flexible Solar Cells via Regulating Selenization Kinetics. (2023) (0)
- Al-Dielectric Interfaces (2012) (0)
- Scanning tunneling microscopy study of rough Si films deposited on Si(111) (2001) (0)
- Silicon Anode Nanoarchitecture for High Power Lithium-Ion Batteries (2010) (0)
- DIFFRACTION STRUCTURE FACTOR FROM ROUGH GROWTH FRONTS (1993) (0)
- Growth front smoothing effects in extremely high pressure vapor deposition (2020) (0)
- Kinematic Scattering of Waves and Diffraction Conditions (2014) (0)
- Development of Microfluidic Mixers for Time Resolved Electron Microscopy Applied to Single Particle Reconstruction (2007) (0)
- Study of Electro- and Magneto-Mechanical Nano-Assamblies (2006) (0)
- Use of high dielectric constant insulators for bypass capacitance in WSI and wafer scale hybrid multichip modules (1993) (0)
- Heteroepitaxy of Ge on Cube-Textured Ni(001) Foils Through CaF2 Buffer Layer (2016) (0)
- Current-perpendicular-to-plane magnetoresistance of multilayered Co/Cu nanocolumns by scanning tunneling microscope (2007) (0)
- Reconsidering Conventional Field Acceleration Models (2016) (0)
- Chemical structure determination, modeling, and adhesion enhancement of metal/polymer interfaces (2020) (0)
- Development of Nanostructured Electron Microscopy Grids for Time Resolved Single Particle Reconstruction for Transmission Electron Microscopy (2006) (0)
- Measurements of Resonance Frequency of Parylene Microspring Arrays Using Atomic Force Microscopy (2011) (0)
- CORRELATION FUNCTIONS FOR ROUGH SURFACES (1993) (0)
- Heteroepitaxy of High-Mobility Germanium on Sapphire (0001) with Magnetron Sputtering (2020) (0)
- Novel Ultrathin Mg Nanoblades for Hydrogen Storage (2009) (0)
- Origins of Texture Formation (2014) (0)
- Microfluidic Devices for Time-Resolved Cryo-Electron Microscopy (2009) (0)
- Microstructural Effect on the Resistivity of Thin Silver Films. (1996) (0)
- Short-Range Correlations in Imperfect Surfaces and Overlayers (1985) (0)
- Characterization of Cu-Al alloy/SiO 2 interface microstructure (2000) (0)
- Achieving a Photonic Band-Edge Near Visible Wavelengths by Copper Coating on 3D Tungsten Photonic-lattices. (2006) (0)
- Barrier Metal–Dielectric Interfaces (2012) (0)
- Silicon nanostructured films grown on templated surfaces by oblique angle deposition (2011) (0)
- Optical Thin Films with Very Low Refractive Index and Their Application in Photonics Devices (2005) (0)
- Phase Reeationships for Adsoreed Layers on Surfaces (1982) (0)
- Applications and Future Directions (2014) (0)
- Effects of Surface Roughness and Electron-Phonon Interaction on Electron Transport of Ultrathin Epitaxial Copper Films (2015) (0)
- High–Resolution Low Energy Electron Diffraction Study of Surface Instabilities and Growth Dynamics (1991) (0)
- Channeling Study of Partially Ionized Beam Deposited Epitaxial Ag Films on Si(111) Substrates (1990) (0)
- In Situ Measurement of Growing Thin Films by Energy Dispersive X-Ray Reflectivity: Theory and Experimental Design (2001) (0)
- Enhanced Chemisorption of Cu(hfac)$_{2}$ on Parylene Surface by N$_{2}$ Plasma Treatment (2006) (0)
- Coherent Acoustic Spectroscopy of Nanorod Arrays (2009) (0)
- Theoretical insight into the mechanism for spontaneous vertical growth in ReS 2 (2019) (0)
- Substrate-dependent Copper Electroless Deposition (2006) (0)
- Dielectric Breakdown in Copper Interconnects (2016) (0)
- CLEANROOM GLOVES CHARACTERIZATION – A STUDY (2017) (0)
- Charge carrier trapping into mobile, ionic defects in nanoporous ultra-low-k dielectric materials (2014) (0)
- Mechanical Enhancement Of Nanoporous Low-K Films As Interlayer Dielectrics By Ion Implantation (2002) (0)
- Metal ions drift in ultra-low K dielectrics (2008) (0)
- Surface etch-front morphologies using in-plane light scattering (1999) (0)
- Ising models for order-disorder transition in an adsorbed overlayer (1980) (0)
- DIFFRACTION FROM ROUGH CRYSTALLINE AND NON-CRYSTALLINE SURFACES (1993) (0)
- Quantitative island size determination in the chemisorbed layer II. Theoretical models (1981) (0)
- Liquid-Phase van der Waals Epitaxy of a Few-Layer and Unit-Cell Thick Ruddlesden-Popper Halide Perovskite. (2022) (0)
- Short Communication Phase transformation of single crystal h-tungsten nanorods at elevated temperatures (2005) (0)
- Intense THz Beam from Organic Electro-Optic Materials (1993) (0)
- Other CVD Polymers (2004) (0)
- Acoustic transport and electron phonon interaction in nanorod array (2010) (0)
- High‐aspect‐ratio via filling with Al using partially ionized beam deposition (2008) (0)
- Low-Dielectric Constant Materials and Applications in Microelectronics IV April 14-16 , 1998 Chairs (2004) (0)
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